KR101050808B1 - 복수 코어 평면 광도파관 및 그 제조 방법 - Google Patents

복수 코어 평면 광도파관 및 그 제조 방법 Download PDF

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KR101050808B1
KR101050808B1 KR1020077020957A KR20077020957A KR101050808B1 KR 101050808 B1 KR101050808 B1 KR 101050808B1 KR 1020077020957 A KR1020077020957 A KR 1020077020957A KR 20077020957 A KR20077020957 A KR 20077020957A KR 101050808 B1 KR101050808 B1 KR 101050808B1
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South Korea
Prior art keywords
waveguide
core
waveguide core
layer
cladding layer
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Korean (ko)
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KR20070104467A (ko
Inventor
헨리 에이. 블라우벨트
데이빗 더블유. 베르누이
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호야 코포레이션 유에스에이
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Assigned to 후아웨이 테크놀러지 컴퍼니 리미티드 reassignment 후아웨이 테크놀러지 컴퍼니 리미티드 권리의 전부이전등록 Assignors: 호야 코포레이션 유에스에이
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
KR1020077020957A 2005-02-15 2006-02-13 복수 코어 평면 광도파관 및 그 제조 방법 Expired - Fee Related KR101050808B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/058,535 2005-02-15
US11/058,535 US7164838B2 (en) 2005-02-15 2005-02-15 Multiple-core planar optical waveguides and methods of fabrication and use thereof
PCT/US2006/005176 WO2006088872A1 (en) 2005-02-15 2006-02-13 Multiple-core planar optical waveguides and methods of fabrication and use thereof

Publications (2)

Publication Number Publication Date
KR20070104467A KR20070104467A (ko) 2007-10-25
KR101050808B1 true KR101050808B1 (ko) 2011-07-20

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Country Status (7)

Country Link
US (4) US7164838B2 (https=)
EP (1) EP1856567B1 (https=)
JP (2) JP4666665B2 (https=)
KR (1) KR101050808B1 (https=)
CN (1) CN101120273B (https=)
CA (1) CA2596751C (https=)
WO (1) WO2006088872A1 (https=)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1685256B (zh) * 2001-10-30 2012-07-04 Hoya美国公司 使用光学功率横向传送的光学接合设备和方法
WO2004068542A2 (en) * 2003-01-24 2004-08-12 Xponent Photonics Inc Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
US7184643B2 (en) * 2003-04-29 2007-02-27 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
US7164838B2 (en) * 2005-02-15 2007-01-16 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
US8032027B2 (en) 2005-07-25 2011-10-04 Massachusetts Institute Of Technology Wide free-spectral-range, widely tunable and hitless-switchable optical channel add-drop filters
US8105758B2 (en) * 2006-07-11 2012-01-31 Massachusetts Institute Of Technology Microphotonic maskless lithography
WO2008021467A2 (en) * 2006-08-16 2008-02-21 Massachusetts Institute Of Technology Balanced bypass circulators and folded universally-balanced interferometers
WO2008082664A2 (en) * 2006-12-29 2008-07-10 Massachusetts Institute Of Technology Fabrication-tolerant waveguides and resonators
US8655114B2 (en) * 2007-03-26 2014-02-18 Massachusetts Institute Of Technology Hitless tuning and switching of optical resonator amplitude and phase responses
WO2009055440A2 (en) * 2007-10-22 2009-04-30 Massachusetts Institute Of Technology Low-loss bloch wave guiding in open structures and highly compact efficient waveguide-crossing arrays
US7920770B2 (en) * 2008-05-01 2011-04-05 Massachusetts Institute Of Technology Reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal
WO2010065710A1 (en) 2008-12-03 2010-06-10 Massachusetts Institute Of Technology Resonant optical modulators
US8483521B2 (en) 2009-05-29 2013-07-09 Massachusetts Institute Of Technology Cavity dynamics compensation in resonant optical modulators
US8150224B2 (en) * 2010-01-28 2012-04-03 Oki Electric Industry Co., Ltd. Spot-size converter
EP2564527B1 (en) 2010-04-28 2017-11-15 Huawei Technologies Co., Ltd. Cross-talk reduction in a bidirectional optoelectronic device
US8588039B1 (en) 2011-03-02 2013-11-19 Western Digital (Fremont), Llc Energy-assisted magnetic recording head having multiple cores of different lengths
US9535211B2 (en) 2011-12-01 2017-01-03 Raytheon Company Method and apparatus for fiber delivery of high power laser beams
US9664869B2 (en) 2011-12-01 2017-05-30 Raytheon Company Method and apparatus for implementing a rectangular-core laser beam-delivery fiber that provides two orthogonal transverse bending degrees of freedom
KR101875948B1 (ko) * 2011-12-08 2018-08-02 엘지이노텍 주식회사 광 연결 블록, 이를 포함하는 광 인쇄회로기판 및 그의 제조 방법
US8983259B2 (en) 2012-05-04 2015-03-17 Raytheon Company Multi-function beam delivery fibers and related system and method
JP2014041175A (ja) * 2012-08-21 2014-03-06 Oki Electric Ind Co Ltd 波長選択性経路切換素子
FR3007589B1 (fr) 2013-06-24 2015-07-24 St Microelectronics Crolles 2 Circuit integre photonique et procede de fabrication
FR3008493B1 (fr) * 2013-07-15 2015-09-04 Commissariat Energie Atomique Coupleur optique muni d'un guide d'ondes intermediaire
GB201313282D0 (en) * 2013-07-25 2013-09-11 Ibm Optically pumpable waveguide amplifier with amplifier having tapered input and output
US10663663B2 (en) 2014-02-28 2020-05-26 Ciena Corporation Spot-size converter for optical mode conversion and coupling between two waveguides
WO2015127565A1 (en) * 2014-02-28 2015-09-03 Teraxion Inc. High index element-based spot-size converter for optical mode conversion and evanescent coupling between two waveguides
US9759864B2 (en) 2014-02-28 2017-09-12 Ciena Corporation Spot-size converter for optical mode conversion and coupling between two waveguides
CN104849878A (zh) * 2015-06-03 2015-08-19 东南大学 一种基于马赫-曾德结构的氮化硅波导热光开关阵列芯片及其制作方法
US10139563B2 (en) 2015-12-30 2018-11-27 Stmicroelectronics Sa Method for making photonic chip with multi-thickness electro-optic devices and related devices
US10517134B2 (en) 2017-05-11 2019-12-24 Pacesetter, Inc. Method and system for managing communication between external and implantable devices
WO2019113369A1 (en) * 2017-12-06 2019-06-13 Finisar Corporation Adiabatically coupled photonic systems with vertically tapered waveguides
EP3514588A1 (en) * 2018-01-18 2019-07-24 Huawei Technologies Co., Ltd. Optical chip with an edge coupler
US10746921B2 (en) * 2018-07-20 2020-08-18 Globalfoundries Inc. Stacked waveguide arrangements providing field confinement
US10466514B1 (en) 2018-11-06 2019-11-05 Globalfoundries Inc. Electro-optic modulator with vertically-arranged optical paths
CN110286440B (zh) * 2019-05-20 2021-06-11 武汉光迅科技股份有限公司 平面光波导芯片的制作方法
WO2021030639A1 (en) * 2019-08-13 2021-02-18 Nlight, Inc. Method, system and apparatus for higher order mode suppression
CN114730047A (zh) * 2019-12-02 2022-07-08 华为技术有限公司 模斑转换器及其制备方法、硅光器件和光通信设备
WO2021209139A1 (en) 2020-04-16 2021-10-21 Telefonaktiebolaget Lm Ericsson (Publ) Photonic chip with edge coupler and method of manufacture
CN112904481B (zh) * 2021-01-20 2022-09-02 苏州极刻光核科技有限公司 端面耦合器和半导体器件
CN113093333B (zh) * 2021-04-23 2023-04-11 南京刻得不错光电科技有限公司 模斑转换器和光子器件
US20230146862A1 (en) * 2021-11-05 2023-05-11 Viavi Solutions Inc. Photonic waveguide structure
WO2025245113A1 (en) * 2024-05-20 2025-11-27 North Carolina State University Devices and methods with buried bonded waveguides (bbw)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020181829A1 (en) 2000-04-24 2002-12-05 Moti Margalit Multilayer integrated optical device and a method of fabrication thereof
US20030081922A1 (en) 2001-10-25 2003-05-01 Fujitsu Limited Optical waveguide and fabricating method thereof
US20040052467A1 (en) 2002-07-05 2004-03-18 Blauvelt Henry A. Waveguides assembled for transverse-transfer of optical power

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3506569A1 (de) 1985-02-25 1986-08-28 Manfred Prof. Dr. 7900 Ulm Börner Integrierte resonatormatrix zum wellenlaengenselektiven trennen bzw. zusammenfuegen von kanaelen im frequenzbereich der optischen nachrichtentechnik
FR2660439B1 (fr) 1990-03-27 1993-06-04 Thomson Csf Structure guidante integree en trois dimensions et son procede de realisation.
US5119460A (en) 1991-04-25 1992-06-02 At&T Bell Laboratories Erbium-doped planar optical device
JPH05142435A (ja) * 1991-11-26 1993-06-11 Nippon Telegr & Teleph Corp <Ntt> 導波路形ビーム変換素子およびその製造方法
FR2684823B1 (fr) * 1991-12-04 1994-01-21 Alcatel Alsthom Cie Gle Electric Composant optique semi-conducteur a mode de sortie elargi et son procede de fabrication.
AU668648B2 (en) 1993-05-26 1996-05-09 Sumitomo Electric Industries, Ltd. Optical waveguide module and method of manufacturing the same
EP0720243A3 (en) 1994-12-27 1998-07-01 Fujitsu Limited Method of fabricating compound semiconductor device and optical semiconductor device
US6487350B1 (en) 1998-07-16 2002-11-26 Brookhaven Science Associates Multi-clad black display panel
DE19849862C1 (de) 1998-10-29 2000-04-06 Alcatel Sa Thermooptischer Schalter
US6385376B1 (en) 1998-10-30 2002-05-07 The Regents Of The University Of California Fused vertical coupler for switches, filters and other electro-optic devices
JP2000321452A (ja) 1999-05-11 2000-11-24 Oki Electric Ind Co Ltd 光導波路素子及び光導波路素子の製造方法
US6330378B1 (en) 2000-05-12 2001-12-11 The Trustees Of Princeton University Photonic integrated detector having a plurality of asymmetric waveguides
WO2002021176A1 (en) 2000-09-05 2002-03-14 At & T Corp. A method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
JP4008649B2 (ja) 2000-09-27 2007-11-14 沖電気工業株式会社 光学装置
US6483863B2 (en) 2001-01-19 2002-11-19 The Trustees Of Princeton University Asymmetric waveguide electroabsorption-modulated laser
FR2821135B1 (fr) 2001-02-21 2003-06-27 Zodiac Int Dispositif de fixation d'un lien souple sur un boudin gonflable d'une embarcation pneumatique
US7120335B2 (en) * 2001-05-08 2006-10-10 Massachusetts Institute Of Technology Vertically and laterally confined 3D optical coupler
US6912330B2 (en) 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6744953B2 (en) 2001-09-07 2004-06-01 Agilent Technologies, Inc. Planar optical waveguide with alignment structure
GB0122427D0 (en) 2001-09-17 2001-11-07 Denselight Semiconductors Pte Fabrication of stacked photonic lightwave circuits
CN1685256B (zh) 2001-10-30 2012-07-04 Hoya美国公司 使用光学功率横向传送的光学接合设备和方法
US6600847B2 (en) 2001-11-05 2003-07-29 Quantum Photonics, Inc Semiconductor optical device with improved efficiency and output beam characteristics
AU2002365565A1 (en) 2001-11-23 2003-06-10 Xponent Photonics Inc. Alignment apparatus and methods for transverse optical coupling
US6884327B2 (en) 2002-03-16 2005-04-26 Tao Pan Mode size converter for a planar waveguide
EP1376170A3 (en) 2002-06-19 2004-12-29 Matsushita Electric Industrial Co., Ltd. Optical waveguide, optical module, and method for producing same module
US6981806B2 (en) 2002-07-05 2006-01-03 Xponent Photonics Inc Micro-hermetic packaging of optical devices
US20040013384A1 (en) 2002-07-17 2004-01-22 Greg Parker Optical waveguide structure
JP4502323B2 (ja) 2002-09-25 2010-07-14 ホーヤ コーポレイション ユーエスエイ 光学装置
WO2004068542A2 (en) 2003-01-24 2004-08-12 Xponent Photonics Inc Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
US7095920B1 (en) 2003-02-11 2006-08-22 Little Optics Inc Broadband optical via
US7095928B2 (en) 2003-04-29 2006-08-22 Xponent Photonics Inc Surface-mounted photodetector for an optical waveguide
US7184643B2 (en) 2003-04-29 2007-02-27 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof
US7164838B2 (en) * 2005-02-15 2007-01-16 Xponent Photonics Inc Multiple-core planar optical waveguides and methods of fabrication and use thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020181829A1 (en) 2000-04-24 2002-12-05 Moti Margalit Multilayer integrated optical device and a method of fabrication thereof
US20030081922A1 (en) 2001-10-25 2003-05-01 Fujitsu Limited Optical waveguide and fabricating method thereof
US20040052467A1 (en) 2002-07-05 2004-03-18 Blauvelt Henry A. Waveguides assembled for transverse-transfer of optical power

Also Published As

Publication number Publication date
JP5170792B2 (ja) 2013-03-27
EP1856567A1 (en) 2007-11-21
EP1856567B1 (en) 2018-07-04
WO2006088872A1 (en) 2006-08-24
US20060182402A1 (en) 2006-08-17
US20070116419A1 (en) 2007-05-24
CN101120273B (zh) 2011-04-13
JP2008530615A (ja) 2008-08-07
US7646957B2 (en) 2010-01-12
JP2010250342A (ja) 2010-11-04
US7373067B2 (en) 2008-05-13
US20080232756A1 (en) 2008-09-25
CA2596751A1 (en) 2006-08-24
US7164838B2 (en) 2007-01-16
KR20070104467A (ko) 2007-10-25
US20100092144A1 (en) 2010-04-15
CN101120273A (zh) 2008-02-06
US8260104B2 (en) 2012-09-04
EP1856567A4 (en) 2011-03-30
CA2596751C (en) 2014-05-06
JP4666665B2 (ja) 2011-04-06

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