CN114730047A - 模斑转换器及其制备方法、硅光器件和光通信设备 - Google Patents
模斑转换器及其制备方法、硅光器件和光通信设备 Download PDFInfo
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- CN114730047A CN114730047A CN201980102176.9A CN201980102176A CN114730047A CN 114730047 A CN114730047 A CN 114730047A CN 201980102176 A CN201980102176 A CN 201980102176A CN 114730047 A CN114730047 A CN 114730047A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
本申请提供了一种模斑转换器及其制备方法、硅光器件和光通信设备，涉及光纤通信技术领域，用于在提高硅光子芯片和标准单模光纤之间的耦合效率的同时，降低模斑转换器的封装工艺难度。该模斑转换器包括下包层，设置于下包层上的第一波导芯、覆盖第一波导芯的间隙层、设置于间隙层上的第二波导芯，以及设置于第二波导芯上的上包层；第一波导芯的折射率大于第二波导芯的折射率，第二波导芯的折射率大于间隙层的折射率、下包层的折射率和上包层的折射率；所述第一波导芯用于接收光信号并使光信号耦合到第二波导芯；所述第二波导芯用于将从第一波导芯耦合到其内的光信号输出；所述间隙层为耐腐蚀的透明层，用于阻挡刻蚀液刻蚀第一波导芯。
Description
PCT国内申请，说明书已公开。
Claims (15)
- PCT国内申请，权利要求书已公开。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2019/122487 WO2021108967A1 (zh) | 2019-12-02 | 2019-12-02 | 模斑转换器及其制备方法、硅光器件和光通信设备 |
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| CN114730047A true CN114730047A (zh) | 2022-07-08 |
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| CN201980102176.9A Pending CN114730047A (zh) | 2019-12-02 | 2019-12-02 | 模斑转换器及其制备方法、硅光器件和光通信设备 |
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| Country | Link |
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| CN (1) | CN114730047A (zh) |
| WO (1) | WO2021108967A1 (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114035269B (zh) * | 2021-11-30 | 2024-03-15 | 中国科学院半导体研究所 | 模斑转换器及其制备方法 |
| CN116263520A (zh) * | 2021-12-15 | 2023-06-16 | 中兴通讯股份有限公司 | Cpo装置和交换机 |
| CN114460687A (zh) * | 2022-01-19 | 2022-05-10 | 杭州芯耘光电科技有限公司 | 一种应用于硅光芯片的耦合结构 |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101120273A (zh) * | 2005-02-15 | 2008-02-06 | 斯邦恩特光子学公司 | 多芯平面型光波导及制作和使用该光波导的方法 |
| US20130188910A1 (en) * | 2010-10-08 | 2013-07-25 | Nec Corporation | Optical conversion element and optical conversion element manufacturing method |
| CN203241564U (zh) * | 2013-05-30 | 2013-10-16 | 青岛海信宽带多媒体技术有限公司 | 光纤波导模斑转换器及光耦合器 |
| JP2013231753A (ja) * | 2012-04-27 | 2013-11-14 | Nippon Telegr & Teleph Corp <Ntt> | スポットサイズ変換器およびその製造方法 |
| CN104090336A (zh) * | 2014-07-30 | 2014-10-08 | 华中科技大学 | 紧凑型高效率的模斑变换器及其设计方法 |
| US20150268419A1 (en) * | 2014-03-21 | 2015-09-24 | Imec Vzw | Method for optical coupling between a photonic integrated circuit and an external optical element |
| JP2015215477A (ja) * | 2014-05-12 | 2015-12-03 | 日本電信電話株式会社 | スポットサイズ変換器 |
| US20160299294A1 (en) * | 2013-12-20 | 2016-10-13 | Huawei Technologies Co., Ltd. | Method and Apparatus for Coupling Optical Waveguide to Single-Mode Fiber |
| US20160306117A1 (en) * | 2015-04-17 | 2016-10-20 | Christopher Middlebrook | Tapered polymer waveguide |
| CN107346049A (zh) * | 2017-08-08 | 2017-11-14 | 苏州易缆微光电技术有限公司 | 一种光波导模斑转换器及其制作方法 |
| CN109358395A (zh) * | 2018-12-04 | 2019-02-19 | 苏州易缆微光电技术有限公司 | 一种新型波导面耦合模斑转换器及其制备方法 |
| CN110231719A (zh) * | 2018-03-05 | 2019-09-13 | 中国科学院半导体研究所 | 一种电光调制器 |
-
2019
- 2019-12-02 CN CN201980102176.9A patent/CN114730047A/zh active Pending
- 2019-12-02 WO PCT/CN2019/122487 patent/WO2021108967A1/zh active Application Filing
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101120273A (zh) * | 2005-02-15 | 2008-02-06 | 斯邦恩特光子学公司 | 多芯平面型光波导及制作和使用该光波导的方法 |
| US20130188910A1 (en) * | 2010-10-08 | 2013-07-25 | Nec Corporation | Optical conversion element and optical conversion element manufacturing method |
| JP2013231753A (ja) * | 2012-04-27 | 2013-11-14 | Nippon Telegr & Teleph Corp <Ntt> | スポットサイズ変換器およびその製造方法 |
| CN203241564U (zh) * | 2013-05-30 | 2013-10-16 | 青岛海信宽带多媒体技术有限公司 | 光纤波导模斑转换器及光耦合器 |
| US20160299294A1 (en) * | 2013-12-20 | 2016-10-13 | Huawei Technologies Co., Ltd. | Method and Apparatus for Coupling Optical Waveguide to Single-Mode Fiber |
| US20150268419A1 (en) * | 2014-03-21 | 2015-09-24 | Imec Vzw | Method for optical coupling between a photonic integrated circuit and an external optical element |
| JP2015215477A (ja) * | 2014-05-12 | 2015-12-03 | 日本電信電話株式会社 | スポットサイズ変換器 |
| CN104090336A (zh) * | 2014-07-30 | 2014-10-08 | 华中科技大学 | 紧凑型高效率的模斑变换器及其设计方法 |
| US20160306117A1 (en) * | 2015-04-17 | 2016-10-20 | Christopher Middlebrook | Tapered polymer waveguide |
| CN107346049A (zh) * | 2017-08-08 | 2017-11-14 | 苏州易缆微光电技术有限公司 | 一种光波导模斑转换器及其制作方法 |
| CN110231719A (zh) * | 2018-03-05 | 2019-09-13 | 中国科学院半导体研究所 | 一种电光调制器 |
| CN109358395A (zh) * | 2018-12-04 | 2019-02-19 | 苏州易缆微光电技术有限公司 | 一种新型波导面耦合模斑转换器及其制备方法 |
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| WO2021108967A1 (zh) | 2021-06-10 |
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Application publication date: 20220708 |