KR101011688B1 - Positioning apparatus for test tray of test handler - Google Patents

Abstract

The present invention relates to a test tray positioning device of a test handler, according to the present invention, by generating a friction in the guide device for guiding the movement of the test tray, and the test tray which is moved while being guided by the guide device to the test tray Disclosed is a technique for providing a frictional resistance generating device to be positioned at a required position to simplify the overall configuration and simplify the manufacturing process.

Test handler, de-chamber chamber, positioning device, friction resistance generator

Description

Positioning apparatus for test tray of test handler

The present invention relates to a test handler.

The test handler is a device that supports semiconductor devices manufactured through a predetermined manufacturing process to be tested by a tester. The test handlers load semiconductor devices loaded in a customer tray into a test tray and transfer them to the test chamber, and the test chamber Complete semiconductor devices are unloaded from the test tray to the customer tray.

The test handler passes through the inner chamber before the test tray is transferred to the test chamber, and the test tray passing through the test chamber is transferred to the desequing chamber.

The inner chamber is for heating or cooling the semiconductor devices loaded on the test tray to a desired temperature, and the desock chamber is for reducing the heated or cooled device to a room temperature state.

The test tray heated or cooled to a predetermined test temperature condition in the inner chamber is transferred to the test chamber by a transfer means, and at the same time, the test tray of the test chamber is transferred to the desequence chamber. At this time, the decommissioning chamber is provided with a position setting device for completely introducing the test tray transferred from the test chamber to a desired position in the desuxing chamber.

If the test tray does not reach the correct position of the de-chamber chamber, further transfer of the test tray in the de-chamber may not be performed smoothly. Here, the additional transfer operation refers to lowering the test tray by a separate transfer device, or moving the test tray by one step in the de-chamber chamber to transfer the test tray to the unloading position.

As a technology related to such a positioning device, Korean Patent Publication No. 10-0395369 (name: tray introduction device of a semiconductor device test handler, hereinafter referred to as "Background art 1") is disclosed.

Background Art 1 includes a retracting device corresponding to the above-described positioning device.

The drawing device is composed of a fixed block, a stop latch, a movable block, and a movable latch.

A stop latch is installed on the fixed block so as to be able to pivot elastically in the test tray travel direction. The movable block is provided with a movable latch, and the movable latch rotates during the movement of the movable block to support the rear end of the test tray.

Through this configuration, the test tray passes over the stop latch of the fixed block, and then is supported by the movable latch of the moving block while being pulled to a desired position in the speed chamber.

However, Background 1 has a stop latch for stopping the test tray and a movable latch for moving the test tray, respectively, so that the configuration is complicated and if either the stop latch or the movable latch does not operate smoothly. There was a problem that the entire drawer is inoperable.

Korean Patent Publication No. 2002-0036553 (name: Carrier transfer device of the Modular Test Handler, hereinafter referred to as 'Background Art 2') is disclosed as a technology related to a positioning device of a type different from Background Art 1.

Background Art 2 has a carrier transfer device in a configuration corresponding to the positioning device described herein.

The carrier conveying apparatus is composed of a moving member, a driving means and a holder portion.

The moving member is installed to reciprocate in the chamber by the drive means.

The holder part includes a hook lever rotatably installed on the movable member, and an elastic member elastically supporting the end of the hook lever.

As a result, the holder is moved together with the moving member while the holder part is hooked with one side of the carrier by the hook lever of the holder to move the carrier into the de-chamber chamber.

However, since the holder part does not have a function of releasing itself from being coupled with the carrier, the test tray has to be lifted through the elevating member and then the coupling between the carrier and the hook lever has to be released.

That is, Background 2 has a problem in that the configuration is complicated because a separate lifting member is required in addition to the transfer device, the overall volume of the chamber must increase to implement the lifting device.

The present invention provides a test tray positioning apparatus of a test handler which can position a test tray moved into a chamber in a simple position through a simple mechanical configuration.

The test tray positioning apparatus of the test handler according to the present invention for achieving the above object, the guide device for guiding the movement of the test tray; And a frictional resistance generating device generating friction on the test tray which is moved while being guided by the guide device so that the test tray is positioned at a required position. Characterized in that it comprises a.

In addition, the frictional resistance generating device, the friction member friction with one surface of the test tray; And an elastic member for pressing the friction member toward the test tray.

In addition, the frictional resistance generating device, fixed to the guide device, the connecting member extending through the friction member; And a support member installed at an extended end of the connection member. It further comprises, The elastic member is characterized in that it is installed to surround the connecting member between the support member and the friction member.

In addition, the distance between the friction member and the test tray is characterized in that it is provided so as to narrow toward the direction in which the test tray is moved.

In addition, the frictional resistance generating device extends in the direction in which the test tray is moved, characterized in that one or a plurality of friction pieces extending inclined toward the test tray side.

In addition, the movable member is installed to be reciprocating in the chamber; A holder member installed on the moving member and detachably coupled to the test tray; And a pressing member installed in the chamber and pressing the holder member to release the coupling of the holder member and the test tray when the test tray is moved to the required position. Characterized in that it comprises a.

In addition, the holder member, the lever portion is rotatably installed around the hinge axis to the moving member; A hook part formed at one end of the lever part and hooked to a transfer groove formed in the test tray; An elastic portion for elastically supporting the other end of the lever portion on the moving member; And a roller part provided at the other end of the lever part and in contact with the pressing member, wherein the pressing member has a surface contacting the roller part to gradually press the roller part toward the moving member according to the movement of the roller part. It is characterized by being formed obliquely.

In addition, the moving member is extended to the holder member side to limit the movement of the test tray, characterized in that it comprises a stopper portion disposed between the hook portion and the hinge shaft.

The present invention has the effect of simplifying the overall configuration and simplifying the manufacturing process by placing the test tray to be moved to the de-chamber chamber in the required position using the friction force.

In addition, the present invention is to achieve the release of the holder member by using the pressing member installed in the chamber, there is an effect that can reduce the volume of the chamber by the need for a separate lifting device for releasing the conventional holder member. .

Hereinafter, one preferred embodiment according to the present invention will be described in detail with reference to the accompanying drawings, description of overlapping description or obvious matters will be omitted or compressed as possible.

1 is a schematic view showing a chamber of a test handler according to the present invention.

As shown in FIG. 1, the test handler 100 includes an inner chamber 110, a test chamber 120, and a de-slow chamber 130.

The test chamber 120 is a space where a semiconductor device SC and a tester (not shown) connected to the test tray T.T are connected. In addition, the inner chamber 110 is a place for heating or cooling the semiconductor device SC mounted on the test tray TT to a desired temperature, and the desorption chamber 130 controls the heated or cooled semiconductor device SC. It is a place to reduce to room temperature.

The inner chamber 110, the test chamber 120, and the continuous chamber 130 are coupled in communication with each other, and the test tray TT located in the inner chamber 110 is connected to the test chamber 120 by the guide device 140. And is sequentially transferred to the desorption chamber 130.

Guide device 140 is installed over each chamber (110 to 130), it is provided in the form of a rail to guide the top or bottom of the test tray (T.T).

In addition, the inner chamber 110 is provided with a transfer device 150 for transferring the test tray (TT), the transfer device 150 is a test chamber (TT) located in the inner chamber 110, the test chamber ( 120).

At the same time, the test tray T.T located in the test chamber 120 is pushed by the test tray T.T transferred from the inner chamber 110 to be transferred to the desorption chamber 130.

The test tray T.T transferred to the de-chamber chamber 130 is positioned at the required position required by the positioning device 160.

2 is a perspective view showing a positioning device and a test tray according to a first embodiment of the present invention, Figure 3 is an exploded perspective view showing a positioning device according to a first embodiment of the present invention.

Referring to FIGS. 2 and 3, the positioning device 210 includes a guide device 220 and a frictional resistance generator 230.

The guide device 220 is for guiding the movement of the test tray TT, and includes a first guide part 221 for guiding the rear surface of the test tray TT and a second for guiding the front surface of the test tray TT. The guide part 222 and the third guide part 223 for guiding the upper or lower surface of the test tray TT are provided.

The frictional resistance generator 230 is used to generate friction on the test tray TT, which includes the friction member 231, the connection member 232, the support member 233, and the elastic member 234. It is composed.

The friction member 231 rubs with one surface of the test tray T. T to reduce the moving speed of the test tray T. T. In addition, the distance between the friction member 231 and the test tray TT is provided to become narrower in the direction in which the test tray TT moves, which is the frictional resistance generated between the friction member 231 and the test tray TT. To increase gradually.

One end of the connection member 232 is fixed to one surface of the third guide part 223, and the other end thereof is formed to extend through the friction member 231, and the support member 233 is formed at the other end of the connection member 232. Will be fixedly installed. In this case, the third guide part 223 includes an extension part 223a extending to pass through the second guide part 222 in the movement direction of the test tray TT, and a connecting member (3) to the extension part 223a. 232) is fixed.

The elastic member 234 is installed to surround the connection member 232 between the friction member 231 and the support member 233. The elastic member 234 presses the friction member 231 toward the test tray TT with a predetermined elastic force so that the test tray TT and the friction member 231 are rubbed to a position where the test tray TT is required. Let it stop

4 is a perspective view showing a positioning device and a test tray according to a second embodiment of the present invention, Figure 5 is an exploded perspective view showing a positioning device according to a second embodiment of the present invention.

4 and 5, the positioning device 410 according to the second embodiment of the present invention includes a guide device 420 and a frictional resistance generator 430.

The guide device 420 is for guiding the test tray TT and includes a first guide part 421, a second guide part 422, and a third guide part 423 similar to the first embodiment. .

The frictional resistance generator 430 is for generating friction with the test tray TT, and extends in a direction in which the test tray TT moves, and is provided as a friction piece 431 extending inclined toward the test tray TT. do. The friction piece 431 is preferably formed to have a predetermined elastic force to press the test tray (T.T).

In addition, the friction piece 431 may be provided in plural numbers, thereby making it possible to achieve continuous friction with the test tray T.T.

On the other hand, in order to install the friction piece 431, the frictional resistance generating device 430 according to the present embodiment is integrally coupled with the coupling member 432 and the friction piece 431 to be coupled to the third guide portion 423. It is further provided with a fixing piece 433 is fixed to the coupling member 432. In this case, the third guide part 423 includes an extension part 423a which extends through the first guide part 421 in the moving direction of the test tray TT, and has a coupling member to the extension part 423a. 432 is fixed.

6 is a perspective view illustrating a positioning device and a test tray according to a third embodiment of the present invention, and FIGS. 7A and 7B are enlarged views illustrating a positioning device according to a third embodiment of the present invention. Perspective view.

Hereinafter, a positioning apparatus according to a third embodiment of the present invention will be described with reference to FIGS. 6 and 7 (a) and (b).

The test tray TT is guided by the guide device 610, and the guide device 610 is the first guide part 611, the second guide part 612, and the third guide part like the first embodiment. 613 is provided.

The positioning device 620 includes a moving member 630, a holder member 640, and a pressing member 650.

The moving member 630 is installed to reciprocate in the chamber 600 by the driving means 660, the holder member 640 is a lever portion 641, hook portion 642, elastic portion 643, The roller part 644 is provided.

The lever part 641 of the holder member 640 is rotatably installed around the hinge shaft 645 on the moving member 630.

The hook portion 642 is formed at one end of the lever portion 641, is detachably coupled to the test tray TT, and a transfer groove T on which the hook portion 642 is hooked to a lower portion of the test tray TT. .T1) is formed.

The elastic part 643 elastically supports the other end of the lever part 641 on the moving member 630 to restore the holder member 640 to its initial position when the holder member 640 is rotated.

The roller 644 is installed at the other end of the lever 641 and rotates the holder member 640 while being in contact with the pressing member 650.

The pressing member 650 is installed in the chamber 600, and when the test tray TT is moved to a required position, pressurizes the holder member 640 to couple the holder member 640 to the test tray TT. This releases the test tray TT in the required position. The pressing member 650 is formed such that the surface 651 in contact with the roller portion 644 is inclined to gradually press the roller portion 644 toward the moving member 630 as the roller portion 644 moves to the side thereof. do.

Meanwhile, the moving member 630 may further include a stopper part 631 extending to the holder member 640 to limit the movement of the test tray TT, and the stopper part 631 may be provided with a hook part 642. It is preferable to arrange | position between the hinge axes 645.

Next, the operation of the positioning device according to the first embodiment of the present invention will be described with reference to Figs.

First, as shown in (a) of FIG. 8, the front and rear surfaces of the test tray TT are supported by the first guide part 221 and the second guide part 222 and the third guide part 223. ) Moves to the side with the lower surface supported.

As shown in FIG. 8B, the test tray TT is rubbed with the friction member 231 pressed by the test tray TT by the elastic force of the elastic member 234. The moving speed is reduced, and finally, as shown in FIG. 8C, the test tray TT stops at the required position and the position is determined.

Next, the operation of the positioning device according to the second embodiment of the present invention will be described with reference to Figs. 9A to 9C.

First, as shown in FIG. 9A, the test tray TT is supported by the first guide part 421 and the second guide part 422 by the front and rear surfaces thereof, and the third guide part 423. ) Moves to the side with the lower surface supported.

And, as shown in Figure 9 (b), the test tray TT is continuously rubbed with a plurality of friction pieces 431 for pressing the test tray (TT), and then with the (c) of Figure 9 Likewise, the test tray TT stops at the required position and the position is determined.

Next, the operation of the positioning device according to the third embodiment of the present invention will be described with reference to Figs. 10A to 10C.

First, as shown in FIG. 10A, the test tray T. T is moved laterally by the guide device 610.

Thereafter, as illustrated in FIG. 10B, the movement of the test tray TT is limited by the stopper part 631, and at the same time, the hook part 641 of the holder member 640 is connected to the test tray TT. It is caught in the feed groove (T.T1).

Subsequently, the test tray TT is transferred laterally by the moving member 630, and as shown in FIG. 10C, the roller 644 of the holder member 640 is pressed by the pressing member 650. When the hook portion 641 and the test tray TT are released while being pressed by the test tray, the test tray TT stops at the required position and the position thereof is determined.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It is not to be understood that the scope of the invention should be understood by the claims and equivalent concepts described below.

1 is a schematic view showing a chamber of a test handler according to the present invention.

2 is a perspective view showing a positioning device and a test tray according to the first embodiment of the present invention.

3 is an exploded perspective view showing a positioning device according to a first embodiment of the present invention.

4 is a perspective view showing a positioning device and a test tray according to a second embodiment of the present invention.

5 is an exploded perspective view showing a positioning device according to a second embodiment of the present invention.

6 is a perspective view showing a positioning device and a test tray according to a third embodiment of the present invention.

7 (a) and 7 (b) are enlarged perspective views showing an enlargement of the positioning device according to the third embodiment of the present invention.

8A to 8C are schematic diagrams schematically showing the operation of the positioning device according to the first embodiment of the present invention.

9 (a) to 9 (c) are schematic diagrams schematically showing the operation of the positioning device according to the second embodiment of the present invention.

10A to 10C are schematic diagrams schematically showing the operation of the positioning device according to the third embodiment of the present invention.

* Description of the code for the main parts of the drawings *

100: test handler 110: inner chamber

120: test chamber 130: desock chamber

140: guide device 150: transfer device

210, 410, 620: Positioning device

Claims (8)

A guide device for guiding the movement of the test tray; And Friction resistance generating device for generating a friction on the test tray which is moved while being guided by the guide device to position the test tray in the required position; Including, The frictional resistance generator, A friction member friction with one surface of the test tray; And An elastic member for pressing the friction member toward the test tray; Characterized in that it comprises Test tray positioning device of the test handler. delete The method of claim 1, The frictional resistance generator, A connection member fixed to the guide device and extending through the friction member; And A support member installed at an extended end of the connection member; More, The elastic member is installed so as to surround the connecting member between the support member and the friction member. Test tray positioning device of the test handler. The method of claim 1, The distance between the friction member and the test tray is characterized in that it is provided to become narrower in the direction in which the test tray is moved Test tray positioning device of the test handler. The method of claim 1, The frictional resistance generator is extended in the direction in which the test tray is moved, characterized in that one or a plurality of friction pieces extending inclined toward the test tray side Test tray positioning device of the test handler. A moving member installed to reciprocate in the chamber; A holder member installed on the moving member and detachably coupled to the test tray; And An urging member installed in the chamber and configured to press the holder member to release the coupling of the holder member and the test tray when the test tray is moved to a required position; Characterized in that it comprises Test tray positioning device of the test handler. The method of claim 6, The holder member, A lever part rotatably installed around a hinge axis of the moving member; A hook part formed at one end of the lever part and hooked to a transfer groove formed in the test tray; An elastic portion for elastically supporting the other end of the lever portion on the moving member; And It is installed on the other end of the lever portion, and includes a roller portion in contact with the pressing member, The pressing member is characterized in that the surface in contact with the roller portion is formed to be inclined to gradually press the roller portion toward the moving member in accordance with the movement of the roller portion. Test tray positioning device of the test handler. The method of claim 7, wherein The moving member, Extending toward the holder member to limit the movement of the test tray, characterized in that it comprises a stopper portion disposed between the hook portion and the hinge shaft Test tray positioning device of the test handler.

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