KR100966503B1 - 센서 장치 - Google Patents

센서 장치 Download PDF

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Publication number
KR100966503B1
KR100966503B1 KR1020087008059A KR20087008059A KR100966503B1 KR 100966503 B1 KR100966503 B1 KR 100966503B1 KR 1020087008059 A KR1020087008059 A KR 1020087008059A KR 20087008059 A KR20087008059 A KR 20087008059A KR 100966503 B1 KR100966503 B1 KR 100966503B1
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South Korea
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semiconductor
sample
specimen
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holding portion
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Korean (ko)
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KR20080050466A (ko
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료타 세키구치
요이치로 한다
토시히코 오우치
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020087008059A 2005-09-05 2006-08-31 센서 장치 Expired - Fee Related KR100966503B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005256654 2005-09-05
JPJP-P-2005-00256654 2005-09-05

Publications (2)

Publication Number Publication Date
KR20080050466A KR20080050466A (ko) 2008-06-05
KR100966503B1 true KR100966503B1 (ko) 2010-06-29

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KR1020087008059A Expired - Fee Related KR100966503B1 (ko) 2005-09-05 2006-08-31 센서 장치

Country Status (6)

Country Link
US (1) US7684044B2 (enExample)
EP (1) EP1926984A2 (enExample)
JP (1) JP4481967B2 (enExample)
KR (1) KR100966503B1 (enExample)
CN (1) CN101258400B (enExample)
WO (1) WO2007029758A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007132795A1 (en) * 2006-05-12 2007-11-22 Canon Kabushiki Kaisha Detecting element, detecting device and detecting method
JP5294600B2 (ja) * 2007-09-28 2013-09-18 キヤノン株式会社 標的物質検出装置、及び標的物質検出方法
JP5288772B2 (ja) * 2007-11-02 2013-09-11 キヤノン株式会社 化学センサ素子、センシング装置およびセンシング方法
US20110188043A1 (en) * 2007-12-26 2011-08-04 Yissum, Research Development Company of The Hebrew University of Jerusalem, Ltd. Method and apparatus for monitoring processes in living cells
US8772890B2 (en) * 2008-10-07 2014-07-08 Terasense Group, Inc. Apparatus and method of detecting electromagnetic radiation
KR101017796B1 (ko) * 2009-01-22 2011-02-28 한국과학기술원 접촉형 테라헤르츠 시간 도메인 분광 장치
EP2537021A1 (en) * 2010-02-15 2012-12-26 Koninklijke Philips Electronics N.V. Device for analyzing a sample using radiation in the terahertz frequency range
KR101299132B1 (ko) 2011-12-28 2013-08-22 한국과학기술연구원 칼코지나이드 재료를 이용한 국소 표면 플라즈몬 공진 센서 및 이의 제조 방법
JP2013246115A (ja) * 2012-05-29 2013-12-09 Seiko Epson Corp 光学デバイス及び検出装置
CN102902130A (zh) * 2012-09-27 2013-01-30 中国计量学院 高速太赫兹波调制装置及其方法
US10060851B2 (en) 2013-03-05 2018-08-28 Plexense, Inc. Surface plasmon detection apparatuses and methods
KR101592241B1 (ko) 2013-04-15 2016-02-05 (주)플렉센스 나노 입자 어레이의 제조 방법, 표면 플라즈몬 공명 기반의 센서, 및 이를 이용한 분석 방법
US10092209B2 (en) * 2014-10-03 2018-10-09 Advantest Corporation Non-invasive in situ glucose level sensing using electromagnetic radiation
CN104316498B (zh) * 2014-11-13 2017-07-14 中国科学院上海微系统与信息技术研究所 一种表面等离子体共振的太赫兹传感器
DE102015208026A1 (de) * 2015-03-03 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur ortsaufgelösten Bestimmung des spezifischen elektrischen Widerstands und/oder der spezifischen elektrischen Leitfähigkeit von Proben
CN104739419A (zh) * 2015-03-19 2015-07-01 深圳市一体太赫兹科技有限公司 调节血糖的系统
JP6589239B2 (ja) * 2015-09-25 2019-10-16 株式会社Ｓｃｒｅｅｎホールディングス 膜厚測定装置及び膜厚測定方法
CN105606534B (zh) * 2015-12-11 2018-09-25 中国科学院上海微系统与信息技术研究所 太赫兹近场信号转换器
JP6646519B2 (ja) * 2016-05-20 2020-02-14 浜松ホトニクス株式会社 全反射分光計測装置及び全反射分光計測方法
CN107068783B (zh) * 2016-11-25 2018-08-14 中国科学院上海技术物理研究所 一种锑化铟太赫兹探测器及制作方法
CN108398096A (zh) * 2018-04-11 2018-08-14 青岛万龙智控科技有限公司 钢丝帘布厚度的太赫兹波反射式在线测量方法
US10551313B1 (en) * 2019-04-15 2020-02-04 The Florida International University Board Of Trustees Surface plasmon resonance based mechanical sensing of beating heart cells
CN115825001A (zh) * 2022-12-20 2023-03-21 北京环境特性研究所 一种可变角度的太赫兹频段衰减全反射材料参数测量系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858799A (en) 1995-10-25 1999-01-12 University Of Washington Surface plasmon resonance chemical electrode
WO2004037387A2 (en) * 2002-10-24 2004-05-06 Bayer Charlene W Filters and methods of making and using the same

Family Cites Families (14)

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JP2807777B2 (ja) * 1994-09-09 1998-10-08 工業技術院長 スラブ光導波路を利用した光吸収スペクトル測定装置
CN1058787C (zh) * 1994-12-23 2000-11-22 清华大学 提高表面等离子体波传感器测量精度的方法及其传感器
EP1002226A1 (en) * 1997-07-24 2000-05-24 Ecole Polytechnique Federale De Lausanne Detection and investigation of biological molecules by fourier transform infra-red spectroscopy
GB9816441D0 (en) * 1998-07-28 1998-09-23 Hartley Frank R Analysis of liquids
US6738141B1 (en) * 1999-02-01 2004-05-18 Vir A/S Surface plasmon resonance sensor
CA2360932A1 (en) * 1999-02-01 2000-08-10 Vir A/S A surface plasmon resonance sensor
RU2226684C2 (ru) * 1999-05-17 2004-04-10 Дзе Флорида Интернэшнл Юниверсити Борд Оф Трастиз Способ и устройство для определения поверхностного плазмонного резонанса
GB9928849D0 (en) * 1999-12-07 2000-02-02 Secr Defence Brit Surface plasmon resonance
US6421128B1 (en) * 2000-05-17 2002-07-16 The Arizona Board Of Regents On Behalf Of The University Of Arizona Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared special ranges
JP2004505294A (ja) * 2000-07-21 2004-02-19 マイクロ　マネージド　フォトンズ　アクティーゼルスカブ 表面プラズモン・ポラリトン・バンドギャップ構造
US6570158B2 (en) * 2001-06-02 2003-05-27 Hya Feygin Method and apparatus for infrared-spectrum imaging
US7033542B2 (en) * 2002-02-14 2006-04-25 Archibald William B High throughput screening with parallel vibrational spectroscopy
US7015471B2 (en) * 2002-09-25 2006-03-21 North Carolina State University Surface plasmon resonance systems and methods having a variable charge density layer
JP3950818B2 (ja) 2003-05-29 2007-08-01 アイシン精機株式会社 反射型テラヘルツ分光測定装置及び測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858799A (en) 1995-10-25 1999-01-12 University Of Washington Surface plasmon resonance chemical electrode
WO2004037387A2 (en) * 2002-10-24 2004-05-06 Bayer Charlene W Filters and methods of making and using the same

Also Published As

Publication number Publication date
CN101258400B (zh) 2010-12-08
WO2007029758A3 (en) 2007-06-14
KR20080050466A (ko) 2008-06-05
EP1926984A2 (en) 2008-06-04
WO2007029758A2 (en) 2007-03-15
CN101258400A (zh) 2008-09-03
JP2007093590A (ja) 2007-04-12
US7684044B2 (en) 2010-03-23
JP4481967B2 (ja) 2010-06-16
US20080273207A1 (en) 2008-11-06

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