JP4481967B2 - センサ装置 - Google Patents

センサ装置 Download PDF

Info

Publication number
JP4481967B2
JP4481967B2 JP2006228963A JP2006228963A JP4481967B2 JP 4481967 B2 JP4481967 B2 JP 4481967B2 JP 2006228963 A JP2006228963 A JP 2006228963A JP 2006228963 A JP2006228963 A JP 2006228963A JP 4481967 B2 JP4481967 B2 JP 4481967B2
Authority
JP
Japan
Prior art keywords
semiconductor
surface plasmon
sensor device
plasmon resonance
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006228963A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007093590A5 (enExample
JP2007093590A (ja
Inventor
亮太 関口
洋一郎 飯田
敏彦 尾内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006228963A priority Critical patent/JP4481967B2/ja
Publication of JP2007093590A publication Critical patent/JP2007093590A/ja
Publication of JP2007093590A5 publication Critical patent/JP2007093590A5/ja
Application granted granted Critical
Publication of JP4481967B2 publication Critical patent/JP4481967B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2006228963A 2005-09-05 2006-08-25 センサ装置 Expired - Fee Related JP4481967B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006228963A JP4481967B2 (ja) 2005-09-05 2006-08-25 センサ装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005256654 2005-09-05
JP2006228963A JP4481967B2 (ja) 2005-09-05 2006-08-25 センサ装置

Publications (3)

Publication Number Publication Date
JP2007093590A JP2007093590A (ja) 2007-04-12
JP2007093590A5 JP2007093590A5 (enExample) 2008-02-07
JP4481967B2 true JP4481967B2 (ja) 2010-06-16

Family

ID=37695362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006228963A Expired - Fee Related JP4481967B2 (ja) 2005-09-05 2006-08-25 センサ装置

Country Status (6)

Country Link
US (1) US7684044B2 (enExample)
EP (1) EP1926984A2 (enExample)
JP (1) JP4481967B2 (enExample)
KR (1) KR100966503B1 (enExample)
CN (1) CN101258400B (enExample)
WO (1) WO2007029758A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10060851B2 (en) 2013-03-05 2018-08-28 Plexense, Inc. Surface plasmon detection apparatuses and methods
US10359362B2 (en) 2013-04-15 2019-07-23 Plexense, Inc. Method for manufacturing nanoparticle array, surface plasmon resonance-based sensor and method for analyzing using same

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007132795A1 (en) * 2006-05-12 2007-11-22 Canon Kabushiki Kaisha Detecting element, detecting device and detecting method
JP5294600B2 (ja) * 2007-09-28 2013-09-18 キヤノン株式会社 標的物質検出装置、及び標的物質検出方法
JP5288772B2 (ja) * 2007-11-02 2013-09-11 キヤノン株式会社 化学センサ素子、センシング装置およびセンシング方法
US20110188043A1 (en) * 2007-12-26 2011-08-04 Yissum, Research Development Company of The Hebrew University of Jerusalem, Ltd. Method and apparatus for monitoring processes in living cells
US8772890B2 (en) * 2008-10-07 2014-07-08 Terasense Group, Inc. Apparatus and method of detecting electromagnetic radiation
KR101017796B1 (ko) * 2009-01-22 2011-02-28 한국과학기술원 접촉형 테라헤르츠 시간 도메인 분광 장치
EP2537021A1 (en) * 2010-02-15 2012-12-26 Koninklijke Philips Electronics N.V. Device for analyzing a sample using radiation in the terahertz frequency range
KR101299132B1 (ko) 2011-12-28 2013-08-22 한국과학기술연구원 칼코지나이드 재료를 이용한 국소 표면 플라즈몬 공진 센서 및 이의 제조 방법
JP2013246115A (ja) * 2012-05-29 2013-12-09 Seiko Epson Corp 光学デバイス及び検出装置
CN102902130A (zh) * 2012-09-27 2013-01-30 中国计量学院 高速太赫兹波调制装置及其方法
US10092209B2 (en) * 2014-10-03 2018-10-09 Advantest Corporation Non-invasive in situ glucose level sensing using electromagnetic radiation
CN104316498B (zh) * 2014-11-13 2017-07-14 中国科学院上海微系统与信息技术研究所 一种表面等离子体共振的太赫兹传感器
DE102015208026A1 (de) * 2015-03-03 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur ortsaufgelösten Bestimmung des spezifischen elektrischen Widerstands und/oder der spezifischen elektrischen Leitfähigkeit von Proben
CN104739419A (zh) * 2015-03-19 2015-07-01 深圳市一体太赫兹科技有限公司 调节血糖的系统
JP6589239B2 (ja) * 2015-09-25 2019-10-16 株式会社Ｓｃｒｅｅｎホールディングス 膜厚測定装置及び膜厚測定方法
CN105606534B (zh) * 2015-12-11 2018-09-25 中国科学院上海微系统与信息技术研究所 太赫兹近场信号转换器
JP6646519B2 (ja) * 2016-05-20 2020-02-14 浜松ホトニクス株式会社 全反射分光計測装置及び全反射分光計測方法
CN107068783B (zh) * 2016-11-25 2018-08-14 中国科学院上海技术物理研究所 一种锑化铟太赫兹探测器及制作方法
CN108398096A (zh) * 2018-04-11 2018-08-14 青岛万龙智控科技有限公司 钢丝帘布厚度的太赫兹波反射式在线测量方法
US10551313B1 (en) * 2019-04-15 2020-02-04 The Florida International University Board Of Trustees Surface plasmon resonance based mechanical sensing of beating heart cells
CN115825001A (zh) * 2022-12-20 2023-03-21 北京环境特性研究所 一种可变角度的太赫兹频段衰减全反射材料参数测量系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807777B2 (ja) * 1994-09-09 1998-10-08 工業技術院長 スラブ光導波路を利用した光吸収スペクトル測定装置
CN1058787C (zh) * 1994-12-23 2000-11-22 清华大学 提高表面等离子体波传感器测量精度的方法及其传感器
AU7526496A (en) * 1995-10-25 1997-05-15 University Of Washington Surface plasmon resonance electrode as chemical sensor
EP1002226A1 (en) * 1997-07-24 2000-05-24 Ecole Polytechnique Federale De Lausanne Detection and investigation of biological molecules by fourier transform infra-red spectroscopy
GB9816441D0 (en) * 1998-07-28 1998-09-23 Hartley Frank R Analysis of liquids
US6738141B1 (en) * 1999-02-01 2004-05-18 Vir A/S Surface plasmon resonance sensor
CA2360932A1 (en) * 1999-02-01 2000-08-10 Vir A/S A surface plasmon resonance sensor
RU2226684C2 (ru) * 1999-05-17 2004-04-10 Дзе Флорида Интернэшнл Юниверсити Борд Оф Трастиз Способ и устройство для определения поверхностного плазмонного резонанса
GB9928849D0 (en) * 1999-12-07 2000-02-02 Secr Defence Brit Surface plasmon resonance
US6421128B1 (en) * 2000-05-17 2002-07-16 The Arizona Board Of Regents On Behalf Of The University Of Arizona Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared special ranges
JP2004505294A (ja) * 2000-07-21 2004-02-19 マイクロ　マネージド　フォトンズ　アクティーゼルスカブ 表面プラズモン・ポラリトン・バンドギャップ構造
US6570158B2 (en) * 2001-06-02 2003-05-27 Hya Feygin Method and apparatus for infrared-spectrum imaging
US7033542B2 (en) * 2002-02-14 2006-04-25 Archibald William B High throughput screening with parallel vibrational spectroscopy
US7015471B2 (en) * 2002-09-25 2006-03-21 North Carolina State University Surface plasmon resonance systems and methods having a variable charge density layer
AU2003286657A1 (en) * 2002-10-24 2004-05-13 Charlene W. Bayer Filters and methods of making and using the same
JP3950818B2 (ja) 2003-05-29 2007-08-01 アイシン精機株式会社 反射型テラヘルツ分光測定装置及び測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10060851B2 (en) 2013-03-05 2018-08-28 Plexense, Inc. Surface plasmon detection apparatuses and methods
US10359362B2 (en) 2013-04-15 2019-07-23 Plexense, Inc. Method for manufacturing nanoparticle array, surface plasmon resonance-based sensor and method for analyzing using same

Also Published As

Publication number Publication date
CN101258400B (zh) 2010-12-08
WO2007029758A3 (en) 2007-06-14
KR100966503B1 (ko) 2010-06-29
KR20080050466A (ko) 2008-06-05
EP1926984A2 (en) 2008-06-04
WO2007029758A2 (en) 2007-03-15
CN101258400A (zh) 2008-09-03
JP2007093590A (ja) 2007-04-12
US7684044B2 (en) 2010-03-23
US20080273207A1 (en) 2008-11-06

Similar Documents

Publication Publication Date Title
JP4481967B2 (ja) センサ装置
Peng et al. Terahertz spectroscopy in biomedical field: a review on signal-to-noise ratio improvement
US6421128B1 (en) Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared special ranges
US6330062B1 (en) Fourier transform surface plasmon resonance adsorption sensor instrument
JP4829669B2 (ja) 検体情報取得装置、及び検体情報取得方法
US8792102B2 (en) Interferometric spectral imaging of a two-dimensional array of samples using surface plasmon resonance
US6330387B1 (en) Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared spectral ranges
JPH06506298A (ja) 分析装置
US7271914B2 (en) Biomolecular sensor system utilizing a transverse propagation wave of surface plasmon resonance (SPR)
WO2010044193A1 (ja) 試料分析方法
CA2503686A1 (en) Wavelength tunable surface plasmon resonance sensor
TW200928350A (en) A method for improving surface plasmon resonance by using conducting metal oxide as adhesive layer
US20110205543A1 (en) Gas Sensor, Method for Optically Measuring the Presence of a Gas Using the Gas Sensor, and Gas Sensing System
Nivedha et al. Surface plasmon resonance
JP2005532563A (ja) 分子検出器装置
Samaha et al. Graphene terahertz devices for sensing and communication
JP4726212B2 (ja) センシング装置
Lu et al. Electrical SPR biosensor with thermal annealed graphene oxide: Concept of highly sensitive biomolecule detection
Toma et al. Direct detection of neuron-specific enolase using a spectrometer-free colorimetric plasmonic biosensor
EP2372343A1 (en) Gas sensor, method for optically measuring the presence of a gas using the gas sensor and gas sensing system
Heidarzadeh Highly sensitive plasmonic sensor based on ring shape nanoparticles for the detection of ethanol and D-glucose concentration
Zhang et al. Advancing trace liquid detection: colloidal gold-based quasi-BIC metamaterials in terahertz biosensing
Jamil et al. Graphene-MoS 2 SPR-based biosensor for urea detection
JP5130517B2 (ja) 光導波路型ｄｎａセンサおよびｄｎａ検出方法
JP5859955B2 (ja) 被測定物の特性の測定方法、および、それに用いられるセンシングデバイス

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071217

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20091210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091222

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100216

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100316

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100318

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130326

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140326

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees