KR100960823B1 - 하전입자선 조사장치 - Google Patents

하전입자선 조사장치 Download PDF

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Publication number
KR100960823B1
KR100960823B1 KR1020080005786A KR20080005786A KR100960823B1 KR 100960823 B1 KR100960823 B1 KR 100960823B1 KR 1020080005786 A KR1020080005786 A KR 1020080005786A KR 20080005786 A KR20080005786 A KR 20080005786A KR 100960823 B1 KR100960823 B1 KR 100960823B1
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South Korea
Prior art keywords
irradiation
charged particle
particle beam
axis direction
quantum
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Korean (ko)
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KR20080068594A (ko
Inventor
데이지 니시오
다카시 오기노
가즈히로 노무라
도시키 다치카와
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
고쿠리츠간센터 소쵸
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Publication of KR20080068594A publication Critical patent/KR20080068594A/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00—Radiation therapy
    • A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1042—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy with spatial modulation of the radiation beam within the treatment head
    • A61N5/1043—Scanning the radiation beam, e.g. spot scanning or raster scanning
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00—Radiation therapy
    • A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1077—Beam delivery systems
    • A61N5/1079—Sharing a beam by multiple treatment stations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F5/00—Screening processes; Screens therefor
    • G03F5/02—Screening processes; Screens therefor by projection methods
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70208—Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

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  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Veterinary Medicine (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Radiation-Therapy Devices (AREA)
  • Nuclear Medicine (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
KR1020080005786A 2007-01-18 2008-01-18 하전입자선 조사장치 Active KR100960823B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007009524A JP4797140B2 (ja) 2007-01-18 2007-01-18 荷電粒子線照射装置
JPJP-P-2007-00009524 2007-01-18

Publications (2)

Publication Number Publication Date
KR20080068594A KR20080068594A (ko) 2008-07-23
KR100960823B1 true KR100960823B1 (ko) 2010-06-07

Family

ID=39700797

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080005786A Active KR100960823B1 (ko) 2007-01-18 2008-01-18 하전입자선 조사장치

Country Status (4)

Country Link
JP (1) JP4797140B2 (enExample)
KR (1) KR100960823B1 (enExample)
CN (1) CN101224324B (enExample)
TW (1) TW200836792A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101242319B1 (ko) * 2008-09-12 2013-03-11 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010013346A1 (ja) * 2008-08-01 2010-02-04 独立行政法人放射線医学総合研究所 放射線治療・ｐｅｔ複合装置
US8581196B2 (en) 2008-08-01 2013-11-12 National Institute Of Radiological Sciences Detector-shift type combined radiation therapy/PET apparatus
WO2010046983A1 (ja) * 2008-10-23 2010-04-29 株式会社島津製作所 粒子線治療装置
JP5339592B2 (ja) * 2009-01-28 2013-11-13 独立行政法人国立がん研究センター 陽子線治療におけるポジトロン放出核種のアクティビティ分布のシミュレーション方法
KR101127680B1 (ko) * 2009-09-08 2012-03-23 중앙대학교 산학협력단 도넛형 코일을 이용한 하전입자 빔 단층촬영 장치 및 방법
CN102695544B (zh) 2009-10-23 2016-05-11 离子束应用公司 用于粒子治疗的包括束分析仪的机架
EP2660825B1 (en) * 2010-12-27 2015-04-01 Sumitomo Heavy Industries, Ltd. Energy degrader and charged-particle irradiation system provided with same
JP5726541B2 (ja) * 2011-01-18 2015-06-03 住友重機械工業株式会社 エネルギーデグレーダ、及びそれを備えた荷電粒子照射システム
US8809815B2 (en) * 2011-04-25 2014-08-19 Mitsubishi Electric Corporation Particle-beam energy changing apparatus, particle beam therapy system including the same, and method of changing particle beam energy
JP5701671B2 (ja) * 2011-04-27 2015-04-15 住友重機械工業株式会社 荷電粒子線照射装置
JP5726644B2 (ja) * 2011-06-06 2015-06-03 住友重機械工業株式会社 エネルギーデグレーダ、及びそれを備えた荷電粒子線照射システム
JP2012254146A (ja) * 2011-06-08 2012-12-27 Hitachi Ltd 荷電粒子ビーム照射システム
JP6587826B2 (ja) * 2015-05-14 2019-10-09 株式会社日立製作所 粒子線照射システム
CN105251138B (zh) * 2015-11-13 2018-03-13 上海艾普强粒子设备有限公司 一种粒子照射装置以及包括该装置的粒子治疗系统
CN108778137B (zh) * 2016-03-03 2022-10-18 皇家飞利浦有限公司 混合x射线和伽马成像系统
CN105797282B (zh) * 2016-03-07 2018-09-04 上海艾普强粒子设备有限公司 一种粒子照射装置以及包括该装置的粒子治疗系统
WO2017214902A1 (zh) * 2016-06-15 2017-12-21 深圳市奥沃医学新技术发展有限公司 肿瘤位置的追踪方法及放射治疗设备
JP6594835B2 (ja) * 2016-09-02 2019-10-23 住友重機械工業株式会社 荷電粒子線治療装置、及びリッジフィルタ

Citations (2)

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JPH0510895A (ja) 1991-07-05 1993-01-19 Hidetsugu Ikegami 固体の表面物性を探査する方法および走査クラスター顕微鏡
JP2005114367A (ja) 2003-10-02 2005-04-28 Shimadzu Corp 放射線検出器、および、ｒｉイメージング装置

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NL8900575A (nl) * 1989-03-09 1990-10-01 Philips Nv Roentgenonderzoek apparaat.
JP3519248B2 (ja) 1997-08-08 2004-04-12 住友重機械工業株式会社 放射線治療用回転照射室
JP2004524527A (ja) * 2001-02-06 2004-08-12 ジー エス アイ ゲゼルシャフト フュア シュベールイオーネンフォルシュンク エム ベー ハー 重イオン癌治療施設における高エネルギーイオンビームの輸送および送出のためガントリシステム
EP1347309A3 (en) * 2002-03-20 2012-04-18 Hitachi, Ltd. Radiological imaging apparatus and method
JP3673791B2 (ja) * 2002-05-22 2005-07-20 キヤノン株式会社 放射線撮影装置及び放射線撮影方法
JP4464612B2 (ja) * 2003-02-12 2010-05-19 株式会社島津製作所 放射線撮像装置
JP2005185718A (ja) * 2003-12-26 2005-07-14 Ge Medical Systems Global Technology Co Llc 放射線断層撮像装置および撮像方法
JP4071765B2 (ja) * 2004-12-10 2008-04-02 株式会社東芝 核医学診断装置
JP2006021046A (ja) * 2005-07-05 2006-01-26 Mitsubishi Heavy Ind Ltd 放射線治療装置

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH0510895A (ja) 1991-07-05 1993-01-19 Hidetsugu Ikegami 固体の表面物性を探査する方法および走査クラスター顕微鏡
JP2005114367A (ja) 2003-10-02 2005-04-28 Shimadzu Corp 放射線検出器、および、ｒｉイメージング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101242319B1 (ko) * 2008-09-12 2013-03-11 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치
US8421010B2 (en) 2008-09-12 2013-04-16 Hitachi High-Technologies Corporation Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample

Also Published As

Publication number Publication date
TWI352605B (enExample) 2011-11-21
CN101224324A (zh) 2008-07-23
JP2008173297A (ja) 2008-07-31
TW200836792A (en) 2008-09-16
JP4797140B2 (ja) 2011-10-19
KR20080068594A (ko) 2008-07-23
CN101224324B (zh) 2012-10-10

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