KR100927456B1 - 고체 유기 금속 화합물용 충전 용기 및 그 충전 방법 - Google Patents

고체 유기 금속 화합물용 충전 용기 및 그 충전 방법 Download PDF

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Publication number
KR100927456B1
KR100927456B1 KR1020030007664A KR20030007664A KR100927456B1 KR 100927456 B1 KR100927456 B1 KR 100927456B1 KR 1020030007664 A KR1020030007664 A KR 1020030007664A KR 20030007664 A KR20030007664 A KR 20030007664A KR 100927456 B1 KR100927456 B1 KR 100927456B1
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KR
South Korea
Prior art keywords
carrier gas
filling container
filling
organometallic compound
container
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KR1020030007664A
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English (en)
Korean (ko)
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KR20030067563A (ko
Inventor
토미야스시즈오
토쿠도메코이치
하가켄이치
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토소 화인켐 가부시키가이샤
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Publication of KR20030067563A publication Critical patent/KR20030067563A/ko
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Publication of KR100927456B1 publication Critical patent/KR100927456B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020030007664A 2002-02-08 2003-02-07 고체 유기 금속 화합물용 충전 용기 및 그 충전 방법 KR100927456B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00032750 2002-02-08
JP2002032750 2002-02-08

Publications (2)

Publication Number Publication Date
KR20030067563A KR20030067563A (ko) 2003-08-14
KR100927456B1 true KR100927456B1 (ko) 2009-11-19

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ID=27654833

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030007664A KR100927456B1 (ko) 2002-02-08 2003-02-07 고체 유기 금속 화합물용 충전 용기 및 그 충전 방법

Country Status (3)

Country Link
KR (1) KR100927456B1 (zh)
CN (1) CN1269188C (zh)
TW (1) TWI273144B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140002849A (ko) * 2012-06-26 2014-01-09 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2444143B (en) * 2006-11-27 2009-10-28 Sumitomo Chemical Co Apparatus of supplying organometallic compound
JP5728772B2 (ja) * 2011-05-31 2015-06-03 株式会社ブイ・テクノロジー 原料ガス発生装置
CN114059038B (zh) * 2020-08-07 2024-02-09 吕宝源 固态金属有机化合物转态方法及其转态系统
KR102407768B1 (ko) * 2021-07-01 2022-06-10 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140002849A (ko) * 2012-06-26 2014-01-09 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR101695356B1 (ko) 2012-06-26 2017-01-24 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치

Also Published As

Publication number Publication date
CN1437219A (zh) 2003-08-20
TW200302876A (en) 2003-08-16
TWI273144B (en) 2007-02-11
CN1269188C (zh) 2006-08-09
KR20030067563A (ko) 2003-08-14

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