KR100919205B1 - 배향막 검사장치 및 이를 이용한 액정표시장치의 제조방법 - Google Patents
배향막 검사장치 및 이를 이용한 액정표시장치의 제조방법Info
- Publication number
- KR100919205B1 KR100919205B1 KR1020050053196A KR20050053196A KR100919205B1 KR 100919205 B1 KR100919205 B1 KR 100919205B1 KR 1020050053196 A KR1020050053196 A KR 1020050053196A KR 20050053196 A KR20050053196 A KR 20050053196A KR 100919205 B1 KR100919205 B1 KR 100919205B1
- Authority
- KR
- South Korea
- Prior art keywords
- steam
- alignment film
- substrate
- liquid crystal
- inspection apparatus
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (27)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050053196A KR100919205B1 (ko) | 2005-06-20 | 2005-06-20 | 배향막 검사장치 및 이를 이용한 액정표시장치의 제조방법 |
US11/315,628 US7492437B2 (en) | 2005-06-20 | 2005-12-23 | Apparatus for inspecting alignment film and method for fabricating liquid crystal display device using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050053196A KR100919205B1 (ko) | 2005-06-20 | 2005-06-20 | 배향막 검사장치 및 이를 이용한 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060133380A KR20060133380A (ko) | 2006-12-26 |
KR100919205B1 true KR100919205B1 (ko) | 2009-09-28 |
Family
ID=37573894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050053196A KR100919205B1 (ko) | 2005-06-20 | 2005-06-20 | 배향막 검사장치 및 이를 이용한 액정표시장치의 제조방법 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7492437B2 (ko) |
KR (1) | KR100919205B1 (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7777848B2 (en) * | 2006-03-02 | 2010-08-17 | Canon Kabushiki Kaisha | Manufacturing method of liquid crystal panel and deuterium oxide surface treatment method of alignment film |
CN102460280A (zh) | 2009-06-04 | 2012-05-16 | 夏普株式会社 | 液晶面板的制造方法、液晶面板和修复装置 |
KR102289985B1 (ko) | 2014-12-08 | 2021-08-17 | 삼성디스플레이 주식회사 | 표시 장치 |
US10619870B2 (en) | 2015-06-08 | 2020-04-14 | Koh Young Technology Inc. | Humid air forming device, inspection device comprising same, and inspection method |
CN105739139B (zh) * | 2016-05-12 | 2018-12-14 | 京东方科技集团股份有限公司 | 一种配向膜的检测方法及装置 |
CN107315285B (zh) * | 2017-07-19 | 2018-07-27 | 深圳市华星光电半导体显示技术有限公司 | 一种温控配向装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0643127A (ja) * | 1992-03-27 | 1994-02-18 | Toshiba Corp | 表面状態検査装置 |
JPH10111257A (ja) * | 1995-12-14 | 1998-04-28 | Toshiba Corp | 表面検査装置、表面検査方法及び液晶表示装置の製造方法 |
KR200306839Y1 (ko) * | 1997-12-08 | 2003-12-24 | 비오이 하이디스 테크놀로지 주식회사 | 배향막표면상태검출장치 |
KR20040005496A (ko) * | 2002-07-10 | 2004-01-16 | 삼성전자주식회사 | 배향홈 검사 방법 및 이를 이용한 배향홈 검사 시스템 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101067972B1 (ko) * | 2002-12-31 | 2011-09-26 | 엘지디스플레이 주식회사 | 액정표시소자의 배향막러빙불량검사기 |
TWI233484B (en) * | 2004-05-11 | 2005-06-01 | Au Optronics Corp | Method and apparatus for inspecting orientation of alignment layers |
-
2005
- 2005-06-20 KR KR1020050053196A patent/KR100919205B1/ko active IP Right Grant
- 2005-12-23 US US11/315,628 patent/US7492437B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0643127A (ja) * | 1992-03-27 | 1994-02-18 | Toshiba Corp | 表面状態検査装置 |
JPH10111257A (ja) * | 1995-12-14 | 1998-04-28 | Toshiba Corp | 表面検査装置、表面検査方法及び液晶表示装置の製造方法 |
KR200306839Y1 (ko) * | 1997-12-08 | 2003-12-24 | 비오이 하이디스 테크놀로지 주식회사 | 배향막표면상태검출장치 |
KR20040005496A (ko) * | 2002-07-10 | 2004-01-16 | 삼성전자주식회사 | 배향홈 검사 방법 및 이를 이용한 배향홈 검사 시스템 |
Also Published As
Publication number | Publication date |
---|---|
US7492437B2 (en) | 2009-02-17 |
KR20060133380A (ko) | 2006-12-26 |
US20060286701A1 (en) | 2006-12-21 |
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