KR100912884B1 - Etching method for TFT-LCD Glass Using Turnicg-Roll blush - Google Patents

Abstract

The present invention relates to a rotary roll brush and an etching method used in a TFT-LCD glass etching process, and specifically, a cleaning process before etching, an etching process and a post-etch cleaning in a state in which the etching glass is placed vertically in one etching equipment. In sequentially performing TFT-LCD glass etching, the present invention provides a TFT-LCD cleaning rotary roll brush mounted in a vertical conveying TFT-LCD glass pretreatment chamber which cleans before etching, and performs a cleaning process using the same. It is done.

According to the present invention, the cylindrical pre-etch cleaning process is equipped with a cylindrical rotary roll brush in a series of processes leading to a horizontal conveyance cleaning operation, a vertical conveyance etching process, and a horizontal conveyance cleaning process performed for the TFT-LCD glass etching process. By doing so, the entire process can be performed in the vertical conveying etching process for the glass, and the tack time is improved through the efficiency of process connection by treating it as one process without undergoing a separate cleaning process before etching. There is an effect that can significantly reduce the failure rate due to breakage of the TFT-LCD panel.

TFT-LCD Glass Etching, Rotary Roll Brush

Description

Rotary roll brush for TFT-LCC glass etching and etching method using it {Etching method for TFT-LCD Glass Using Turnicg-Roll blush}

The present invention relates to a brush used in the cleaning process of the TFT-LCD etching process, and more particularly, a horizontal transfer cleaning operation, a vertical transfer etching process, and a horizontal transfer cleaning process performed for the TFT-LCD glass etching process. The pre-etch cleaning process is performed by attaching a cylindrical rotary roll brush in a series of processes, which allows the entire process to be performed in a vertical conveying etching process for glass, without undergoing a separate cleaning process before etching. By treating in one process, it is possible to reduce the tack time through the efficiency of the process connection, and to a rotary roll brush that can significantly reduce the defective rate due to the breakage of the TFT-LCD panel.

Various flat panel display devices such as liquid crystal display device (LCD), plasma display panel (PDP), electroluminescent display (ELD), and vacuum fluorescent display (VFD) have been studied. Among them, LCD has been actively researched in terms of excellent image quality and low power consumption.

 In particular, a thin film transistor (TFT) liquid crystal display (TFT) used for a flat panel display (FPD) has a liquid crystal interposed between a TFT corresponding to a lower plate and a color filter (CF) corresponding to an upper plate. Manufactured in the form. Various methods can be applied to reduce the size or weight of the LCD, but there are limitations in the structure or current technology to reduce the weight or size of the essential components of the LCD. On the other hand, the glass substrate, the most basic component of LCD, has room to reduce its weight as technology advances. In particular, since the glass substrate has the largest weight among the structures constituting the LCD, research to reduce the weight is continued.

In order to reduce the weight of the TFT-LCD, it is necessary to process the glass flat. That is, it is necessary to etch the cell glass to which the TFT and CF are bonded. The etching method of the glass and the apparatus which are performed so far have various problems.

Specifically, referring to FIG. 1, in general, in order to etch a TFT-LCD glass, a horizontal cleaning process of glass is performed (R1 and R2). This is to remove foreign substances and contaminants before etching in order to arrange the glass horizontally and perform cleaning. In addition, when the cleaning is finished, it is transferred to a separate etching equipment, and then the etching process is performed in a state in which the glass is upright (R3). In this case, for the cleaning process after the etching, the glass conveyance R4 is performed by the horizontal conveyance method.

Due to the difference in the conveying method of the TFT-LCD panel, it is common that the process of connecting the processes cannot be connected smoothly, and thus, the process is performed in a separate process. If you handle it several times, defects such as staining or damage will occur.

In addition, there is a technical problem in the case of using the cleaning using the blush in the horizontal conveying type Sejong process, in particular, due to technical difficulties in the application of the blush to the vertical conveying method, the cleaning in one etching process Difficult to introduce the process, there was a problem that the connection workability between the etching process and the cleaning process is inferior.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a rotary roll brush installed vertically with a pre-etch cleaning process in a pre-etch cleaning, etching, and post-etch cleaning process to form an etching process of a TFT-LCD. By installing it to be able to perform the cleaning work in the vertically upright state in the etching process, by processing as a single process without a separate cleaning process before the etching work, reducing the tack time through the efficiency of the process connection, It is to significantly reduce the defective rate due to breakage of the TFT-LCD panel.

In order to solve the above problems, the present invention in the etching glass in a vertical etching state in a single etching equipment in order to clean the etching before and after the etching process, the etching process after etching in the TFT-LCD glass etching, cleaning before etching It provides a rotary roll brush for cleaning the TFT-LCD mounted in the vertical transfer TFT-LCD glass pretreatment chamber. In particular, the TFT-LCD cleaning roll brush has a cylindrical structure, and is vertically separated so that the cross section is divided into semi-circular shapes for easy assembly and processing, and the material of the rotating roll brush uses a thermosetting resin, in particular, a brush By installing a drive motor on the top of the drive shaft to be able to change the rotational speed of the cylindrical rotary roll brush, and to adjust the play of the double-sided symmetrical brush freely to increase the efficiency of the invention.

According to the present invention, the cylindrical pre-etch cleaning process is equipped with a cylindrical rotary roll brush in a series of processes leading to a horizontal transfer cleaning operation, a vertical transfer etching process, and a horizontal transfer cleaning process performed for the TFT-LCD glass etching process. By doing so, the entire process can be carried out in the etching process of the vertical conveying method to the glass, and by treating it as one process without undergoing a separate cleaning process before etching, the tack time through the efficiency of the process connection There is an effect that can significantly reduce the failure rate due to breakage of the TFT-LCD panel.

The present invention is a vertical conveying TFT-LCD which performs cleaning before etching in TFT-LCD glass etching in a pre-etch cleaning, etching process, and post-etch cleaning process in a state in which the etching glass is placed vertically in one etching equipment. Provides a TFT-LCD cleaning rotary roll brush mounted in the glass pretreatment chamber so that cleaning can be performed immediately while the glass is upright through a rotary roll brush installed vertically in the cleaning process before the glass etching process for TFT-LCD. In this way, cleaning and etching may be simultaneously performed in one etching process, thereby saving work time due to shortening of process connectivity and realizing an effect of preventing glass breakage.

In addition, the present invention provides a rotary roll brush for cleaning the TFT-LCD, characterized in that the rotary roll brush is cylindrical, so as to prevent the breakage of the glass by reducing the friction with the glass to a minimum by a smooth rotation movement.

In addition, the present invention preferably provides a rotary roll brush for cleaning TFT-LCD, wherein the rotary roll brush is formed of a thermosetting resin.

In addition, the present invention preferably provides a rotary roll brush for cleaning TFT-LCD, wherein the rotary roll brush is formed of polypropylene.

In addition, the present invention provides a rotary roll brush for cleaning the TFT-LCD, characterized in that the brush roll having a brush brush of 0.1 ~ 1.0mm on the outer surface of the roll brush, while minimizing the damage of the glass while removing the contamination To promote this.

In addition, the present invention, the rotary roll brush is mounted in the vertical conveying TFT-LCD glass pretreatment chamber, the drive shaft is vertically formed and mounted, and is driven by a drive moto TFT-LCD characterized in that the rotational speed can be varied A rotating roll brush for cleaning can be provided to ensure a variety of cleaning operations.

In another aspect, the present invention provides a rotary roll brush for cleaning TFT-LCD cleaning, characterized in that the rotating roll brush is spaced apart from each other in a structure facing each other is provided at least two, the spaced interval is adjustable. Allow you to control your strength and weakness.

In addition, the present invention is to provide a rotary roll brush for cleaning TFT-LCD, characterized in that the rotating roll brush is manufactured by separating the cylindrical cross-section is a semi-circle, so as to be assembled, so that the separation and assembly is easy. To improve the convenience of use.

In addition, the present invention in the TFT-LCD glass etching process, in the etching glass in a single etching equipment in a vertical state to perform the cleaning before etching, the etching process, and the post-etch cleaning process, but the cleaning before etching The process provides an etching method of a TFT-LCD, which is performed by the above-described rotating roll brush for cleaning a TFT-LCD.

Hereinafter, with reference to the accompanying drawings, the configuration and operation of the present invention will be described in detail.

Referring to FIG. 2, FIG. 2 is a schematic diagram of equipment for treating a cleaning process and an etching process according to the present invention into one.

As a sequence of the process according to the present invention, first, the TFT-LCD glass for etching is loaded into the etching equipment (S1). After loading, a stable mounting is performed through a buffer process (S2), and a cleaning step before etching is performed (S3). In this pre-etching cleaning step, the cleaning is performed in a standing state of the vertically-mounted TFT-LCD glass, and an etching process such as chemical etching is performed after the cleaning step (S4). Even when etching is performed, the TFT-LCD glass is transferred in each step in a vertical alignment. In addition, after the etching process is performed after the etching after the cleaning step (S5), and after the cleaning step after the etching to perform a neutralization step (S6) that can sufficiently remove the chemicals of the etching process. Subsequently, ultra pure cleaning (S7) is performed, and then the etching process is completed through drying, a buffer process, and an unloading process (S8 to S10). In the pre-etch cleaning step (S3), the TFT-LCD cleaning rotary roll brush is mounted vertically in the chamber in which the cleaning is performed.

Referring to FIG. 3, the rotary roll blush 10 is disposed in the vertical direction about the drive shaft 40 in the chamber 100 to perform cleaning. In this case, the rotating roll blush is preferably manufactured in a cylindrical shape, and in particular, the cylindrical structure is preferably manufactured in a structure capable of being divided and assembled so that the cross section is semicircular by vertically dividing. It is to facilitate the assembly and separation of the rotary roll blush 10. In addition, the rotary roll blush 10 is preferably formed of a thermosetting resin, more preferably made of a polypropylene material. This is to provide durability to withstand chemicals such as strong acid.

In the rotary roll blush, it is preferable to form a brush bristle of 0.1 to 1.0 mm to form a structure that minimizes scratches of the glass and at the same time to promote cleaning efficiency.

In addition, by installing a drive motor at one end of the rotary roll blush, by varying the rotational speed of the cylindrical rotary roll blush, it is preferable to adjust the strength of the cleaning. In addition, by installing a double-sided symmetrical blush around the panel, the TFT-LCD glass can be cleaned from both sides, and through the adjustment of the double-sided symmetrical blush, it can be used universally according to the size of the TFT-LCD glass. This is preferred.

In particular, the driving method is preferred to use the magnetic 30 method to withstand the chemicals of the strong acid to be able to fundamentally block the leakage of the solution.

Using the above-described cylindrical rotary roll blush, in the above-described TFT-LCD glass etching process, the cleaning process before the etching, the etching process and the post-etch cleaning process are performed in a state in which the etching glass is placed vertically in one etching equipment. While performing as, the cleaning process before etching can be performed in one process in a state in which the glass is upright, there is an advantage that can implement the process simplification and efficiency.

In the detailed description of the invention as described above, specific embodiments have been described. However, many modifications are possible without departing from the scope of the invention. The technical spirit of the present invention should not be limited to the described embodiments of the present invention, but should be determined not only by the claims, but also by those equivalent to the claims.

1 is a flowchart of a glass conveying method in the conventional TFT-LCD glass etching.

2 is a view illustrating a TFT-LCD glass etching process according to the present invention.

3 is a view showing a structure equipped with a rotary roll blush used in the cleaning process in the TFT-LCD glass etching process according to the present invention.

Claims (9)

In order to sequentially etch the TFT-LCD glass in order to clean and etch before etching, and after etching in a state where the etching glass is placed vertically in one etching equipment, A cylindrical rotary roll brush for TFT-LCD cleaning, mounted in a vertical transfer TFT-LCD glass pretreatment chamber for cleaning before etching, The rotary roll brush is formed of a thermosetting resin, On the outer surface of the roll brush is equipped with a brush bristle 0.1 ~ 1.0mm, It is mounted in the vertical conveying TFT-LCD glass pretreatment chamber, the drive shaft is vertically formed and mounted, it is driven by the drive motor to change the rotational speed, At least two spaced apart from each other in a structure facing each other, the spaced interval is formed to be adjustable, A rotary roll brush for cleaning a TFT-LCD, characterized in that the cylindrical cross section is formed into a semicircle and formed into an assemblable structure. The method according to claim 1, The rotary roll brush is a TFT-LCD cleaning roll roll, characterized in that formed of polypropylene material. In the TFT-LCD glass etching process, pre-etching, etching, and post-etching cleaning processes are sequentially performed in a state in which the etching glass is placed vertically in one etching equipment. A method of etching a TFT-LCD, which is performed by the rotary roll brush for cleaning a TFT-LCD of claim 2. delete delete delete delete delete delete

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