KR100862705B1 - Brush assembly and apparatus for treating substrate with the brush assembly, and method for installing the brush assembly - Google Patents

Abstract

A brush assembly, a substrate processing apparatus having the same, and a method for installing the same are provided to support stable a brush by adjusting accurately tensile strength of a fixing shaft. A brush body(120) comes in contact with a substrate in a process to remove foreign materials from a surface of the substrate. A fixing shaft(110) is inserted into the brush body. A bearing is formed between the brush body and the fixing shaft. A driving member(150) is formed to drive the brush body to rotate the brush body along an outer circumference of the fixing shaft. The brush body includes a rotary shaft(122) for surrounding the fixing shaft and a brush(124) installed around the rotary shaft. The brush comes in contact with the substrate in the process.

Description

A brush assembly, a substrate processing apparatus having the same, and a method of installing the brush assembly TECHNICAL FIELD [0001]

The present invention relates to a brush assembly and a substrate processing apparatus having the same, and a method of installing the brush assembly, and more particularly, a brush assembly for removing foreign substances on a surface of a substrate, and an apparatus for treating a substrate using the same. A method of installing a brush assembly.

In a general semiconductor manufacturing process and a flat panel display manufacturing process, a process of cleaning a substrate such as a wafer and glass is performed. In the process of cleaning the substrate, the process of cleaning the substrate using a brush removes foreign substances from the surface of the substrate by contacting the brush rotated to the substrate surface.

A typical apparatus for cleaning glass substrates for manufacturing flat panel displays includes a transfer shaft, a nozzle, and a brush assembly. The plurality of transfer shafts are arranged in parallel to transfer the substrate while rotating at a constant speed during the process. The nozzle sprays the cleaning liquid onto the substrate moved by the transfer shafts. The brush assembly then has a brush that is rotated in contact with the substrate surface. As brushes, disc brushes and roll brushes are usually used.

However, by increasing the length of the roll brush in order to cope with the recent increase in size of the substrate, the phenomenon of the center of the roll brush is struck due to the load of the substrate or brush assembly during the process. When such a phenomenon that the center of the roll brush is struck occurs, the substrate cleaning power of the roll brush is lowered and the substrate processing process efficiency is lowered. To solve this, it is possible to increase the durability of the roll brush by increasing the thickness of the shaft provided in the roll brush, but in this way the weight of the brush assembly is increased so that the installation and maintenance of the brush assembly is not easy for the operator. There is a problem that the price of the brush assembly increases.

An object of the present invention is to provide a brush assembly, a substrate processing apparatus having the same, and a method of installing the brush assembly, which improves the processing efficiency of cleaning the substrate.

An object of the present invention is to provide a brush assembly for preventing sagging of the brush body, a substrate processing apparatus having the same, and a method of installing the brush assembly.

It is an object of the present invention to provide a brush assembly capable of easily tensioning a shaft supporting a brush body, and a substrate processing apparatus and method having the same.

It is an object of the present invention to provide a brush assembly capable of adjusting the tensile strength of a shaft supporting a brush body, a substrate processing apparatus having the same, and a method of installing the brush assembly.

Brush assembly according to the present invention for achieving the above object is provided between the brush body, the fixed shaft is inserted into the brush body, the brush shaft is inserted into the brush body in contact with the substrate during the process to remove the foreign matter on the substrate surface A bearing and a driving member for driving the brush body such that the brush body is rotated along an outer circumferential surface of the fixed shaft.

According to an embodiment of the present invention, the brush body includes a rotary shaft provided to surround the fixed shaft and a circumference of the rotary shaft, the brush being in contact with the substrate during the process.

According to an embodiment of the present invention, the brush assembly is rotated along a screw thread formed at one end of the fixed frame and the fixed shaft for supporting both ends of the fixed shaft in a direction away from one end of the fixed shaft It includes a tensioning nut to tension.

According to an embodiment of the present invention, the brush assembly further includes a tension nut that is rotated along the thread formed on the other end of the fixed shaft to tension the other end of the fixed shaft away from the fixed shaft.

According to an embodiment of the present invention, the drive member includes a gear coupled to the drive motor and the rotary shaft to receive a rotational force from the drive motor.

A substrate processing apparatus according to the present invention for achieving the above object is a housing that provides a space for processing a substrate therein, a plurality of transfer shafts for transferring the substrate in the housing, the substrate transferred by the transfer shafts And a brush assembly for contacting the substrate conveyed by the transfer shafts in the process, and a brush assembly for removing foreign matter remaining on the surface of the substrate, wherein the brush assembly is in contact with the substrate during the process. Brush body for removing foreign matter on the substrate surface, a fixed shaft inserted into the brush body, a bearing provided between the brush body and the fixed shaft, and the brush body so that the brush body is rotated along the outer circumferential surface of the fixed shaft It includes a drive member for driving.

According to an embodiment of the present invention, the brush body includes a rotary shaft provided to surround the fixed shaft and a circumference of the rotary shaft, the brush being in contact with the substrate during the process.

According to an embodiment of the present invention, the brush assembly is rotated along a screw thread formed at one end of the fixed frame and the fixed shaft for supporting both ends of the fixed shaft in a direction away from one end of the fixed shaft It includes a tensioning nut to tension.

According to an embodiment of the present invention, the brush assembly further includes a tension nut that is rotated along the thread formed on the other end of the fixed shaft to tension the other end of the fixed shaft away from the fixed shaft.

A brush assembly installation method according to the present invention for achieving the above object is a brush body for removing foreign matter on the surface of the substrate in contact with the substrate during the process, a fixed shaft inserted into the brush body, between the brush body and the fixed shaft And a tensioning nut which is rotated along a screw thread formed at one end of the fixed shaft to tension one end of the fixed shaft in a direction away from the fixed shaft. Install the brush assembly, but after fixing the other end of the fixed shaft to the fixed frame by the rotation of the tension nut, one end of the fixed shaft is installed in the direction away from the fixed frame to install the brush assembly. .

The brush assembly according to the present invention, a substrate processing apparatus having the same, and an installation method of the brush assembly prevent the brush assembly from being struck during the process to improve the substrate processing process efficiency.

Brush assembly according to the invention, the substrate processing apparatus having the same, and the installation method of the brush assembly can be easily tensioned by the operator to the fixed shaft for supporting the brush.

Brush assembly according to the invention, the substrate processing apparatus having the same, and the installation method of the brush assembly can be adjusted by the operator precisely the tension of the fixed shaft for supporting the brush.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments presented herein are provided so that the disclosure will be thorough and complete, and will fully convey the spirit of the invention to those skilled in the art.

In addition, in the present embodiment, a wet cleaning apparatus for cleaning a glass substrate for flat panel display manufacturing has been described as an example, but the present invention can be applied to any substrate processing apparatus for treating a substrate using a processing liquid.

In addition, in the present embodiment, a wet cleaning apparatus for cleaning a substrate using a roll brush has been described as an example, but the present invention may be applied to a facility for treating a substrate using a disk brush and other types of brushes.

(Example)

1 is a view showing a substrate processing apparatus according to the present invention, Figure 2 is a view showing the configuration of the brush assembly shown in FIG. 3 is a perspective view showing a part of the brush assembly shown in FIG. 1.

Referring to FIG. 1, an apparatus for treating substrate 1 according to the present invention includes at least one process room 10. If a plurality of process chambers 10 are provided, the process chambers 10 are disposed adjacent to each other to perform a series of treatment processes. The process chamber 10 performs a process of removing foreign matter remaining on the surface of the glass substrate (hereinafter, referred to as a substrate) s for manufacturing a flat panel display.

The process chamber 10 includes a housing 12, a substrate transfer member 14, an injection member 16, and a brush assembly 100.

The housing 12 provides a space in which the process of cleaning the substrate s is performed. One side of the housing 12 is provided with a substrate inlet 12a through which the substrate s is carried in, and the other side of the housing 12 is provided with a substrate outlet 12b through which the substrate s is carried out. In addition, the lower portion of the housing 12 is provided with a drain line 12c for draining the processing liquid used in the process. The housing 12 is preferably sealed so that the processing liquid used during the process and the fume generated from the processing liquid do not leak out of the housing 12.

The substrate transfer member 14 transfers the substrate s in the housing 12 during the process. The substrate transfer member 14 includes a transfer shaft 14a and a roller 14b. The plurality of feed shafts 14a are provided in parallel. Each transfer shaft 14a is provided in a direction perpendicular to the transfer direction of the substrate s. The rollers 14b are arranged at equal intervals on the outer circumferential surface of each transfer shaft 14a to support the bottom surface of the substrate s during the process.

The injection member 16 supplies the processing liquid toward the substrate s moved by the substrate transfer member 14 during the process. As the injection member 16, a plurality of nozzles are used. Alternatively, a chemical knife may be used as the injection member 16.

The brush assembly 100 rotates at a high speed in contact with the surface of the substrate s during the process to remove foreign substances on the surface of the substrate s. The brush assembly 100 includes an upper brush assembly for cleaning the upper surface of the substrate s during processing and a lower brush assembly for cleaning the lower surface of the substrate s. Each upper and lower brush assembly consists of substantially the same configurations. In this embodiment, the configuration for any one brush assembly will be described in detail.

2 and 3, the brush assembly 100 includes a fixing shaft 110, a brush body 120, a fixing frame 130, and a support member. 140), a driving member (150), and a shaft tension member (shaft tension member) (160).

The fixed shaft 110 is provided to support the brush body 120. Both ends of the fixed shaft 110 is supported by the fixed frame 130. A thread 112 is formed at one end of the fixed shaft 110.

The brush body 120 removes foreign substances remaining on the surface of the substrate s. The brush body 120 includes a rotating shaft 122 and a roll brush 124. The rotary shaft 122 is installed to surround the circumference of the fixed shaft 110 and is rotatably installed along the outer circumferential surface of the fixed shaft 110. To this end, bearings B1 are installed between the fixed shaft 110 and the rotary shaft 122. The brush 124 is installed to surround the circumference of the rotary shaft body 122. The brush 124 contacts the surface of the substrate s during the process to remove foreign substances remaining on the surface of the substrate s.

The fixed frame 130 supports the fixed shaft 110. The fixed frame 130 has a first frame 132 and a second frame 134. The first frame 132 supports one end of the fixed shaft 110 and the second frame 134 supports the other end of the fixed shaft 110.

The support member 140 supports the brush body 120. The support member 140 has a first support block 142 and a second support block 144. The first support block 142 supports one end of the rotary shaft 122, and the second support block 144 supports the other end of the rotary shaft 122. In this case, the first and second support blocks 142 and 144 support the rotary shaft 122 such that the rotary shaft 122 is rotatable along the circumference of the fixed shaft 110. To this end, bearings B2 are installed between the first and second support blocks 142 and 144 and the rotary shaft 122.

The driving member 150 rotates the brush body 120 during the process. The driving member 150 has a driving motor 152, a first gear 154, and a second gear 156. The drive motor 152 rotates the first gear 154. The first gear 154 and the second gear 156 mesh with each other to rotate. The second gear 156 is installed at one end of the rotary shaft 122. When the first gear 154 is rotated by the drive motor 152 during the process, the rotary shaft 122 is rotated by the rotation of the second gear 156. In the present exemplary embodiment, the driving member 150 rotates the brush body 120 using a plurality of gears as an example. However, the driving member 150 uses a belt and a pulley to brush. The body 120 may be rotated.

The shaft tension member 160 is fixed to the fixed frame 130 by tensioning the fixed shaft 110. The shaft tension member 160 includes a fixing nut 162 and a tension nut 164. The fixing nut 162 is fixedly installed at the other end of the fixing shaft 110. The tension nut 164 is installed at one end of the fixed shaft 110. At this time, the tension nut 164 is installed to be rotatable along the thread 112 is formed on one end of the fixed shaft (110).

Here, the shaft tension member 160 tensions the fixed shaft 110 to prevent the center of the fixed shaft 110 from falling. That is, the operator tensions the fixed shaft 110 by adjusting the shaft tension member 160 when the brush assembly 100 is installed. For example, referring to FIG. 4A, the operator rotates the tension nut 164 of the shaft tension member 160 in the first direction R1 to move the tension nut 164 in the first direction (X1 of FIG. 3). To be tightened to the first frame 132. When the tension nut 164 is tightened to the first frame 132, one end of the fixed shaft 110 is pressed to tension in the second direction (X2 in FIG. 3). At this time, the other end of the fixed shaft 110 is fixed to the second frame 134 by the fixing nut 162, as shown in Figure 4b, the fixed shaft 110 is tensioned tension. Therefore, the worker may tension the fixed shaft 110 by rotating the tension nut 164.

In addition, the operator can adjust the tensile strength of the fixed shaft 110 by adjusting the shaft tension member 160. That is, the operator can adjust the tensile strength of the fixed shaft 110 by visually confirming the tensile degree of the fixed shaft 110 while rotating the tension nut 164 directly. Alternatively, the operator sets a torque wrench to tighten the tension nut 164 only to a predetermined tensile pressure by using a tool such as a torque wrench, and then adjusts the tension nut 164 to fix the shaft 110. Excessive tension or less tension can be prevented.

In the above-described embodiment of the present invention, the shaft tension member 160 has a fixing nut 162 fixedly installed at the other end of the fixed shaft 110 and a tension nut 164 screwed to one end of the fixed shaft 110. Providing, for example, when the operator tensions the fixed shaft 110 by adjusting the tension nut 164, the method of tensioning the fixed shaft 110 can be applied in various ways. For example, as shown in FIG. 5, the shaft tension member 160 according to another embodiment of the present invention provides tension nuts 164 at both ends of the fixed shaft 110, so that an operator fixes the shaft 110. The fixing shaft 110 may be tensioned by adjusting the tension nut 164 screwed to the thread 112 provided at both ends of the. For example, the tension nut 164 provided at one end of the fixed shaft 110 is rotated in the first direction R1 so that one end of the fixed shaft 110 is tensioned in the first direction X1 and the fixed shaft 110 is fixed. The other end of the fixed shaft 110 is tensioned in the second direction X2 by rotating the tension nut 164 provided at the other end of the second direction R2. Shaft tension member 160 according to another embodiment of the present invention can provide a tension nut 164 at both ends of the fixed shaft 110, it is possible to more effectively perform the tension of the fixed shaft 110.

As described above, the brush assembly according to the present invention, the substrate processing apparatus having the same, and the installation method of the brush assembly include a shaft tension means for tensioning the fixed shaft provided in the brush assembly, so that the brush body is sagging during the process. This prevents the phenomenon and improves the efficiency of the substrate processing process.

In addition, the brush assembly according to the present invention, the substrate processing apparatus having the same, and the installation method of the brush assembly, the operator can easily adjust the tension of the fixing shaft provided in the brush assembly, it is easy to install the brush assembly.

The foregoing detailed description illustrates the present invention. In addition, the foregoing description shows and describes preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications may be made within the scope of the concept of the invention disclosed in this specification, the scope equivalent to the disclosed contents, and / or the skill or knowledge in the art. The above-described embodiments illustrate the best state for implementing the technical idea of the present invention, the use of other inventions such as the present invention in other state known in the art, and the specific fields of application and uses of the invention. Various changes required are also possible. Accordingly, the detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Also, the appended claims should be construed to include other embodiments.

1 is a view showing a substrate processing apparatus according to the present invention.

FIG. 2 is a diagram illustrating the components of the brush assembly shown in FIG. 1.

3 is a perspective view showing a portion of the brush assembly shown in FIG. 1.

4A and 4B are views for explaining an installation process of the brush assembly according to the present invention.

5 is a view showing a brush assembly according to another embodiment of the present invention.

Claims (10)

delete Brush body to contact with the substrate during the process to remove the foreign matter on the surface of the substrate, A fixed shaft inserted into the brush body, A bearing provided between the brush body and the fixed shaft, and It includes a drive member for driving the brush body so that the brush body is rotated along the outer peripheral surface of the fixed shaft, The brush body, A rotary shaft provided to surround a circumference of the fixed shaft; And a brush installed around the rotating shaft and contacting the substrate during the process. The method of claim 2, The brush assembly, A fixed frame for supporting both ends of the fixed shaft, And a tension nut which is rotated along a thread formed at one end of the fixed shaft to tension one end of the fixed shaft in a direction away from the fixed shaft. The method of claim 3, wherein The brush assembly, And a tension nut which is rotated along a thread formed at the other end of the fixed shaft to tension the other end of the fixed shaft in a direction away from the fixed shaft. The method of claim 2, The drive member, Drive motor, And a gear coupled to the rotation shaft to receive a rotational force from the drive motor. delete In the apparatus for processing a substrate, A housing providing a space for processing the substrate therein; A plurality of transfer shafts for transferring the substrate in the housing; A nozzle for supplying a processing fluid to a substrate conveyed by the transfer shafts, and Including a brush assembly in contact with the substrate transported by the transfer shaft in the process, to remove the foreign matter remaining on the substrate surface, The brush assembly, Brush body to contact with the substrate during the process to remove the foreign matter on the surface of the substrate, A fixed shaft inserted into the brush body, A bearing provided between the brush body and the fixed shaft, and It includes a drive member for driving the brush body so that the brush body is rotated along the outer peripheral surface of the fixed shaft, The brush body, A rotary shaft provided to surround a circumference of the fixed shaft; And a brush disposed around the rotary shaft and brought into contact with the substrate during the process. The method of claim 7, wherein The brush assembly, A fixed frame for supporting both ends of the fixed shaft, And a tension nut which is rotated along a thread formed at one end of the fixed shaft to tension one end of the fixed shaft in a direction away from the fixed shaft. The method of claim 8, The brush assembly, And a tension nut which is rotated along a thread formed at the other end of the fixed shaft to tension the other end of the fixed shaft in a direction away from the fixed shaft. Brush body for removing foreign matter on the surface of the substrate in contact with the substrate during the process, a fixed shaft inserted into the brush body, a bearing provided between the brush body and the fixed shaft, a fixed frame for supporting both ends of the fixed shaft, And installing a brush assembly having a tension nut which is rotated along a thread formed at one end of the fixed shaft to tension one end of the fixed shaft away from the fixed shaft. After the other end of the fixed shaft is fixed to the fixed frame by the rotation of the tension nut, one end of the fixed shaft is to be tensioned in a direction away from the fixed frame to install the brush assembly of the brush assembly How to install.

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