KR100855324B1 - Vacuum absorber and pannel attachment device using the same - Google Patents

Abstract

A vacuum sucker and a curved panel sucking device using the same are provided to suck and transfer various types of panels through one production line and exactly and rapidly transfer the panels. A vacuum sucker(100) includes a first body(10), a rod(30), a position fixing unit, a second body(20), and a suction pad(40). The first body is installed at another device or equipment. The rod passes through the first body and is movable along a longitudinal direction of the first body. The position fixing unit fixes a movement position of the rod according to external pressure. The second body is installed at an end of the rod and includes a ball joint to adjust an angle of the suction pad. The suction pad is installed at the second body by the medium of the ball joint and sucks an object through vacuum pressure of a vacuum device.

Description

Vacuum adsorber and curved panel adsorption device using the same {Vacuum Absorber and Pannel Attachment Device Using the Same}

The present invention relates to a vacuum adsorber and a curved panel adsorption device using the same, and more particularly, a vacuum adsorption device capable of automatically changing a height and an angle of an adsorption pad according to the shape of a curved panel and a curved surface provided with a plurality of such vacuum adsorbers. It relates to a panel adsorption device.

BACKGROUND OF THE INVENTION A vacuum adsorber or a vacuum adsorption device equipped with a plurality of such vacuum adsorbers is widely used as a means for transporting a panel having a relatively smooth surface, such as an automobile, a semiconductor, and an LCD panel.

Since non-curved panels (ie, plate-shaped members) such as semiconductor wafers and LCD panels have only a difference in area or small thickness depending on the product, a large amount of adsorption and transport of all the products is possible even with one standard vacuum adsorber. There is no crowd.

On the other hand, if the curved surface of the panel is greatly different according to the product (ie, the car model) such as the automobile production line, the position (or height) and the adsorption angle of the vacuum adsorber or the vacuum adsorption device are set according to the curved surface of the panel. Depending on the type of panel, each production line had to be equipped independently.

In view of this point, in recent years, an invention such as Patent No. 559314 (hereinafter, referred to as a prior art) has been invented. 1 is a block diagram showing a panel adsorption device according to the prior art, Figure 2 is a block diagram showing a panel adsorber according to the prior art.

As shown in FIG. 1, the prior art vacuum adsorption device 200 includes a plurality of vacuum adsorbers 210, and each vacuum adsorber 210 has a link assembly 220 that can be changed in position by pinions and worm gears. ).

Therefore, the vacuum adsorption apparatus 200 according to the related art has an advantage of changing the vertical position of the suction pad 230 in accordance with the shape of the panel through a driving motor for driving a worm gear to suck and transport the panel.

However, the prior art merely changes the horizontal or vertical position of the vacuum adsorber 210, so that the adjustment of the adsorption angle is practically impossible, and thus it is impossible to completely adsorb the complex curved panel. Therefore, the prior art is difficult to apply when the curved shape of the panel is large or the curved shape of the panel is suddenly changed greatly.

In addition, the prior art has to precisely adjust the rotation speed of the drive motor to adjust the height of the adsorption pad 230 according to the shape of the panel to be adsorption, so that the configuration of the vacuum adsorption device 200 becomes complicated and the device cost increases. There is a problem.

In addition, the prior art does not disclose the technical idea to automatically change the vertical position of the vacuum adsorber 210 according to the curved shape of the panel, so that in order to produce various kinds of products in one production line It is difficult to apply when transferring the curved panel, and even if it is applicable, it is difficult to change the position quickly, which reduces the work efficiency.

The present invention has been made in view of the above, a vacuum adsorption unit capable of effectively adsorbing any curved panel, and a vacuum which can be equipped with a large number of such vacuum adsorbers and automatically change the adsorption position and adsorption angle according to the curved surface of the panel. It is an object to provide an adsorption device.

According to an embodiment of the present invention for achieving the above object, a vacuum adsorber connected to the vacuum device to suck the object, the first body is installed in another device or facility; A rod penetrating through the first body and movable along a length direction of the first body; Position fixing means installed on the first body to fix a moving position of the rod depending on the presence or absence of external pressure; A second body installed at an end of the rod and having an angle fixing means for fixing an angular position of the suction pad; And an adsorption pad installed on the second body and capable of adjusting the angle in the vertical direction and connected to the vacuum device to adsorb the object.

Preferably, the first body is a first cylinder having a first air inlet and out port is formed, the position fixing means is a pair of plate members which are respectively installed in the first cylinder and the hole in which the rod is communicated; An elastic member disposed between the pair of plate members to tilt at least one of the plate members at an angle with respect to the cross section of the rod; And a first piston installed in the first cylinder and applying a force such that the pair of plate members inclined by the air pressure flowing into the first air inlet and out port is parallel to the cross section of the rod.

In addition, the second body is a second cylinder coupled to the end of the rod and the second air inlet port is formed, the second cylinder is installed inside the second cylinder and supplied to the air pressure supplied through the second air inlet port A second piston moved by; An elastic member installed inside the second cylinder and exerting a force in a direction opposite to a moving direction of the second piston by air pressure; And a holder installed at the second piston to fix the angular position of the suction pad according to the moving direction of the second piston, wherein the suction pad is installed at the second cylinder via a ball joint.

In addition, it is preferable that a resin member is attached to the inner surface of the hole of the plate member while increasing the frictional force with the rod surface and not damaging the rod surface.

In addition, the holder preferably has a receiving portion that can hold a portion of the ball of the ball joint.

In addition, a spring for pushing the second cylinder and the suction pad downward may be provided between the first cylinder and the second cylinder and between the second cylinder and the suction pad, respectively.

In addition, the rod, the second cylinder, the second piston, the holder, the ball, and the suction pad is preferably formed with an air suction passage through which the suction force of the vacuum apparatus can be transmitted.

According to another embodiment of the present invention for achieving the above object, a vacuum adsorber connected to the vacuum device to adsorb the object, the first body is installed in another device or facility; A rod penetrating through the first body and movable along a length direction of the first body; Position fixing means installed on the first body to fix a moving position of the rod depending on the presence or absence of external pressure; A suction pad freely installed at an end portion of the rod in a vertical direction and connected to the vacuum device to suck the object; And a vacuum adsorber installed at the end of the rod, the vacuum absorber including an angle fixing means for fixing an angular position of the suction pad depending on the presence or absence of external pressure.

Preferably, the sensing means for detecting whether the curved panel is adsorbed on the suction pad; An air pump supplying air into the first and second cylinders through the first and second air inlet ports or exhausting the air inside the first and second cylinders to the outside; And control means for controlling the air pump according to the detection signal of the detection means.

In addition, the sensing means is preferably a pressure sensor for measuring the internal pressure of the suction pad.
In addition, a coil spring is provided between the second body and the suction pad to apply a uniform elastic force around the suction pad such that the suction direction of the suction pad coincides with the longitudinal direction of the rod. It is good to have a corrugated pipe installed on the outer circumference.
In addition, both ends of the coil spring may have a winding portion wound at least three times in contact with each other without being separated from each other in the compression direction of the coil spring.

The present invention can adsorb any panel having a curved surface, and the vacuum suction position and the suction angle can be automatically adjusted according to the curved shape of the panel.

Therefore, according to the present invention, it is possible to adsorb and transport various types of panels through a single production line, and there is an advantage in that the transfer operation of the panels can be performed quickly and accurately.

Although the present invention has been illustrated and described with respect to specific preferred embodiments, the present invention is not limited to the above-described embodiments, and those of ordinary skill in the art to which the present invention pertains should have the following claims. Various changes may be made without departing from the spirit of the technical idea of the present invention described.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 is an overall plan view of a vacuum adsorber according to one embodiment of the present invention.

As shown in FIG. 3, the vacuum adsorber 100 of the present invention includes a first cylinder 10 as a first body, a second cylinder 20 as a second body, a rod 30, and an adsorption pad 40. Include.

The first cylinder 10 is fixed to the installation line as a part of the main body of the vacuum adsorber 100, and has a rod 30 penetrating therein in a vertical direction. The rod 30 can move freely in the vertical direction of the interior of the first cylinder 10, and has a first passage for air suction therein. In other words, the rod 30 is in the form of a hollow shaft. The upper end of the rod 30 is connected to a pipe of a vacuum device (for example, a vacuum pump) that sucks air through the first passage of the rod 30.

The second cylinder 20 is installed at the lower end of the rod 30 and moves up and down in accordance with the movement of the rod 30. Inside the second cylinder 20 is formed a second passage connected to the first passage for air suction of the rod (30).

The suction pad 40 is rotatably installed in the second cylinder 20 in the three-dimensional direction via the ball joint 50 (see FIG. 5). Adsorption pad 40 has an air inlet connected to passages of rod 30 and second cylinder 20. Accordingly, when the vacuum device connected to the rod 30 is operated, the object may be sucked through the suction pad 40. Adsorption pad 40 is preferably made of a rubber material so that it can be easily adsorbed on the surface of the object to be adsorbed.

Meanwhile, a first spring 60 is installed between the first cylinder 10 and the second cylinder 20, and a second spring 62 between the second cylinder 20 and the suction pad 40. 5) is installed. The first spring 60 serves to push the second cylinder 20 downward so that the distance between the first cylinder 10 and the second cylinder 20 can be kept constant, and the second spring 62. This suppresses the adsorption direction of the adsorption pad 40 with respect to the 2nd cylinder 20 to arbitrary directions, and serves as a preservation which directs the adsorption direction of the adsorption pad 40 to a substantially vertical downward direction.

Next, the inside of the first cylinder 10 that is the first body will be described in detail. FIG. 4 is a cross-sectional view of the first body shown in FIG. 3 in the longitudinal direction, and FIG. 5 is a cross-sectional view illustrating a case in which air pressure is provided inside the first body.

As shown in FIG. 4, the first cylinder 10 has a generally cylindrical structure having an accommodation space therein, and includes a first air inlet port 12, a first piston 14, an elastic member 16, And a pair of plate members 18. For reference, one surface of the first cylinder 10 is open to facilitate installation of the pair of plate members 18.

The first air inlet and outlet ports 12 are formed on one side of the first cylinder 10 (usually located below the first cylinder 10) and connected to an external air supply device (for example, an air pump). To allow the air supply and the air discharge into the first cylinder (10).

The first piston 14 is installed inside the first cylinder 10. The first piston 14 is fitted to the rod 30 penetrating the first cylinder 10 to move up and down along the longitudinal direction of the rod 30.

The pair of plate members 18 are installed obliquely with respect to the transverse cross section of the first cylinder 10. The pair of plate members 18 are formed with holes 18a through which the rods 30 can pass while the plate members 18 are parallel to the transverse cross section of the first cylinder 10.

The elastic member 16 is provided between the pair of plate members 18, so that when a separate external pressure does not act on the plate member 18, the pair of plate members 18 are transverse to the first cylinder 10. It is always kept oblique to the cross section. Therefore, if no external pressure acts on the plate member 18, the rod 30 is caught by the hole 18a of the plate member 18 and cannot move up and down.

In the above state, air is introduced through the first air inlet and outlet port 12 so that the air pressure greater than the elastic force of the elastic member 16 in the interior of the first cylinder 10 (the lower space of the first piston 14). When this is accumulated, the first piston 14 pushes up the pair of plate members 18 as shown in FIG.

Then, the pair of plate members 18 are pushed up by the first piston 14 to be in close contact with each other and eventually parallel to the upper surface of the first piston 14 (or the transverse cross section of the rod 30). .

Therefore, if air is supplied to the inside of the first cylinder 10, the rod 30 can communicate freely through the hole 18a of the plate member 18, but on the contrary from the inside of the first cylinder 10 When the air is discharged, the rod 30 is caught by the hole 18a of the plate member 18 and stopped.

The present invention uses this to determine the position of the first cylinder 20 installed at the end of the rod 30 by adjusting the supply and discharge of air through the first air inlet and out ports 12.

Next, the coupling relationship between the inside of the second cylinder 20, which is the second body, the second cylinder 20, and the suction pad 40 will be described in detail. FIG. 6 is a cross-sectional view of the second body illustrated in FIG. 3 in the longitudinal direction, and FIG. 7 is a cross-sectional view illustrating a case where air pressure is provided inside the second body.

As shown in FIG. 6, the second cylinder 20 has a generally cylindrical structure having an accommodation space therein, and includes a second air inlet port 22, a second piston 24, an elastic member 26, And a holder 50.

The second air inlet and outlet ports 22 are formed on the side surfaces of the second cylinder 20, and like the first air inlet and outlet ports 12, the second air inlet and outlet ports 22 are connected to an external air supply device to supply air into the second cylinder 20. Enable supply and air exhaust.

The second piston 24 is installed inside the second cylinder 20, and moves up and down according to the magnitude of the air pressure supplied through the second air inlet and outlet port 22. For reference, the airtight member made of synthetic resin may be installed around the second piston 24 for airtightness with the inner wall of the second cylinder 20.

The elastic member 26 is installed between the upper inner wall of the second cylinder 20 and the upper surface of the second piston 24 to apply a force to push the second piston 24 downward. Therefore, the second piston 24 has an inertia that always moves downward by the elastic member 26 inside the second cylinder 20.

The holder 28 is recessed in the bottom surface and is positioned at the lower end of the second cylinder 20. The holder 28 is connected to the second piston 24 and moves up and down in accordance with the movement of the second piston 24. The holder 28, particularly the recessed portion 28a of the holder 28, is preferably made of a material such as resin so as to facilitate frictional contact with the surface of the ball joint 50.

The suction pad 40 is installed in the second cylinder 20 via the ball joint 50. The ball joint 50 is fixed so that the lower portion thereof is not separated by the gripping portion 20a of the second cylinder 20, and the upper portion thereof is a concave portion 28a of the holder 28, more particularly a concave portion. It is provided to abut against the inner circumferential surface of the 28a (when the upper portion of the ball joint 50 is in substantial contact with the holder 28, the holder 28 is relatively downward by the second piston 24). Is moved). The adsorption pad 40 coupled to the second cylinder 20 via the ball joint 50 installed as described above can be rotated in a three-dimensional direction. As previously described, a second spring 62 is provided between the suction pad 40 and the second cylinder 20 so that the suction pad 40 is generally vertically downward.

On the other hand, the inside of the second cylinder 20, the second piston 24, the holder 28, and the ball joint 50, the vacuum pressure to the suction pad 40 through a vacuum device installed on the top of the rod 30 To this end, holes communicating with the air intake passages of the rod 30 are respectively formed.

In the above state, when air is supplied to the inside of the second cylinder 20 through the second air inlet port 22 and the internal pressure of the second cylinder 20 is greater than the elastic force of the elastic member 26, FIG. 7. As shown in FIG. 2, the second piston 24 moves upward by air pressure.

This causes the holder 28 to rise up with the second piston 24, thereby separating or loosening the contact between the recessed portion 28a of the holder 28 and the surface of the ball joint 50. As a result, since the adsorption pad 40 is freely rotatable to the second cylinder 20 via the ball joint 50, the adsorption angle of the adsorption pad 40 is in contact with the adsorption pad 40. It is arbitrarily changed according to the curved shape of the panel.

Therefore, when the air is supplied to the inside of the second piston 24, the adsorption pad 40 can move freely. On the contrary, when the air is discharged from the inside of the second piston 24, the adsorption pad 40 rotates. Is fixed.

The vacuum adsorber 100 of the present invention configured as described above simply adjusts the internal pressures of the cylinders 10 and 20 through the pneumatic device, so as to fit the curved surface of the target panel to adsorb the height and the adsorption angle of the adsorption pad 40. As it can be matched, detailed control by the control device is unnecessary, as in the prior art using a drive motor.

Next, the use example of the present invention will be described in detail through an adsorption apparatus in which the vacuum adsorber 100 of the present invention is installed. FIG. 8 is a view schematically showing a curved panel adsorption device equipped with a vacuum adsorber shown in FIG. 3, and FIG. 9 is a view showing a state of use of the curved panel adsorption device shown in FIG. 8.

As shown in FIG. 8, the panel adsorption device 110 according to the present invention includes a plurality of vacuum adsorber 100, a plurality of pumps 120 and 122, a panel sensing means 130, and these components. Frame 112.

The vacuum adsorber 100 is disposed at regular intervals along the width and length of the frame 112 so as to adsorb objects larger or smaller than the area of the frame 112. Air inlet and outlet ports 12 and 22 formed in the cylinders 10 and 20 of the vacuum adsorber 100 are connected to the second pump 122 through a rubber hose and the like, and an air intake passage formed in the rod 30. 70 is connected to the first pump 120.

The panel sensing unit 130 is installed in the vacuum adsorber 100 to determine whether the panel 300 is introduced under the panel adsorption device 110. Meanwhile, in the present exemplary embodiment, the panel sensing unit 130 is illustrated as being installed in the vacuum adsorber 100, but may be installed in a conveyor facility for transferring the frame 112 or the panel 300 as necessary.

Meanwhile, although not shown in the drawing, the panel adsorption device 110 is provided with control means electrically connected to the pumps 120 and 122 and the panel sensing means 130. The control means controls the driving of the pumps 120 and 122 according to the panel sensing signal of the panel sensing means 130.

Referring to the operation of the panel adsorption device 110 is as follows.

First, the control means drives the first pump 120 to always apply a vacuum pressure to the adsorption pad 40, and simultaneously drives the second pumps 122 to drive the rod 30 of the vacuum adsorber 100. And rotation of the suction pad 40 is always free.

In this state, when the inflow of the panel 300 is detected by the panel sensing means 130, the panel adsorption device 110 moves downward through a separate transport means (not shown).

Then, the vacuum adsorber 100 moves downward along with the panel adsorption device 110 to come into contact with the surface of the panel 300. In this case, since the rod 30 and the suction pad 40 of the vacuum adsorber 100 are free to move up and down, respectively, the rod 30 moves up and down according to the surface height of the panel 300, and the adsorption is performed. The pad 40 rotates to conform to the curved shape of the panel 300.

When the panel adsorption device 110 is sufficiently moved downward so that the adsorption pad 40 of most of the vacuum adapters 100 comes into close contact with the panel 300, since the outside air is no longer sucked through the adsorption pad 40, 1 Pump 120 will generate a load.

Then, the control means recognizes the overload state of the first pump 120 and detects that the panel 300 is in close contact with the adsorption pad 40 through this. Then, the control means stops the driving of the second pump 122 to fix the current position of the rod 30 and the suction pad 40, and the external device so that the transfer operation of the panel 300 can be performed. For example, send a signal to the transport means.

The conveying means raises the panel adsorption device 110 to the original position according to the signal of the control means, and transfers the panel 300 to the next production line according to the processing order of the panel 300.

When the panel 300 arrives at the destination, the control means releases the vacuum pressure of the suction pad 40 by stopping the drive of the first pump 120 and places the panel 300 at the destination. Then, the panel adsorption device 110 returns to the initial position by the transport means and repeats the adsorption transport operation of the panel 300.

On the other hand, if the second pump 122 is not driven again, the position of the rod 30 and the suction angle (or rotation angle) of the suction pad 40 are maintained in a fixed state to match the shape of the previous panel 300. . Therefore, when the transfer operation of the same panel 300 is performed again, it is not necessary to control the driving of the second pump 122, so that the adsorption transfer operation of the panel 300 can be processed quickly.
Next will be described the configuration of the second body according to another embodiment of the present invention. 10 is a cross-sectional view of a second body of a vacuum adsorber according to another embodiment of the present invention, and FIG. 11 is a front view of the coil spring shown in FIG. 10. For reference, the same components as the above-described embodiments use the same reference numerals, and detailed descriptions of these components are omitted.
The second body 20a includes a ball joint 50 and connects the rod 30 and the suction pad 40 to each other. In the center of the second body 20a and the ball joint 50, a flow path P is formed to communicate in the vertical direction for a long time, as shown in FIG. 10, and the suction force generated by the vacuum device is generated as the flow path P. This works.
Between the second body 20a and the suction pad 40, a second spring 62 and a corrugated pipe 80 in the form of a coil spring are provided. The second spring 62 is installed as close as possible to the outer circumference of the ball joint 50 so that the suction surface of the suction pad 40, that is, the suction direction is always in the longitudinal direction or the flow path P of the rod 30 (see FIG. 3). The excitation force is applied to the upper surface of the suction pad 40 so as to coincide with the longitudinal direction. Both ends 62a of the second spring 62 have a winding portion form tightly wound as shown in FIG. 11 so that a uniform force may be applied to the upper side of the suction pad 40 around the extension line of the flow path P. FIG. Have Preferably, the winding portions of both ends 62a are in contact with each other without falling so as not to be compressed, and preferably wound at least three times. However, the center portion 62b of the second spring 62, except for both ends 62a, has a winding and compressible form like a general coil spring. On the other hand, the lower surface of the second body (20a) and the upper surface of the suction pad 40 is formed with a circular groove (21, 41) that can be fixed to both ends of the second spring (62).
Corrugated pipe 80 is installed on the outside of the second spring (62). Both ends of the corrugated pipe 80 are fixed to the second body 20a and the suction pad 40, respectively. The corrugated pipe 80 blocks the inflow of foreign matter, etc. around the ball joint 50 and the second spring 62, and is insignificant, but similar to the second spring 62, the adsorption direction of the adsorption pad 40 is reduced. Play an excuse to keep this constant.
Unlike the second body 20 described above, the second body 20a according to the present embodiment configured as described above does not have a configuration such as a second piston 24 that fixes the suction pad 40 at an arbitrary angle. . Therefore, the present embodiment is easier to miniaturize the device than the embodiment described above.
In addition, since the adsorption angle of the adsorption pad 40 can be moved without limitation by the elastic force of the second spring 62, the curved panel can be easily adsorbed as in the above-described embodiment.

1 is a block diagram showing a panel adsorption device according to the prior art,

2 is a block diagram showing a panel adsorber according to the prior art,

3 is an overall plan view of a vacuum adsorber according to an embodiment of the present invention,

FIG. 4 is a cross-sectional view of the first body shown in FIG. 3 in the longitudinal direction;

5 is a cross-sectional view illustrating a case where air pressure is provided inside the first body,

FIG. 6 is a cross-sectional view of the second body illustrated in FIG. 3 in the longitudinal direction;

7 is a sectional view showing a case where air pressure is provided inside the second body,

8 is a view schematically showing a curved panel adsorption device equipped with a vacuum adsorber shown in FIG.

9 is a view showing a state of use of the curved panel adsorption device shown in FIG.
10 is a cross-sectional view of a second body of a vacuum adsorber according to another embodiment of the present invention,
FIG. 11 is a front view of the coil spring shown in FIG. 10.

<Description of Symbols for Major Parts of Drawings>

100: vacuum adsorber 10: first body

12: first air inlet port 14: first piston

16: elastic member 18: plate member

18a: hole 20: second body

22: second air inlet port 24: second piston

26: elastic member 28: holder

28a: receiving portion 30: rod

40: adsorption pad 50: ball joint

60: spring 70: air intake passage

110: adsorption device 120: first pump

122: second pump 130: panel sensing means

Claims (12)

delete In the vacuum adsorber connected to the vacuum device to adsorb the object, A first body installed in another device or facility; A rod penetrating through the first body and movable along a length direction of the first body; Position fixing means installed on the first body to fix a moving position of the rod depending on the presence or absence of external pressure; A second body installed at an end of the rod and provided with a ball joint to enable angle adjustment of the suction pad; And a suction pad installed at the second body via the ball joint and adsorbing the object through the vacuum pressure of the vacuum apparatus. The first body is a first cylinder formed with a first air inlet port, The position fixing means includes a pair of plate members which are installed in the first cylinder and each of the holes through which the rod communicates; An elastic member installed between the pair of plate members to incline at least one of the plate members at an angle with respect to a cross section of the rod; And a first piston installed in the first cylinder and applying a force such that the pair of plate members inclined by the air pressure flowing into the first air inlet and out port is parallel to the cross section of the rod. Vacuum adsorber. The method according to claim 2, The second body is a second cylinder coupled to the end of the rod and the second air inlet port is formed, The second cylinder may include a second piston installed inside the second cylinder and moved by air pressure supplied through the second air inlet / out port; An elastic member installed inside the second cylinder and exerting a force in a direction opposite to a moving direction of the second piston by air pressure; And a holder mounted to the second piston to fix an angular position of the suction pad in accordance with a movement direction of the second piston. The method according to claim 3, The inner surface of the hole of the plate member is a vacuum adsorber, characterized in that the member is made of a resin material which does not damage the surface of the rod while increasing friction with the surface of the rod. The method according to claim 3, And the holder has a receptacle capable of gripping a portion of the ball of the ball joint. The method according to any one of claims 3 to 5, And a spring for pushing the second cylinder and the suction pad downward between the first cylinder and the second cylinder and between the second cylinder and the suction pad, respectively. The method according to claim 6, And the air suction passages are formed in the rod, the second cylinder, the second piston, the holder, the ball, and the suction pad, respectively, through which suction force of the vacuum apparatus can be transmitted. Curved panel adsorption apparatus provided with one or more vacuum adsorber of Claim 6. The method according to claim 8, Sensing means for sensing whether a curved panel is adsorbed to the suction pad; An air pump supplying air into the first and second cylinders through the first and second air inlet ports or exhausting the air inside the first and second cylinders to the outside; And Curved panel adsorption device further comprises a control means for controlling the air pump in accordance with the detection signal of the detection means. The method according to claim 9, The sensing means is a curved panel adsorption device, characterized in that the pressure sensor for measuring the internal pressure of the adsorption pad. The method according to claim 2, Between the second body and the suction pad is provided a coil spring that applies a uniform elastic force around the suction pad so that the suction direction of the suction pad coincides with the longitudinal direction of the rod, the outer circumference of the coil spring Vacuum adsorber, characterized in that the corrugated pipe is installed. The method according to claim 11, Both ends of the coil spring has a winding unit wound at least three times wound in contact with each other in the compression direction of the coil spring do not fall apart.

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