JPH09183089A - Search type vacuum suction device and air control valve for vacuum suction - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suck and transport a material to be sucked even if the material is a plate material provided with holes and irregularities or a plate material not magnetized by providing a vacuum sucking air control valve at a vacuum outlet to which a suction pad is installed. SOLUTION: Even if a material to be sucked is difficult to be sucked due to holes made in the material or irregularities on the surface of it, a suction pad 11 makes it possible. Also, because a drive motor 8 and an air cylinder 9 can be controlled independently, the drive motor functions so that it is rotated according to the sucking condition of the suction pad 11, and an air cylinder 9 functions so that it raises suction pad 11. Then a limit switch functions so that a rotating plate 5 rotated by the drive motor 8 is not rotated beyond a specified limit and also the rotating direction of the drive motor is reversed. In addition, a vacuum sucking air control valve 12 closes a suction passage immediately if the suction pad 11 fails to suck so as to minimize air leakage from vacuum devices.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exploration-type vacuum suction device and a vacuum suction air control valve, which can be used for suctioning a workpiece such as a plate-shaped material with holes or a plate-shaped material having irregularities on its surface. .

[0002]

2. Description of the Related Art In the manufacturing process of printed circuit boards used for electronic devices, communication devices, etc., and sheet metal materials such as machined parts, each part is transported to a necessary step. A belt conveyor or a vacuum suction device is used as this transportation method.

To carry using this vacuum suction device, a plurality of suction pads are usually provided for one suction source to suck the plate-shaped material. Then, suction is performed by applying the suction pad to the plate-like material and sealing the suction pad.

However, the plate-shaped material may have holes or irregularities. Even if the suction pad is applied to such a place, the opening of the suction pad is not completely closed. Therefore,
Even if suction is performed, that portion does not become a vacuum, so that the suction pressure at the suction source becomes low even if suction can be performed by another suction pad. That is, the suction pressure is low as a whole, and the plate-shaped material cannot be sucked and cannot be conveyed. Therefore, it has been an obstacle to automation of the production line.

Therefore, conventionally, a structure has been proposed in which only the suction operation of the vacuum suction device in which the suction of the suction pad is not sealed is stopped. And, regarding its structure,
A vacuum suction device described in JP-A-6-99386,
There is a vacuum suction device described in Japanese Utility Model Publication No. 6-9886. These vacuum suction devices will be described with reference to FIGS. 7 to 10.

First, FIG. 7 shows a vacuum suction device disclosed in JP-A-6-99386. FIG. 7A is a cross-sectional view showing the operation of the conventional vacuum suction device when the vacuum generator is turned on due to an accident or the like before the suction pad hits the adsorbed material. The movable valve 53 is located at the highest position Pa that closes the suction chamber 52 and the suction passage 51. Therefore, the vacuum state is blocked by the movable valve 53 and stopped at the suction passage 51.

The upper surface of the movable valve 53 shown in FIG. 7A is the suction chamber 5.
FIG. 8 shows an enlarged view of the movable valve reaching portion 50 that is in contact with the upper wall of No. 2. Here, fine irregularities 56 are formed on the upper surface of the movable valve 53 with reduced processing accuracy. Therefore, even when the upper surface of the movable valve 53 hits the upper wall of the suction chamber 52, a small amount of the air in the suction chamber 52 always flows into the suction passage 51 as indicated by the arrow 57.

Next, the operation of the vacuum suction device for sucking the plate-like material 55 with the movable valve 53 closing the suction chamber 52 will be described with reference to FIGS. 7B and 7C. When the suction pad 54 is brought into contact with the plate material 55, the suction pad 54 is closed by the plate material 55 (FIG. 7B). Then, the external air does not flow into the suction pad 54. Even at this time, a small amount of air in the suction chamber 52 always flows into the suction passage 51 through the unevenness 56 on the movable valve 53 as shown in FIG. Therefore, the difference between the vacuum pressures in the suction passage 51 and the suction chamber 52 in the vacuum state gradually decreases.

However, the movable valve 53 is in the state shown in FIG. 7B for a while due to the suction force of the vacuum pressure of the vacuum generator, that is, in the highest position Pa. Eventually, when the difference in the vacuum pressure becomes small and the suction force due to the vacuum pressure cannot support the weight of the movable valve 53, the movable valve 53 gradually descends from the highest reached position Pa to the normal position Pb by its own weight (FIG. 7C). ). Then, the suction chamber 52 and the suction passage 51 are in communication with each other. Then, the air in the suction chamber 52 is transferred to the suction passage 51.
And the vacuum pressure of both becomes equal. Therefore, the plate-like material 55 hitting the suction pad 54 is surely sucked by the suction force of the vacuum generator.

On the other hand, FIG. 9 and FIG. 10 show the vacuum suction device disclosed in Japanese Utility Model Laid-Open No. 6-9886. FIG. 9 shows a vacuum chamber 60, and the exhaust port 6 is provided in the vacuum chamber 60.
1 is formed. A blower (not shown) as an exhaust unit is connected to the exhaust port 61. A suction plate 64 is fixed to the opening 63 of the vacuum chamber 60 to close the opening 63. The vacuum chamber 60 and the suction plate 64 form a chamber 62. The vacuum chamber 60 and the suction plate 64 form a vacuum suction device body.

A suction pad 65 is fixed to the lower surface side of the suction plate 64 in the figure. As the suction pad 65, use of sponge, elastic rubber or the like can be considered. A large number of through holes 70 are formed in the suction plate 64, and the suction pad 6 is formed so as to communicate with the through holes 70.
A through hole 66 is also formed in 5. The through hole 66 has a larger diameter than the through hole 70.

A valve unit 67 is attached to the through hole 70. The valve unit 67 has a structure as shown in FIG. First, the hollow cylindrical tubular body 7
1 and the upper and lower ends of this cylindrical body 71 have openings 72, 73.
It has become. Further, the lower end edge portion on the opening 72 side is a seat portion 74. A ball 68 as a valve body is housed in the cylindrical body 71 so as to be movable in the direction of the arrow in the figure.

The valve unit 67 having the above-described structure is manufactured and assembled in a unitized state in advance, and is press-fitted and fixed in the through hole 70 of the suction plate 64. Further, in the case where it is once press-fitted and fixed in the through hole 70 and then removed, it can be easily removed by inserting and pulling out a jig (not shown) into the opening 73, for example.

When the vacuum suction device shown in FIG. 9 is not used,
The ball 68 of each valve unit 67 is in a state of falling downward due to its own weight. At the time of use, the air in the exhaust port 61 and the chamber 62 sucked by the blower is sucked and exhausted, and the work 69 is adsorbed through the adsorption pad 65.
At that time, the valve unit 67 of the portion closed by the work 69 acts as follows. First, the ball 68 is temporarily sucked upward by suction of the blower.
Since the spaces before and after 8 are sucked together and become in the same pressure state,
It falls due to its own weight.

On the other hand, the ball 68 of the valve unit 67, which is not blocked by the work 69, is sucked upward and seated on the seat portion 74. That is,
The portion is completely airtight, so that the vacuum state is not carelessly compromised. After that, the work 69 is adsorbed and held and conveyed to an arbitrary place, and if the suction by the blower is stopped there, the work 69 is placed there.

[0016]

The above-mentioned conventional structure has the following problems. For example, JP-A-6-993
In the case of the vacuum adsorption device described in Japanese Patent No. 86, the movable valve 5
When the upper surface of 3 hits the upper wall of the suction chamber 52, the air flow rate shown by the arrow 57 is determined by the unevenness 56. That is, if the unevenness 56 is processed to increase the air flow rate, the vacuum pressure of the entire vacuum suction device will not increase, and if the flow rate is decreased, the plate-like material 55 cannot be sucked in a short time. Even if the flow rate is set to an appropriate value, the vacuum pressure of the entire vacuum suction device will not rise and the energy loss will increase if the plurality of suction pads 54 are not sucking the plate-like material 55. There is.

In the case of the vacuum suction device disclosed in Japanese Utility Model Laid-Open No. 6-9886, since the valve unit 67 has the openings 72 and 73 at the axial center thereof, the air flowing in from the opening 73 is directed to the ball 68. Hit the center. The ball 68, which receives the air flow as a center, rises but is hard to rotate, and the air flow becomes extremely unstable around the surface of the ball 68.
Moves up and down and left and right to come into close contact with the seat portion 74 of the opening 72. With the mechanism of the vacuum suction device, the suction pad 65
When the workpiece 69 is sucked, the air remaining in the suction pad 65 is sucked in for a moment, and the ball 68 suddenly jumps up, causing a malfunction such as a close contact with the seat portion 74 of the opening 72.

In addition, there is another processing problem. When the vacuum suction device is machined so that the gap between the outer diameter of the ball 68 and the inner diameter of the cylindrical body 71 is large, even if air is sucked in, the air flow passes through the gap, and the ball 68 passes through the opening portion. When it is processed so that it is hard to float as it is brought into close contact with the seat portion 74 of 72, and the gap difference is made small, the suction pad 6
Even when the workpiece 5 sucks the work 69, the ball 68 floats and comes into close contact with the seat portion 74, which causes a problem that the clearance difference is extremely small.

[0019]

According to a first aspect of the present invention, a rotary plate 5 is mounted on a support plate 1 via a rotary shaft 14, and suction pads 11 are provided at both ends of the rotary plate 5.
And a vacuum suction port 13 is attached to the suction pad 11, and a vacuum suction air control valve 12 communicating with the end of the vacuum suction port 13 is provided. .

According to the second aspect of the present invention, the worm 6 is attached to the rotary shaft of the drive motor 8 which rotates intermittently, and the worm wheel 7 meshing with the worm 6 is attached to the rotary shaft 14.
The structure of the exploration-type vacuum suction device provided at the upper end of the.

The invention according to claim 3 is that the rotating plate 5
Is an exploration type vacuum suction device provided with an air cylinder 9 for sliding the suction pad 11 up and down.

Further, the invention of claim 4 has a structure of an exploration type vacuum suction device in which a limit switch 15 is provided on the side surface of the block 2.

Further, in the invention of claim 5, the vacuum suction air control valve body 21 having one opening, the through hole 30 provided in the opening hole 27 of the vacuum suction air control valve body 21, and the through hole. A fitting 24 fitted into the fitting 30, a vacuum suction air control valve lid 22 having one opening, a through hole 29 provided in an opening hole 28 of the vacuum suction air control valve lid 22, and a fitting into the through hole 29. The inserted joint 23, the sphere 26 movably accommodated in the opening 27, the vacuum suction air control valve body 21 and the vacuum suction air control valve lid 22 sandwiched between the O.
A ring 25 and a vacuum suction air control valve are provided.

In the sixth aspect of the present invention, the vacuum suction air control valve body 21 has a structure of a vacuum suction air control valve in which the axis of the through hole 30 is eccentric from the axis of the opening hole 27. And

According to the seventh aspect of the present invention, the vacuum suction air control valve lid 22 has a structure of a vacuum suction air control valve in which the axis of the through hole 29 is eccentric from the axis of the opening hole 28. And

Further, the invention of claim 8 is a vacuum adsorption air control valve, wherein the vacuum adsorption air control valve main body 21 is provided with a through hole 30 on a lower side surface of the opening hole 27.

Further, the invention of claim 9 is characterized by comprising a sphere 26 having a diameter slightly smaller than the opening hole 27 and an O-ring 25 having a hole diameter slightly smaller than the sphere 26. A vacuum adsorption air control valve is used.

[0028]

The function of the exploration type vacuum suction device and the vacuum suction air control valve according to the present invention is as follows. That is, even if the material to be adsorbed has a hole or has unevenness on the surface such as a plate-shaped material that is difficult to adsorb, the adsorption pad 11 fully automatically searches for an optimum position and enables adsorption.

Further, since the drive motor 8 and the air cylinder 9 can be independently controlled, the drive motor 8 works so as to rotate in accordance with the suction state of the suction pad 11, and the air cylinder 9 moves the suction pad 11 in place. Work to lift.

Further, the limit switch 15 works to reverse the rotation direction of the drive motor 8 so that the rotation plate 5 rotated by the drive motor 8 does not rotate beyond a certain range.

Further, the vacuum suction air control valve 12 functions to promptly close the suction passage when the suction pad 11 cannot be sucked, thereby minimizing air leakage of the vacuum device.

Further, the through holes 29 and 30 are eccentric from the central axis of the opening hole 27, so that the sphere 26 can rotate and levitate in a stable state.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The exploratory vacuum suction device and vacuum suction air control valve of the present invention will be described below with reference to the embodiments shown in FIGS. FIG. 1 is a perspective view showing an outline of an embodiment of the exploration type vacuum suction device of the present invention, which is constructed by providing the exploration type vacuum suction device having a support column 4 fixed to the center of a support plate 1.

The probe type vacuum suction device will be described in more detail. As shown in FIG. 1, there is a support plate 1, and suction pads 11 having a search mechanism are suspended at both ends of the support plate 1. The vacuum outlet 13 at the upper end of the suction pad 11 is connected to the vacuum suction air control valve 12 and a pressure sensor (not shown) by an air hose.

A sequencer (not shown) is connected to the pressure sensor, the limit switch 15, the drive motor 8 and a solenoid valve (not shown), and the solenoid valve is connected to the air cylinder 9 by an air hose. The signal output from the pressure sensor and the limit switch 15 is transmitted to the sequencer, and the sequencer controls the drive motor 8 and the solenoid valve based on the respective signals. FIG. 1 shows one unit mechanism of the present apparatus, and a plurality of the exploratory vacuum suction devices are arranged side by side for use.

FIG. 2 is a perspective view showing an exploratory mechanism and an operation in which one end portion of FIG. 1 is enlarged, and a rotary plate 5 for exploring a suckable place is provided above the support plate 1. Has been done.

The exploration mechanism of the exploration-type vacuum suction device will be described in more detail. As shown in FIG. 2, there is a rotating plate 5, and the rotating plate 5 is provided with a through hole 19 at its center. Further, air cylinders 9 are locked on the upper surfaces of both ends of the rotary plate 5, and through holes 20 are formed on that side.

The suction pad 11 is slidably fitted in the through hole 20, and the lift plate 10 is locked to the suction pad 11 at the vacuum outlet 13 so that the air cylinder 9 and the suction pad 10 can be sucked. It is locked so as to be linked to the pad 11. Further, the rotary shaft 14 penetrates the through hole 19,
The upper surface of the rotating plate 5 is joined and locked to the lower surface of the flange portion of the rotating shaft 14.

The rotary shaft 14 is rotatably fitted in the through hole 17, and the support plate 1 is rotatably sandwiched between the rotary plate 5 and the plane washer 16. A block 2 is arranged on the upper surface of the support plate 1, and is fixed together with the fixed plate 3 thereon. Further, a through hole 18 is formed in the center of the fixed plate 3, blocks 2 are arranged at the lower ends of both ends, and the through hole 17 of the support plate 1 is concentric with the through hole 18 below the block 2. Is fixed to the support plate 1.

Rotating shaft 1 protruding from the fixed plate 3
A worm wheel 7 is fitted on the upper end of 4. The worm 6 is fitted on the rotary shaft of the drive motor 8 and is engaged with the worm wheel 7.

Limit switches 15 are locked on both side surfaces of the block 2 at positions where they come into contact with the side surfaces of the rotary plate 5.

The operation of the exploration type vacuum suction device will be described based on the above configuration. First, the exploration-type vacuum suction device shown in FIG. 1 is suspended from a column 4 and moved up and down by an air cylinder (not shown). This mechanism may be replaced with another mechanism, and for example, a mechanism that moves the support column 4 up and down by a motor or the like may be used.

When the exploration-type vacuum suction device descends, the suction pad 11 comes into contact with a plate-shaped member (not shown). When the exploration-type vacuum suction device further descends, the rubber of the suction pad 11 is pressed while the spring of the suction pad 11 is compressed, and the rubber portion of the suction pad 11 comes into close contact with the plate-shaped material. After the contact, the descending of the exploration-type vacuum suction device is stopped, and is kept as it is.

Then, suction is started from the vacuum outlet 13, and the suction pad 11 starts sucking the plate-shaped material. At this time,
When it is determined that the pressure sensor communicated with the vacuum outlet 13 by an air hose (not shown) has reached the set suction pressure, the suction state is maintained as it is. As the suction pressure, a vacuum pressure necessary for suction is set in advance in the pressure sensor.

However, when the suction pad 11 tries to suck into the hole or uneven portion of the plate-shaped material, the suction pressure cannot be applied to the suction pad 11, and the pressure sensor (not shown) has reached the suction pressure. I do not perceive. Then, the pressure sensor sends a signal to a sequencer (not shown), and the sequencer to which the signal is sent excites a solenoid valve (not shown) and at the same time stops the vacuum device. Then, the excited solenoid valve sends air to the communicating air cylinder 9, and the air cylinder 9 works to push up the suction pad 11 together with the elevating plate 10.

The suction pad 11 pushed up is separated from the plate-like material, and the sequencer activates the drive motor 8 to rotate the rotating plate 5 connected to the worm wheel 7. When the suction pad 11 moves with an appropriate distance, the sequencer stops the drive motor 8 and demagnetizes the solenoid valve at the same time, the solenoid valve draws the communicating air cylinder 9, and the suction pad 11 is initially moved by a spring. Return to the adsorption state of. Then, the suction pad 11 tries to adsorb again to the plate-shaped material.

At this time, if the suction pad 11 further fails in suction, the above operation is repeated again, but the rotating plate 5
When the limit switch is turned ON, a signal is transmitted to the sequencer, and the sequencer switches the drive motor 8 in the opposite rotation direction.

FIG. 3 is a sectional view showing a first embodiment of the structure and operation of the vacuum suction air control valve 12, which is composed of a vacuum suction air control valve body 21 and a vacuum suction air control valve lid 22. Has been done.

The vacuum suction air control valve 12 will be described in more detail. As shown in FIG. 3, there is a vacuum suction air control valve body 21, which has an opening hole 27 in the upper part thereof, and the inside of the cylinder having the opening hole 27. Sphere 26 with a diameter slightly smaller than the opening 27
Has been paid. An O-ring 25 having an inner diameter smaller than that of the sphere 26 is embedded in the opening hole 27.
The ring 25 is sandwiched so as to be pressed by the vacuum suction air control valve lid 22.

A through hole 30 deviated from the axial center of the opening hole 27 is formed in the bottom surface of the vacuum suction air control valve body 21. A joint 23 is attached to the through hole 30 from the outside of the bottom surface, and an air hose that connects the suction pad 11 and a pressure sensor (not shown) is attached.

An opening hole 28 having a diameter larger than the inner diameter of the O-ring 25 is provided inside the vacuum suction air control valve lid 22.
There is a through hole 29 in the upper surface. Further, a joint 24 is also attached to the through hole 29 from the outside of the upper surface of the air control valve lid 22 to enable communication of an air hose connected to a suction source.

FIG. 4 shows the vacuum suction air control valve 12 of FIG.
FIG. 9 is a cross-sectional view showing the action of the above, showing a state when the vacuum suction device fails in suction. The operation of the vacuum adsorption air control valve 12 will be described based on the above configuration. The suction source is OF
In the case of F, the sphere 26 is at the bottom of the opening hole 27,
When the suction source is turned on, air flows in from the joint 24 on the suction pad 11 side of the vacuum suction air control valve 12 and flows so as to pass through the gap between the ball 26 and the opening hole 27. At that time, when the suction pad 11 completely sucks the plate-shaped material, there is almost no air leakage, the flow rate of the air flowing through the gap is extremely small after the suction, and the sphere 26 does not float and enters the opening hole 27. An air flow passage is secured and the suction pad 11
To allow suction.

However, when the suction pad 11 cannot completely adsorb the plate-shaped material, that is, when air leakage occurs, a large amount of air flows so as to pass through the gap. At that time, since the through holes 29 and 30 are eccentric so as not to hit the center of the sphere 26, the sphere 26 has a mechanism that allows easy rotation. When the ball 26 rotates, the air flow flows through the flow passage having the predetermined gap, so that the ball 26 floats in a stable state. Then, the air comes into close contact with the inner diameter of the O-ring 25, shuts off the air flowing from the joint 24, and does not flow into the joint 23 to the suction source. Therefore, the suction pad 11 can prevent air leakage.

FIG. 5 is a sectional view showing a second embodiment of the structure and operation of the vacuum suction air control valve 12, in which the through hole 29 of the vacuum suction air control valve lid 22 is aligned with the axial center of the opening hole 28. It is composed by eccentricity.

FIG. 6 is a cross-sectional view showing a third embodiment of the structure and operation of the vacuum suction air control valve 12, in which the through hole 30 of the vacuum suction air control valve main body 21 is provided on the lower side surface of the opening hole 28. It is configured by drilling in.

In the second and third embodiments, since the through holes 29 and 30 are formed for the purpose of ensuring the air flow passage as in the first embodiment, the ball 26 can be operated accurately.

[0057]

Since the present invention is configured as described above, it has the following effects. That is, the exploration-type vacuum suction device can suction and convey even a plate-shaped material having holes or irregularities or a plate-shaped material that cannot be magnetized by a magnet. Moreover, by adding a plurality of the exploration-type vacuum suction devices in parallel, it becomes possible to handle a larger plate-shaped material.

Further, since the exploration-type vacuum adsorption device is capable of exploring the adsorbable position, it is not necessary to accurately align the position of the adsorbed material, and a flexible line in which semi-finished products having different shapes flow It can also be used.

Further, since the exploration-type vacuum adsorption device has a mechanism having the vacuum adsorption air control valve 12, even if the adsorption pad 11 that has failed in adsorption is present in a part, air leakage is blocked and another adsorption is performed. Does not prevent suction with the pad.

Further, the through hole 2 of the vacuum adsorption air control valve 12
Since 9 and 30 are eccentric from the axis of the opening hole 27,
The levitating operation of the ball 26 is more stable than when it is placed at the axis,
As a result, malfunctions are significantly reduced. Moreover, the opening hole 27
Since a large tolerance can be taken, there is an advantage that it can be easily processed.

Further, even if one suction source is used together with the vacuum suction air control valve 12, it is possible to control suction of a plurality of suction pads 11. Therefore, it is necessary to arrange ejector vacuum pumps and the like by the number of suction pads 11. Moreover, since the exploration type is adopted, it is possible to finish the exploration type vacuum adsorbing device with much lower cost, such as increasing the adsorbing rate of the adsorbing pad 11 so that the adsorbing pad 11 can be constructed with a small number of adsorbing pads.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an exploration type vacuum suction device.

FIG. 2 is a perspective view showing an exploration mechanism and action of the exploration-type vacuum suction device.

FIG. 3 is a cross-sectional view of the structure and operation of the vacuum adsorption air control valve according to the first embodiment.

4 is a cross-sectional view of the operation of the vacuum suction air control valve shown in FIG.

FIG. 5 is a cross-sectional view of the structure and operation of a vacuum adsorption air control valve showing a second embodiment.

FIG. 6 is a cross-sectional view of the structure and action of a vacuum adsorption air control valve showing a third embodiment.

FIG. 7 is a sectional view showing an operation of a conventional vacuum suction device.

8 is a partially enlarged cross-sectional view of the conventional vacuum suction device shown in FIG.

FIG. 9 is a cross-sectional view showing a configuration of a conventional vacuum suction device.

10 is a cross-sectional view showing the configuration of the conventional valve unit shown in FIG.

[Explanation of symbols]

 1 Support Plate 2 Block 3 Fixed Plate 5 Rotation Plate 8 Drive Motor 9 Air Cylinder 11 Adsorption Pad 12 Vacuum Adsorption Air Control Valve 14 Rotation Axis 15 Limit Switch 25 O-ring 26 Ball

Claims (9)

[Claims] 1. A rotary plate 5 is mounted on a support plate 1 through a rotary shaft 14, and suction pads 11 are loosely fitted to both ends of the rotary plate 5 so as to move forward and backward, and a vacuum is applied to the suction pad 11. The outlet 13 is attached to the vacuum outlet 1.
An exploration-type vacuum suction device provided with a vacuum suction air control valve 12 communicating with the tip of No. 3. 2. A worm 6 is attached to a rotary shaft of a drive motor 8 which rotates intermittently, and a worm wheel 7 meshing with the worm 6 is provided at an upper end of the rotary shaft 14. The exploration-type vacuum adsorption device according to the item. 3. A suction pad 11 is provided on the rotating plate 5.
The exploration-type vacuum suction device according to claim 1, further comprising an air cylinder 9 for sliding up and down. 4. The exploratory vacuum suction device according to claim 1, wherein a limit switch 15 is provided on the side surface of the block 2. 5. A vacuum suction air control valve body 21 having one opening, a through hole 30 provided in an opening hole 27 of the vacuum suction air control valve body 21, and a joint 24 fitted in the through hole 30. And an air control valve cover 2 for vacuum suction with one opening
2, a through hole 29 provided in the opening hole 28 of the vacuum suction air control valve lid 22, and a joint 2 fitted in the through hole 29.
3 and a sphere 26 movably accommodated in the opening hole 27.
And an O-ring 25 sandwiched between the vacuum suction air control valve body 21 and the vacuum suction air control valve lid 22, and a vacuum suction air control valve. 6. The vacuum adsorption air control valve body 21 comprises:
The vacuum adsorption air control valve according to claim 5, wherein the axis of the through hole 30 is eccentric from the axis of the opening hole 27. 7. The vacuum suction air control valve according to claim 5, wherein the vacuum suction air control valve lid 22 is configured such that the axis of the through hole 29 is eccentric from the axis of the opening hole 28. . 8. The vacuum suction air control valve body 21 comprises:
The air control valve for vacuum adsorption according to claim 5, wherein the through hole 30 is provided on the lower side surface of the opening hole 27. 9. A sphere 26 having a diameter slightly smaller than the opening hole 27, and an O-ring 25 having a hole diameter slightly smaller than the sphere 26. 6. An air control valve for vacuum adsorption according to 6, 7, or 8.