CN1367729A - Suction nozzle and electronic parts mounting device - Google Patents

Suction nozzle and electronic parts mounting device Download PDF

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Publication number
CN1367729A
CN1367729A CN 99816893 CN99816893A CN1367729A CN 1367729 A CN1367729 A CN 1367729A CN 99816893 CN99816893 CN 99816893 CN 99816893 A CN99816893 A CN 99816893A CN 1367729 A CN1367729 A CN 1367729A
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China
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mentioned
suction nozzle
electronic device
vacuum chamber
adsorption plane
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CN 99816893
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Chinese (zh)
Inventor
大川晁右
冈崎忠雄
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EVEST Corp
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EVEST Corp
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Priority to CN 99816893 priority Critical patent/CN1367729A/en
Publication of CN1367729A publication Critical patent/CN1367729A/en
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Abstract

A suction nozzle capabl eof sucking electronic parts of different sizes. A nozzle body is formed with a plurality of minute holes that are open at one of their respectively ends to a suction surface and at the other ends thereof to a communication surface communicating with a vacuum chamber associated with a hollow shaft. The length (L) of the minute holes is such that with some of the openings in the suction surface closed, the negative pressure required for suction in the vacuum chamber is maintained by the generated pressure loss in the minute holes communicating with the unclosed openings in the suctino surface.

Description

Suction nozzle and electronic parts mounting device
Technical field
The present invention relates to a kind of suction nozzle that semiconductor chips such as IC, LSI or electronic devices such as diode, resistance are assemblied in the electronic parts mounting device on the real device, circuit board and are used for adsorbing from the device supply unit above-mentioned electronic device of being used for.
Background technology
For semiconductor chips such as IC or LSI or electronic devices such as electric capacity, diode are assemblied on the assemblies such as real device, circuit board or inspection plate, use can be called the electronic parts mounting device of assembly bench or chip assembly bench etc.This assembling device have for the electronic device that will be housed in the device supply unit be transported to the device supply unit on the real device, circuit board of configuration and assembly head that horizontal direction moves, the accessory retainer that can above-below direction moves freely is installed on this assembly head.
The accessory retainer is used for picking up and the suction nozzle of attract electrons device or the clamping hand of gripping electronic device from the device supply unit.Wherein suction nozzle is attached to the end face (adsorption plane) of suction nozzle on the surface of electronic devices such as semiconductor chip, by being evacuated the attract electrons device in the suction nozzle.
As everyone knows, the structure of suction nozzle is: the suction nozzle body is made of single tube, with the opening surface of single tube as adsorption plane attract electrons device.In addition, also have such structure as everyone knows: will be split into endless groove ring-type adsorption section concentric circles be configured on the adsorption plane attract electrons device.
Being assemblied in the size of the electronic device on the assemblies such as real device, circuit board, is big and small various.Therefore,, do not match and it changed for the size that makes itself and electronic device for suction nozzle as the accessory retainer that keeps electronic device, but certain ask a kind of can with the corresponding structure of the electronic device of various sizes.
The said suction nozzle body is made the suction nozzle of single tube shape, because the bore of adsorption plane is certain, so, in order to adsorb the electronic device littler, generally speaking, must change the suction nozzle of the bore that the size that makes itself and electronic device matches into than the bore of adsorption plane.In order to improve real dress efficient, need the technology of not carrying out this replacing.
On the other hand, with the adsorption section concentric circles of ring-type be formed in suction nozzle on the adsorption plane, adsorb if select the suction nozzle of ring-type that its size with the electronic device of absorption is matched, then can adsorb the electronic device of various sizes.But, produce with ring-type adsorption section concentric circles be formed in that suction nozzle is very difficult on the adsorption plane, improved the production cost of suction nozzle.
In addition, match in order to make ring-type adsorption section that is configured to concentric circles and the size of the electronic device that will adsorb, attract selectively, need the structure that each ring-type adsorption section can be attracted independently, machine construction itself is complicated.
The object of the present invention is to provide a kind of simple in structure, suction nozzle that can adsorb the electronic device of various sizes.
Another object of the present invention is to provide a kind of electronic parts mounting device that the suction nozzle of electronic device simple in structure, as to adsorb various sizes is installed.
Above-mentioned and other purpose and new feature of the present invention is clearly from the description and the accompanying drawing of this specification.
Disclosure of an invention
The briefing of the representative content in the disclosed invention of the application is seen following explanation:
Promptly, the present invention is a kind of suction nozzle, be installed in the electronic device that the lower end, absorption and the maintenance that move up and down axle that can be arranged on movably freely up and down on the assembly head are housed in the electronic device supply unit, above-mentioned assembly head can above the above-mentioned device supply unit and assembly above between, move freely in the horizontal direction, it is characterized in that: have the suction nozzle body, be provided with the adsorption plane that can adsorb above-mentioned electronic device in the lower end, be provided with the connected surface with vacuum chamber in the upper end, above-mentioned vacuum chamber is arranged on above-mentioned moving up and down on the axle; On the said suction nozzle body, be formed with respectively a plurality of pores that above-mentioned adsorption plane and above-mentioned connected surface are communicated with, under can not be, make in the above-mentioned vacuum chamber by the pressure loss that flow into the air in the above-mentioned vacuum chamber by untight pore to keep negative pressure state by the state of above-mentioned electronic device that is adsorbed on the above-mentioned adsorption plane with all above-mentioned pore sealings.
Owing to adopt such structure, if than the big electronic device of each opening on the adsorption plane of a plurality of pores, then no matter its size how, can both be by a suction nozzle absorption.
In addition, because suction nozzle is under the state that can not all pores be sealed by the above-mentioned electronic device that is adsorbed on the adsorption plane, can make by the pressure loss that flow into the air in the vacuum chamber by untight pore and keep negative pressure state in the vacuum chamber, so, even the bore that makes pore is greatly to the degree that can not stop up owing to suction scolding tin or dust, need not also can the attract electrons device with the peristome complete closed of the pore of adsorption plane.
Description of drawings
Fig. 1 is the stereogram of the whole electronic parts mounting device of expression.
Fig. 2 is the 2-2 line side cross sectional view along Fig. 1.
Fig. 3 is the 3-3 line side cross sectional view along Fig. 1.
Fig. 4 is the 4-4 line side cross sectional view along Fig. 3.
Fig. 5 is the stereogram of presentation graphs 3 and assembly head shown in Figure 4.
Fig. 6 is the main position amplification view of Fig. 4.
Fig. 7 is the 7-7 line side cross sectional view along Fig. 6.
Fig. 8 is the 8-8 line side cross sectional view along Fig. 6.
Fig. 9 is the 9-9 line side cross sectional view along Fig. 6.
Figure 10 is the 10-10 line side cross sectional view along Fig. 9.
Figure 11 is the pneumatic circuit figure of the internal structure of expression liquid-jet vacuum pump.
Figure 12 is the cutaway view of the connection status of expression suction nozzle and quill shaft.
Figure 13 (a) is the end view drawing of the adsorption plane of expression suction nozzle body, and Figure 13 (b) is along the 11-11 line side cross sectional view among Figure 13 (a).
Figure 14 (a) is the end view drawing of state of the position portion of the expression adsorption plane that electronic device is adsorbed on the suction nozzle body, and Figure 14 (b) is along the 12-12 line side cross sectional view among Figure 14 (a).
Figure 15 (a) is the end view drawing of adsorption plane of the modified example of expression suction nozzle, and Figure 15 (b) is the end view drawing of adsorption plane of another other modified example of expression suction nozzle.
The optimised form that is used to carry out an invention
Followingly at length form of implementation of the present invention is described according to accompanying drawing.
Fig. 1 is a stereogram of representing also to be called the whole electronic parts mounting device 10 of chip assembly bench, and Fig. 2 is the 2-2 line side cross sectional view along Fig. 1, and Fig. 3 is the main position amplification view that the 3-3 line along Fig. 1 dissects, Fig. 4 be along the 4-4 line of Fig. 3 to view.
Electronic parts mounting device 10 has device body 11,2 column 11a, 11b that this device body 11 possesses that above-below direction extends and the horizontal beam 11c that is connected their upper ends.Column 11a, 11b and horizontal beam 11c make by the outside that cover is installed in respectively the skeleton that is formed by steel profile, are formed with through hole 12 at the central portion of device body 11.
Side at device body 11 is fixed with device supporting station 13, as shown in Figure 2, on this device supporting station 13, is provided with device supply unit 14.Though figure 1 illustrates the device supply unit 14 of a side that is arranged at device supporting station 13,, as shown in Figure 2, device supply unit 14 is arranged on the both sides of device supporting station 13.
On device supply unit 14, be mounted with a plurality of component cases, in each component cases, contain under the state of electronic devices such as the semiconductor chip that keeps IC and LSI respectively or capacitor, diode and resistance, can be rolled into the belt of reel.As the electronic device that is assembled, except it is housed in the component cases, be housed in addition in the retainer or be housed in the pallet, they all are loaded on the device supporting station 13.Retainer also can be called charging tray, is that the cross section is the box of the tubulose of rectangle, is linearity configuration therein, accommodates electronic device, and pallet is plane configuration, accommodate electronic device.
As shown in Figure 2, above device supporting station 13, be provided with 2 conveyer belts 15 that on X-direction, extend, move into the real device, circuit board 15a that is equipped with electronic device by this conveyer belt 15 from the outside of device body 11.Article 2, conveyer belt 15 can move on Y direction according to the size of real device, circuit board 15a, makes that it is approaching mutually, leaves, and adjusts mutual distance.But, in Fig. 1, omitted conveyer belt 15.
Be assembled to the assigned position of real device, circuit board 15a in order to be housed in electronic device in the component cases, 2 assembly heads 16 that can move freely on X-direction and these two horizontal axis of Y direction respectively are installed on the device body 11.
For assembly head 16 is moved in the horizontal direction, 2 guide rails 17 that extend on Y direction are installed on horizontal beam 11c, the trave lling girder 18 that can slide freely on Y direction along guide rail 17 is installed on each guide rail 17, and the part that trave lling girder 18 usefulness are arranged on the slide block 17a of its base end part one side can be slidably mounted on the guide rail 17 freely.2 guide rails that extend on X-direction 19 are installed on each trave lling girder 18, the assembly head 16 that can move freely on X-direction along guide rail 19 is installed on guide rail 19.
As shown in Figure 2, though 2 trave lling girders 18 that have assembly head 16 respectively are installed, in Fig. 2,, only show the guide rail 19 on each trave lling girder 18 on device body 11 for the ease of mapping.But, also can be with trave lling girder 18 as a device assembling device with 1 assembly head 16.As shown in the figure, guide rail 19 is installed in the bottom of cantilevered trave lling girder 18, can arrive the below of horizontal fixed beam 11c from the leading section of trave lling girder 18, with the space of hanging below the assembly head 16 that the state along continuous straight runs below the guide rail 19 moves also utilizes horizontal fixed beam 11c, can guarantee the very big shift motion on X-direction.
As shown in Figure 4, assembly head 16 has support 21, and this support 21 is fixed with can be along the slide block 19a of each guide rail 19 slip, and this support 21 constitutes assembly head bodies.Fig. 5 is the stereogram of the general configuration of expression assembly head 16, if amplify expression assembly head 16 shown in Figure 4, then as shown in Figure 6.
As shown in Figure 5, support 21 has: be placed on 2 connecting portion 21a on the guide rail 19; From each connecting portion 21a 2 vertical component effect 21b extending of direction up and down; The horizontal part 21c that connects these vertical component effects 21b.The outside, bottom at each vertical component effect 21b is equipped with drive tab 22, and 4 quill shafts 23 that can slide and can rotate freely simultaneously freely on each be axial are being installed on each drive tab 22.Therefore, as among Fig. 5 with shown in symbol 23a~23h like that, 8 quill shafts 23 altogether are installed on 1 assembly head 16.As accessory retainer 24, suction nozzle 25 is installed at the front end of each quill shaft 23, keeps electronic device E by this accessory retainer 24.
On the connecting portion 21a of support 21, be fixed with supporting member 27, as shown in Figure 6, between this supporting member 27 and horizontal part 21c, the leading screw 28 that can rotate freely be installed.The part that moves up and down plate 29 inner threaded portion 29a screws on this leading screw 28, moves up and down plate 29 above-below directions and moves by driving leading screw 28 rotations, can driving.As shown in Figure 7, move up and down plate 29, be fixed on guide rod 30 on the supporting member 27 and be entrenched in and be formed in the through hole that moves up and down on the plate 29 in order to guide.
As shown in Figure 7,, on support 21, be fixed with motor 31, take turns between 33, be wound with timing belt 34 at the timing belt that is fixed in the timing belt wheel 32 on the axle of this motor 31 and be fixed on the leading screw 28 in order to make leading screw 28 rotations.Therefore, if CD-ROM drive motor 31, then move up and down plate 29 and driving above-below direction by leading screw 28 and move.
As shown in Figure 8, moving up and down on the plate 29, corresponding with 8 accessory retainers 24,8 cylinders 35 are installed.As shown in Figure 6, each cylinder 35 is combined in and is formed on the internal thread that moves up and down on the plate 29 by being formed at external thread rotary on the cylinder body outer peripheral face, be installed in and move up and down on the plate 29, leading section at the piston rod 36 of each cylinder 35 is fixed with drive rod 37, each drive rod 37 breakthrough form is formed in the notch on the vertical component effect 21b, is projected into the outside of vertical component effect 21b.
Be through with quill shaft 23 in the through hole that is formed at each drive rod 37 front end, as shown in Figure 6, the large-diameter portion 38 of quill shaft 23 is against on the drive rod 37, at this drive rod 37 be fixed between the baffle plate 41 on the quill shaft 23, compression helical spring 42 is installed.Apply spring force for quill shaft 23 by this compression helical spring 42 towards the below.
As shown in Figure 9, on a vertical component effect 21b of support 21,4 electromagnetically operated valves 43 controlling compressed-air actuated supply respectively and stop to supply with are installed, the air supply opening of each electromagnetically operated valve 43 is connected on 4 cylinders 35 corresponding with 4 quill shaft 23e~23h by flexible pipe.On another vertical component effect 21b, same electromagnetically operated valve 43 is installed also, is connected on 4 cylinders 35 corresponding with 4 quill shaft 23a~23d by flexible pipe.Therefore, if compressed air is supplied in the cylinder 35, then piston rod 36 moves downwards, drives drive rod 37 and moves downwards.
At drive rod 37 with move up and down between the plate 29, draft helical spring 44 is installed, give respectively to move up and down plate 29 and apply upward spring force.Therefore, if stop to supply with compressed air, cylinder 35 inside are communicated with the exhaust outlet of electromagnetically operated valve 43, then by the spring force of draft helical spring 44, each drive rod 37 moves up and down plate 29 relatively and moves up.
As shown in Figure 9, suction nozzle 25 attracts air from the peristome of front end, and vacuum suction electronic device E, clamping hand 26 have by air pressure makes it make the manipulator of switch motion, as accessory retainer 24, in suction nozzle 25 and the clamping hand 26 any one can be installed in the front end of quill shaft 23.On 1 quill shaft 23 in shown in Figure 94 clamping hand 26 is installed, on other 3 quill shafts 23, suction nozzle 25 is installed.
When the electronic device E that keeps being loaded in by accessory retainer 24 on the device supporting station 13, making after assembly head 16 is moved horizontally to the position of regulation, corresponding quill shaft 23 is moved down, after maintenance, quill shaft 23 is moved up.Then, after assembly head 16 is moved to the assigned position of real device, circuit board 15a, quill shaft 23 is moved down.Therefore, though electronic device E is under the state that remains on the accessory retainer 24, rise, descend and move and move horizontally, but, because when moving horizontally, if other part and electronic device interfere, then electronic device E will fall down from accessory retainer 24, so, accessory retainer 24 move up and down stroke need set long enough, be the degree that does not interfere.
If consider the efficiency of assembling of raising at the electronic device E of real device, circuit board 15a, hope can promptly make accessory retainer 24 move up or down at short notice.On illustrated electronic parts mounting device 10, be to drive each quill shaft 23 by compound drive form, this compound drive form is compound by motor 31 drive move up and down plate 29 move up and down and by being installed in moving up and down that the cylinder 35 that moves up and down on the plate 29 drives.
Advancing of the piston rod 36 that drives by cylinder 35 to spacing, though by being against on the end cap of cylinder 35, piston can locate accurately,, will make piston rod 36 location accurately in the centre position be very difficult.In contrast, can control the rotating speed of motor 31 accurately, move up and down plate 29 and can locate and stop at position arbitrarily.And the translational speed of advancing of the piston rod 36 that is driven by cylinder 35 is compared with the speed of moving up and down that moves up and down plate 29 that is driven by motor 31, and that sets easily is higher.And, be applied to impulsive force on the electronic device E when making accessory retainer 24 move down, contact electronic device E, to compare with the actuating force that drives by cylinder 35, it is less that the actuating force that is driven by motor 31 can be set.Therefore, as shown in the figure, the driving by hybrid motor 31 and the driving of cylinder 35, accessory retainer 24 is moved up and down,, do not assemble Yi Bian apply impulsive force ground for electronic device E Yi Bian can promptly do the action that moves up and down of accessory retainer 24.Because the difference of the kind of electronic device E, the occasion that the height of electronic device E is different can at random be adjusted the decline extreme position of accessory retainer 24 by the rotating speed of adjusting motor 31.
At the accessory retainer 24 that is installed on each quill shaft 23 are occasions of suction nozzle 25, for suction nozzle 25 is arrived in negative pressure vacuum feed just, so, in Fig. 6, be positioned on each drive tab 22 of position, the left and right sides, correspondingly with each accessory retainer 24 respectively be provided with 4,8 liquid-jet vacuum pumps 45 are set altogether.This liquid-jet vacuum pump 45 is that blast injection is arrived diffuser, makes it at this vacuum pump, is connected between the joint 47 of air entry 46 and quill shaft 23 upper ends by the vacuum that will produce, and can make the suction nozzle 25 of accessory retainer 24 front ends be vacuum state.
On the other hand, be installed in the occasion of the front end of quill shaft 23 as accessory retainer 24, make the electromagnetically operated valve action that is assembled on the liquid-jet vacuum pump 45, compressed air is supplied to quill shaft 23, make manipulator do the open and close action at clamping hand 26.
In order to detect its position when the mobile assembly head 16, video camera 48 is installed, when the electronic device E that will keep is assemblied on the assigned position of real device, circuit board 15a, on support 21 by video camera 48 detection reference positions.The electronic device E of absorption does not remain on the accessory retainer 24 with the posture of regulation, and the posture with rotation is keeping sometimes.
Therefore, the posture, posture that remain on the electronic device E on the accessory retainer 24 in detection be the posture of the regulation occasion of having rotated relatively, it must be adjusted to the position of regulation.Therefore, as Fig. 9 and shown in Figure 10, motor 51 is installed on support 21.On the other hand, as shown in Figure 6, be assembled with the splined shaft 52 of the hollow that can rotate freely in drive tab 22, quill shaft 23 is with splined shaft 52 rotations, and these splined shaft 52 above-below directions slide freely relatively.As Fig. 9 and shown in Figure 10, on the splined shaft 52 corresponding, be fixed with timing belt wheel 53 with each quill shaft 23, on being fixed in the timing belt wheel 54 on the axle of motor 51 and amounting to 8 timing belt wheel 53, be wound with continuous timing belt 55.Therefore, if CD-ROM drive motor 51, then each accessory retainer 24 rotates, and can change the posture of the direction of rotation of the electronic device E that is adsorbed on the accessory retainer 24.Even, symbol 56 expression loose pulleys in Figure 10.
Figure 11 represents the pneumatic circuit figure of internal structure as shown in Figure 6, that 4 liquid-jet vacuum pump 45 respectively is set respectively in the outside of 2 vertical component effect 21b of support 21.As shown in the figure, supplying with between compressed-air actuated air supply opening 61 and the air entry 46, be provided with the generation vacuum and use electromagnetically operated valve 62 and destroy vacuum with electromagnetically operated valve 63, when the generation vacuum is opened with electromagnetically operated valve 62, blast injection produces vacuum to the injection portion 64 with diffuser in injection portion 64.Therefore, the air of air entry 46 flow into injection portion 64 by filter 65 and unidirectional valve, if electronic device E is adsorbed on the front end of suction nozzle 25, then air entry 46 is a vacuum state negative pressure state just.By detect the pressure of air entry 46 with pressure sensor 66, can detect electronic device E and whether remain on the suction nozzle 25.
When unloading the electronic device E that is adsorbed on the suction nozzle 25, the destruction vacuum is opened with electromagnetically operated valve 63, will direct into air entry 46 from the compressed air of air supply opening 61.Supplying to the destruction vacuum is controlled by adjustable throttling 67 with the compressed-air actuated amount of electromagnetically operated valve 63.And the air of discharging from injection portion 64 is discharged to the outside after by muffler 68 noise reductions.
In the occasion of using suction nozzle 25 as accessory retainer 24, make air entry 46 be vacuum state, vacuum suction and maintenance electronic device E.On the other hand, using clamping hand 26 occasions as accessory retainer 24, generation vacuum shown in Figure 11 is moved with electromagnetically operated valve 62, but destroy vacuum with electromagnetically operated valve 62, compressed air is supplied to clamping hand 26 by connecting, disconnecting, come switch to be arranged on manipulator on the clamping hand 26, keep electronic device E.
The suction nozzle 25 that uses as accessory retainer 24, at present embodiment as shown in figure 12, by the suction nozzle body 71 of straight cylindrical with have the urceolus 72 that this suction nozzle body 71 was inserted and be fixed on the installation cylindrical portion 72a of front end one side and constitute.
As shown in figure 12, the installation cylindrical portion 72b that urceolus 72 will be installed cylindrical portion 72a and quill shaft 23 usefulness makes one, and its structure is the connected space of one for the small-bore hollow bulb of installing in the cylindrical portion 72a with the major diameter hollow bulb that cylindrical portion 72b is installed.
Shown in Figure 13 (a) and (b), the structure of suction nozzle body 71 is made the pore 80 that is formed by tubule 73 thus for being inserted in the small-bore tubule 73 in the outboard tube 74 of bigbore straight cylindrical in suction nozzle body 71.Gap portion with outboard tube 74 in present embodiment tubule 73 also can use as pore 80.So, present embodiment forms the adsorption plane 71a of suction nozzle body 71 on porous area shown in Figure 13 (a).
Be provided with connected surface 71b one side of the suction nozzle body 71 of a plurality of pores 80 in inside, interpolation and being fixed on front end one side of urceolus 72 design all-in-one-piece is installed in the cylindrical portion 72a.Fixedly the time, preferably be adhesively fixed, produce escape of air between the outer peripheral face with the suction nozzle body 71 that do not make inner peripheral surface that cylindrical portion 72a is installed and insertion.
In addition, perimembranous is processed with screw thread in the front end of the big footpath of urceolus 72 hollow bulb installation cylindrical portion 72b, as shown in figure 12, it can be threaded with the threaded portion that is arranged on quill shaft 23 front end peripheries.
In addition, on the outer peripheral face of quill shaft 23, be provided with O shape circle 75 and seal, make it under the state of the big footpath hollow bulb that by above-mentioned main points quill shaft 23 is screwed in and is fixed on urceolus 72, can not produce escape of air.
In addition, make by above-mentioned main points and be installed in the connected surface 71b of the suction nozzle body 71 in the urceolus 72 and the front of quill shaft 23 is left certain distance, constitute the space of vacuum chamber 90 therebetween.So, many tubules 73 are arranged on the pores 80 that constitute in the suction nozzle body 71, the one end is provided with opening on adsorption plane 71a, the other end with vacuum chamber 90 in the connected surface 71b that is communicated be provided with opening.Making it pass a plurality of pore 80 adsorption plane 71a one sides is communicated with connected surface 71b in vacuum chamber 90.
On the other hand, shown in Figure 14 (a) and (b), even the part of adsorption plane 71a peristome is owing to attract electrons device E is in closed state, suck extraneous air from the pore 80 that is communicated with untight peristome, in pore 80, produce the pressure loss (Δ P), the length of pore 80 is wanted and can be made it can keep the absorption of electronic device E by the negative pressure in this pressure loss maintenance vacuum chamber 90.
By the way, the pressure loss Δ P that produces in pore 80 when establishing pipe friction coefficient with the pore tube wall and be λ, can be calculated by the relational expression between the bore d of the length L of following pore 80 and pore 80.
And v is the mean flow rate of fluid, and g is an acceleration of gravity.
ΔP=λ(L/d)(v 2/2g)
The length of pore 80 is preferably big than the length L of obtaining like this.Length is less than L, and is little in the pressure loss of the pore 80 that is communicated with untight peristome, can not keep the needed attraction of attract electrons device, if can not make adsorption plane 71a is the closed allround state, then can not adsorb.
Below to using above-mentioned electronic parts mounting device 10 that the order that electronic device E is assemblied on the real device, circuit board 15a is described.
By trave lling girder 18 is moved on Y direction along each guide rail 17, assembly head 16 is moved on X-direction along the guide rail 19 that is arranged on the trave lling girder 18,2 assembly heads 16 that are arranged on 1 electronic parts mounting device 10 are moved in the horizontal direction.As shown in the figure, in the occasion that is provided with 2 assembly heads 16, control moving of its horizontal direction respectively, so that assembly head 16 can not interfered mutually.
Each assembly head 16 at first moves to the assigned position of device supply unit 14, makes any one location, upper end at the electronic device E of regulation in 8 accessory retainers 24 that are arranged on the assembly head 16.Under this state, make and 24 corresponding cylinder 35 actions of this accessory retainer, by drive rod 37 quill shaft 23 is moved down.Then, CD-ROM drive motor 31 makes and moves up and down plate 29 and move down.The generation vacuum that is transported to the regulation in liquid-jet vacuum pump 45 in the official hour control signal is with electromagnetically operated valve 62, and compressed air supplies to injection portion 64, and air entry 46 becomes negative pressure state.
Made by cylinder 35 after quill shaft 23 moves down, by by motor 31 quill shaft 23 being moved down, the front end of suction nozzle 25 contacts with electronic device E, and can make suction nozzle 25 contact at leisure this moment, can prevent that suction nozzle 25 is applied to impulsive force on the electronic device E.Error between the stop position of suction nozzle 25 front ends and the electronic device E surface, the spring force rising of revolting springs 42 owing to quill shaft 23 is absorbed.If suction nozzle 25 contacts with the surface of electronic device E, then electronic device E is by flowing into inner air from its front end, and vacuum suction is at the front end of suction nozzle 25.
Then, make motor 31 reverse rotations, make to move up and down plate 29 and move up, simultaneously, the compressed air in the cylinder 35 are discharged to the outside, therefore, drive rod 37 is moved up, quill shaft 23 is moved up by the spring force of draft helical spring 44.Carrying out this when moving up, also can drive simultaneously and move up and down plate 29 and make cylinder 35 actions.So, when accessory retainer 24 is moved up, or after the end that moves up, assembly head 16 is moved in the horizontal direction, make assembly head 16 stop at the assigned position of real device, circuit board 15a.
Under this state, keep the quill shaft 23 of electronic device E to move down by similarly making with above-mentioned occasion, electronic device E can be configured on the real device, circuit board 15a.Absorption remains on the electronic device E on the suction nozzle 25, by connecting destruction vacuum shown in Figure 11 with electromagnetically operated valve 63, it can be unloaded from suction nozzle 25, is placed on the real device, circuit board 15a.
Using clamping hand 26 occasions, destroying vacuum with electromagnetically operated valve 63, compressed air is supplied to clamping hand 26, can hold and keep electronic device E by connecting at official hour, disconnecting as accessory retainer 24.Make 26 actions of clamping hand and destroying vacuum, and changing the occasion of the compressed-air actuated amount that supplies to air entry 46, adjusting choke valve 67.
Though more than particularly the invention that the inventor proposes is illustrated according to the form of implementing, the present invention is not limited to above-mentioned form, can carry out various changes designs certainly in the scope that does not break away from its main aim.
For example, suction nozzle 25 of the present invention is in occasion as shown in the figure, though shown in structure tubule 73 is arranged in the outboard tube 74 close state, but shown in Figure 15 (a), also can in outboard tube 74, next door 81 be set the direction along pipe, make it form pore 80.
Have again, shown in Figure 15 (b), also can make the side of square tubule 82 bonding mutually, on the porous area of square aperture, form adsorption plane 71a.
Have again, though can make the bore of many tubules 73 be identical respectively bore,, even use the tubule 73 of different bores also to have no relations.For example, also bigbore tubule 73 can be configured in the central part in the outboard tube 74, dispose a plurality of small-bore tubules 73 along the circumferential part of this tubule 73.
In addition, though electronic parts mounting device of the present invention is used for multiple electronic device E is assemblied in real device, circuit board 15a in illustrated occasion, but, even with breadboard as being assembled parts, specific electronic device is assembled superincumbent occasion, also can use the present invention.
In addition, though on 1 assembly head 16, be provided with 8 quill shafts 23,, be not limited to 8, can set for arbitrarily and count.In addition, in illustrated occasion, though accessory retainer 24 is installed in as the bottom of quill shaft 23 that moves up and down axle, utilize the hole in the quill shaft 23, guiding makes the fluid of accessory retainer 24 actions, but, also can not make axle for hollow, directly the accessory retainer 24 that is installed in its bottom is supplied with fluids with flexible pipe etc.
According to the present invention, suction nozzle is under the state that the part of adsorption plane peristome is closed, the needed negative pressure of absorption in the vacuum chamber, be by with tubule that the not closed peristome of adsorption plane is communicated with in the pressure loss that produces keep, so electronic device can be adsorbed on the part of adsorption plane.
Because suction nozzle is designed under the state that the part at the adsorption plane peristome is closed, the needed negative pressure of absorption in the vacuum chamber, be by with tubule that the not closed peristome of adsorption plane is communicated with in the pressure loss that produces keep, so, also can the attract electrons device even do not make whole adsorption planes be in closed state.

Claims (4)

1. suction nozzle, be installed in the electronic device that the lower end, absorption and the maintenance that move up and down axle that can be arranged on movably freely up and down on the assembly head are housed in the electronic device supply unit, above-mentioned assembly head can above the above-mentioned device supply unit and assembly above between, move freely in the horizontal direction, it is characterized in that:
Have the suction nozzle body, be provided with the adsorption plane that can adsorb above-mentioned electronic device in the lower end, be provided with the connected surface with vacuum chamber in the upper end, above-mentioned vacuum chamber is arranged on above-mentioned moving up and down on the axle,
On the said suction nozzle body, be formed with respectively a plurality of pores that above-mentioned adsorption plane and above-mentioned connected surface are communicated with,
Under can not be, make in the above-mentioned vacuum chamber by the pressure loss that flow into the air in the above-mentioned vacuum chamber by untight pore to keep negative pressure state by the state of above-mentioned electronic device that is adsorbed on the above-mentioned adsorption plane with all above-mentioned pore sealings.
2. the suction nozzle of putting down in writing as claim 1 is characterized in that:
Form the said suction nozzle body by outboard tube and many tubules that are assembled in wherein, in each tubule, form pore each other with tubule.
3. the electronic device that will be contained in the device supply unit is assemblied in the electronic parts mounting device on the assembly, it is characterized in that: have:
Can above the above-mentioned device supply unit and above-mentioned assembly above between, the assembly head that moves freely in the horizontal direction;
Be installed in the suction nozzle that can be arranged on the lower end that moves up and down axle on the above-mentioned assembly head up and down freely movably;
Said suction nozzle has the suction nozzle body, and the said suction nozzle body is provided with the adsorption plane that can adsorb above-mentioned electronic device in the lower end, is provided with and is arranged on the above-mentioned connected surface that moves up and down the vacuum chamber on the axle in the upper end,
The said suction nozzle body is formed with respectively a plurality of pores that above-mentioned adsorption plane and above-mentioned connected surface are communicated with,
Under can not be, make in the above-mentioned vacuum chamber by the pressure loss that flow into the air in the above-mentioned vacuum chamber by untight pore to keep negative pressure state by the state of above-mentioned electronic device that is adsorbed on the above-mentioned adsorption plane with all above-mentioned pore sealings.
4. the electronic parts mounting device of putting down in writing as claim 3 is characterized in that:
Form the said suction nozzle body by outboard tube and many tubules that are assembled in wherein, in each tubule, form pore each other with tubule.
CN 99816893 1999-09-08 1999-09-08 Suction nozzle and electronic parts mounting device Pending CN1367729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 99816893 CN1367729A (en) 1999-09-08 1999-09-08 Suction nozzle and electronic parts mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 99816893 CN1367729A (en) 1999-09-08 1999-09-08 Suction nozzle and electronic parts mounting device

Publications (1)

Publication Number Publication Date
CN1367729A true CN1367729A (en) 2002-09-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 99816893 Pending CN1367729A (en) 1999-09-08 1999-09-08 Suction nozzle and electronic parts mounting device

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CN (1) CN1367729A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101850342A (en) * 2010-04-20 2010-10-06 合肥美亚光电技术有限责任公司 Removal device for material separator
CN101471276B (en) * 2007-12-28 2011-04-20 京元电子股份有限公司 Flat suction nozzle and chip fetching/laying machine as well as semiconductor test method thereof
CN103338623A (en) * 2013-06-26 2013-10-02 东莞市明迪精密机械设备有限公司 Component inserter with overhead horizontal slide rails
CN103338625A (en) * 2013-06-26 2013-10-02 东莞市明迪精密机械设备有限公司 Component inserter with double overhead machine heads
CN108136596A (en) * 2015-08-26 2018-06-08 伯克希尔格雷股份有限公司 The system and method that vacuum valve module for end effector is provided
CN108350925A (en) * 2015-11-11 2018-07-31 雅马哈发动机株式会社 Shaft device, mounting head, surface mounting apparatus
US11865700B2 (en) 2018-07-27 2024-01-09 Berkshire Grey Operating Company, Inc. Systems and methods for efficiently exchanging end effector tools

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101471276B (en) * 2007-12-28 2011-04-20 京元电子股份有限公司 Flat suction nozzle and chip fetching/laying machine as well as semiconductor test method thereof
CN101850342A (en) * 2010-04-20 2010-10-06 合肥美亚光电技术有限责任公司 Removal device for material separator
CN103338623A (en) * 2013-06-26 2013-10-02 东莞市明迪精密机械设备有限公司 Component inserter with overhead horizontal slide rails
CN103338625A (en) * 2013-06-26 2013-10-02 东莞市明迪精密机械设备有限公司 Component inserter with double overhead machine heads
CN103338625B (en) * 2013-06-26 2016-06-15 东莞市明迪精密机械设备有限公司 Double-head overhead type inserter
CN108136596A (en) * 2015-08-26 2018-06-08 伯克希尔格雷股份有限公司 The system and method that vacuum valve module for end effector is provided
CN108136596B (en) * 2015-08-26 2021-08-24 伯克希尔格雷股份有限公司 Systems and methods for providing a vacuum valve assembly for an end effector
US11185996B2 (en) 2015-08-26 2021-11-30 Berkshire Grey, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
US11660763B2 (en) 2015-08-26 2023-05-30 Berkshire Grey Operating Company, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
CN108350925A (en) * 2015-11-11 2018-07-31 雅马哈发动机株式会社 Shaft device, mounting head, surface mounting apparatus
US11865700B2 (en) 2018-07-27 2024-01-09 Berkshire Grey Operating Company, Inc. Systems and methods for efficiently exchanging end effector tools

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