JP2009262287A - Suction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction device reduced in size and noise by eliminating the use of an ejector. <P>SOLUTION: This suction device includes: a motor 200; a crank mechanism 300 having an input end connected to the motor 200; a cylinder 400; a cylinder head 500 in which a suction passage 504 communicating with a suction chamber 505 is formed and which has, at the end of the suction passage 504, a check valve 502 for suction air which is opened when the negative pressure in the suction chamber 505 acts thereon and closed when the positive pressure acts thereon; a diaphragm pump 600 which is so formed as to change the pressure in the suction chamber 505 of the cylinder head 500 by a piston 603 connected to the output end of the crank mechanism 300, and vertically moving in the cylinder 400, and having an exhaust check valve 602 which is closed when the negative pressure in the suction chamber 505 acts on the end of an exhaust passage 613 formed in the piston 603 and opened when the positive pressure acts thereon; and a vacuum pad 700 attached to the cylinder head 500. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an adsorption device.

  The adsorption device is attached to an assembly device of a production line such as a transportation device or an electric device in order to hold the object to be adsorbed. In this adsorption device, high-pressure air is sent from an external pump to an ejector through a hose, and the ejector generates a high vacuum adsorption force.

Incidentally, Patent Document 1 discloses using a diaphragm pump as a vacuum pump. However, it does not disclose what kind of configuration is specifically used. Moreover, the diaphragm pump is used to clean the adsorption surface.
JP 2000-21963 A

Thus, since the conventional adsorption | suction apparatus is a structure which sends high pressure air from an external pump to an ejector with a hose, and generates a high vacuum adsorption force with an ejector, it cannot be reduced in size. Moreover, since the ejector is used, the noise is large.
An object of the present invention is to provide an adsorption device that is small in size and low in noise.

The adsorption device according to the present invention is:
A motor,
A crank mechanism having an input end coupled to the motor;
A cylinder,
A cylinder head having an intake check valve that is opened when a negative pressure in the intake chamber is applied to the end of the intake passage and is closed when a positive pressure is applied;
The piston is connected to the output end of the crank mechanism and moves up and down in the cylinder to change the pressure in the intake chamber of the cylinder head, and at the end of the exhaust passage formed in the piston, A diaphragm pump having an exhaust check valve that is closed when a negative pressure in the intake chamber acts and opened when a positive pressure acts;
A vacuum pad provided on the cylinder head, and when adsorbing the object to be adsorbed, the piston is lifted by the driving force of the motor to suck the air in the vacuum pad, and the intake chamber of the cylinder head And closing the exhaust side check valve, opening the intake side check valve, guiding the air in the vacuum pad to the intake path of the cylinder head, and taking the air into the intake chamber;
In order to exhaust the air in the intake chamber, the piston is pushed down by the driving force of the motor to increase the pressure in the intake chamber, close the intake side check valve, open the exhaust side check valve, and A step of guiding indoor air to the exhaust passage of the piston and exhausting the air from the exhaust passage to the outside. Since it is not the structure which sends high pressure air from an external pump to an ejector with a hose and generates a high vacuum suction force with an ejector, it can reduce in size. In addition, since a motor is used as the driving force, noise can be reduced. Further, since the suction device can omit the hose, it is easy to handle and has high reliability. Furthermore, once the inside of the vacuum pad is evacuated to a vacuum, the adsorption device can maintain the state, so that the carbon dioxide emission can be reduced with energy saving.

The above crank mechanism is
A rotary shaft that is rotatably supported by a support member that is erected on the cylinder, and that is connected to a motor and forms an input end;
A bearing in which the rotating shaft is connected to an eccentric position away from the rotation center;
It is preferable to include a link member that forms an output end, in which the bearing is fitted in one end portion and the other end portion is rotatably connected to the piston.

The above cylinder head is
A cylinder head body portion in which an intake chamber leading to the first intake passage and the first intake passage is formed;
A variable portion that extends and contracts and a piston portion that is coupled to the variable portion, and the first intake passage is opened and closed in the first chamber of the intake chamber by the vertical movement of the piston portion. An arranged check valve for intake,
The first chamber of the intake chamber is separated from the second chamber, has a second intake passage connecting the first chamber and the second chamber, and the upper end of the variable portion of the intake check valve is connected A check valve support,
When the piston is pushed down and the pressure in the intake chamber of the cylinder head increases, the piston portion of the check valve for intake moves downward due to the positive pressure in the intake chamber, and the piston portion contacts the cylinder head main body portion. Closing the first intake passage, shutting off the intake of air in the vacuum pad,
When the piston is pulled up and the pressure in the intake chamber decreases, the negative pressure in the intake chamber moves the piston portion of the check valve for intake upward, and the piston portion moves away from the cylinder head main body portion and 1 intake passage is opened, and air in the vacuum pad is led from the first intake passage through the first chamber of the intake chamber to the second intake passage to be sucked into the second chamber. Is preferred.

The above diaphragm pump is
A piston support having a first exhaust passage connecting the cavity and the outside, wherein a cavity is formed;
An exhaust check valve having a variable part extending and contracting, a piston part connected to the variable part, and an upper end of the variable part connected to an upper end of the cavity part;
A second exhaust passage connecting the intake chamber of the cylinder head and the hollow portion is formed, and the second exhaust passage is opened and closed in the hollow portion by the vertical movement of the piston portion of the exhaust check valve. A piston that is inserted and integrated as
A diaphragm provided on an outer periphery of the piston, and sandwiched between the cylinder and the cylinder head;
The piston support is connected to the output end of the crank mechanism, and when the piston is pulled up and the pressure in the intake chamber of the cylinder head decreases, the negative pressure in the intake chamber causes the piston portion of the exhaust check valve to Moving downward, the piston portion contacts the piston, closes the second exhaust passage, shuts off the exhaust of air in the intake chamber,
When the piston is pushed down to increase the pressure in the intake chamber, the positive pressure in the intake chamber causes the piston portion of the exhaust check valve to move upward, the piston portion moves away from the piston, and the second exhaust It is preferable that the passage is opened and the air in the intake chamber is led from the hollow portion to the first exhaust passage via the second exhaust passage and exhausted to the outside.

  Here, the adsorption device preferably includes a vacuum degree sensor or an adsorption confirmation detector. Not only can reliability be improved, it can be operated efficiently and current consumption can be greatly reduced.

  Furthermore, it is preferable that the above-described cylinder head is provided with a vacuum release valve. The object to be adsorbed can be easily removed.

  ADVANTAGE OF THE INVENTION According to this invention, a small and low noise adsorption apparatus can be provided.

  Hereinafter, embodiments of an adsorption device according to the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following embodiments. In addition, for clarity of explanation, the following description and drawings are simplified as appropriate. Note that, for the sake of convenience, the top, bottom, left, and right of the present invention refer to the positional relationship of the constituent members on the paper surface of FIG.

  As shown in FIG. 1, the suction device 1 includes a motor 200, a crank mechanism 300, a cylinder 400, a cylinder head 500, a diaphragm pump 600, and a vacuum pad 700.

  As the motor 200, an electric small motor can be used. The motor 200 has an output shaft 201 connected to the input end of the crank mechanism 300 via the connecting member 8, and is housed in the cover member 9 indicated by a two-dot chain line in FIG. 1 and supported by the cylinder 400. Incidentally, it is preferable to use a rechargeable battery as the power source of the motor 200. Wiring for power supply can be omitted, and handling is improved.

  The crank mechanism 300 includes a rotating shaft 301, bearings 302 and 304, and a link member 303.

  The rotating shaft 301 is rotatably supported by the support member 10 provided upright on the cylinder 400. The rotating shaft 301 forms an input end of the crank mechanism 300, and one end is connected to the motor 200.

  The bearing 302 is a bearing. The bearing 302 is fitted into the upper part of the link member 303. As shown in FIG. 2, the other end of the rotating shaft 301 is passed through and fixed to the inner ring 302a of the bearing 302 at an eccentric position away from the rotation center O of the inner ring 302a.

  The link member 303 is formed in a cam shape. The link member 303 forms an output end of the crank mechanism 300, and the lower part of the link member 303 is rotatably connected to the diaphragm pump 600.

  The bearing 304 is also a bearing. The bearing 304 is fitted in the lower part of the link member 303.

  That is, in the crank mechanism 300, when the rotation shaft 301 connected to the output shaft 201 of the motor 200 rotates, the inner ring 302a of the bearing 302 rotates eccentrically and moves the link member 303 up and down. As a result, the diaphragm pump 600 connected to the link member 303 moves up and down. At this time, the link member 303 is slightly swung left and right, but the lower part of the link member 303 is rotatably connected to the diaphragm pump 600 via the bearing 304, so that the right and left wobbling of the link member 303 is absorbed. .

  However, the crank mechanism 300 only needs to be configured to be able to convert the rotational driving force of the motor 200 into the vertical movement of the diaphragm pump 600.

  The cylinder 400 has a through hole 401 in which the diaphragm pump 600 is housed. The through hole 401 has an inner diameter and a depth at which the diaphragm pump 600 can move up and down. As shown in FIG. 3, a flange member 11 provided with a support member 10 that supports the rotating shaft 301 of the crank mechanism 300 on both sides of the bearing 302 is connected to the upper surface of the cylinder 400 by a joining means such as a bolt. ing. An exhaust hole 11 a is formed at the center of the flange member 11 so that the air sucked up by the diaphragm pump 600 is exhausted from the cylinder 400 to the outside.

  The cylinder head 500 is connected to the lower surface of the cylinder 400 so as to form a sealed space at the lower end of the cylinder 400. As shown in FIG. 3, the cylinder head 500 includes a cylinder head body 501, an intake check valve 502, and a check valve support 503.

  The cylinder head main body 501 is formed with a first intake passage 504 and an intake chamber 505 communicating with the first intake passage 504. The intake chamber 505 has a volume that allows the diaphragm pump 600 to perform intake and exhaust by a single vertical movement. The intake chamber 505 is separated into a first chamber 505a and a second chamber 505b by a check valve support 503. The inner diameter of the first chamber 505a is smaller than the inner diameter of the second chamber 505b and has a depth that allows the intake check valve 502 to move up and down satisfactorily. The inner diameter of the second chamber is substantially equal to the inner diameter of the cylinder 400.

  The intake check valve 502 is formed of an elastic member such as rubber. The intake check valve 502 includes a variable portion 506 and a piston portion 507.

  The variable portion 506 extends radially from the lower end of the tubular portion 508 that is fitted and connected to the check valve support 503. The variable portion 506 is crushed and contracted or stretched and extended to move the piston portion 507 up and down.

  The piston part 507 is connected so as to be suspended from the lower end edge of the variable part 506. The outer diameter of the piston portion 507 is smaller than the inner diameter of the first chamber 505 a and larger than the inner diameter of the first intake passage 504.

  Such an intake check valve 502 is arranged in the first chamber 505 a of the intake chamber 505 so that the first intake passage 504 is opened and closed by the vertical movement of the piston portion 507. That is, in the intake check valve 502, when negative pressure in the intake chamber 505 acts, the piston portion 507 moves upward, and the piston portion 507 moves away from the lower surface of the first chamber 505a of the cylinder head main body portion 501, and the first check portion 502 moves away. The intake passage 504 is opened. On the other hand, in the intake check valve 502, when positive pressure in the intake chamber 505 acts, the piston portion 507 moves downward, and the piston portion 507 contacts the lower surface of the first chamber 505a of the cylinder head body portion 501, and the first check portion 502 is in contact with the first check valve 502. The intake passage 504 is closed.

  The chuck valve support 503 has a fitting hole 509 in which the cylindrical portion 508 of the intake check valve 502 is fitted and connected at the center, and connects the first chamber 505a and the second chamber 505b around the fitting hole 509. A plate-like member in which the second intake passage 510 is formed, and has an outer diameter substantially equal to the inner diameter of the second chamber 505b. The check valve support 503 is connected to a portion protruding inward by a joining means such as a bolt so that the inner diameter of the first chamber 505a is smaller than the inner diameter of the second chamber 505b.

  The diaphragm pump 600 includes a piston support 601, an exhaust check valve 602, a piston 603, and a diaphragm 604. The diaphragm pump 600 is configured to change the pressure in the intake chamber 505 of the cylinder head 500 by a piston 603 that is connected to the output end of the crank mechanism 300 and moves up and down in the cylinder 400.

  As shown in FIG. 4, the piston support 601 is a cylindrical member formed with an outer diameter substantially equal to the inner diameter of the through hole 401 of the cylinder 400, and is slidably fitted into the cylinder 400. Incidentally, in the present embodiment, the bush 12 is disposed between the outer periphery of the piston support 601 and the inner periphery of the cylinder 400 so that the piston support 601 can slide in the cylinder 400 satisfactorily.

  A fitting hole 605 for fitting the lower part of the link member 303 of the crank mechanism 300 is formed in the upper part of the piston support 601. The piston support 601 is horizontally formed with a through hole 606 through which the piston pin 13 that connects the piston support 601 and the link member 303 passes. The link member 303 is fitted into the fitting hole 605 so that the bearing 304 fitted in the lower part of the link member 303 and the through hole 606 are arranged in a concentric position, and are connected to each other through the piston pin 13.

  A hollow portion 607 in which the exhaust check valve 602 and the upper portion of the piston 603 are accommodated is formed in the lower portion of the piston support 601. A fitting hole 608 in which the upper end of the exhaust check valve 602 is fitted and connected is formed on the upper surface of the cavity 607.

  The piston support 601 is formed with a first exhaust passage 609 that connects the cavity 607 and the outside.

  The exhaust check valve 602 is formed of an elastic member such as rubber. The exhaust check valve 602 includes a variable portion 610 and a piston portion 611.

  The variable portion 610 extends radially from the lower end of the cylindrical portion 612 that is fitted and connected to the fitting hole 608 of the piston support 601. This variable portion 610 is crushed and contracted, or stretched and extended to move the piston portion 611 up and down.

  The piston part 611 is connected so as to be suspended from the lower end edge of the variable part 610. The outer diameter of the piston portion 611 is smaller than the inner diameter of the cavity portion 607 and larger than the inner diameter of the second exhaust passage 613 formed in the piston 603.

  The piston 603 has an inner diameter of the second chamber 505 b of the cylinder head main body 501, that is, a large diameter portion 603 a having an outer diameter substantially equal to the outer diameter of the piston support 601, and an outer diameter substantially equal to the inner diameter of the cavity portion 607. And a small-diameter portion 603b that is fitted into the hollow portion 607 and integrated.

  A second exhaust passage 613 that connects the inside of the intake chamber 505 of the cylinder head 500 and the cavity 607 is formed in the large diameter portion 603a and the small diameter portion 603b. The small diameter portion 603b is fitted into and integrated with the cavity portion 607 so that the second exhaust path 613 is opened and closed by the vertical movement of the exhaust check valve 602 connected to the upper surface of the cavity portion 607. That is, in the exhaust check valve 602, when negative pressure in the intake chamber 505 acts, the piston portion 611 moves downward, and the piston portion 611 contacts the upper surface 603c of the piston 603 to close the second exhaust passage 613. . On the other hand, in the exhaust check valve 602, when positive pressure in the intake chamber 505 acts, the piston portion 611 moves upward, the piston portion 611 moves away from the upper surface 603c of the piston 603, and the second exhaust passage 613 is opened. .

  Incidentally, in the present embodiment, the rising portion 614 having an inner diameter larger than the outer diameter of the piston portion 611 of the exhaust check valve 602 is formed on the peripheral surface of the upper surface of the small diameter portion 603b, but may be omitted.

  The diaphragm 604 is provided on the outer periphery of the boundary portion between the large diameter portion 603a and the small diameter portion 603b of the piston 603. The diaphragm 604 is sandwiched between the cylinder 400 and the cylinder head 500, supports the diaphragm pump 600, and enables the piston 603 to move up and down. The diaphragm 604 plays a role of preventing air in the intake chamber 505 of the cylinder head 500 from leaking from other than the second exhaust path 613 of the diaphragm pump 600.

  The vacuum pad 700 is a sucker member such as rubber so that it can be satisfactorily attracted to the object to be adsorbed. The upper end of the vacuum pad 700 is fitted into and connected to the lower end of the cylinder head main body 501.

When adsorbing an object to be adsorbed using the adsorption apparatus 1 having such a configuration, the following intake process and exhaust process are repeated.
In the intake process, as shown in FIG. 5, the piston 603 of the vacuum pump 600 is pulled up by the driving force of the motor 200 in order to intake air in the vacuum pad 700. As a result, the pressure in the intake chamber 505 of the cylinder head 500 is reduced, the piston portion 611 of the exhaust check valve 602 is pulled downward by the negative pressure of the intake chamber 505, and the piston portion 611 is in contact with the upper surface 603c of the piston 603. The second exhaust passage 613 is closed, and the exhaust of air in the intake chamber 505 is shut off.

  At the same time, when the pressure in the intake chamber 505 decreases, the negative pressure in the intake chamber 505 causes the piston portion 507 of the intake check valve 502 to be lifted upward to open the first intake passage 504. At this time, since a gap T1 is secured between the outer periphery of the piston portion 507 and the inner periphery of the first chamber 505a of the intake chamber 505, the intake air is sucked from the first intake passage 504 by the negative pressure of the intake chamber 505. The air in the vacuum pad 700 is passed through the second intake passage 510 via the gap T1 around the piston portion 507 in the first chamber 505a and is sucked into the second chamber 505b.

  In the exhaust process, as shown in FIG. 6, the piston 603 of the vacuum pump 600 is pushed down by the driving force of the motor 200 in order to exhaust the air in the intake chamber 505. As a result, the pressure in the intake chamber 505 of the cylinder head 500 is increased, and the piston portion 507 of the intake check valve 502 is pushed downward by the positive pressure of the intake chamber 505 to close the first intake passage 504.

  At the same time, when the pressure in the intake chamber 505 increases, the piston portion 611 of the exhaust check valve 602 is lifted upward by the positive pressure in the intake chamber 505, and the piston portion 611 moves away from the upper surface 603 c of the piston 603 to form the second exhaust. The path 613 is opened. At this time, a gap T2 is secured between the outer periphery of the piston portion 611 and the inner periphery of the piston support 601 (in this embodiment, the inner periphery of the rising portion 614). The air sucked from the chamber 505 passes through the gap T2 around the piston portion 611, is guided to the first exhaust passage 609 of the piston support 601, and is exhausted to the outside.

  As described above, the adsorption device 1 of the above-described embodiment repeats the intake process and the exhaust process to adsorb the object to be adsorbed while making the inside of the vacuum pad 700 substantially vacuum. That is, since the high-pressure air is not sent from the external pump to the ejector by the hose and the ejector generates a high vacuum adsorption force, the size can be reduced. In addition, since a motor is used as the driving force, noise can be reduced.

  Moreover, since the adsorption | suction apparatus 1 can abbreviate | omit a hose, handling is easy and reliability is high.

  Furthermore, since the adsorption apparatus 1 can maintain the state once the inside of the vacuum pad 700 is evacuated, the carbon dioxide emission can be reduced with energy saving.

  Although not shown, the intake device 1 preferably includes a vacuum degree sensor or an adsorption confirmation detector. Not only can reliability be improved, it can be operated efficiently and current consumption can be greatly reduced.

  Moreover, it is preferable that the adsorption device 1 includes the vacuum release valve 14 such as an electromagnetic valve in the cylinder head 500. The object to be adsorbed can be easily removed.

  The suction device 1 can be suitably used for, for example, an automobile window glass reversing device, a positioning device, or an attachment handle. Moreover, as shown in FIG. 7, it can use suitably for the handling jig 15 of a robot. Moreover, it can be used for the window sticking backup jig 16 as shown in FIG. 8, or can be used for the simple hand 17 as shown in FIG.

  As mentioned above, although embodiment of the adsorption | suction apparatus which concerns on this invention was described, it can change in the range which is not restricted to said structure and does not deviate from the technical idea of this invention.

It is sectional drawing which showed the adsorption | suction apparatus of this invention. It is the side view which showed the link mechanism periphery. It is the disassembled perspective view which showed the cylinder and the cylinder head schematically. It is the disassembled perspective view which showed the crank mechanism and the diaphragm pump schematically. It is sectional drawing which showed the suction process of the adsorption | suction apparatus. It is sectional drawing which showed the exhaust process of the adsorption | suction apparatus. It is the perspective view which showed the form which used the adsorption | suction apparatus for the handling jig of the robot. It is the perspective view which showed the form which used the adsorption | suction apparatus for the window sticking backup jig. It is the side view which showed the form which used the adsorption | suction apparatus for the simple hand.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Adsorber 14 Vacuum release valve 200 Motor 201 Output shaft 300 Crank mechanism 301 Rotating shaft 303 Link member 400 Cylinder 500 Cylinder head 501 Cylinder head main body 502 Intake check valve 503 Check valve support 504 First intake passage 505 Intake chamber 505a First chamber 505b Second chamber 506 Variable portion 507 Piston portion 510 Second intake passage 600 Diaphragm pump 601 Piston support 602 Exhaust check valve 603 Piston 604 Diaphragm 607 Hollow portion 609 First exhaust passage 610 Variable portion 611 Piston portion 613 Second exhaust path 700 Vacuum pad

Claims (6)

A motor,
A crank mechanism having an input end coupled to the motor;
A cylinder,
A cylinder head having an intake check valve that is opened when a negative pressure in the intake chamber is applied to the end of the intake passage and is closed when a positive pressure is applied;
The piston is connected to the output end of the crank mechanism and moves up and down in the cylinder to change the pressure in the intake chamber of the cylinder head, and at the end of the exhaust passage formed in the piston, A diaphragm pump having an exhaust check valve that is closed when a negative pressure in the intake chamber acts and opened when a positive pressure acts;
A vacuum pad provided on the cylinder head, and when adsorbing the object to be adsorbed, the piston is lifted by the driving force of the motor to suck the air in the vacuum pad, and the intake chamber of the cylinder head And closing the exhaust side check valve, opening the intake side check valve, guiding the air in the vacuum pad to the intake path of the cylinder head, and taking the air into the intake chamber;
In order to exhaust the air in the intake chamber, the piston is pushed down by the driving force of the motor to increase the pressure in the intake chamber, close the intake side check valve, open the exhaust side check valve, and Directing indoor air to the exhaust path of the piston and exhausting the air from the exhaust path;
Repeat the adsorption device. The crank mechanism is
A rotary shaft that is rotatably supported by a support member that is erected on the cylinder, and that is connected to a motor and forms an input end;
A bearing in which the rotating shaft is connected to an eccentric position away from the rotation center;
The link member which comprises an output end, in which the bearing is inserted in one end, and the other end is rotatably connected to the piston. Adsorption device. The cylinder head is
A cylinder head body portion in which an intake chamber leading to the first intake passage and the first intake passage is formed;
A variable portion that extends and contracts and a piston portion that is coupled to the variable portion, and the first intake passage is opened and closed in the first chamber of the intake chamber by the vertical movement of the piston portion. An arranged check valve for intake,
The first chamber of the intake chamber is separated from the second chamber, has a second intake passage connecting the first chamber and the second chamber, and the upper end of the variable portion of the intake check valve is connected A check valve support,
When the piston is pushed down and the pressure in the intake chamber of the cylinder head increases, the piston portion of the check valve for intake moves downward due to the positive pressure in the intake chamber, and the piston portion contacts the cylinder head main body portion. Closing the first intake passage, shutting off the intake of air in the vacuum pad,
When the piston is pulled up and the pressure in the intake chamber decreases, the negative pressure in the intake chamber moves the piston portion of the check valve for intake upward, and the piston portion moves away from the cylinder head main body portion and 1 intake passage is opened, and air in the vacuum pad is led from the first intake passage through the first chamber of the intake chamber to the second intake passage to be sucked into the second chamber. The adsorption device according to claim 1 or 2, characterized by the above. The diaphragm pump is
A piston support having a first exhaust passage connecting the cavity and the outside, wherein a cavity is formed;
An exhaust check valve having a variable part extending and contracting, a piston part connected to the variable part, and an upper end of the variable part connected to an upper end of the cavity part;
A second exhaust passage connecting the intake chamber of the cylinder head and the hollow portion is formed, and the second exhaust passage is opened and closed in the hollow portion by the vertical movement of the piston portion of the exhaust check valve. A piston that is inserted and integrated as
A diaphragm provided on an outer periphery of the piston, and sandwiched between the cylinder and the cylinder head;
The piston support is connected to the output end of the crank mechanism, and when the piston is pulled up and the pressure in the intake chamber of the cylinder head decreases, the negative pressure in the intake chamber causes the piston portion of the exhaust check valve to Moving downward, the piston portion contacts the piston, closes the second exhaust passage, shuts off the exhaust of air in the intake chamber,
When the piston is pushed down to increase the pressure in the intake chamber, the positive pressure in the intake chamber causes the piston portion of the exhaust check valve to move upward, the piston portion moves away from the piston, and the second exhaust The passage is opened, and the air in the intake chamber is led from the hollow portion to the first exhaust passage via the second exhaust passage and exhausted to the outside. 4. The adsorption device according to any one of items 3.   The adsorption device according to any one of claims 1 to 4, wherein the adsorption device includes a vacuum degree sensor or an adsorption confirmation detector.   The suction device according to claim 1, wherein the cylinder head includes a vacuum release valve.

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