KR100806949B1 - 직진형 연마방법 및 장치 - Google Patents

직진형 연마방법 및 장치 Download PDF

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Publication number
KR100806949B1
KR100806949B1 KR1020067019958A KR20067019958A KR100806949B1 KR 100806949 B1 KR100806949 B1 KR 100806949B1 KR 1020067019958 A KR1020067019958 A KR 1020067019958A KR 20067019958 A KR20067019958 A KR 20067019958A KR 100806949 B1 KR100806949 B1 KR 100806949B1
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KR
South Korea
Prior art keywords
workpiece
polishing
straight
surface plate
flat surface
Prior art date
Application number
KR1020067019958A
Other languages
English (en)
Korean (ko)
Other versions
KR20060132954A (ko
Inventor
헤이지 야수이
Original Assignee
도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 filed Critical 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬
Publication of KR20060132954A publication Critical patent/KR20060132954A/ko
Application granted granted Critical
Publication of KR100806949B1 publication Critical patent/KR100806949B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020067019958A 2004-03-31 2005-03-29 직진형 연마방법 및 장치 KR100806949B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004105655 2004-03-31
JPJP-P-2004-00105655 2004-03-31

Publications (2)

Publication Number Publication Date
KR20060132954A KR20060132954A (ko) 2006-12-22
KR100806949B1 true KR100806949B1 (ko) 2008-02-22

Family

ID=35063594

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067019958A KR100806949B1 (ko) 2004-03-31 2005-03-29 직진형 연마방법 및 장치

Country Status (7)

Country Link
US (1) US20070202777A1 (ja)
EP (1) EP1745888A4 (ja)
JP (1) JP4472694B2 (ja)
KR (1) KR100806949B1 (ja)
CN (1) CN1929954B (ja)
TW (1) TWI271261B (ja)
WO (1) WO2005095053A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101249632B (zh) * 2008-03-20 2010-06-09 沈阳材佳机械设备有限公司 往复直线加旋转运动研磨抛光装置
US8684791B2 (en) * 2011-11-09 2014-04-01 Alvin Gabriel Stern Linear, automated apparatus and method for clean, high purity, simultaneous lapping and polishing of optics, semiconductors and optoelectronic materials
US9950404B1 (en) 2012-03-29 2018-04-24 Alta Devices, Inc. High throughput polishing system for workpieces

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6080559A (ja) 1983-10-12 1985-05-08 Mitsubishi Metal Corp 研磨装置
JPH0852652A (ja) * 1994-08-09 1996-02-27 Ontrak Syst Inc リニアポリシャ及び半導体ウエハ平滑化方法
JPH08195364A (ja) * 1994-10-11 1996-07-30 Ontrak Syst Inc 半導体ウェーハを研磨するための研磨パッドクラスタ
JPH10249720A (ja) 1997-03-13 1998-09-22 Kobe Steel Ltd 平板状工作物のポリッシング加工方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144354B (en) * 1983-07-15 1987-03-11 Helical Springs Limited Grinding apparatus
US5371973A (en) * 1992-09-30 1994-12-13 Western Atlas Inc. Grinding machine utilizing multiple, parallel, abrasive belts simultaneously grinding surfaces on a workpiece
US6241583B1 (en) * 1999-02-04 2001-06-05 Applied Materials, Inc. Chemical mechanical polishing with a plurality of polishing sheets
US6626744B1 (en) * 1999-12-17 2003-09-30 Applied Materials, Inc. Planarization system with multiple polishing pads
US6422929B1 (en) * 2000-03-31 2002-07-23 Taiwan Semiconductor Manufacturing Co., Ltd. Polishing pad for a linear polisher and method for forming
US20040137830A1 (en) * 2002-12-24 2004-07-15 Kazumasa Ohnishi Lapping method and lapping machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6080559A (ja) 1983-10-12 1985-05-08 Mitsubishi Metal Corp 研磨装置
JPH0852652A (ja) * 1994-08-09 1996-02-27 Ontrak Syst Inc リニアポリシャ及び半導体ウエハ平滑化方法
JPH08195364A (ja) * 1994-10-11 1996-07-30 Ontrak Syst Inc 半導体ウェーハを研磨するための研磨パッドクラスタ
JPH10249720A (ja) 1997-03-13 1998-09-22 Kobe Steel Ltd 平板状工作物のポリッシング加工方法

Also Published As

Publication number Publication date
JP4472694B2 (ja) 2010-06-02
EP1745888A4 (en) 2008-01-02
US20070202777A1 (en) 2007-08-30
JPWO2005095053A1 (ja) 2008-07-31
CN1929954A (zh) 2007-03-14
WO2005095053A1 (ja) 2005-10-13
CN1929954B (zh) 2011-12-14
KR20060132954A (ko) 2006-12-22
TW200531781A (en) 2005-10-01
TWI271261B (en) 2007-01-21
EP1745888A1 (en) 2007-01-24

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