KR100803728B1 - Boat transferring apparatus for unloading handler for semiconductor package - Google Patents

Abstract

A boat transfer apparatus of a semiconductor package unloading handler is provided to minimize error occurrence in separating a semiconductor package of a boat by an unloading picker by continuously transferring the boat to a work position and a boat collect position of the unloading picker while semiconductor packages are lifted upward by a carrier block. At least one transfer block(45,46) transfers horizontally between first and second positions of the main body of a handler, capable of transferring vertically. At least one carrier block(40a,40b) is coupled to a boat by an ascending operation in the first position of the main body and pulls the boat to transfer horizontally, fixed to the transfer block. The carrier block descends in the second position of the main body to be decoupled from the boat. A guide pin(43) is installed in the transfer block, capable of transferring vertically and elastically and frequently appearing to the upper surface of the carrier block. When a plurality of guide pins are placed on the carrier block while being separated from the carrier block by a predetermined distance, the guide pin guides the boats, coming in contact with the inner sides of the boats. The transfer block and the carrier block can be incorporated.

Description

Boat Transferring Apparatus for Unloading Handler for Semiconductor Package

1 is a plan view schematically showing the overall configuration of a semiconductor package unloading handler to which the boat transport apparatus according to an embodiment of the present invention is applied

2 is an enlarged plan view illustrating a configuration of an alignment unit of the handler of FIG. 1;

3A and 3B are side views illustrating a configuration of an alignment unit of the handler of FIG. 1.

4 is a plan view illustrating an alignment operation performed in the alignment unit of the handler of FIG. 1.

5A and 5B are front views sequentially illustrating alignment operations performed in the alignment unit of the handler of FIG. 1.

6 and 7 are side views showing a state in which the boat is coupled to the carrier block constituting the boat transport apparatus in the handler of FIG.

8 is a plan view showing the configuration of the boat transport apparatus of the handler of FIG.

9 is a cross-sectional view taken along line AA ′ of FIG. 8;

10 is a plan view showing another operating state of the boat conveying apparatus of the handler of FIG.

11 is a cross-sectional view taken along the line B-B 'of FIG.

FIG. 12 is a cross-sectional view corresponding to FIG. 11 and showing a state converted into a carrier block for handling a large boat; FIG.

13 is a side view showing the configuration of the boat recovery portion of the handler of FIG.

Figure 14 is a view similar to Figure 13, a side view showing the operation of the boat feeding unit of the boat recovery unit

Figure 15 is a side view showing the lifting operation of the boat feeding unit of the boat recovery unit

16 is a plan view of the boat recovery portion of the handler of FIG.

17 is a plan view of the boat recovery portion of the handler of FIG. 1, showing a horizontal movement operation of the magazine mounting portion.

Explanation of symbols on the main parts of the drawings

1: curing device 2: boat pipe conveyor

3: gate stopper 4: boat detection sensor

5: pneumatic cylinder 10: main body

20: alignment unit 21, 22: first and second alignment unit

23: Base block 24: Y-axis guide frame

25a, 25b: 1st and 2nd conveyor belt 26a, 26b: 1st and 1st alignment bar

26c: alignment bar 27a, 27b: first and second pneumatic cylinders

29: stopper 30: transfer unit

31, 32: 1st and 2nd guide rail 33: Central guide rail

35: rail fixing plate 40a, 40b: first and second carrier blocks

41: support jig 42: support rib

43: guide pin 44: spring

45, 46: first and second moving blocks 51, 52: first and second unloading picker

53, 54: 1,2 picker frame 55: pickup nozzle

70: imaging device 80: unloading unit

90: boat recovery unit 91: boat feeding unit

95: magazine mounting portion 96: magazine

911: lifting block 912: rail

913a, 913b: feeding roller 913c: feeding roller motor

914: Pusher 916: Pusher Block

917: pneumatic cylinder 918: tension spring

919: pusher push pin 921: elevating guide frame

922: lifting slide block 971: horizontal guide frame

972: horizontal slide block B: boat

P: Semiconductor Package T: Tray

The present invention relates to a handler for unloading a semiconductor package into a tray. More particularly, the present invention relates to a semiconductor package unloading handler for transferring a completed semiconductor package mounted on a boat to a tray in a semiconductor package manufacturing process. The present invention relates to a boat conveying apparatus for a semiconductor package unloading handler, which enables to quickly and efficiently transfer a housed boat to a predetermined position on the handler.

In general, a semiconductor package is subjected to a process of molding a resin paper on an upper surface of a semiconductor substrate after attaching a semiconductor chip having a high integrated circuit such as a transistor and a capacitor formed on a semiconductor substrate made of silicon. After the molding process, a cutting device is cut into individual semiconductor package units, that is, a singulation process. After the singulation process, the semiconductor packages are made of a ball grid array (BGA), which acts as a lead frame on the lower surface of the semiconductor substrate, to be energized with the chip, and then placed on a temporary tray made of a heat-resistant metal called a boat. It is attached to the curing apparatus, and is completed by heating and curing in the curing apparatus. The completed semiconductor packages are placed in a semiconductor package unloading handler, stored in a tray, and shipped after being tested for performance by an inspection apparatus.

The conventional semiconductor package unloading handler for accommodating the semiconductor package completed in the process of manufacturing the semiconductor package in the tray as described above, aligns while receiving the boat equipped with the semiconductor packages through the curing device, and arranges the boat carrier After aligning by putting them in a separate position, the aligned boat is put back on the conveyor line using the boat conveying device and returned to the working position of the unloading picker, and then mounted on the boat using the unloading picker. The semiconductor packages are moved to a tray and mounted.

However, as described above, the conventional semiconductor package unloading handler is not only complicated to perform the alignment of the boat delivered from the curing apparatus and transfer the boat to the working position and the boat recovery position of the unloading picker, but also the alignment. It is difficult to guarantee the accuracy of the problem.

In addition, since the conventional semiconductor package unloading handler is configured to handle only a boat for one type of semiconductor package, in order to perform tray storing operation for another type of semiconductor package, the other package is used to unload the semiconductor package. I had to do the job.

The present invention is to solve the above problems, an object of the present invention is to efficiently transport the boat containing the semiconductor package to the working position and the boat recovery position of the unloading picker, the semiconductor package of the boat by the unloading picker It is to provide a boat conveying device of the semiconductor package unloading handler that can minimize the occurrence of errors in the separation operation.

Another object of the present invention is to provide a semiconductor package that can improve the compatibility of the handler by handling the two boats having different sizes in one handler through the simple removal or replacement of components It is to provide a boat carrier of the unloading handler.

According to one embodiment of the present invention for achieving the above object, at least one movement that is horizontally moved to any position between the first position and the second position of the main body of the handler and installed to move up and down A block; Fixedly coupled to the moving block, coupled with the boat by an ascending operation in the first position of the main body, and dragging and moving the boat horizontally, and descending at a second position of the main body so that the engagement with the boat is released; One carrier block; It is installed to be movable up and down elastically in the movable block, and is formed to be floated on the upper surface of the carrier block, when a plurality of guide pins seated on the upper surface of the carrier block a predetermined distance apart, the boat between the boats Provided is a boat conveying apparatus for a semiconductor package unloading handler comprising a guide pin for guiding boats in contact with an inner edge of the field.

According to another embodiment of the present invention, the first guide rail and the second extending along the X-axis direction to the main body of the handler and installed side by side with a predetermined distance apart to guide the movement of the boat on which the semiconductor package is mounted. Guide rails; At least one movable block installed horizontally along the X-axis direction to an arbitrary position between the first and second positions of the main body between the first and second guide rails; It is fixedly coupled to the moving block, coupled to the boat by the operation of ascending in the first position to move the boat horizontally along the first and second guide rails, descending at the second position to engage with the boat At least one carrier block for disengaging; It is installed to be movable up and down elastically in the movable block, and is formed to be floated on the upper surface of the carrier block, when a plurality of guide pins seated on the upper surface of the carrier block a predetermined distance apart, the boat between the boats Provided is a boat conveying apparatus for a semiconductor package unloading handler comprising a guide pin for guiding boats in contact with an inner edge of the field.

Hereinafter, a preferred embodiment of a semiconductor package unloading handler according to the present invention will be described in detail with reference to the accompanying drawings.

First, the semiconductor package unloading handler according to the present invention is configured to handle two different sizes of boats by a simple conversion operation. In the following description, a relatively large size boat is referred to as a 'large boat'. The small boat is described as 'small boat'.

1 is a view showing an overall configuration of a semiconductor package unloading handler to which a boat conveying apparatus according to an embodiment of the present invention is applied. The semiconductor package unloading handler shown in this figure illustrates a configuration for handling a small boat. have.

Referring to FIG. 1, a boat-injection conveyor 2 in which boats B (see FIG. 2), in which a semiconductor package P is mounted, are mounted from an external device, for example, the curing apparatus 1, on one side of the main body 10. Is placed. And the alignment part 20 which is aligned after the boat B conveyed from the said boat input conveyor 2 is seated on one side of the said main body 10 is arrange | positioned, and is aligned to one side of this alignment part 20 The transmission part 30 which the boat B transmitted from the part 20 transfers on the 1st and 2nd carrier blocks 40a and 40b mentioned later is installed in an inline shape. Between the alignment unit 20 and the delivery unit 30 to limit the movement of the boat (B) to stop on the alignment unit 20 without being transported to the transfer unit 30 in an unaligned state The stopper 29 is installed so that the motor 29a can rotate up and down.

Imaging to detect the mounting direction of each semiconductor package by vision inspection of a specific display of the semiconductor packages of the boat B carried by the first and second carrier blocks 40a and 40b on one side of the transfer unit 30. The device 70 is installed to be movable in the Y-axis direction. The imaging device can be configured using, for example, a CCD camera or the like.

In the middle of the main body 10, the semiconductor package is picked up by a vacuum suction method from the boat B carried by the first and second carrier blocks 40a and 40b, and the unloading part ( The first and second unloading pickers 51 and 52 which are accommodated in the empty tray T of 80 are provided.

The first and second unloading pickers 51 and 52 are horizontally moved along the first and second picker frames 53 and 54 extending in the Y-axis direction, respectively, and the semiconductors are disposed on the first and second carrier blocks 40a and 40b. The package is returned to the unloading unit 80.

In addition, the first and second unloading pickers 51 and 52 pick up or lower the semiconductor package while two pick-up nozzles 55 are lifted up and down on one picker head. 55 may be configured to reverse the orientation of the semiconductor package horizontally / vertically while reciprocating 90 degrees.

Meanwhile, on the other side of the main body 10, the empty boat B, which is transported after the semiconductor packages are separated by the first and second unloading pickers 51 and 52, is stored in the boat storage magazine 96. The boat recovery unit 90 is installed.

The boat recovery unit 90 includes a magazine mounting unit 95 in which a plurality of magazines 96 for accommodating the boat B are horizontally movable in the Y-axis direction, and up and down on one side of the magazine mounting unit 95. It is configured to be movable so that the boat feeding unit 91 for receiving the empty boat on the carrier block in a magazine in turn.

The first and second carrier blocks 40a and 40b are configured to be movable at a predetermined height up and down, and carry boats B while crossing each other.

On the other hand, between the boat input conveyor 2 and the alignment unit 20, a plurality (4 in this embodiment) for allowing or restricting the movement of the boat B from the boat input conveyor 2 to the alignment unit 20 Gate stopper (3) is provided to be movable up and down. Each of the gate stoppers 3 detects that the boat B (refer to FIG. 2) conveyed from the boat feeding conveyor 2 is in contact with the gate stopper 3 and waits for the respective gate stoppers 3. Boat detection sensor 4 for controlling the operation of the) is installed.

The first and second guide rails 31 and 32 extending along the X-axis direction from the transmission part 30 to the boat recovery part 90 are installed at an intermediate portion of the main body 10 at predetermined intervals. Guide grooves 31a and 32a in which one end portions of the boats B carried by the first and second carrier blocks 40a and 40b are inserted and guided to the first and second guide rails 31 and 32 (FIG. 8 and FIG. 9) are formed. The first and second guide rails 31 and 32 have an interval corresponding to the width of the boats large boats handled by the handler.

The alignment unit 20 is a first alignment unit 21 in which a small boat is seated and aligned among the boats handled by the handler, and a second alignment unit 22 in which another small boat B is seated and aligned. Compartment.

An alignment reference bar 26c (see FIG. 2) for detaching the boats B is installed between the first alignment unit 21 and the second alignment unit 22 in a detachable manner. If you want to handle a large boat in the alignment bar bar (26c) can be used to remove the separation. The detailed configuration and operation of this alignment unit 20 will be described in detail below.

On the other hand, the unloading unit 80 is the empty tray stacking unit 81, the empty tray (T) is loaded, and the semiconductor package (P) conveyed by the first and second unloading pickers (51, 52) The package accommodating position 82 accommodated in the tray T and the tray stacking unit 83 in which the tray T in which the semiconductor packages are all accommodated are stacked.

The empty tray stacking unit 81 separates one from the lowermost tray among the stacked empty trays and transfers it to the package storage position 82. And the said tray loading part 83 loads the tray T conveyed by the said package accommodation position 82 one by one from a lower side.

Hereinafter, each component of the handler configured as described above will be described in more detail.

2 to 3B, the boat input conveyor 2 is configured to transfer a plurality of boats B in an unaligned state from an external device such as the hardening device 1 to the alignment unit 20. It consists of a boat input conveyor extending horizontally from one end of 1) to one end of the alignment unit 20. Here, the boat input conveyor 2 is preferably formed at the same height as the first and second conveyor belts (25a, 25b) configured in the alignment unit (20).

Then, the gate stopper 3 between the boat feeding conveyor 2 and the alignment unit 20 moves up and down by a predetermined distance by a linear motion device such as a pneumatic cylinder 5 while the boat feeding conveyor 2 ), The conveyance of the boat B to the alignment unit 20 is controlled.

2 to 5b, the alignment unit 20 includes a base block 23 moving along the Y-axis guide frame 24 extending in the Y-axis direction on the main body 10. As described above, the alignment unit 20 is divided into a first alignment unit 21 and a second alignment unit 22, and the first and second alignment units 21 and 22 have a symmetrical structure. Have That is, the alignment unit 20 includes first and second conveyor belts 25a and 25b and the first and second conveyor belts 25a and 25b which are installed to drive in the X-axis direction on the base block 23. It is fixedly installed between the alignment reference bar (26c) for partitioning the first alignment unit 21 and the second alignment unit 22, and the base block 23 is installed so as to reciprocate a predetermined distance in the Y-axis direction And the first and second alignment bars 26a and 26b for pressing the boat B toward the alignment reference bar 26c and the end portions of the first and second conveyor belts 25a and 25b so as to be rotatable up and down. It consists of a stopper 29 to limit the movement of the boat (B).

The first and second alignment bars 26a and 26b reciprocate in the Y axis by a stroke defined by the first and second pneumatic cylinders 27a and 27b.

The alignment bar 26c may be detached from the base block 23 as necessary, i.e., when handling a large boat, and when it is desired to handle a small boat again, as shown in the drawings. (23) can be used in combination.

Rollers 28a for transporting the boats B on the first and second alignment parts 21 and 22 to the transmission part 30 while rotating by a motor at the ends of the first and second alignment bars 26a and 26b. 28b) is installed. The rollers (28a, 28b) is the outer peripheral surface of the boat (B), the outer peripheral surface is connected to the edge of the end of the boat (B) seated on the first and second conveyor belts (25a, 25b) to transfer the boat (B) by the rotational force 30 It acts to push towards.

6 and 7, the boat B has a plurality of holes formed in a heat resistant metal plate, and the plurality of guide ribs Br in which the semiconductor package P is seated and supported therein. ) Has a structure protruding upward.

As such, the semiconductor packages P are supported by the guide ribs Br in a state of being seated in the through hole of the boat B, so that the first and second unloading pickers 51 and 52 are mounted on the boat B. When the packages are picked up, the semiconductor package P may not be picked up properly due to interference by the guide ribs Br.

Accordingly, the semiconductor package is lifted up to the upper end of the guide rib Br at positions corresponding to the through holes of the boat B on the upper surfaces of the first and second carrier blocks 40a and 40b. A plurality of support jigs 41 are formed to protrude from the carrier block 40a, 40b to fix the position of the boat B, and support for supporting the outer periphery of the semiconductor package P on the outer circumferential surface of the support jig 41. The rib 42 is integrally formed.

As shown in FIGS. 8 to 11, the transmission part 30 is provided with a rail fixing plate 35 that crosses the upper side of the first and second guide rails 31 and 32, and the rail fixing plate 35 is provided with the rail fixing plate 35. A central guide rail 33 having two guide grooves 33a corresponding to the guide grooves 31a and 32a of the first and second guide rails 31 and 32 is fixed below the central portion.

In addition, the first and second carrier blocks 40a and 40b are installed to be movable up and down in the space between the first and second guide rails 31 and 32 and are configured to cross-move horizontally independently of each other. .

That is, the first carrier block 40a is configured to be movable horizontally along the X-axis direction and to be moved up and down at a predetermined position by a linear motion device (not shown) installed in the main body 10 (see FIG. 1). Another linear motion device (not shown) coupled to the first moving block 45 and installed on the main body 10 (see FIG. 1) on the opposite side of the first moving block 45. It is coupled to the second moving block 46 configured to move horizontally along the X-axis direction and to move up and down at a predetermined position. Of course, the first and second carrier blocks 40a and 40b are composed of the first and second moving blocks 45 and 46 separately and separated and combined on the first and second moving blocks 45 and 46. As described above, alternatively, the first and second carrier blocks 40a and 40b may be integrally formed with the first and second moving blocks 45 and 46.

Accordingly, while the first carrier block 40a or the second carrier block 40b is moved upward toward the boat recovery unit 90 in the transfer unit 30, the boat recovery unit 90 on the opposite side is moved. The second carrier block 40b or the first carrier block 40a cross-moves toward the transfer part 30 in the downwardly moved state, so that the boat B can be continuously transported.

In addition, a through hole 49 penetrating up and down is formed in an intermediate portion of the first carrier block 40a and the second carrier block 40b, and the upper and middle surfaces of the first and second moving blocks 45 and 46 are formed. The plurality of guide pins 43 exposed to the upper surface of the first carrier block 40a through the through hole 49 are installed to be movable upward and downward, and the guide pins 43 are provided below the guide pins 43. The spring 44 is elastically supported.

Each of the guide pins 43 has an inner side portion and a second alignment portion 22 of the boat B of the first alignment portion 21 when both carrier blocks 40a and 40b are moved from the transmission portion 30. The outer edges of the respective boats B are brought into close contact with the guide grooves 31a and 32a of the first and second guide rails 31 and 32, respectively, and the inner edges of the boats B are in contact with each other. Function

The reason why the guide pin 43 is elastically movable in this way is that, as shown in FIG. 9, the first carrier block 40a or the second carrier block 40b is located at the lower side of the transfer part 30. When moving upward and coupled with the boat B, the guide pin 43 moves downward while hitting the lower surface of the center guide rail 33 to upwardly move the carrier blocks 40a and 40b by the guide pin 43. This is to prevent the movement from interfering.

Of course, in the case of extending the central guide rail 33 installed in the delivery unit 30 from the end of the delivery unit 30 to the boat recovery unit 90 as described above, the guide pins 43 on each carrier block 40a, 40b. However, in this case, since the length of the center guide rail 33 may be increased, deformation such as warpage may be applied, and material cost may be high, thereby ensuring sufficient strength of the center guide rail 33 and reducing material cost. If so, this structure could be used.

In addition, the reason why the guide pin 43 is configured to be elastically movable is that, as shown in FIG. 12, the handler handles the large boat B 'and the first and second carrier blocks 40a and 40b. To convert the large carrier block 40c corresponding to the large boat B ', the lower surface of the large carrier block 40c presses the guide pins 43 so that the first and second moving blocks 45, 46) to be combined without difficulty.

Next, referring to FIGS. 13 to 17, the boat recovery unit 90 includes a boat feeding unit 91 for conveying the empty boat B on the carrier blocks 40a and 40b toward the magazine 96. The magazine mounting part 95 provided with the some magazine 96 which accommodates the empty boat B conveyed by the boat feeding unit 91 is provided. The boat feeding unit 91 is moved up and down by the lifting unit, and the magazine mounting portion 95 is configured to move horizontally in the Y-axis direction by the horizontal moving unit.

The boat feeding unit 91 is coupled to the lifting unit and the lifting block 911 to move up and down, and the first and second guide rails (31, 32) on both sides of the lower end of the lifting block (911) Two pairs of phases for moving the boat B by rotational force in contact with the upper and lower ends of the rail portion 912 and the outer ends of the boats B inserted into the guide grooves of the rail portion 912, An inner space of the magazine 96 is provided with the lower feeding rollers 913a and 913b and the boat B moving along the rail portion 912 toward the magazine 96 by the upper and lower feeding rollers 913a and 913b. And a pair of pushers 914 to fully push in.

The upper and lower feeding rollers 913a and 913b are rotatably installed at intervals of the thickness of the boat B on the upper and lower sides of the guide grooves of the rail units 912, and the upper and lower feeding members on both sides. The pairs of rollers 913a and 913b are configured to drive rotation synchronously by the feeding roller motor 913c.

In addition, the pushers 914 may be elastically rotated about the rotation shaft 914a to the pusher block 916 which moves along the pusher guide rail 915 extending in the Y-axis direction on both sides of the lifting block 911. The pusher block 916 is connected to the piston rod 917a of the pneumatic cylinder 917 to move in the Y-axis direction along the pusher guide rail 915 by the operation of the pneumatic cylinder 917. The pusher 914 is elastically connected to the pusher block 916 by a tension spring 918, and as shown in Figure 13 on the lower surface of the lifting block 911 in the state in which the piston rod 917a is contracted The tension spring 918 is tensioned by the pusher push pin 919 installed to maintain the state of being rotated upward.

Therefore, as shown in FIG. 14, when the piston rod 917a of the pneumatic cylinder 917 is extended, the pusher block 916 is moved toward the magazine 96 along the pusher guide rail 915. Accordingly, the coupling between the pusher 914 and the pusher pressing pin 919 is released, and the pusher 914 is rotated downward by the elastic force of the tension spring 918, and the end of the pusher 914 of the rail part 912 is removed. The end of the boat (B) is to be pushed.

In addition, the elevating unit is installed to move up and down along the elevating guide frame 921 is installed perpendicular to the main body 10, and the elevating guide frame 921 and the elevating block 911 of the boat feeding unit 91 And a lifting slide block 922 fixedly coupled to each other, and a linear movement device (not shown) for moving the lifting slide block 922 along the lifting guide frame 921. Here, the linear motion device may be configured using a linear motion device well known in the art, such as a linear motion device, a linear motor, such as a ball screw and a motor, a pulley and a belt and a motor.

On the other hand, the horizontal moving unit for horizontally moving the magazine mounting portion 95 is a horizontal guide frame (971) is formed to extend along the Y-axis direction in the main body 10 and to move along the horizontal guide frame (971) A horizontal slide block 972 to which the magazine mounting portion 95 is fixedly coupled thereto and a linear movement device (not shown) for horizontally moving the horizontal slide block 972 along a horizontal guide frame 971. Is done. The linear motion device of the horizontal moving unit may also be configured by using a known linear motion device such as a ball screw and a motor similarly to the linear motion device of the elevating unit described above.

Referring to the operation of the semiconductor package unloading handler configured as described above are as follows.

As shown in FIG. 2, the boats B containing the semiconductor packages are conveyed in an unaligned state from the external device such as the curing apparatus 1 through the boat feeding conveyor 2. The conveyed boats B stop just in front of the alignment unit 20 while hitting the gate stopper 3 provided at the end of the boat-loading conveyor 2. At this time, as shown in Figure 3a, the boat detection sensor 4 of the gate stopper 3 in contact with the boat (B) detects the boat (B), accordingly the base of the alignment unit 20 The block 23 moves along the Y-axis guide frame 24 so that the first alignment portion 21 moves to the gate stopper 3 detected by the boat detection sensor 4.

As shown in FIG. 3A, when the first alignment portion 21 is aligned with the gate stopper 3, the pneumatic cylinder 5 operates as shown in FIG. 3B to lower the gate stopper 3. Then, the boat B on the boat feeding conveyor 2 is transferred to the first conveyor belt 25a of the first alignment portion 21. At this time, since the width of the first alignment portion 21, that is, the width between the alignment reference bar 26c and the first alignment bar 26a is larger than the width of the boat B, the boat B is somewhat to some extent. Even when twisted and supplied, it can be smoothly conveyed onto the first alignment unit 21.

The boat B, which is transferred onto the first conveyor belt 25a of the first alignment portion 21, is restricted from and moved on the first alignment portion 21 by the stopper 29 (see FIG. 2). It is seated.

Subsequently, the base block 23 moves along the Y-axis guide frame 24 so that the second alignment portion 22 is aligned with the gate stopper 3 on which the boat B is then hit. When the second alignment portion 22 is aligned with the gate stopper 3, the gate stopper 3 is lowered in the same manner as described above so that the new boat B is connected to the second conveyor belt of the second alignment portion 22. 25b).

As described above, when the boat B is seated on the first and second alignment portions 21 and 22, the first and second pneumatic cylinders 27a and 28b may be mounted as shown in FIGS. 4 to 5B. In operation, the first and second alignment bars 26a and 26b move toward the alignment bar 26c to press the boats B toward the alignment bar 26c, thereby pushing the boats B to the alignment bar ( Align with respect to 26c).

When the boats B are aligned on the first and second alignment units 21 and 22, the stoppers 29 behind the first and second alignment units 21 and 22 rotate to move the boats B. This is allowed, and then the boats B are moved to the delivery section 30 by the operation of the rollers 28a, 28b and the first and second conveyor belts 25a, 25b.

When the boats B are moved from the first and second alignment parts 21 and 22 to the delivery part 30, as shown in FIG. 9, the outer edge of each boat B is the delivery part 30. It is inserted into the guide grooves (31a, 32a) formed in the first and second guide rails (31, 32) of the guide, the inner edge of the boat (B) is inserted into the guide groove (33a) of the center guide rail 33 You are guided.

When the boats B are positioned in the transfer unit 30, the first carrier block 40a waiting at the lower side of the transfer unit 30 is raised to be coupled to the boat B. In this case, as shown in FIG. 7, the support jig 41 of the first carrier block 40a is inserted through the through hole of the boat B, thereby raising the semiconductor packages P to the upper end of the guide rib Br. .

In addition, when the first carrier block 40a is lifted up and coupled to the boat B, as shown in FIG. 9, the guide pin 43 of the first carrier block 40a has a lower surface of the center guide rail 33. It is pressed in contact with the spring, the spring 44 is compressed.

As described above, when the boats B of the transmission unit 30 are seated and coupled to the first carrier block 40a, the first moving block 45 is the main body 10 as shown in FIGS. 8 to 11. Of the first and second unloading pickers 51 and 52 (see Fig. 1), with the first carrier block 40a holding the boat B fixed. Done. At this time, the imaging device 70 (refer to FIG. 1) reciprocates in the Y-axis direction and photographs predetermined direction marking marks (not shown) engraved on the semiconductor packages P on the first carrier block 40a. The semiconductor package P is detected in which direction the boat B is seated.

When the first carrier block 40a is out of the transmission unit 30, the contact between the guide pin 43 and the center guide rail 33 of the first carrier block 40a is released, and the guide pin 43 is The inner edge of the boat B is guided while being restored by the elastic force of the spring 44. Of course, at this time the outer edge of each boat (B) will still be stably guided by the guide grooves (31a, 32a) of the first and second guide rails (31, 32).

On the other hand, when the first carrier block 40a moves toward the first and second unloading pickers 51 and 52 as described above, the second carrier block 40b moves toward the transfer part 30. At this time, since the second carrier block 40b is moved downward, the first carrier block 40a and the second carrier block 40b are located at different heights, and thus the first carrier block 40a and the first carrier block 40b are positioned at different heights. The cross movement of the two carrier blocks 40b is possible.

Referring back to FIG. 1, when the first carrier block 40a moves to a lower position of the first unloading picker 51 and the second unloading picker 52 with the boat B fixed, The first and second unloading pickers 51 and 52 move independently along the first and second picker frames 53 and 54, and pick up the semiconductor packages P on the first carrier block 40a to receive the package storage position 82. The semiconductor package P is accommodated in the tray T waiting in the tray.

At this time, the pick-up nozzles 55 of the first and second unloading pickers 51 and 52 are clockwise or counterclockwise according to the mounting directions of the respective semiconductor packages P detected by the imaging device 70. 90 degrees or 180 degrees to rotate the semiconductor package (P) horizontally / vertically to seat on the tray (T). Of course, when the direction of the semiconductor package placed on the boat B and the direction of each semiconductor package seating groove formed in the tray T are the same, the semiconductor packages may be directly placed on the tray T without the need to rotate the pickup nozzle 55. You will be able to rest.

As described above, when the semiconductor packages P mounted on the boats B of the first carrier block 40a are separated by the first and second unloading pickers 51 and 52, the first carrier block 40a is separated. ) Moves in the Y-axis direction to the boat recovery unit 90.

In this case, as shown in FIG. 13, the boats B on the first carrier block 40a have the outer edge portion inserted into and supported by the rail portion 912 of the boat feeding unit 91, and the first carrier block ( 40a) is lowered to release the coupling with the boat (B).

In this state, as shown in FIG. 14, the upper and lower feeding rollers 913a and 913b on both sides rotate by the operation of the feeding roller motor 913c to advance the boats B toward the magazine 96. Subsequently, when the rear end of the boat B exits the upper and lower feeding rollers 913a and 913b, the piston rod 917a of the pneumatic cylinder 917 extends and the pusher 914 moves toward the magazine 96. Will move. Accordingly, while the contact between the pusher 914 and the pusher pressing pin 919 is released, the pusher 914 is rotated downward by the action of the tension spring 918, the end of the pusher 914 of each boat (B) In contact with the rear end, the boat B is completely pushed into the magazine 96.

As such, the boat feeding unit 91 pushes the empty boat B into the magazine 96 by the operation of the upper and lower feeding rollers 913a and 913b and the pusher 914. Here, the boat feeding unit 91, as shown in Figure 15, while moving up and down along the lifting guide frame 921 by the action of the lifting unit from the bottom of the magazine 96 in order (B) Push to load. Of course, in some cases, the boat feeding unit 91 may be controlled to load the boat B from the uppermost side of the magazine 96 while lifting up and down.

On the other hand, if the boat (B) is filled in the magazine 96 of any one of the magazine 96 of the magazine mounting portion 95, as shown in Figure 17, the magazine mounting portion 95 is a horizontal guide frame ( A horizontal movement along 971 is performed to continuously fill the boat B in the lateral empty magazine 96. At this time, the worker removes the filled magazines 96 from the magazine mounting portion 95, and installs a new empty magazine 96 in place to prepare for the next work.

Meanwhile, in the above-described embodiment of the semiconductor package unloading handler, two small boats B are handled at the same time to separate the semiconductor packages from the boat B and stored in the tray T.

However, when handling the large boat with such a handler, the alignment reference bar 26c of the alignment unit 20 and the center guide rail 33 of the transmission unit 30 are removed, and the first and second carriers are removed. If the magazines 96 of the blocks 40a and 40b and the magazine mounting portion 95 are replaced with those corresponding to the large boats, the large boats can be handled simply.

As described above, according to the present invention, since the boat is continuously conveyed to the working position and the boat recovery position of the unloading picker while the semiconductor packages are lifted upward by the carrier block, the semiconductor package of the boat is separated by the unloading picker. The occurrence of errors in the operation is minimized and there is an advantage that the boats can be transported quickly and easily.

In addition, since the small boat and the large boat can be selectively handled by a simple operation of replacing the carrier block on the moving block, the compatibility of the handler can be improved and the cost of purchasing the equipment can be prevented.

Claims (6)

At least one movable block which is horizontally moved to an arbitrary position between the first position and the second position of the main body of the handler and installed to be movable up and down; Fixedly coupled to the moving block, coupled with the boat by an ascending operation in the first position of the main body, and dragging and moving the boat horizontally, and descending at a second position of the main body so that the engagement with the boat is released; One carrier block; It is installed to be movable up and down elastically in the movable block, and is formed to be floated on the upper surface of the carrier block, when a plurality of guide pins seated on the upper surface of the carrier block a predetermined distance apart, the boat between the boats Boat transport apparatus of a semiconductor package unloading handler comprising a guide pin for guiding the boats in contact with the inner side of the field. A first guide rail and a second guide rail extending along the X-axis direction and installed side by side to be spaced apart from each other by the handler to guide the movement of the boat on which the semiconductor package is mounted; At least one movable block installed horizontally along the X-axis direction to an arbitrary position between the first and second positions of the main body between the first and second guide rails; It is fixedly coupled to the moving block, coupled to the boat by the operation of ascending in the first position to move the boat horizontally along the first and second guide rails, descending at the second position to engage with the boat At least one carrier block for disengaging; It is installed to be movable up and down elastically in the movable block, and is formed to be floated on the upper surface of the carrier block, when a plurality of guide pins seated on the upper surface of the carrier block a predetermined distance apart, the boat between the boats Boat transport apparatus of a semiconductor package unloading handler comprising a guide pin for guiding the boats in contact with the inner side of the field. According to claim 1 or 2, wherein the movable block and the carrier block is installed so that a plurality of independently move horizontally and vertically, so as to convey the boat while crossing each other in the space between the first position and the second position. Boat transport apparatus for a semiconductor package unloading handler, characterized in that the. 3. The boat according to claim 1 or 2, wherein the boat is formed with a plurality of through holes in which each semiconductor package is seated; And a support jig protruding from the upper surface of each carrier block to raise the semiconductor package to a predetermined height through each hole of the boat. 5. The boat conveying apparatus of claim 4, wherein a plurality of support ribs protruding the outer periphery of each semiconductor package are formed on an outer side of the support jig. The boat transport apparatus of claim 1, wherein the moving block and the carrier block are integrally formed.

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