KR20080045028A - Boat aligning apparatus of unloading handler for semiconductor package - Google Patents

Abstract

A boat aligning apparatus of an unloading handler for a semiconductor package is provided to achieve high accuracy in boat alignment and improve compatibility of the handler by allowing the handler to selectively control two boats having different sizes. A boat aligning apparatus(20) of an unloading handler for a semiconductor package comprises a base block(23), an alignment reference bar(26c), a plurality of reference bars(26a,26b), an alignment bar moving unit, and a base block moving unit. The base block is where a boat(B) carrying a semiconductor package(P) loaded from outside is mounted. The alignment reference bar is securely installed on one side of the base block. The alignment bars are installed on the base block having a predetermined space with the alignment reference bar, and is movable towards the alignment reference bar to exert pressure on the boat on the base block with respect to the alignment reference bar. The alignment bar moving unit moves the alignment bar to the alignment reference bar. The base block unit horizontally moves the base block in a direction perpendicular to a transferring direction of the boat, and allows the base block to selectively receive a plurality of boats loaded from outside.

Description

Boat Aligning Apparatus of Unloading Handler for Semiconductor Package

1 is a plan view schematically showing the configuration of a semiconductor package unloading handler to which the boat alignment device according to an embodiment of the present invention is applied;

FIG. 2 is an enlarged plan view illustrating a configuration of a boat alignment device of the handler of FIG. 1. FIG.

Figure 3a and Figure 3b is a side view showing the configuration of the boat alignment device of the handler of Figure 1

4 is a plan view illustrating the alignment operation performed in the boat alignment device of the handler of FIG.

5A and 5B are front views sequentially showing alignment operations performed in the boat alignment device of the handler of FIG.

6 and 7 are side views showing a state in which the carrier block and the boat are coupled in the handler of FIG.

8 is a plan view illustrating a configuration of a delivery unit and a carrier block of the handler of FIG. 1;

9 is a cross-sectional view taken along line AA ′ of FIG. 8;

FIG. 10 is a plan view illustrating another operating state of the transfer unit and the carrier block of the handler of FIG. 1; FIG.

11 is a cross-sectional view taken along the line B-B 'of FIG.

FIG. 12 is a cross-sectional view corresponding to FIG. 11 and showing a state converted into a carrier block for handling a large boat; FIG.

13 is a side view showing the configuration of the boat recovery portion of the handler of FIG.

Figure 14 is a view similar to Figure 13, a side view showing the operation of the boat feeding unit of the boat recovery unit

Figure 15 is a side view showing the lifting operation of the boat feeding unit of the boat recovery unit

16 is a plan view of the boat recovery portion of the handler of FIG.

17 is a plan view of the boat recovery portion of the handler of FIG. 1, showing a horizontal movement operation of the magazine mounting portion.

Explanation of symbols on the main parts of the drawings

1: curing device 2: boat pipe conveyor

3: gate stopper 4: boat detection sensor

5: pneumatic cylinder 10: main body

20: boat alignment device 21, 22: first and second alignment part

23: Base block 24: Y-axis guide frame

25a, 25b: 1st and 2nd conveyor belt 26a, 26b: 1st and 1st alignment bar

26c: alignment bar 27a, 27b: first and second pneumatic cylinders

29: stopper 30: transfer unit

31, 32: 1st and 2nd guide rail 33: Central guide rail

35: rail fixing plate 40a, 40b: first and second carrier blocks

41: support jig 42: support rib

43: guide pin 44: spring

45, 46: first and second moving blocks 51, 52: first and second unloading picker

53, 54: 1,2 picker frame 55: pickup nozzle

70: imaging device 80: unloading unit

90: boat recovery unit 91: boat feeding unit

95: magazine mounting portion 96: magazine

911: lifting block 912: rail

913a, 913b: feeding roller 913c: feeding roller motor

914: Pusher 916: Pusher Block

917: pneumatic cylinder 918: tension spring

919: pusher push pin 921: elevating guide frame

922: lifting slide block 971: horizontal guide frame

972: horizontal slide block B: boat

P: Semiconductor Package T: Tray

The present invention relates to a handler for unloading a semiconductor package into a tray. More particularly, the present invention relates to a semiconductor package unloading handler for quickly and efficiently transferring a semiconductor package completed in a semiconductor package manufacturing process into a tray. A boat aligning device for a semiconductor package unloading handler which enables the boat containing a package to be quickly and efficiently aligned and returned to the next process.

In general, a semiconductor package is subjected to a process of molding a resin paper on an upper surface of a semiconductor substrate after attaching a semiconductor chip having a high integrated circuit such as a transistor and a capacitor formed on a semiconductor substrate made of silicon. After the molding process, a cutting device is cut into individual semiconductor package units, that is, a singulation process. After the singulation process, the semiconductor packages are made of a ball grid array (BGA), which acts as a lead frame on the lower surface of the semiconductor substrate, to be energized with the chip, and then placed on a temporary tray made of a heat-resistant metal called a boat. It is attached to the curing apparatus, and is completed by heating and curing in the curing apparatus. The completed semiconductor packages are placed in a semiconductor package unloading handler, stored in a tray, and shipped after being tested for performance by an inspection apparatus.

The conventional semiconductor package unloading handler for accommodating the semiconductor package completed in the process of manufacturing the semiconductor package in the tray as described above, aligns while receiving the boat equipped with the semiconductor packages through the curing device, and arranges the boat carrier After aligning by putting them in a separate position, the aligned boat is put back on the conveyor line using the boat conveying device and returned to the working position of the unloading picker, and then mounted on the boat using the unloading picker. The semiconductor packages are moved to a tray and mounted.

However, as described above, the conventional semiconductor package unloading handler is not only complicated in performing the position alignment of the boat delivered from the curing apparatus and transferring the boat to the working position of the unloading picker, but also ensures the accuracy of the alignment. I have a problem that is difficult to do.

In addition, since the conventional semiconductor package unloading handler is configured to handle only a boat for one type of semiconductor package, in order to perform tray storing operation for another type of semiconductor package, the other package is used to unload the semiconductor package. I had to do the job.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to simplify the process of aligning the injected semiconductor package and inserting it into the working position of the unloading picker, and improving the alignment accuracy at the working position of the unloading picker. To provide a boat aligning device for a semiconductor package unloading handler that can be enabled.

Another object of the present invention is to provide a semiconductor package that can improve the compatibility of the handler by handling the two boats having different sizes in one handler through the simple removal or replacement of components To provide a boat aligner for the unloading handler.

According to an aspect of the present invention for achieving the above object, a base block on which a boat containing a semiconductor package conveyed from the outside is seated; An alignment reference bar fixedly installed at one side of the base block; At least one alignment bar installed in the base block to be spaced apart from the alignment reference bar by a predetermined distance, and movable to the alignment reference bar to press the boat seated on the base block against the alignment reference bar; Provided is a boat alignment device for a semiconductor package unloading handler including an alignment bar moving unit for moving the alignment bar toward an alignment reference bar.

According to another aspect of the present invention, there is provided a boat feeding conveyor for transporting a plurality of boats equipped with a semiconductor package from an external device in the X-axis direction; A base block installed horizontally on one side of the boat feeding conveyor in a Y-axis direction and receiving the boat from the boat feeding conveyor; A base block moving unit for horizontally moving the base block in the Y-axis direction; An alignment reference bar fixedly installed at one side of the base block; At least one alignment bar installed in the base block to be spaced apart from the alignment reference bar by a predetermined distance, and horizontally movable toward the alignment reference bar to press the boat seated on the base block against the alignment reference bar; Provided is a boat alignment apparatus for a semiconductor package unloading handler including an alignment bar moving unit for moving the alignment bar toward an alignment reference bar.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of the boat alignment device of the semiconductor package unloading handler according to the present invention will be described in detail with reference to the accompanying drawings.

First, the semiconductor package unloading handler according to the present invention is configured to handle two different sizes of boats by a simple conversion operation. In the following description, a relatively large size boat is referred to as a 'large size' boat. The boat is called a boat, and a relatively small boat is called a 'small boat'.

FIG. 1 shows the overall configuration of a semiconductor package unloading handler according to an embodiment of the present invention. The semiconductor package unloading handler shown in this figure illustrates a configuration for handling a small boat.

Referring to FIG. 1, a boat-injection conveyor 2 in which boats B (see FIG. 2), in which a semiconductor package P is mounted, are mounted from an external device, for example, the curing apparatus 1, on one side of the main body 10. Is placed. And the boat aligning device 20 which is aligned after the boat B conveyed from the boat feeding conveyor 2 is seated on one side of the main body 10 is disposed, one side of the boat aligning device 20 The transmission part 30 which is transmitted to the boat carrier B transmitted from the boat aligning apparatus 20 on the 1st and 2nd carrier blocks 40a and 40b mentioned later is installed in an inline shape. Between the boat alignment device 20 and the delivery unit 30, the movement of the boat B is restricted so that the boat B stops on the boat alignment device 20 without being transported to the delivery unit 30 in an unaligned state. The stopper 29 to be rotated up and down by the motor 29a is installed.

Imaging to detect the mounting direction of each semiconductor package by vision inspection of a specific display of the semiconductor packages of the boat B carried by the first and second carrier blocks 40a and 40b on one side of the transfer unit 30. The device 70 is installed to be movable in the Y-axis direction. The imaging device can be configured using, for example, a CCD camera or the like.

In the middle of the main body 10, the semiconductor package is picked up by a vacuum suction method from the boat B carried by the first and second carrier blocks 40a and 40b, and the unloading part ( The first and second unloading pickers 51 and 52 which are accommodated in the empty tray T of 80 are provided.

The first and second unloading pickers 51 and 52 are horizontally moved along the first and second picker frames 53 and 54 extending in the Y-axis direction, respectively, and the semiconductors are disposed on the first and second carrier blocks 40a and 40b. The package is returned to the unloading unit 80.

In addition, the first and second unloading pickers 51 and 52 pick up or lower the semiconductor package while two pick-up nozzles 55 are lifted up and down on one picker head. 55 may be configured to reverse the orientation of the semiconductor package horizontally / vertically while reciprocating 90 degrees.

Meanwhile, on the other side of the main body 10, the empty boat B, which is transported after the semiconductor packages are separated by the first and second unloading pickers 51 and 52, is stored in the boat storage magazine 96. The boat recovery unit 90 is installed.

The boat recovery unit 90 includes a magazine mounting unit 95 in which a plurality of magazines 96 for accommodating the boat B are horizontally movable in the Y-axis direction, and up and down on one side of the magazine mounting unit 95. It is configured to be movable so that the boat feeding unit 91 for receiving the empty boat on the carrier block in a magazine in turn.

The first and second carrier blocks 40a and 40b are configured to be movable at a predetermined height up and down, and carry boats B while crossing each other.

On the other hand, between the boat input conveyor 2 and the boat aligning device 20, a plurality (in this embodiment) to allow or restrict the movement of the boat (B) from the boat input conveyor 2 to the boat aligning device (20) Four gate stoppers 3 are provided to be movable up and down. Each of the gate stoppers 3 detects that the boat B (refer to FIG. 2) conveyed from the boat feeding conveyor 2 is in contact with the gate stopper 3 and waits for the respective gate stoppers 3. Boat detection sensor 4 for controlling the operation of the) is installed.

The first and second guide rails 31 and 32 extending along the X-axis direction from the transmission part 30 to the boat recovery part 90 are installed at an intermediate portion of the main body 10 at predetermined intervals. Guide grooves 31a and 32a in which one end portions of the boats B carried by the first and second carrier blocks 40a and 40b are inserted and guided to the first and second guide rails 31 and 32 (FIG. 8 and FIG. 9) are formed. The first and second guide rails 31 and 32 have an interval corresponding to the width of the boats large boats handled by the handler.

The boat alignment device 20 includes a first alignment portion 21 in which a small boat is seated and aligned among the boats handled by the handler, and a second alignment portion 22 in which another small boat B is seated and aligned. It is divided into

An alignment reference bar 26c (see FIG. 2) for detaching the boats B is installed between the first alignment unit 21 and the second alignment unit 22 in a detachable manner. If you want to handle a large boat in the alignment bar bar (26c) can be used to remove the separation. The detailed configuration and operation of this boat alignment device 20 will be described in detail below.

On the other hand, the unloading unit 80 is the empty tray stacking unit 81 on which the empty trays (T) are stacked, and the semiconductor package (P) conveyed by the first and second unloading pickers (51, 52) The package accommodating position 82 accommodated in the tray T and the tray stacking unit 83 in which the tray T in which the semiconductor packages are all accommodated are stacked.

The empty tray stacking unit 81 separates one from the lowermost tray among the stacked empty trays and transfers it to the package storage position 82. And the said tray loading part 83 loads the tray T conveyed by the said package accommodation position 82 one by one from a lower side.

Hereinafter, each component of the handler configured as described above will be described in more detail.

Referring to FIGS. 2 to 3B, the boat input conveyor 2 is configured to convey a plurality of boats B in an unaligned state from an external device such as the curing device 1 to the boat alignment device 20. Consists of a boat input conveyor extending horizontally from one end of (1) to one end of the boat alignment device (20). Here, the boat input conveyor 2 is preferably formed at the same height as the first and second conveyor belts (25a, 25b) configured in the boat aligning device (20).

Each gate stopper 3 between the boat feeding conveyor 2 and the boat aligning device 20 is moved up and down by a predetermined distance by a linear motion device such as a pneumatic cylinder 5 while the boat feeding conveyor ( The conveyance of the boat B from 2) to the boat aligning device 20 is controlled.

As shown in Figure 2 to 5b, the boat alignment device 20 has a base block 23 to move along the Y-axis guide frame 24 extending in the Y-axis direction on the main body 10. As described above, the boat alignment device 20 is divided into a first alignment unit 21 and a second alignment unit 22, and the first and second alignment units 21 and 22 are symmetrical with each other. Has That is, the boat aligning device 20 includes first and second conveyor belts 25a and 25b installed to drive the base block 23 in the X-axis direction, and the first and second conveyor belts 25a and 25b. ) Is fixedly installed between the alignment reference bar 26c partitioning the first alignment portion 21 and the second alignment portion 22 and the base block 23 to reciprocate by a predetermined distance in the Y-axis direction. The first and second alignment bars 26a and 26b which are provided to press the boat B toward the alignment reference bar 26c, and the end portions of the first and second conveyor belts 25a and 25b are rotatable up and down. It is comprised by the stopper 29 which restricts the movement of the boat B, and is installed.

The first and second alignment bars 26a and 26b reciprocate in the Y axis by a stroke defined by the first and second pneumatic cylinders 27a and 27b.

The alignment bar 26c can be separated from the base block 23 as needed, i.e., when handling a large boat, and again when handling a small boat, as shown in the figures. (23) can be used in combination.

Rollers 28a for transporting the boats B on the first and second alignment parts 21 and 22 to the transmission part 30 while rotating by a motor at the ends of the first and second alignment bars 26a and 26b. 28b) is installed. The rollers 28a and 28b have outer circumferential surfaces of the rollers 28a and 25b connected to the outer edges of the boat B seated on the first and second conveyor belts 25a and 25b. To act as a push.

6 and 7, the boat B has a plurality of holes formed in a heat resistant metal plate, and the plurality of guide ribs Br in which the semiconductor package P is seated and supported therein. ) Has a structure protruding upward.

As such, the semiconductor packages P are supported by the guide ribs Br in a state of being seated in the through hole of the boat B, so that the first and second unloading pickers 51 and 52 are mounted on the boat B. When the packages are picked up, the semiconductor package P may not be picked up properly due to interference by the guide ribs Br.

Accordingly, the semiconductor package is lifted up to the upper end of the guide rib Br at positions corresponding to the through holes of the boat B on the upper surfaces of the first and second carrier blocks 40a and 40b. A plurality of support jigs 41 are formed to protrude from the carrier block 40a, 40b to fix the position of the boat B, and support for supporting the outer periphery of the semiconductor package P on the outer circumferential surface of the support jig 41. The rib 42 is integrally formed.

As shown in FIGS. 8 to 11, the transmission part 30 is provided with a rail fixing plate 35 that crosses the upper side of the first and second guide rails 31 and 32, and the rail fixing plate 35 is provided with the rail fixing plate 35. A central guide rail 33 having two guide grooves 33a corresponding to the guide grooves 31a and 32a of the first and second guide rails 31 and 32 is fixed below the central portion.

In addition, the first and second carrier blocks 40a and 40b are installed to be movable up and down in the space between the first and second guide rails 31 and 32 and are configured to cross-move horizontally independently of each other. .

That is, the first carrier block 40a is configured to be movable horizontally along the X-axis direction and to be moved up and down at a predetermined position by a linear motion device (not shown) installed in the main body 10 (see FIG. 1). Another linear motion device (not shown) coupled to the first moving block 45 and installed on the main body 10 (see FIG. 1) on the opposite side of the first moving block 45. It is coupled to the second moving block 46 configured to move horizontally along the X-axis direction and to move up and down at a predetermined position.

Accordingly, while the first carrier block 40a or the second carrier block 40b is moved upward toward the boat recovery unit 90 in the transfer unit 30, the boat recovery unit 90 on the opposite side is moved. The second carrier block 40b or the first carrier block 40a cross-moves toward the transfer section 30 in the downwardly moved state, so that the boat B can be continuously conveyed.

In addition, a through hole 49 penetrating up and down is formed in an intermediate portion of the first carrier block 40a and the second carrier block 40b, and the upper and middle surfaces of the first and second moving blocks 45 and 46 are formed. The plurality of guide pins 43 exposed to the upper surface of the first carrier block 40a through the through hole 49 are installed to be movable upward and downward, and the guide pins 43 are provided below the guide pins 43. The spring 44 is elastically supported.

Each of the guide pins 43 has an inner side portion and a second alignment portion 22 of the boat B of the first alignment portion 21 when both carrier blocks 40a and 40b are moved from the transmission portion 30. The outer edges of the respective boats B are brought into close contact with the guide grooves 31a and 32a of the first and second guide rails 31 and 32, respectively, and the inner edges of the boats B are in contact with each other. Function.

The reason why the guide pin 43 is elastically movable in this way is that, as shown in FIG. 9, the first carrier block 40a or the second carrier block 40b is located at the lower side of the transfer part 30. When moving upward and coupled with the boat B, the guide pin 43 moves downward while hitting the lower surface of the center guide rail 33 to upwardly move the carrier blocks 40a and 40b by the guide pin 43. This is to prevent the movement from interfering.

Of course, in the case of extending the central guide rail 33 installed in the delivery unit 30 from the end of the delivery unit 30 to the boat recovery unit 90 as described above, the guide pins 43 on each carrier block 40a, 40b. However, in this case, since the length of the center guide rail 33 may be increased, deformation such as warpage may be applied, and material cost may be high. Therefore, the strength of the center guide rail 33 may be sufficiently secured and material cost may be reduced. If possible, such a structure could be used.

In addition, the reason why the guide pin 43 is configured to be elastically movable is that, as shown in FIG. 12, the handler handles the large boat B 'and the first and second carrier blocks 40a and 40b. To convert the large carrier block 40c corresponding to the large boat B ', the lower surface of the large carrier block 40c presses the guide pins 43 so that the first and second moving blocks 45, 46) to be combined without difficulty.

Next, referring to FIGS. 13 to 17, the boat recovery unit 90 includes a boat feeding unit 91 for conveying the empty boat B on the carrier blocks 40a and 40b toward the magazine 96. The magazine mounting part 95 provided with the some magazine 96 which accommodates the empty boat B conveyed by the boat feeding unit 91 is provided. The boat feeding unit 91 is moved up and down by the lifting unit, and the magazine mounting portion 95 is configured to move horizontally in the Y-axis direction by the horizontal moving unit.

The boat feeding unit 91 is coupled to the lifting unit and the lifting block 911 to move up and down, and the first and second guide rails (31, 32) on both sides of the lower end of the lifting block (911) Two pairs of phases for moving the boat B by rotational force in contact with the upper and lower ends of the rail portion 912 and the outer ends of the boats B inserted into the guide grooves of the rail portion 912, An inner space of the magazine 96 is provided with the lower feeding rollers 913a and 913b and the boat B moving along the rail portion 912 toward the magazine 96 by the upper and lower feeding rollers 913a and 913b. And a pair of pushers 914 to fully push in.

The upper and lower feeding rollers 913a and 913b are rotatably installed at intervals of the thickness of the boat B on the upper and lower sides of the guide grooves of the rail units 912, and the upper and lower feeding members on both sides. The pairs of rollers 913a and 913b are configured to drive rotation synchronously by the feeding roller motor 913c.

In addition, the pushers 914 may be elastically rotated about the rotation shaft 914a to the pusher block 916 which moves along the pusher guide rail 915 extending in the Y-axis direction on both sides of the lifting block 911. The pusher block 916 is connected to the piston rod 917a of the pneumatic cylinder 917 to move in the Y-axis direction along the pusher guide rail 915 by the operation of the pneumatic cylinder 917. The pusher 914 is elastically connected to the pusher block 916 by a tension spring 918, the lower surface of the lifting block 911 in the state in which the piston rod 917a is contracted as shown in FIG. While the tension spring 918 is tensioned by the pusher pressing pin 919 installed in the state, the state is rotated upward.

Therefore, as shown in FIG. 14, when the piston rod 917a of the pneumatic cylinder 917 is extended, the pusher block 916 is moved toward the magazine 96 along the pusher guide rail 915. Accordingly, the coupling between the pusher 914 and the pusher pressing pin 919 is released, and the pusher 914 is rotated downward by the elastic force of the tension spring 918, and the end of the pusher 914 of the rail part 912 is removed. The end of the boat (B) is to be pushed.

In addition, the elevating unit is installed to move up and down along the elevating guide frame 921 is installed perpendicular to the main body 10, and the elevating guide frame 921 and the elevating block 911 of the boat feeding unit 91 And a lifting slide block 922 fixedly coupled to each other, and a linear movement device (not shown) for moving the lifting slide block 922 along the lifting guide frame 921. Here, the linear motion device may be configured using a linear motion device well known in the art, such as a linear motion device, a linear motor, such as a ball screw and a motor, a pulley and a belt and a motor.

On the other hand, the horizontal moving unit for horizontally moving the magazine mounting portion 95 is a horizontal guide frame (971) is formed to extend along the Y-axis direction in the main body 10 and to move along the horizontal guide frame (971) A horizontal slide block 972 to which the magazine mounting portion 95 is fixedly coupled thereto and a linear movement device (not shown) for horizontally moving the horizontal slide block 972 along a horizontal guide frame 971. Is done. The linear motion device of the horizontal moving unit may also be configured using a known linear motion device such as a ball screw and a motor, similarly to the linear motion device of the lifting unit described above.

Referring to the operation of the semiconductor package handler configured as described above are as follows.

As shown in FIG. 2, the boats B containing the semiconductor packages are conveyed in an unaligned state from the external device such as the curing apparatus 1 through the boat feeding conveyor 2. The conveyed boats B stop at the front of the boat aligning device 20 while hitting the gate stopper 3 provided at the end of the boat feeding conveyor 2. At this time, as shown in Figure 3a, the boat detection sensor 4 of the gate stopper (3) in contact with the boat (B) detects the boat (B), accordingly of the boat alignment device 20 The base block 23 moves along the Y-axis guide frame 24 so that the first alignment unit 21 moves to the gate stopper 3 sensed by the boat detection sensor 4.

As shown in FIG. 3A, when the first alignment portion 21 is aligned with the gate stopper 3, the pneumatic cylinder 5 operates as shown in FIG. 3B to lower the gate stopper 3. Then, the boat B on the boat feeding conveyor 2 is transferred to the first conveyor belt 25a of the first alignment portion 21. At this time, since the width of the first alignment portion 21, that is, the width between the alignment reference bar 26c and the first alignment bar 26a is larger than the width of the boat B, the boat B is somewhat to some extent. Even when twisted and supplied, it can be smoothly conveyed onto the first alignment unit 21.

The boat B, which is transferred onto the first conveyor belt 25a of the first alignment portion 21, is restricted from the movement on the first alignment portion 21 by the stopper 29 (see FIG. 2). It sits on top.

Subsequently, the base block 23 moves along the Y-axis guide frame 24 so that the second alignment portion 22 is aligned with the gate stopper 3 on which the boat B is then hit. When the second alignment portion 22 is aligned with the gate stopper 3, the gate stopper 3 is lowered in the same manner as described above so that the new boat B is connected to the second conveyor belt of the second alignment portion 22. 25b).

As described above, when the boat B is seated on the first and second alignment portions 21 and 22, the first and second pneumatic cylinders 27a and 28b may be mounted as shown in FIGS. 4 to 5B. By operation, the first and second alignment bars 26a and 26b move toward the alignment reference bar 26c to press the boats B toward the alignment reference bar 26c, thereby pushing the boats B to the alignment reference bar 26c. ).

When the boats B are aligned on the first and second alignment units 21 and 22, the stoppers 29 behind the first and second alignment units 21 and 22 rotate to move the boats B. This is allowed, and then the boats B are moved to the delivery section 30 by the operation of the rollers 28a, 28b and the first and second conveyor belts 25a, 25b.

When the boats B are positioned in the transfer unit 30, the first carrier block 40a waiting at the lower side of the transfer unit 30 is raised to be coupled to the boat B.

As described above, when the boats B of the transfer unit 30 are seated and coupled to the first carrier block 40a, the first moving block 45 is horizontally moved in the X-axis direction of the main body 10, Accordingly, the first carrier block 40a moves downward of the first and second unloading pickers 51 and 52 (see FIG. 1) while the boat B is fixed. At this time, the imaging device 70 (refer to FIG. 1) reciprocates in the Y-axis direction and photographs predetermined direction marking marks (not shown) engraved on the semiconductor packages P on the first carrier block 40a. The semiconductor package P is detected in which direction the boat B is seated.

When the first carrier block 40a moves toward the first and second unloading pickers 51 and 52, the second carrier block 40b moves toward the transfer unit 30. At this time, since the second carrier block 40b is moved downward, the first carrier block 40a and the second carrier block 40b are located at different heights, and thus the first carrier block 40a and the first carrier block 40b are positioned at different heights. The cross movement of the two carrier blocks 40b is possible.

When the first carrier block 40a moves to the lower positions of the first unloading picker 51 and the second unloading picker 52 with the boat B fixed, the first and second unloading pickers ( The trays 51 and 52 move along the first and second picker frames 53 and 54 independently and pick up the semiconductor packages P on the first carrier block 40a and wait at the package storage position 82. ), The semiconductor package P is housed.

As described above, when the semiconductor packages P mounted on the boats B of the first carrier block 40a are separated by the first and second unloading pickers 51 and 52, the first carrier block 40a is separated. ) Moves in the Y-axis direction to the boat recovery unit 90, the boat feeding unit 91 is moved up and down in the boat recovery unit 90 of the empty boat (B) of the magazine mounting portion 95 The magazine 96 is accommodated.

Meanwhile, in the above-described embodiment of the semiconductor package handler, two small boats B are handled at the same time to separate the semiconductor packages from the boat B and stored in the tray T.

However, when handling a large boat with such a handler, the alignment reference bar 26c of the boat alignment device 20 and the center guide rail 33 of the transmission unit 30 are removed, If the magazines 96 of the carrier blocks 40a and 40b and the magazine mounting portion 95 are replaced with those corresponding to the large boats, the large boats can be handled simply.

As described above, according to the present invention, the boat is returned to the pick-up position of the unloading picker by aligning the boat directly from the position at which the boat is returned from the external device, without moving the boat transported from the external device to a separate place. There is an advantage that the time required for alignment and conveyance can be shortened and productivity can be improved.

In addition, the small and large boats can be selectively handled by a simple operation of removing and replacing some components, thereby improving the compatibility of the handlers and preventing the cost increase of equipment purchase.

Claims (5)

A base block on which a boat in which the semiconductor package conveyed from the outside is accommodated is seated; An alignment reference bar fixedly installed at one side of the base block; At least one alignment bar installed in the base block to be spaced apart from the alignment reference bar by a predetermined distance, and movable to the alignment reference bar to press the boat seated on the base block against the alignment reference bar; Boat alignment device of the semiconductor package unloading handler comprising an alignment bar moving unit for moving the alignment bar toward the alignment reference bar. The method of claim 1, further comprising a base block moving unit for horizontally moving the base block in a direction orthogonal to the conveying direction of the boat, and allowing the base block to selectively receive a plurality of boats input from the outside. Boat alignment device of the semiconductor package unloading handler, characterized in that. The boat according to claim 1 or 2, wherein the base block is installed to rotate in the conveying direction of the boat between the alignment bar and the at least one alignment bar, and transports the boat from the outside onto the base block and the boat on the base block. At least one conveyor belt for conveying to the next process position; The boat alignment device of the semiconductor package unloading handler, which is installed to be movable at the rear end of the base block, further comprising a stopper for limiting or releasing the movement of the boat by the conveyor belt. The boat alignment device of claim 1, wherein two alignment bars are disposed on both sides of the base block with respect to the alignment reference bar. The boat alignment device of claim 1 or 4, wherein the alignment bar is detachable and coupled to the base block.

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