KR200394149Y1 - Vision inspection apparatus for semiconductor package having a sorting module for sorting packages and trays - Google Patents

Abstract

The sorting unit 500 of the present invention includes a tray sorting container 530, a tray conveying means 510, and a package conveying means 520, and the tray sorting receiving part 530 is an empty tray supply part 531, A reject package tray accommodating part 533, a good package tray accommodating part 535, and a tray temporary mounting part 537 are provided, and the good package tray accommodating part 535 transfers the vision-tested tray from the vision inspecting part. The package carrying means 520 carries a reject package of the packages seated on the tray of the good package tray receiving part 535 to the tray of the reject package tray receiving part 533, and temporarily transfers the tray. The good package seated on the tray of the mounting portion is transported to the tray of the good package tray receiving portion 535, the tray transport means 510, when the tray temporary mounting portion 537 is empty, the reject package transport operation is completed Tre This is conveyed from the good package tray receiving portion 535 to the tray temporary holder 537, the reject package tray receiving portion from the empty tray supply portion 531 when the reject package tray receiving portion 533 is empty The empty tray is transported to the 533, and when the tray of the tray temporary holder 537 is empty, the empty tray is transported to the empty tray supply unit 531.

Description

VISION INSPECTION APPARATUS FOR SEMICONDUCTOR PACKAGE HAVING A SORTING MODULE FOR SORTING PACKAGES AND TRAYS}

The present invention relates to a vision inspection apparatus for a semiconductor package having a package and a tray sorting portion, and more particularly, to a vision inspection apparatus for a semiconductor package including a package and a tray sorting portion having a simplified and compact device and excellent work efficiency. will be.

The vision inspection apparatus is a device that physically inspects the appearance of a test object, particularly a semiconductor package.

Semiconductor packages such as IC chips require high precision in proportion to being finely fabricated. However, despite the continuous development of the manufacturing technology of the semiconductor package, appearance defects, marking defects, etc. are inevitably generated, and it is recognized that post inspection of the semiconductor package is very important.

The semiconductor package is transported in a state of being seated in a tray in a plurality of rows and rows, and thus vision inspection is performed in a tray unit. Typically, 24 to 400 semiconductor packages are seated in a tray, and the tray is configured to be stacked.

12 is a diagram schematically showing the overall configuration of a conventional vision inspection apparatus.

As shown, the tray 14 loaded on the loading station 16 is off-loaded while being transported via the scan bed 26 and the replace station 36 by a conveyor 18: 18 ′, 18 ′. Off-loaded at station 48.

The stacking tray 12 is provided at the top of the loading station 16 to load the trays on the conveyor 18 one by one downward. In the upper part of the scan bed 26, the scanning head 30 including the optical sensor 32 is moved to inspect the tray 14. At the top of the replacement station 36, the pick & place robot 42 having the vacuum picker 44 is moved to carry the tray 14. The off-loaded trays are stacked on top of the off-loading station 48 to form a stacking tray 50.

The conveyor 18 constituting the straight conveying path includes drive rollers 20 and 22 ', driven rollers 20' and 22 and a conveyor belt 24.

Unexplained reference numerals 28 and 38 denote a transfer section.

The conventional vision inspection apparatus loads the tray on the loading station 16, then vision inspections on the scan bed 26, sorts by good package and reject package on the replace station 36, and then Off-loading at the loading station 48

do.

On the replace station 36, first trays (not shown) and second trays (not shown) are arranged on both sides of the main tray 14 in the transverse direction (the direction perpendicular to the ground). The first tray is initially empty and the second tray is initially mounted with a good package. The pick & place robot 42 picks up the reject package from the main tray 14, places it down on the first tray, picks up the good package of the second tray, and places it down on the main tray 14. Thus, only the good package is seated in the tray 14 transferred on the off-loading station 48.

However, the conventional vision inspection apparatus has the following problems.

In the conventional vision inspection apparatus, the replacement station 36 and the off-loading station 48 are provided separately, which serves to inhibit the compactness of the apparatus.

In addition, since the first tray and the second tray have to be supplied by hand one by one each time, the work efficiency is extremely poor.

In order to alleviate this problem, a vision inspection apparatus having a tray conveying means separate from the package conveying means (pick & place robot) has been proposed, but it has a disadvantage in terms of simplification, compactness, and work efficiency. .

The present invention is devised to solve the above problems, and an object of the present invention is to provide a vision inspection device that is excellent in simplification, compactness, and work efficiency.

In order to achieve the above object, the present invention includes a vision inspection unit for vision inspection of a package seated on a tray and a sorting unit for classifying the package inspected by the vision inspection unit into a good package and a reject package, the sorting unit is classified into a tray A receiving portion, a tray conveying means, and a package conveying means, wherein the tray sorting accommodating portion includes an empty tray supplying portion, a reject package tray accommodating portion, a good package tray accommodating portion, and a tray temporary holder, and the good package tray accommodating portion is The vision inspection unit receives the vision-tested tray, and the package transporting unit transports the reject package among the packages seated on the tray of the good package tray receiving unit to the tray of the reject package tray receiving unit, Good package seated on the tray, the good package Ray receiving portion carrying the tray, and the tray transport means

When the tray temporary holder is empty, the tray carrying the reject package carrying operation is completed from the good package tray container to the tray temporary holder, and when the reject package tray container is empty, the reject package tray from the empty tray supply unit It provides a vision inspection apparatus for a semiconductor package having a package and a tray sorting portion, characterized in that for transporting the empty tray to the receiving portion, the empty tray of the tray temporary holding portion empty the tray to the empty tray supply.

Preferably, the empty tray supply unit receives an empty tray from below, and the reject package tray receiving unit and the good package tray receiving unit carry out a tray in which a package carrying operation is completed, and the tray conveying means and the package. The conveying means moves on top of the tray sorting container and carries the tray and the package, respectively.

Preferably, the empty tray supply part receives a tray from a tray stacked below, and the reject package tray accommodating part and the good package tray accommodating part are transported downward and stacked on the lower part of the tray where the package carrying operation is completed. .

Preferably, the empty tray supply unit includes a tray box for stacking the trays and a stack tray support means for supporting the stacking trays and being movable up and down, wherein the reject package tray receiving unit enables stacking of the trays. And a tray tray for receiving, a tray support means for supporting and releasing a tray on which a reject package carrying operation is performed, and a stack tray support means which is supported to be moved up and down while being supported to support the stacked trays which are transported downwards; The good package tray accommodating part includes a tray for accommodating trays, a work tray support means for supporting / releasing a tray on which a good package transport operation is performed, and a tray transported downward to support a stacked tray, and being movable up and down. With stacking tray support means

do.

Preferably, the empty tray supplying portion, the reject package tray receiving portion, the good package tray receiving portion, and the tray temporary mounting portion are arranged in a transverse direction, and the package conveying means and the tray conveying means are along a single guideway. The conveying operation is performed while moving in the transverse direction, and the package conveying means is capable of longitudinal movement together with the transverse movement.

Preferably, the tray conveying means has a slider arm that moves laterally along the single guideway and a picker portion coupled to the slider arm, and the package conveying means moves transversely along the single guideway. And a slider guideway arm, a second slider moving longitudinally along the slider guideway, and a picker portion coupled to the second slider.

Preferably, the empty tray supply unit, the reject package tray accommodating portion, the good package tray accommodating portion, and the tray temporary holder are sequentially arranged adjacent to each other.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view showing the overall configuration of the vision inspection apparatus of the present invention.

As shown, the vision inspection apparatus of FIG. 1 includes a tray loading unit 200, a 3D appearance inspection unit 300, a flipper unit 400, a 2D marking inspection unit (not shown), and a sorting unit 500.

The tray is transferred to the sorting unit 500 through the tray loading unit 200, the 3D appearance inspection unit 300, the flipper unit 400, and the 2D marking inspection unit sequentially.

The tray loading unit 200 stacks trays on which semiconductor packages requiring vision inspection are stacked, and loads them on a transport path one by one from below to transport them downstream. The direction of the tray and the package seated thereon is, for example, stacked in a BGA package with the ball side facing up and the marked side facing downward.

The 3D appearance inspection unit 300 inspects whether the inspection head moves in the lateral direction and the longitudinal direction and inspects the appearance of the package in 3D appearance to check whether there are no abnormalities in the dimensions, or whether the product is broken.

The flipper 400 flips a package. For example, the BGA package exiting the 3D visual inspection unit 300 is faced downward. Therefore, for subsequent 2D marking inspection, it is necessary to flip the package so that the marked side faces upward. To this end, the flipper 400 flips the package. The tray and the package out of the flipper unit 400 are upside down.

A vision inspection apparatus having a configuration in which a 2D marking inspection is performed first and a 3D appearance inspection is performed later is also possible. In this case, the flipper unit 400 must be present between the 2D marking inspection unit and the 3D appearance inspection unit 300. In this case, the tray loading section

For example, the BGA package is loaded with the marking surface facing upward by 200, and the marking surface is flipped downward with the flipper 400.

The tray out of the flipper 400 is inspected by 2D marking inspection. The 2D marking inspection checks, for example, whether there are no abnormalities in the marking text and its direction, or no surface scratches.

The sorting unit 500 classifies the package into a good package and a reject package based on data obtained by the 3D appearance inspecting unit 300 and the 2D marking inspecting unit.

Referring to the tray transport path of the vision inspection apparatus of Figure 1, the tray is transported along the load transport path, the intermediate transport path and the off-loading transport path.

The loading transport path is the transport path where the tray is loaded, the off-loading transport path is the transport path where the tray is off-loaded, and the intermediate transport path connects these two transport paths so that the tray is moved from the loading transport path to the intermediate transport path. It is a conveying path that can be transported to an off-loading conveying path.

In the embodiment of Figure 1, the tray loading unit 200 and the 3D appearance inspection unit 300 is provided on the loading transport path, the flipper 400 is provided on the intermediate transport path, the 2D marking inspection on the off-loading transport path And the sorting unit 500 is provided. That is, the tray loading part 200 is provided upstream of the loading conveyance path, and the sorting part 500 is provided downstream of the off-loading conveyance path, and the tray loading part 200 and the sorting part 500 are provided. A vision inspection unit (3D appearance inspection unit 300, flipper unit 400 and 2D marking inspection unit) for vision inspection of the package is provided on the transfer path therebetween.

The loading conveying path adopts the front-in loading method which loads the tray from the front and transports the tray in the longitudinal direction, and the intermediate conveying path connects the loading conveying path with the off-loading conveying path, and the off-loading conveying path Employs a front-out off-loading method that longitudinally transfers the tray from the rear to the front to off-load the tray from the front.

In particular, the loading transport path and the off-loading transport path are formed along the longitudinal direction, and the intermediate transport path is formed along the transverse direction, thereby forming a Π'-shaped arrangement as a whole. Therefore, as compared with the conventional straight arrangement, it is possible to use the installation space of the device more efficiently. It is also possible to load and off-load the tray from the front, improving tray management efficiency.

FIG. 2 is a diagram illustrating a configuration of a tray loading unit 200 and the like of the vision inspection apparatus of FIG. 1.

The tray loading unit 200 includes a support block 201, a latch 203, a pusher 205, and a rail 209.

The tray loading unit 200 stacks 20 to 30 package trays one by one and loads them on the rails 209 one by one from below, and transports them downstream.

(a) The support block 201 is configured to enable up-down of two-stage up and down-stage, and firstly supports a lower surface of a bottom tray among trays (not shown) stacked in the single-stage up state.

(b) Next, in that state, the latch 203 protrudes to support the lower surface of the second tray from the bottom. A notch is formed at an outer periphery of the tray so that the latch 203 can be inserted between the tray and the tray.

(c) Next, the support block 201 is down to place the tray on the rail 209.

(d) Next, the pusher 205 pushes the tray and moves downstream to return to the original position. The pusher 205 is driven by a belt 207 driven by a reversible motor.

(e) Next, the supporting block 201 is lifted by supporting the lower surface of the bottom tray (the second tray from the bottom in step b) of the stacked trays.

(f) Next, the latch 203 is retracted.

(g) Next, the support block 201 descends to the first step up state.

Reference numeral 101 denotes a tray transfer rail connecting the tray loading unit 200 (rail 209) and the 3D appearance inspection unit 300.

3 is a diagram illustrating a configuration of a flipper unit 400 and the like of the vision inspection apparatus of FIG. 1.

3 shows an intermediate transfer path and a flipper 400 provided on the intermediate transfer path.

As shown, upstream and downstream of the flipper 400, the tray feed rail 105 and the flipper for transferring the tray from the loading transfer path to the flipper 400, respectively.

Conveyor belt 111 is provided for transferring the tray from 400 to the off-loading transfer path.

The tray leaving the loading transfer path is transferred to the flipper unit 400 by the pusher 107. The pusher 107 is provided to be capable of up and down, and is in a down state when the tray is transported onto the rails 105, and when the tray is transferred to the flipper 400, the pusher 107 is moved up and pushes the tray in the state. Going forward

In the flipper unit 400, the tray which has been flipped is drawn out onto the conveyor belt 111 by a drawer 109. The drawer 109 is provided to be capable of up and down, and the drawer 109 enters the up state when the drawer 109 enters the flipper 400, and the drawer 109 is pulled out when the tray is pulled out and pulls out the tray.

The tray mounted on the conveyor belt 111 is transported downstream until the tray comes on top of the lifting means 113.

4 is a diagram illustrating a configuration of the flipper 400 of FIG. 3.

The flipper 400 may include the rotation driving means 410, the structural frame 420, the first mount 430, the first tray carrier 440, the middle plate 450, the second mount, and the second tray carrier 470. ), A first sensor unit 480, and a second sensor 490.

The flipper unit 400 is a component that sequentially flips, flips, and spaces a package tray on which a package is seated and an empty tray, thereby flipping a package.

FIG. 5 is a diagram illustrating a configuration of the first tray carrier 440, the second tray carrier 470, and the first sensor unit 480 in FIG. 4.

The rotation driving means 410 includes a support 411, a rotation shaft 413, and a pulley 415.

Support 411 is fixedly installed on the main base 103 (see Fig. 3). Support 411 is provided with a pair, one on each side. The rotating shaft 413 is rotatably coupled to the support 411. Two rotary shafts 413 are provided, one for each support 411, and one end of one of the rotary shafts 413 is fixedly coupled to the pulley 415. The pulley 415 is rotationally driven by a drive source (not shown) via a belt (not shown). The other end of the rotation shaft 413 is fixedly coupled to the structural frame 420.

The structural frame 420 is flipped by receiving the rotational driving force of the rotation driving means 410, so that the structural frame 420 is directly or indirectly coupled to the structural frame 420, the first tray carrier 440, It is flipped integrally with the middle plate 450, the second mount 460, the second tray carrier 470, and the second sensor 490.

Structural frame 420 is provided with a pair of mutually opposite and vertically on both front and rear sides, two frame plate 421, four brackets 423, four up-down drive means (425a, 425b) and eight guideways and a guide way 427.

The two frame plates 421 are fixedly coupled to the other ends of the two rotation shafts 413, respectively. Grooves 421a are formed in the frame plate 421 along the transverse direction. The first sensor 481 moves laterally along the groove 421a and transmits and receives a sensor signal through the groove 421a to check whether the package is properly seated on the tray.

One end of the bracket 423 is fixedly coupled to the frame plate 421, and the other end is fixedly coupled to the cylinder 425a.

The first mount 430 and the second mount 460 are fixedly coupled to the cylinder rod 425b, respectively, and move relative to the structural frame 420 (bracket 423) in accordance with the expansion and contraction stroke of the cylinder 425a. do.

Guideways 427 are fixedly coupled to opposite surfaces of the two frame plates 421.

The middle plate 450 is fixedly coupled to the frame plate 421. The tray receiving hole 451 is formed in the middle plate 450. A gripper accommodation space 453 is formed at an outer circumference of the tray accommodation hole 451.

Four second sensors 490 are fixedly coupled to the middle plate 450 toward the tray receiving hole 451.

FIG. 6A is a view of the first tray carrier 440 of FIG. 4 from above, and FIG. 6B is a view of the first tray carrier 440 of FIG. 4 from below.

The first tray carrier 440 is horizontally provided in the space between the pair of structural frames 420 (frame plate 421).

The first tray carrier 440 includes a carrier plate 441, gripping means 442a-442i, back pushing means 444a, 444b, up-down drive means 446a, 446b, slider 447, Stopper means 448a and 448b.

The carrier plate 441 serves as a basic structure of the first tray carrier 440.

The gripping means comprises a gripper 442a, a cylinder 442b, a cylinder rod 442c, an interlocking block 442d, 442e, 442f, a fixing block 442h, a connecting pin 442g and a hinge pin 442i. Is done.

When the cylinder 442b makes a contraction stroke, the cylinder rods are sequentially

442c, the interlocking block 442d, the interlocking block 442e, and the interlocking block 442f perform a linear motion, and finally the gripper 442a connected to the interlocking block 442f by the connecting pin 442g. Open. The gripper 442a is rotatably coupled to the fixing block 442h by the hinge pin 442i.

Conversely, when the cylinder 442b makes an expansion stroke, the gripper 442a closes to grip the tray.

The back pushing means comprises a back pushing plate 444a, a cylinder 444b, a cylinder rod (not shown) and a spring (not shown).

The back pushing plate 444a is normally pulled by the spring. However, when the cylinder 444b performs an expansion stroke, the back pushing plate 444a protrudes out of the carrier plate 441 and pushes the tray.

The up-down drive means 446a and 446b comprise a cylinder 446a and a cylinder rod 446b. The cylinder rod 446b is fixedly coupled to the first mount 430. The first tray carrier 440 is moved relative to the first mount 430 by the expansion and contraction stroke of the cylinder 446a.

The slider 447 guides the vertical movement of the first tray carrier 440 by moving up and down under the guidance of the guide way 427.

The stopper means 448a and 448b comprise a stopper cylinder 448b and a stopper rod 448a. The stopper rod 448a protrudes by the expansion stroke of the stopper cylinder 448b, thereby preventing the tray from moving past the correct position when the package tray enters the carrier plate 441 from the tray transfer rail 105.

FIG. 7 is a view of the second tray carrier 470 of FIG. 4 viewed from above.

The second tray carrier 470 has a structure similar to the first tray carrier 440 except that the stopper means is not provided, the gripper has a different structure, and the like. Therefore, unless otherwise indicated, the reference numerals are used to correspond to the first tray carrier 440 and the second tray carrier 470, and the description thereof is omitted. For example, the back pushing plate of the first tray carrier 440 is 444a, and the back pushing plate of the second tray carrier 470 is used as 474a.

The first tray carrier 440 and the second tray carrier 470 are connected to the structural frame 420 via the first mount 430 and the second mount 460, respectively. In addition, the first tray carrier 440 and the second tray carrier 470 are movable relative to the first mount 430 and the second mount 460, respectively, and the first mount 430 and the second mount ( Since the 460 can move relative to the structural frame 420, the first tray carrier 440 and the second tray carrier 470 can move relative to the structural frame 420. Relative movement is possible with respect to the middle plate 450 fixedly coupled to the frame 420.

The first tray carrier 440 and the second tray carrier 470 closely contact / separate the package tray of the first tray carrier 440 and the empty tray of the second tray carrier 470, and rotate the driving means 410. The first tray carrier 440 and the second tray carrier 470 are flipped integrally with both trays while the package tray and the empty tray are in close contact with each other.

FIG. 8 is a diagram illustrating a configuration of the first sensor unit 480 of the flipper unit 400 of FIG. 4.

The first sensor unit 480 includes a plate 483, a guide way 485, a slider 487, a moving block 488, and a first sensor 481.

The plate 483 is fixed to the bottom surface of the main base 103 by fastening a screw to the fastening hole 483a.

A guide way 485 is fixedly coupled to the plate 483 to guide the movement of the slider 487 which is fixedly coupled to the lower surface of the moving block 488. The first sensor 481 is fixedly coupled to the moving block 488. Therefore, the first sensor 481 is linearly guided by the guide way 485.

Looking at the operation of the flipper 400 as follows.

(a) The pusher 107 pushes the first tray on which the package is seated in the state in which the first tray carrier 440 is positioned at the lower position of the same height as the tray transfer rail 105, and thus the tray transfer rail. Transfer from 105 to the first tray carrier 440. At this time, the stopper rod 448a protrudes, thereby preventing the first tray from going past the correct position.

For convenience of explanation, the positional relationship is indicated as increasing from below, in order of lower, lower, load, lower, upper and lower, upper and lower imagination, and a middle plate is positioned between lower and upper positions.

On the other hand, the second tray carrier 470 is located in the upper and lower positions, and grips the second tray in which the gripper 462a is empty. The second tray is in close contact with the middle plate 450.

(b) The gripper 442a of the first tray carrier 440 is closed to hold the first tray. The stopper rod 448a returns by the contraction stroke of the stopper cylinder 448b. The first sensor 481 moves to check whether the package is properly seated on the first tray.

Prior to the inspection of the second sensor 490, the first sensor 481 performs a first inspection, whereby if the package is not properly seated in the tray, the process proceeds to the next step (d), which will be described later. It is possible to prevent the damage of the package which may be caused by the performance of.

(c) The cylinder 446b performs the expansion stroke, so that the first tray carrier 440 rises to the load position. At this time, the carrier plate 441 of the first tray carrier 440 is located at a position spaced about 2 to 3 mm from the middle plate 450. The cylinder 446b uses, for example, a 30 mm stroke cylinder.

(d) The gripping of the second tray held by the second tray carrier 470 is released so that the second tray overlaps the first tray.

(e) The second sensor 490 inspects the thicknesses of the first tray and the second tray to see whether they overlap properly.

(f) The first tray carrier 440 is raised to a lower position along with the first mount 430 by the contracting stroke of the cylinder 425a so that the carrier plate 441 of the first tray carrier 440 is moved. Is in close contact with the bottom surface of the middle plate 450. The cylinder 425a uses, for example, a 5 mm stroke cylinder.

(g) The back pushing plates 444a and 474a protrude by the expansion stroke of the cylinders 444b and 474b so that the back side of the mutually opposing surfaces of the first tray and the second tray, that is, the lower surface of the first tray and the second tray, Each of the upper surfaces is pushed to bring the entire surface of the first tray and the second tray into close contact with each other.

By performing the flipping in the subsequent step (h) while the first tray and the second tray are in close contact with each other, the phenomenon that the package seated at the center position of the tray can be reliably prevented due to the warpage of the tray. Will be.

(h) The first tray carrier 440 and the second tray carrier 470 are integrally rotated by the rotation driving means 410. By flipping, the first tray carrier 440 grips the empty inverted first tray in the up and down positions, and the second tray carrier 470 has the inverted package seated in the down position. The inverting second tray is supported.

(i) The back pushing plates 444a and 474a are returned by the contraction stroke of the cylinders 444b and 474b to release the pushing of the upper surface of the reversed first tray and the lower surface of the reversed second tray.

(j) The second tray carrier 470 is lowered to the lowered position by the expansion stroke of the cylinder 425a and the contraction stroke of the cylinder 476b.

(k) The drawer 109 pulls out the reversed second tray on which the reverse package placed on the second tray carrier 470 is seated.

(l) The second tray carrier 470 rises to the lower position by the expansion stroke of the cylinder 476b and the contraction stroke of the cylinder 425a.

(m) The gripper 442a of the first tray carrier 440 is opened by the contraction stroke of the cylinder 442b, and the empty inverted first tray is placed on the second tray carrier 470.

(n) The gripper 472a of the second tray carrier 470 is closed by the expansion stroke of the cylinder 472b, and the second tray carrier 470 grips the inverted first tray.

(o) The first tray carrier 440 and the second tray carrier 470 are flipped integrally by the rotation driving means 410.

(p) The empty first tray carrier 440 is lowered to the lowered position by the expansion stroke of the cylinder 425a and the contraction stroke of the cylinder 446b.

9 is a view showing the configuration of the sorting unit 500 and the like of the apparatus of FIG.

As shown in the drawing, upstream of the sorting unit 500 is provided with a tray transfer rail 115 for transferring the tray from the conveyor belt 111 to the sorting unit 500.

Downstream of the intermediate transfer path, ie the conveyor belt 111, is formed upstream of the off-loading transfer path, ie, at a lower position than the tray transfer rail 115. Therefore, after lifting the tray from the conveyor belt 111 to the height of the tray conveying rail 115 using the lifting means 113, the rail 115 which is an off-loading conveying path by the pusher 117 which is a horizontal conveying means. ) Is horizontally transferred to the sorting unit 500 along.

The sorting unit 500 includes a tray conveying means 510 for conveying a tray to a predetermined position, a package conveying means 520 for conveying and sorting a package to a corresponding tray, and a tray sorting accommodating part 530.

As shown, the tray conveying means 510 and the package conveying means 520 are formed to be movable above the tray sorting receiving portion 530. Thus, by configuring the replacement station and the off-loading station separately, there is an advantage that the compactness of the device can be achieved as compared with the conventional vision inspection device where the size of the device must be increased by that much. The problem with this conventional vision inspection apparatus is related to the structure that allows the off-loaded trays to be stacked on top of the off-loading station 48.

In place of the off-loading station of the conventional vision inspection apparatus, which is configured to stack only the good package, as well as the good package tray accommodating part, the empty tray supply part, the reject package tray accommodating part, and the tray temporary holder part are provided together with the present invention. In this case, the problem of the conventional vision inspection apparatus is further exacerbated.

In other words, separate transfer rails and transfer means must be provided to transfer the trays upstream from the empty tray supply unit, the reject package tray receiving unit, and the tray temporary holder to the replacement station 36 where the package conveying operation is performed. .

In addition, the structural advantage of the present invention is that the empty tray supply portion 531 and reject package tray receiving portion 533 is arranged in the transverse direction between the good package tray receiving portion 535 and the loading transfer path as a whole '□' You can find it in the structure of the layout. Through this, the compactness of the vision inspection apparatus can be achieved.

10 is a view showing the configuration of the tray transport means 510 and the package transport means 520 of FIG.

The tray carrying means 510 and the package carrying means 520 are moved under the guidance of the guide way 501. The tray conveying means 510 has a slider arm 511 and a picker portion 517, and the package conveying means 520 has a slider guide way arm, a second slider 525 and a picker portion 527. It is provided. The slider guide way arm has a first slider 521 and a guide way arm 523.

The slider arm 511 is guided by the guideway 501 and performs a linear linear reciprocating motion integrally with the picker portion 517 fixedly coupled to the slider arm 511.

The first slider 521 is guided by the guideway 501 and linearly reciprocates in a horizontal direction integrally with the guideway arm 523 fixedly coupled to the first slider 521. The second slider 525 is guided by the guideway arm 523 and performs a longitudinal linear reciprocating motion integrally with the picker portion 527 fixedly coupled to the second slider 525. Therefore, the picker part 527 can perform linear reciprocation of a transverse direction and a longitudinal direction. As the picker portion 527, for example, a vacuum picker for performing vacuum suction pick-up and place-down operation while being up and down in the vertical direction is used.

The package carrier 520 and the tray carrier 510 are adapted to carry out the transport operation while moving transversely along the single guideway 501, thereby achieving device simplicity, compactness and cost reduction.

FIG. 11 is a diagram illustrating a configuration of the tray sorting accommodating part 530 of FIG. 9.

As shown, the tray sorting container 530 is adjacent to the empty tray supply unit 531, the reject package tray receiving unit 533, the good package tray receiving unit 535 and the tray temporary holder 537 sequentially Are arranged.

Reject packages because the reject package transfer from the tray of the good package tray receptacle to the tray of the reject package tray receptacle and the transportation of the good package from the tray of the tray temporary holder to the tray of the good package tray receptacle have the greatest number of transports. The tray accommodating part, the good package tray accommodating part, and the tray temporary holder part were arranged in sequence.

The empty tray supply unit 531 accommodates empty trays stacked below and receives the empty tray from below and supplies the empty trays to the reject package tray receiving unit 533 again.

The empty tray supply unit 531 includes a tray box 531a and a stack tray support means 531b. The tray box 531a accommodates a plurality of empty trays in a stackable manner. The stacking tray support means 531b supports a plurality of stacked trays by supporting the lower surface of the bottom tray of the stacked tray, and can be moved up and down so that the height of the top tray is always constant regardless of the number of stacked trays. To maintain.

The reject package tray accommodating part 533 is a component for accommodating the reject package tray in which the reject package is carried and seated. The reject package tray accommodating portion 533 includes a tray box 533a, a stacked tray support means 533b, and a work tray support means 533c.

The work tray support means 533b is a component for supporting / releasing the work tray on which the reject package carrying operation is performed. When the transport operation is completed, the work tray support means 533c releases the support so that the tray is carried out downward and stacked below. The stacking tray support means 533b supports a plurality of stacked trays by supporting the lower surface of the bottom tray among the stacked trays when the transporting operation is completed and then transported downward, and then descends as the number of stacked trays increases.

The reject package tray accommodating part 533 may be provided in plural so as to classify and accommodate the reject package for each reject cause.

The good package tray accommodating part 535 is a component accommodating a good package tray on which a good package is seated. The good package tray accommodating part 535 includes a tray box 535a, a stack tray support means 535b, and a work tray support means 535c. The structure of the good package tray container 535 is similar to that of the reject package tray container 533.

The good package tray accommodating part 535 is connected to the tray transfer rail 115 to transfer the tray from the tray transfer rail 115. To this end, the work tray support means 535c of the good package tray receiving portion 535 is formed at the same height as the tray transfer rail 115 to form part of the off-loading transfer path together with the tray transfer rail 115.

The package transporting means 520 transports the reject package among the packages seated on the tray transferred to the good package tray accommodating portion 535 to a tray of the reject package tray accommodating portion 533, and provides a temporary tray 537. The good package seated on the tray of the carrier of the good package tray receiving unit 535 is transported.

The tray conveying means 510 carries the tray from which the reject package conveying operation is completed to the tray temporary holder 537 when the tray temporary holder 537 is empty, and accommodates the reject package tray. When the unit 533 is empty, the empty tray is transported from the empty tray supply unit 531 to the reject package tray receiving unit 533. When the tray of the tray temporary holder 537 is empty, the empty tray is supplied to the empty tray supply unit 531. To transport.

Looking at the transport of the package and tray in sequence as follows.

(a) First, in the initial state, a plurality of empty trays are stacked in the empty tray supply unit 531, and the empty tray supply unit 531 has been transported from the empty tray supply unit 531 on the work tray support unit 533c of the reject package tray receiving unit 533. One empty tray is placed, and the good package tray receiving portion 535 and the tray temporary holder 537 are empty.

(b) In this state, if the tray on which the package is seated is transported along the off-loading transport path (tray transport rail 115) onto the work tray support means 535c of the good package tray receiving portion 535, the package The conveying means 520 picks up the reject package from the conveyed tray and places it down in the work tray of the reject package tray accommodating portion 533.

(c) When only the good package remains in the work tray of the good package tray accommodating part 535, the tray carrying means 510 picks up the tray and places it down on the tray temporary holder 537.

(d) Perform the process of (b) ~ (c) again.

(e) The package carrying means 520 picks up the good package seated on the work tray placed on the tray temporary holder 537 and places it down on the work tray of the good package tray receiving part 535.

Through the configuration of the sorting unit as described above, not only the transport of the package but also the tray is automatically configured to be transported to a predetermined position, thereby maximizing the work efficiency by automation.

According to the above-described configuration, the present invention can provide a vision inspection device that simplifies and compacts the device and has excellent work efficiency.

1 is a view showing the overall configuration of a vision inspection apparatus of a semiconductor package of the present invention.

FIG. 2 is a diagram illustrating a configuration of a tray loading unit and the like of the apparatus of FIG. 1.

3 is a view showing the configuration of a flipper part and the like of the apparatus of FIG.

4 is a view showing the configuration of the flipper portion of FIG.

FIG. 5 is a view illustrating a configuration of the first tray carrier, the second tray carrier, and the first sensor unit in FIG. 4. FIG.

6A is a view of the first tray carrier of the flipper portion of FIG. 4 from above, and FIG. 6B is a view of the first tray carrier of the flipper portion of FIG. 4 from below.

FIG. 7 is a view of the second tray carrier of the flipper portion of FIG. 4 as viewed from above. FIG.

FIG. 8 is a diagram illustrating a configuration of a first sensor unit of the flipper unit of FIG. 4.

9 is a view showing the configuration of a sorting unit and the like of the apparatus of FIG.

10 is a view showing the configuration of the tray conveying means and the package conveying means of FIG.

FIG. 11 is a diagram showing the configuration of the tray sorting container of FIG.

12 is a view schematically showing the overall configuration of a vision inspection apparatus of a conventional semiconductor package.

<Description of the symbols for the main parts of the drawings>

500: sorting unit 501: guideway

510: tray conveying means 511: slider arm

517: picker portion 520: package transport means

525: second slider 527: picker portion

530: tray sorting container 531: empty tray supply

531a: tray box 531b: laminated tray support means

533: reject package tray receiving portion 533a: tray box

533b: lamination tray support means 533c: work tray support means

535: good package tray receiving portion 535a: tray box

535b: lamination tray support means 535c: work tray support means

537 tray temporary holder

Claims (7)

Vision inspection unit for vision inspection of the package seated on the tray and sorting unit for classifying the package inspected by the vision inspection unit into a good package and reject package, The sorting unit includes a tray sorting container, a tray conveying means and a package conveying means, the tray sorting receiving part comprises an empty tray supply part, a reject package tray receiving part, a good package tray receiving part and a tray temporary holder part, The good package tray receiving unit receives the vision-tested tray from the vision inspection unit, The package transporting means may carry a reject package of the packages seated on the tray of the good package tray accommodating part to the tray of the reject package tray accommodating part, and transfer the good package seated to the tray of the tray temporary holder part of the good package tray. I carry it in the tray of the accommodation part, The tray conveying means may be configured to convey a tray from which the reject package carrying operation is completed when the tray temporary holder is empty, from the good package tray container to the tray temporary holder, and when the reject package tray container is empty, from the empty tray supply unit. A vision inspection apparatus for a semiconductor package having a package and a tray sorting portion, wherein the empty tray is transported to the reject package tray accommodating portion, and the empty tray is transported to the empty tray supply portion when the tray temporary tray of the tray is empty. The method of claim 1, The empty tray supply unit receives an empty tray from below, and the reject package tray receiving unit and the good package tray receiving unit carry out a tray in which a package carrying operation is completed, downward, The tray conveying means and the package conveying means is a vision inspection apparatus of a semiconductor package having a package and a tray sorting unit, characterized in that for transporting the tray and the package, respectively moving in the upper portion of the tray sorting receiving portion. The method of claim 2, The empty tray supply unit receives a tray from a tray stacked below, and the reject package tray accommodating unit and the good package tray accommodating unit are transported downward to stack the trays where the package transport operation is completed and stacked on the lower side. Vision inspection apparatus of a semiconductor package having a package and a tray sorting portion. The method of claim 3, The empty tray supply unit includes a tray box for accommodating the tray and a stack tray support means configured to support the stack tray but move up and down, The reject package tray accommodating portion supports a tray for stackably stacking the tray, a work tray supporting means for supporting / releasing the tray on which the reject package transporting operation is performed, and a tray transported downward to support the stacked tray, but which can be moved up and down. It is provided with a laminated tray support means that is provided, The good package tray accommodating portion includes a tray for accommodating trays, a work tray support means for supporting / releasing a tray on which a good package transport operation is performed, and a tray transported downward to support the stacked trays, but being movable upward and downward. Vision inspection apparatus of a semiconductor package having a package and a tray sorting unit comprising a laminated tray support means. The method of claim 2, The empty tray supplying unit, the reject package tray receiving unit, the good package tray receiving unit, and the tray temporary mounting unit are arranged in a transverse direction, The package conveying means and the tray conveying means perform a conveying operation while moving laterally along a single guideway, The package conveyance means is a vision inspection apparatus of a semiconductor package having a package and a tray sorting portion characterized in that the longitudinal movement with the lateral movement. The method of claim 5, The tray conveying means has a slider arm moving laterally along the single guideway and a picker portion coupled to the slider arm, The package carrying means includes a slider guideway arm moving laterally along the single guideway, a second slider moving longitudinally along the slider guideway, and a picker portion coupled to the second slider. Vision inspection apparatus of a semiconductor package having a package and a tray sorting portion. The method according to any one of claims 1 to 6, And the empty tray supplying unit, the reject package tray receiving unit, the good package tray receiving unit, and the tray temporary mounting unit are sequentially arranged adjacent to each other.