KR100798366B1 - 가소성 유전막 제거제 조성물 및 이를 이용한 유전막 제거방법 - Google Patents
가소성 유전막 제거제 조성물 및 이를 이용한 유전막 제거방법 Download PDFInfo
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- KR100798366B1 KR100798366B1 KR1020060108240A KR20060108240A KR100798366B1 KR 100798366 B1 KR100798366 B1 KR 100798366B1 KR 1020060108240 A KR1020060108240 A KR 1020060108240A KR 20060108240 A KR20060108240 A KR 20060108240A KR 100798366 B1 KR100798366 B1 KR 100798366B1
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- South Korea
- Prior art keywords
- dielectric film
- composition
- plastic
- weight
- water
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- 239000000203 mixture Substances 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 20
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims abstract description 18
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims abstract description 16
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000003513 alkali Substances 0.000 claims abstract description 9
- 235000011187 glycerol Nutrition 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims abstract description 7
- GTYLEVMOSBBKCQ-UHFFFAOYSA-N acetic acid;2-(2-ethoxyethoxy)ethanol Chemical compound CC(O)=O.CCOCCOCCO GTYLEVMOSBBKCQ-UHFFFAOYSA-N 0.000 claims abstract description 7
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 claims abstract description 4
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims abstract description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Natural products CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims abstract 4
- 150000001875 compounds Chemical class 0.000 claims abstract 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 15
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 2
- 239000000908 ammonium hydroxide Substances 0.000 claims description 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 claims description 2
- 239000000920 calcium hydroxide Substances 0.000 claims description 2
- 229910001861 calcium hydroxide Inorganic materials 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 15
- 230000000694 effects Effects 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 6
- -1 diethylene glycol monoalkyl ethers Chemical class 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- AEQDJSLRWYMAQI-UHFFFAOYSA-N 2,3,9,10-tetramethoxy-6,8,13,13a-tetrahydro-5H-isoquinolino[2,1-b]isoquinoline Chemical compound C1CN2CC(C(=C(OC)C=C3)OC)=C3CC2C2=C1C=C(OC)C(OC)=C2 AEQDJSLRWYMAQI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000000176 sodium gluconate Substances 0.000 description 2
- 235000012207 sodium gluconate Nutrition 0.000 description 2
- 229940005574 sodium gluconate Drugs 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000000449 nitro group Chemical class [O-][N+](*)=O 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- JBJWASZNUJCEKT-UHFFFAOYSA-M sodium;hydroxide;hydrate Chemical compound O.[OH-].[Na+] JBJWASZNUJCEKT-UHFFFAOYSA-M 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/264—Aldehydes; Ketones; Acetals or ketals
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Materials Engineering (AREA)
- Paints Or Removers (AREA)
Abstract
Description
실시예 | 조성 (%) | 시간(sec) | ||||
ECA | BDG | Gly | NaOH | 물 | ||
1 | 5 | 5 | 1 | 3 | 86 | 42 |
2 | 10 | 10 | 1 | 3 | 76 | 18 |
3 | 15 | 15 | 1 | 3 | 66 | 22 |
4 | 10 | 15 | 1 | 3 | 71 | 30 |
5 | 15 | 10 | 1 | 3 | 71 | 30 |
6 | 10 | 10 | 1 | 5 | 74 | 33 |
7 | 15 | 10 | 1 | 5 | 69 | 30 |
8 | 10 | 15 | 1 | 5 | 69 | 28 |
9 | 15 | 15 | 1 | 5 | 64 | 26 |
10 | 20 | 20 | 1 | 5 | 54 | 26 |
11 | 20 | 20 | 1 | 3 | 56 | 28 |
12 | 10 | 10 | 2 | 3 | 75 | 23 |
13 | 15 | 15 | 2 | 3 | 65 | 31 |
14 | 10 | 15 | 2 | 3 | 70 | 34 |
15 | 15 | 10 | 2 | 3 | 70 | 34 |
16 | 10 | 10 | 2 | 5 | 73 | 25 |
17 | 20 | 20 | 2 | 5 | 53 | 37 |
18 | 30 | 30 | 2 | 5 | 33 | 29 |
19 | 30 | 30 | 1 | 3 | 36 | 28 |
20 | 5 | 5 | 2 | 3 | 85 | 29 |
비교예 | 조성 (%) | 시간 (sec) | |||||
EDG | BDG | KOH | 글루콘산소다 | EG | 물 | ||
1 | 20 | 20 | 5 | - | - | 65 | 134 |
2 | 20 | 20 | 5 | 1 | 4 | 50 | 105 |
3 | 20 | 20 | 5 | 5 | 4 | 42 | 100 |
Claims (8)
- a) 디에틸렌글리콜모노에틸에테르아세트산, 디에틸렌글리콜, 에틸렌 글리콜 메틸에테르, 및 에틸렌 글리콜 에틸에테르로 이루어진 군 중에서 선택된 화합물 5 내지 20 중량%;b) 부틸디글리콜, 디글리콜모노부틸에테르아세트산, 및 모노부틸글리콜에테르로 이루어진 군 중에서 선택된 화합물 5 내지 20 중량%;c) 글리세린 0.5 내지 5 중량%;d) 수용성 알칼리 0.5 내지 20 중량%; 및e) 잔량의 물을 포함하는 플라즈마 디스플레이 패널용 가소성 유전체막 제거제 조성물.
- 삭제
- 삭제
- 제 1항에 있어서, 상기 수용성 알칼리는 수산화나트륨, 수산화칼륨, 수산화칼슘, 및 수산화암모늄로 이루어진 군 중에서 선택된 것인 플라즈마 디스플레이 패 널용 가소성 유전막 제거제 조성물.
- 제 1항에 있어서, 상기 조성물은 pH 9 내지 10이내 범위의 염기성인 플라즈마 디스플레이 패널용 가소성 유전막 제거제 조성물.
- 플라즈마 디스플레이 패널용 유전체 형성 공정에서 기판에 유전물질 페이스트를 도포한 후 가소성 단계로 건조한 후에 소성하기 전에, 제 1항에 따른 가소성 유전막 제거제 조성물을 이용하여 유전체막을 에칭 또는 제거하는 단계를 포함하는 플라즈마 디스플레이 패널용 가소성 유전막 제거 방법.
- 제 6항에 있어서, 상기 가소성 단계가 100 내지 120 ℃에서 수행되는 것인 플라즈마 디스플레이 패널용 가소성 유전막 제거 방법.
- 제 6항에 있어서, 상기 조성물을 딥핑(dipping) 또는 분사(spray) 방식으로 격벽에 적용하는 것인 플라즈마 디스플레이 패널용 가소성 유전막 제거 방법.
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KR1020060108240A KR100798366B1 (ko) | 2006-11-03 | 2006-11-03 | 가소성 유전막 제거제 조성물 및 이를 이용한 유전막 제거방법 |
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Cited By (1)
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KR101769098B1 (ko) | 2014-05-22 | 2017-08-17 | 덕산약품공업주식회사 | 포토레지스트 잉크 제거제 조성물 및 이를 이용한 포토레지스트 잉크 제거 방법 |
Citations (1)
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KR20060013196A (ko) * | 2004-08-06 | 2006-02-09 | 일동화학 주식회사 | 플라스마 디스플레이 패널 격벽 제거제 조성물 |
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KR20060013196A (ko) * | 2004-08-06 | 2006-02-09 | 일동화학 주식회사 | 플라스마 디스플레이 패널 격벽 제거제 조성물 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101769098B1 (ko) | 2014-05-22 | 2017-08-17 | 덕산약품공업주식회사 | 포토레지스트 잉크 제거제 조성물 및 이를 이용한 포토레지스트 잉크 제거 방법 |
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