KR100792397B1 - Susceptor for lcd manufacturing equipment having reinforcement structure - Google Patents

Abstract

The present disclosure provides a deformation preventing reinforcement structure on the bottom of the heater plate of the susceptor to prevent deformation of the heater plate of the susceptor by heat and to prevent the outer portion of the heater plate from sagging during long time use. It relates to a susceptor for an LCD manufacturing equipment having a. The present invention relates to a susceptor having a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing apparatus, and a circular support rod vertically connected to a center of a bottom surface of the heater plate, wherein the bottom of the heater plate has an outer edge from the center. A plurality of reinforcing ribs formed radially toward the. On the other hand, the present invention is a susceptor having a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment and a circular support rod vertically connected to the bottom center of the heater plate, the lower body portion of the heater plate It may be configured to become thicker from the outside toward the center to form a strain relief structure.

LCD manufacturing equipment, CVD chamber, susceptor, heater plate

Description

SUCEPTOR FOR LCD MANUFACTURING EQUIPMENT HAVING REINFORCEMENT STRUCTURE}

Detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings, in which numerals designate corresponding parts in the drawings.

1 is a configuration diagram of a CVD process chamber of a conventional TFT-LCD manufacturing equipment,

2a to 2c is a front view, a plan view and a side view showing in detail the structure of the conventional susceptor shown in FIG.

3 is a perspective view of a conventional susceptor shown in FIGS. 2A-2C,

4a to 4d is a front view, a plan view, a side view and a bottom view showing a first embodiment of a susceptor for an LCD manufacturing apparatus having a strain relief reinforced structure according to the present invention,

5 is a perspective view of the present susceptor shown in FIGS. 4A-4D,

6a to 6d is a front view, a plan view, a side view and a bottom view showing a second embodiment of a susceptor for an LCD manufacturing apparatus having a deformation preventing reinforcement structure according to the present invention,

7A and 7B are perspective views of the present susceptor shown in FIGS. 6A-6D,

8 is a cross-sectional view showing the structure of a CVD process chamber to which the first embodiment of the present invention is applied.

** Explanation of symbols for main parts of drawings **

60: susceptor 70, 100: heater plate

72: heating wire 74: reinforcing rib

80,110: circular support bar 82: electric wire

102: lower body

The present invention supports a glass substrate in a CVD (chemical vapor deposition) process chamber of an LCD manufacturing apparatus, and generates a plasma by applying heat and power to the glass substrate to form a uniform thin film on the glass substrate. More specifically, by providing a deformation preventing reinforcement structure on the bottom of the susceptor's heater plate to suppress the deformation of the susceptor's heater plate by heat in the CVD process while sagging the outer portion of the heater plate during long time use The present invention relates to a susceptor for an LCD manufacturing apparatus having a reinforcement structure for preventing deformation.

LCDs (liquid crystal displays) using TFTs (film deposition transistors) have attracted attention as having been provided with extremely high image quality. In a semiconductor device manufacturing process such as a TFT-LCD (thin film transistor liquid crystal display), a plasma enhanced chemical vapor deposition (PECVD) film is generally deposited by a showerhead method of a plate electrode. Such a film deposition process using plasma is performed in a CVD chamber, and the structure of this general CVD chamber is shown in FIG.

1 is a view illustrating a configuration of a CVD process chamber of a general TFT-LCD manufacturing apparatus. As illustrated, the TFT-LCD manufacturing apparatus is essentially provided with a chamber to perform a CVD process.

The upper part of the chamber 10 is closed by a chamber lid 12 to constitute a reactor provided with a reaction space that is blocked from the outside. O-rings are interposed between the chamber lid 12 and the chamber 10 to effectively block the reaction space from the outside.

The susceptor 20 is installed in the chamber 10, and the glass substrate 30 is seated therein. The susceptor 20 is located in the chamber 10 by the heater plate 24 is coupled to the circular support rod 22. Above the heater plate 24 a showerhead 40 is located, which is connected to a gas injection tube 16 for injecting gas into the reactor. The shower head 40 has a plurality of spray holes formed on a surface of the shower head 40 facing the glass substrate 30, and the gas supplied to the shower head 40 by the gas injection pipe 16 is sprayed through the glass substrate 30. Uniformly spray on the entire surface of the The injected gas is exhausted through the gas exhaust pipe. The showerhead 40 is connected to an RF power supply so as to simultaneously perform the role of the plasma electrode, and the susceptor 20 is grounded. The detailed structure of the susceptor 20 will be described in detail with reference to FIGS. 2A and 2B.

2A to 2C are front, plan and side views showing the structure of the conventional susceptor shown in FIG. 1 in detail, and FIG. 3 is a perspective view of the conventional susceptor shown in FIGS. 2A to 2C.

The susceptor 20 is formed of a wide plate-shaped heater plate 24 on which a glass substrate is seated, and a circular support rod 22 vertically connected to the center of the bottom of the heater plate 24. It can be moved up and down by the susceptor feed means. In particular, a lift pin hole 26 is formed in the heater plate 24, and a heat wire 28 for heating a glass substrate to be seated is built in the heater plate 24. The wires 29 of 28 are wired through the inside of the circular support rod 22.

The susceptor of such a structure places a glass substrate on a heater plate, and performs a predetermined process. Since the susceptor must withstand the use in plasma and withstand the use at high temperatures, the susceptor is made of an aluminum nitride-based sintered body excellent in plasma resistance and thermal conductivity. However, the conventional susceptor is not only deformed by the heat deformation when the plate-shaped heater plate is used, but the heater plate of the thin plate is wide and heavy so that the deformation occurs due to sagging at the outer side depending on the long time use. As a result, the pinhole of the lift pin supporting the glass material is inclined obliquely, which causes the lift pin to be damaged. This results in a failure of the susceptor to support the glass material. As a result, a problem occurs in the performance of the susceptor, causing a defect in the process performed in the chamber.

Accordingly, an object of the present invention is to solve the above-mentioned defects, to provide a reinforcement structure of the deformation prevention type on the bottom of the heater plate of the susceptor to suppress the deformation of the heater plate of the susceptor by heat in the CVD process. The present invention provides a susceptor for an LCD manufacturing apparatus having a deformation preventing reinforcement structure.

Another object of the present invention is to provide a reinforcement structure of the deformation prevention type on the bottom of the heater plate of the susceptor, the SD manufacturing equipment having a deformation prevention reinforcement structure that can prevent the outer portion of the large and heavy heater plate sag when used for a long time. To provide the acceptor.

In order to achieve the above object, a susceptor for an LCD manufacturing apparatus having a deformation preventing reinforcement structure according to the first aspect of the present invention is a susceptor in which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment, and a heater plate of the susceptor. Providing a deformation preventing reinforcement structure on the bottom of the to prevent the sag of the outside of the heater plate.

In order to achieve the above object, a susceptor for an LCD manufacturing apparatus having a deformation preventing reinforcement structure according to the second aspect of the present invention is vertical to a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment and a bottom surface of the heater plate. In the susceptor having a circular support rod connected to the, characterized in that the bottom surface of the heater plate is provided with a plurality of reinforcing ribs formed radially outward from the center.

In order to achieve the above object, a susceptor for an LCD manufacturing apparatus having a deformation preventing reinforcement structure according to the third aspect of the present invention is vertical to a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment and a bottom surface of the heater plate. In the susceptor provided with a circular support rod connected to the, characterized in that the lower body portion of the heater plate toward the center from the outer thicker configuration to form a deformation preventing reinforcement structure.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figures 4a to 4d is a front view, a plan view, a side view and a bottom view showing a first embodiment of a susceptor for an LCD manufacturing apparatus having a strain relief reinforced structure according to the present invention. 5 is a perspective view of the present susceptor shown in FIGS. 4A-4D.

The susceptor 60 is formed of a plate-shaped heater plate 70 and a circular support rod 80 vertically connected to the center of the bottom surface of the heater plate 70. The heater wire 70 has a heating wire 72 built in, and the heating wire 72 is connected to an electric wire 82 wired into the circular support rod 80 to receive power. The wire 82 is composed of a power line for supplying power to the heating wire and a temperature control line for transmitting a temperature control signal.

In this embodiment, a reinforcing rib 74 is provided on the bottom of the plate-shaped heater plate 70 as a deformation preventing reinforcing structure. The plurality of reinforcing ribs 74 are formed radially outward from the lower center of the heater plate 70, at least four are formed toward the four corners of the heater plate 70, and a plurality of them are disposed therebetween. have. The reinforcing ribs 74 extend from the center of the bottom surface of the heater plate 70, in particular, at the connection portion with the circular support rod 80, to the outside of the heater plate 70, and the height thereof becomes lower from the center to the outside. . The strength of the heater plate 70 increases as the reinforcement ribs 74 are densely formed on the bottom surface of the heater plate 70.

The reinforcing rib 74 is integrally formed on the bottom surface of the heater plate 70 by a molding method, or manufactured separately from the heater plate 70 and fixed by a joining method such as welding, or coupled by fixing means such as a bolt. Can be.

This reinforcement structure of the reinforcing rib 74 prevents the deflection of the outer edge due to the self-weight and heat deformation of the heater plate 70.

6a to 6d is a front view, a plan view, a side view and a bottom view showing a second embodiment of a susceptor for an LCD manufacturing apparatus having a strain relief reinforced structure according to the present invention. 7A and 7B are perspective views of the present susceptor shown in FIGS. 6A-6D.

In this embodiment, the lower body portion 102 of the plate-shaped heater plate 100 is made thicker from the outside toward the center to form a deformation preventing reinforcement structure. Specifically, by reinforcing the outer portion of the heater plate 100 by integrally forming a reinforcing structure inclined toward the outside from the circular support rod 110 connected to the bottom center of the heater plate 100, the thickness is thinner due to its own weight and heat deformation. It prevents sagging of the outer part. By such a reinforcement structure, the lower portion of the heater plate 100 forms a shape like inverted pyramid.

8 is a cross-sectional view showing the structure of a CVD process chamber to which the first embodiment of the present invention is applied. Referring now to this figure and FIGS. 4A-5, the operation of the present invention will be described in detail.

As shown, the susceptor 60 having the reinforcing structure of the present invention is installed in the reactor formed by the chamber 130 and the chamber lead 132 is combined to support the glass substrate 140 by seating, Power is supplied to the heating wire 72 of the heater plate 70 from the outside through the 82 to generate a plasma in the reactor to form a film on the glass substrate 140. Thus, since the heater plate 70 is always exposed to high temperature, there is a high risk of thermal deformation. However, the present invention suppresses thermal deformation by providing the reinforcing ribs 74 on the bottom surface of the heater plate 70. Further, the deflection phenomenon on the outer side due to the weight of the plate-shaped heater plate 70 also prevents the reinforcement rib 74 from acting as a reinforcing structure on the heater plate 70.

As described above, the present invention has an effect of suppressing deformation of the heater plate of the susceptor by heat in the CVD process by providing a reinforcement structure of a deformation prevention type on the bottom surface of the heater plate of the susceptor.

In addition, the present invention can prevent the outer portion of the large and heavy heater plate sag when used for a long time by providing a reinforcement structure of the deformation prevention type on the bottom surface of the heater plate of the susceptor.

As such, the present invention has an effect of preventing the deformation of the susceptor due to the reinforcing structure, thereby extending the product life of the susceptor and preventing the susceptor from failing. Furthermore, this has the advantage of increasing the work efficiency of the glass substrate deposition process performed in the CVD process and reducing the defective rate.

The embodiments disclosed herein are only presented by selecting the most preferred examples to help those skilled in the art from the various possible examples, the technical spirit of the present invention is not necessarily limited or limited only by this embodiment, the present invention Various changes and modifications are possible within the scope without departing from the spirit of the invention, as well as other equivalent embodiments.

Claims (6)

delete delete A susceptor having a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment and a circular support rod vertically connected to a center of a bottom surface of the heater plate, A plurality of radially formed on the bottom of the heater plate toward the outside from the center, the reinforcement structure for preventing deformation, characterized in that provided with reinforcing ribs are formed so that the height is lowered toward the outside of the heater plate from the circular support rod Susceptor for an LCD manufacturing equipment having. [4] The susceptor of claim 3, wherein the reinforcing rib is integrally formed on the bottom surface of the heater plate, joined by welding, or joined with a bolt. A susceptor having a heater plate on which a glass substrate is seated in a CVD process chamber of an LCD manufacturing equipment and a circular support rod vertically connected to a center of a bottom surface of the heater plate, The susceptor for an LCD manufacturing apparatus having a strain relief reinforcement structure, characterized in that the lower body portion of the heater plate toward the center from the outer side to form a thicker strain relief structure. The method of claim 5, Susceptor for an LCD manufacturing equipment having a deformation preventing reinforcement structure, characterized in that the heater plate is formed in the reinforcement structure is inclined toward the outer side of the heater plate from the circular support rod to the outer side of the heater plate integrally formed.

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