KR100716050B1 - Stage apparatus and gantry-type stage apparatus and control method of stage apparatus - Google Patents

Abstract

An object of the present invention is to make it possible to modify the parallelism of the beam with respect to the table.

The stage apparatus 10 is a stage apparatus called a gantry type which moves the board | substrate 11 as a workpiece | work in a horizontal direction, and is carried out on the base 12 and the base 12 by Y. The table 14 provided to be movable in the direction, the door-shaped gantry 16 fixed on the base 12, and the movement control and the gantry section of the table 14 in the Y direction. It has the control apparatus 17 which performs height adjustment control of the Z direction of (16). The gantry portion 16 has a beam 18 that extends horizontally above the table 14, and a pair of Z-axis drive mechanisms 20 that support both ends of the beam 18. The beam 18 is provided with a pair of Z-direction sensors 21A and 21B for measuring the distance to the table 14. The beam 18 is in parallel with the upper surface of the table 14 by driving the Z-axis drive mechanism 20 so that the values measured by the Z-direction sensors 21A and 21B are the same.

Stage device, gantry type, controller, beam, drive mechanism

Description

Stage apparatus and gantry-type stage apparatus and control method of stage apparatus

1 is a front view showing an embodiment of a stage device of the present invention.

2 is a side view of the stage apparatus.

3 is a longitudinal cross-sectional view of the internal structure of the Z-axis drive mechanism 20 viewed from the front.

4 is a longitudinal cross-sectional view of the internal structure of the Z-axis drive mechanism 20 viewed from the side.

5 is a front view illustrating the rotary motion support 46 and the slide 48.

FIG. 6: is a longitudinal cross-sectional view of the rotational motion support part 46 and the slide part 48 along the A-A line | wire in FIG.

7 is a flowchart for explaining the control process of the first control method executed by the control device 17.

FIG. 8 is a flowchart for explaining the control process of the first control method executed by the control device 17 following FIG. 7.

9 is a flowchart for explaining the control process of the second control method executed by the control device 17.

FIG. 10 is a flowchart for explaining the control process of the second control method executed by the control device 17 following FIG. 9.

Explanation of symbols on the main parts of the drawings

10: stage device

11: substrate

12: Base

14: table

16: gantry part

17 control device

18: beam

20: Z axis drive mechanism

21A, 21B: Z direction sensor

22: Y axis drive mechanism

24: Y direction guide

26: X direction guide

28: Y direction linear motor

30 support member

36: magnet yoke unit

38: coil unit

46: rotational movement support

48: slide section

50: air cylinder

56: pressure control unit

60: Z axis base

62: ball screw

64: nuts

66: Z axis drive motor

68: Z axis table

70: Z axis linear guide

82: rotary bearing

90: slider

92: slider base

94: cross roller guide

The present invention relates to a stage apparatus and a gantry type stage apparatus and a control method of the stage apparatus, wherein the beams traversed on the upper side of the table are adjusted to be parallel to the upper surface of the table.

For example, in a stage device called a gantry type stage device, a beam is horizontally placed on the upper side of a table on which a substrate is placed, and one of the tables or beams is moved in the Y direction (horizontal direction) to perform a predetermined work ( Processing, inspection, etc.) (for example, refer patent document 1).

In this type of stage apparatus, various processing jigs, inspection units, and the like are attached to the beam, and operation control is performed to perform processing or inspection on the substrate placed on the table. And the height position of the beam with respect to a table is adjusted by the lifting mechanism which supports the both ends of a beam so that raising / lowering is possible.

[Patent Document 1]

Japanese Patent Publication No. 2004-223439

In the above-described conventional stage device, since both ends of the beam are supported to be lifted and lowered through the ball screw mechanism, for example, when the overall length of the beam increases with the enlargement of the substrate, the load on the ball screw mechanism also increases. It is difficult to position with high precision only by the ball screw mechanism.

In addition, since the table is enlarged in response to the increase in the area of the substrate, it is difficult to precisely process the plan view of the upper surface of the table, and when a small inclination in the X direction orthogonal to the substrate conveying direction occurs on the table surface, the beam If a large load is applied when the height adjustment is performed so as to be parallel to the upper surface of the table, it is difficult to accurately maintain the parallelism of the beam due to the structural accuracy of the ball screw mechanism.

Therefore, an object of the present invention is to provide a stage apparatus, a gantry type stage apparatus, and a control method of the stage apparatus that solve the above problems.

In order to solve the said subject, this invention has the following means.

The invention according to claim 1 includes a table on which a work is placed on an upper surface, a pair of Z-axis driving mechanisms standing on both sides of the table, and the pair from above the table. And a pair of rotational movement supporting portions for supporting both ends of the beam so as to be rotatable with respect to the pair of Z-axis driving mechanisms. do.

Invention of Claim 2 has a slide part which slidably supports either one of the said pair of rotary motion support parts with respect to the said beam.

According to a third aspect of the present invention, the pair of Z-axis driving mechanisms includes a cylinder for supporting the load of the beam and pressure adjusting means for maintaining a constant pressure in the cylinder.

The invention of claim 4 further comprises: a pair of detection means for detecting a distance between the beam and the upper surface of the table, and the pair of Z-axis driving mechanisms so as to have the same detection value by the pair of detection means. It is characterized by having a control means.

According to a fifth aspect of the present invention, there is provided a horizontal driving means for moving the table in a horizontal direction.

According to a sixth aspect of the present invention, the pair of Z-axis driving mechanisms includes a ball screw mechanism for transmitting a motor driving force to the beam, and the beam is lifted and raised through the ball screw mechanism.

A gantry stage apparatus having a table and a gantry portion having a beam spanned horizontally above the table, wherein the height of both ends of the beam is parallel to the upper surface of the table. And a Z-axis adjusting mechanism for adjusting the position is provided in the gantry portion.

In the invention according to claim 8, the Z-axis adjusting mechanism includes one of a pair of rotational motion support parts for supporting both ends of the beam so as to be rotatable, and one of the pair of rotational motion support parts. And a slide portion for slidably supporting the beam.

According to a ninth aspect of the present invention, the pair of Z-axis driving mechanisms includes a cylinder for supporting the load of the beam and pressure adjusting means for maintaining a constant pressure in the cylinder.

The invention according to claim 10 includes a step of moving a table in a horizontal direction, a step of measuring a distance between a beam provided so as to face the upper side of the table and the table, and storing a measurement result, and the measurement And a step of adjusting the height position of both ends of the beam such that the beam is parallel to the upper surface of the table so that the detection value by the pair of detection means is equal based on the result.

EMBODIMENT OF THE INVENTION Hereinafter, the best form for implementing this invention with reference to drawings is demonstrated.

<Example 1>

1 is a front view showing an embodiment of a stage apparatus according to the present invention. 2 is a side view of the stage apparatus. As shown in FIG. 1 and FIG. 2, the stage apparatus 10 is a gantry which moves the board | substrate (shown with a broken line in a figure) 11 as a work (work) in a horizontal direction. type), which is a stage device fixed to a base, a table 14 provided on the base 12 so as to be movable in the Y direction, and a door type fixed on the base 12. And a control device (control means) 17 for controlling the movement of the table 14 in the Y direction and the height adjustment control of the gantry 16 in the Z direction.

The upper surface of the table 14 is a mounting surface on which the substrate 11 is placed. In addition, the table 14 is provided with a number of small holes (not shown) for vacuum suction of the substrate 11 on the upper surface, and sucks air in the gap with the substrate 11 from the small hole by a vacuum pump. It is configured to chuck the substrate 11 in a horizontal state.

The gantry portion 16 has a beam 18 that extends horizontally above the table 14, and a pair of Z-axis drive mechanisms 20 that support both ends of the beam 18. In addition, the beam 18 is provided with a pair of Z-direction sensors (detection means) 21A and 21B for measuring the distance (the height position in the Z direction) to the table 14. The pair of Z-direction sensors 21A and 21B are mounted at the X-direction position opposite to the blank area formed on the outside of the mounting area on which the substrate 11 is placed on the upper surface of the table 14. .

As these Z direction sensors 21A and 21B, the sensor of the system which measures a distance by irradiating a laser beam, for example is mentioned. The beam 18 is in parallel with the upper surface of the table 14 by driving the Z-axis drive mechanism 20 so that the values measured by the pair of Z-direction sensors 21A and 21B are the same. Here, the detail of the Z-axis drive mechanism 20 is mentioned later.

Between the base 12 and the table 14, a Y-axis drive mechanism 22 for moving the table 14 in the horizontal direction (Y direction) is provided. The Y axis drive mechanism 22 includes a pair of Y direction guides 24 extending in the Y direction, an X direction guide 26 for restricting the X direction, and a Y direction linear motor (horizontal direction driving means) 28. ) And a support member 30 for supporting the table 14.

The support member 30 stands on the flat base-shaped movable base 32 provided to face the base 12 and the upper surface of the movable base 32 to support the table 14. It has a support 34 to be. Accordingly, the table 14 moves in the Y direction together with the movable base 32 driven by the Y direction linear motor 28. The Y-direction linear motor 28 is attached to the magnet yoke unit 36 fixed to the upper concave portion of the X-direction guide 26 and the lower surface of the movable base 32 and inserted into the magnet yoke unit 36. It is a moving coil MC type linear motor comprised by the coil unit 38. As shown in FIG.

Further, the lower surface of the movable base 32 includes a Y-direction positive pressure pad 40 for ejecting compressed air to the Y-direction guide 24 and X for ejecting compressed air to the left and right sides of the X-direction guide 26. A directional pressure pad 42 is provided. For this reason, the movable base 32 is non-contact with the air direction from the Y-direction positive pressure pad 40 and the X-direction positive pressure pad 42, and is low contacting with respect to the Y-direction guide 24 and the X-direction guide 26. Iii) supported to move to friction.

In addition, in the Y direction guide 24 or its vicinity, the Y direction linear scale (not shown) which measures the Y direction moving position of the table 14 is provided. By this Y-direction linear scale, it is possible to accurately detect to which position the table 14 moves from the initial position (the Y-direction reference position).

Here, the structure of the gantry part 16 is demonstrated. As shown in FIG. 1 and FIG. 2, the gantry portion 16 includes a pair of support members 44 fixed on the base 12 so as to be located at both left and right sides of the table 14 and the support member 44. A Z-axis drive mechanism 20 supported on the upper surface, a pair of rotational motion support portions 46 for rotatably supporting both ends of the beam 18 with respect to the Z-axis drive mechanism 20, and one rotational motion. A slide portion 48 for slidably supporting the support portion 46 in the X direction, and a pair of air cylinders 50 for supporting the loads on both ends of the beam 18 are provided.

The air cylinder 50 has a cylinder body 52 fixed to the side surface of the Z-axis drive mechanism 20 and a piston rod 54 protruding upwardly from the cylinder body 52 to the pressure control unit 56. The pressure inside the cylinder main body 52 is controlled by the predetermined pressure by this. In addition, the upper end of the piston rod 54 is coupled to the beam 18, and the air cylinder 50 is comprised so that the load of the beam 18 may be supported by the air pressure of the cylinder main body 52. As shown in FIG. The pressure control part (pressure adjusting means) 56 controls the air pressure of the cylinder main body 52 so that the pressure according to the load (load) acting on the piston rod 54 may be attached to, for example, the beam 18. In response to an increase in load by various processing jigs or inspection units, pressure control is performed to keep the height position of the beam 18 constant by increasing the air pressure in the cylinder body 52.

3 is a longitudinal sectional view of the internal structure of the Z-axis drive mechanism 20 viewed from the front. 4 is a longitudinal sectional view of the internal structure of the Z-axis drive mechanism 20 viewed from the side. 3 and 4, the Z-axis drive mechanism 20 is hypothetically mounted to the Z-axis base 60 fixed on the support member 44 and the Z-axis base 60 to follow the center line. Ball screw 62, nut 64 screwed to ball screw 62, Z-axis drive motor 66 for applying rotational driving force to ball screw 62, and back of beam 18 ) And a pair of Z-axis linear guides 70 for guiding the lifting operation of the Z-axis table 68. The Z-axis base 60 is formed in a U-shape when viewed from the side, and the standing portion 60a standing up in the vertical direction (Z direction) and the upper portion 60b protruding horizontally from the upper end of the standing portion 60a. ) And a lower portion 60c protruding in the horizontal direction from the lower end of the standing portion 60a and fixed to the supporting member 44.

The ball screw 62 is rotatably supported by a pair of ball screw supports 72 provided in the standing portion 60a of the Z axis base 60 in a state extending in the vertical direction (Z axis direction). The coupling 74 is connected to the upper end. The Z-axis drive motor 66 has a rotating shaft 76 extending downward (Z-axis direction), and is mounted in a vertical state on the upper portion 60b of the Z-axis base 60. In addition, the rotation of the rotary shaft 76 driven by the Z-axis drive motor 66 is transmitted to the ball screw 62 through the coupling 74.

The nut 64 screwed to the ball screw 62 is coupled to the Z-axis table 68, and is elevated in accordance with the rotational direction of the ball screw 62. In addition, the rear surface of the Z-axis table 68 is coupled to a linear block 78 that slides the Z-axis linear guide 70, and the Z-axis table 68 has a nut 64 of the ball screw 62. When moving up and down with rotation, it is guided by the Z-axis linear guide 70.

Further, the beam 18 is coupled to the front surface of the pair of Z-axis tables 68. Therefore, the position of the beam 18 in the Z-axis direction is changed in accordance with the lifting position of the Z-axis table 68 which is driven by the Z-axis drive mechanism 20 in the vertical direction. The height position is adjusted so that the clearance distance with respect to the upper surface of the table 14 (or the board | substrate 11 mounted on the table 14) is made constant by the installed linear scale (not shown).

Here, since the rotation angle of the rotation shaft 76 is proportional to the movement distance of the beam 18 in the Z direction, the rotation angle of the rotation shaft 76 is not provided with the linear scale in the Z axis table 68 as described above. It is also possible to accurately adjust the height position of the beam 18 by incorporating a rotation angle detection sensor (not shown) in the Z-axis driving motor 66 to control the rotation angle.

Here, the structure of the rotational motion support part 46 and the slide part 48 which connect between the both ends of the said beam 18 and a pair of Z-axis drive mechanism 20 is demonstrated. 5 is a front view showing the rotary motion support 46, the slide 48. 6 is a longitudinal cross-sectional view of the rotary motion support 46 and the slide 48 along the line A-A in FIG. However, in this embodiment, the right end of the beam 18 is connected to the rotary motion support 46 and the slide 48, and the left end of the beam 18 is connected to the rotary motion support 46. It is connected. That is, the slide part 48 is provided only in either one of the both ends of the beam 18 (in this embodiment, the right end).

As shown in FIG. 5 and FIG. 6, the rotary table 80 of the rotary motion support part 46 is provided in the edge part of the beam 18, and the inner periphery of this rotary table 80 is provided. The rotary bearing 82 is rotatably fitted. And the shaft 84 penetrates into the inner periphery of the rotary bearing 82, and the edge part of the beam 18 is supported with respect to the shaft 84 so that rotational movement is possible. Moreover, the circular cover 86 which covers the side surface of the inner ring of the rotary bearing 82 is provided in the edge part of the shaft 84 which protrudes forward rather than the rotary bearing 82. Moreover, the front cover of the beam 18 is equipped with the ring-shaped cover 88 which covers the side surface of the outer ring of the rotary bearing 82. As shown in FIG.

The base end of the shaft 84 is provided integrally with the slider 90 sliding in the X direction. As for the slider 90, when it sees from the right side, the cross-sectional shape is formed in a U shape, and is rearward from the vertical board 90a which opposes the Z-axis table 68, and the upper and lower ends of the vertical board 90a. It has the sliding parts 90b and 90c bent. And the slider base 92 is fixed to the front surface of the Z-axis table 68, and the sliding part 90b, 90c which supports the sliding part 90b, 90c in the X direction so that sliding at the end part of the slider base 92 is possible. The cross roller guide 94 is provided.

Accordingly, the right end of the beam 18 is supported by the rotary bearing 82 and the shaft 84 so as to be rotatable, and further slides in the X direction by the slider 90 and the cross roller guide 94. Possibly supported. Although not shown, the left end of the beam 18 is supported by the rotary bearing 82 and the shaft 84 so as to be rotatable.

In this way, the beam 18 is supported at both ends so as to be rotatable, and one end of the beam 18 is slidably supported, so that the height of both ends is provided by the pair of Z-axis drive mechanisms 20. When the position is adjusted, the rotational movement can be made with respect to the Z-axis drive mechanism 20, and the positional shift in the X direction of the rotational movement support portion 46 is absorbed by the sliding operation of the slide portion 48.

In the controller 17 of the present embodiment, the controller 17 is set to execute either the first control method (memory copying control) or the second control method (real time control) based on the detection results of the Z direction sensors 21A and 21B. It is. In the first control method (memory copying control), the substrate 11 is placed on the table 14, and the height position of the table 14 with respect to the Y axis direction is previously measured by the Z-direction sensors 21A and 21B. The measured value is stored. And when performing an actual control operation, based on the height measurement value memorize | stored, the height position of the both ends of the beam 18 is controlled so that the beam 18 may become parallel to the upper surface of the table 14.

In the second control method (real time control), the height position of the table 14 in the Y-axis direction is measured by the Z-direction sensors 21A and 21B while the substrate 11 is placed on the table 14. Based on the detected measured value, the height positions of both ends of the beam 18 are controlled so that the beam 18 is parallel to the upper surface of the table 14.

Here, the control processing of the first control method executed by the control device 17 will be described with reference to FIGS. 7 and 8. As shown in FIG. 7, the control device 17 applies a voltage to the coil unit 38 of the Y-direction linear motor 28 in step S11 (hereinafter referred to as “step”). The table 14 is moved at a predetermined constant speed in the Y direction from the initial position.

In the following S12, the distance to the upper surface of the table 14 at each Y-direction position (height position of the beam 18 relative to the table 14) by the pair of Z-direction sensors 21A and 21B (H _A ) , H _B ) is measured. Subsequently, the procedure proceeds to S13 where the Z-direction measurement data H _A and H _B measured by the pair of Z-direction sensors 21A and 21B are stored in a memory (not shown). Here, the memory stores a database storing measured values (Z-direction measurement data (H _A , H _B )) of the distance between the beam 18 and the table 14 corresponding to the Y-direction position of the table 14. Has

In the next S14, it is checked whether or not the table 14 has moved to the end position in the Y direction. In S14, when the table 14 has not reached the end position of the Y direction, it returns to said S11, the movement of the table 14 to the Y direction, and a pair of Z-direction sensors 21A and 21B. The distance to the upper surface of the table 14 is measured.

In addition, in said S14, when the table 14 is moved to the terminal position of a Y direction, it progresses to S15 and returns the table 14 to an initial position. In following S16, the board | substrate 11 is carried in to the upper surface of the table 14 by a loading apparatus (not shown). Subsequently, the procedure proceeds to S17 where the substrate 11 is vacuum-adsorbed onto the table 14.

In S18, the table 14 is moved at a predetermined constant speed in the Y direction from the initial position by the Y-direction linear motor 28. And in S19 shown in FIG. 8, the Y-direction position of the table 14 with respect to the beam 18 measured by the Y-direction linear scale is read. Subsequently, the procedure proceeds to S20 where the Z-axis drive motor 66 is arranged such that H _A = H and H _B = H based on the Z-direction measurement data H _A and H _B at the corresponding Y-direction position stored in the memory. Is driven to correct the height position at both ends of the beam 18 so that the beam 18 is parallel to the corresponding Y-direction position of the table 14.

In the next S21, it is checked whether or not the table 14 has reached the end position in the Y direction. In the above S21, when the table 14 has not reached the end position in the Y direction, the process returns to the above-described S18 and the control process of S18 to S21 is executed again. In addition, in S21, when the table 14 has reached the end position of the Y direction, it progresses to S22 and the board | substrate 11 on the table 14 is carried out by an carrying out apparatus (not shown). After that, the flow advances to S23 to check whether the stop switch (not shown) is operated to ON. In S23, when a stop switch (not shown) is OFF, it returns to said S15 and repeats the process after S15. In addition, in S23, when the stop switch (not shown) is operated to ON, the stage apparatus 10 is stopped and this control process is complete | finished.

Thus, in the 1st control method, since the height position with respect to the Y-axis direction of the table 14 is measured by Z direction sensors 21A and 21B in advance, and this measured value is memorized, when it is an actual work process, By reading the measured value corresponding to the Y-direction position, the height position of both ends of the beam 18 can be corrected and parallel to the upper surface of the table 14. Therefore, since the beam 18 can always be kept in parallel with the upper surface of the table 14 at a predetermined height position, it becomes possible to precisely process or inspect the substrate 11.

Here, a control process of the second control method executed by the control device 17 will be described with reference to FIGS. 9 and 10. As shown in FIG. 9, the control apparatus 17 returns the table 14 to an initial position in S31. In following S32, the board | substrate 11 is carried in to the upper surface of the table 14 by a loading apparatus (not shown). Subsequently, the procedure proceeds to S33 where the substrate 11 is vacuum-adsorbed onto the table 14.

In the following S34, the table 14 is moved at a predetermined constant speed in the Y direction from the initial position by the Y-direction linear motor 28. In S35 shown in FIG. 10, the Y-direction position of the table 14 with respect to the beam 18 measured by the Y-direction linear scale is read. Subsequently, the flow advances to S36 to read the Z-direction measurement data H _A and H _B at the Y-direction position stored in the memory.

In the following S37, it is checked whether the Z-direction measurement data H _A and H _B measured by the pair of Z-direction sensors 21A and 21B are equal to the preset reference height H. In this S37, when H _A = H and H _B = H, the beam 18 is parallel to the position of the table 14 in the Y direction, and the distance between the beam 18 and the table 14. Is determined to be a prescribed value, and the process of S38 to S46 is omitted, and the routine proceeds to S47 which will be described later.

Further, in S37, H _A = H, H _B = if it is not H, the process proceeds to S38, a pair of Z-direction sensor (21A, 21B) the Z measurement data measured by the (H _A> H) Check whether or not. In S38, when H _A > H, since the left end of the beam 18 is inclined with respect to the Y-direction position of the table 14, the process proceeds to S39 and the left Z-axis driving mechanism ( The Z-axis drive motor 66 of 20 is driven to lower the left end of the beam 18 by the Z-direction difference H _A -H.

In the next S40, the table 14, is the distance to the top surface at each Y position by a pair of Z-direction sensor (21A, 21B) (the height of the beam 18 on the table 14 position) (H _A , H _B ) is measured. After returning to S37, the Z-direction measurement data measured by the pair of Z-direction sensors 21A and 21B after the Z-direction inclination correction is checked whether H _A = H and H _B = H. In the S37, it is, because a beam (18) parallel to edit with respect to the Y direction position of the table 14 when the _{H A = H, H B =} H, the process proceeds to the S47.

In addition, in said S38, when it is not H _A > H, it progresses to S41 and it is checked whether it is Z direction measurement data (H _A <H) measured by the pair of Z direction sensors 21A and 21B. do. In S41, when H _A <H, since the left end of the beam 18 is inclined down, the flow advances to S42 to drive the Z-axis drive motor 66 of the Z-axis drive mechanism 20 on the left side. The left end of the beam 18 is raised by the Z-direction difference H _A -H. Subsequently, the process proceeds to S40 where the pair of Z-direction sensors 21A and 21B are used to distance the upper surface of the table 14 at each Y-direction position (the height position of the beam 18 with respect to the table 14). Measure (H _A , H _B ). Then, the process returns to S37 again, and it is checked whether or not the Z-direction measurement data measured by the pair of Z-direction sensors 21A and 21B after the Z-direction tilt correction is H _A = H and H _B = H. In the S37, it is, because a beam (18) parallel to edit with respect to the Y direction position of the table 14 when the _{H A = H, H B =} H, the process proceeds to the S47.

In the above S41, H _A <if it is not H, the process proceeds to S43, the measured Z measurement data (H _B by a pair of Z-direction sensor (21A, 21B)> checks whether H) do. In the S43, if the H _B> H is, it is inclined in the state the right end of the beam 18 is raised, the process proceeds to S44, the Z-axis driving motor 66 of the Z-axis driving mechanism 20 of the right By driving, the right end of the beam 18 is lowered by the Z-direction difference H _B -H. Subsequently, the process proceeds to S40 where the pair of Z-direction sensors 21A and 21B are used to distance the upper surface of the table 14 at each Y-direction position (the height position of the beam 18 with respect to the table 14). Measure (H _A , H _B ). Then, the process returns to S37 again to check whether the Z-direction measurement data measured by the pair of Z-direction sensors 21A and 21B after the Z-direction inclination correction is H _A = H and H _B = H. In the S37, it is, because a beam (18) parallel to edit with respect to the Y direction position of the table 14 when the _{H A = H, H B =} H, the process proceeds to the S47.

In the above S43, H _B> if it is not H, the process proceeds to S45, check whether or not the Z measurement data acquisition (H _B <H) by a pair of Z-direction sensor (21A, 21B) do. In S45, when H _B &lt; H, since the right end of the beam 18 is inclined, the process proceeds to S46, whereby the Z axis drive motor 66 of the right Z axis drive mechanism 20 is moved. By driving, the right end of the beam 18 is raised by the Z-direction difference H _B -H. Subsequently, the process proceeds to S40 where the pair of Z-direction sensors 21A and 21B are used to distance the upper surface of the table 14 at each Y-direction position (the height position of the beam 18 with respect to the table 14). Measure (H _A , H _B ). Then, the process returns to S37 again to check whether the Z-direction measurement data measured by the pair of Z-direction sensors 21A and 21B after the Z-direction inclination correction is H _A = H and H _B = H. In the S37, it is, because a beam (18) parallel to edit with respect to the Y direction position of the table 14 when the _{H A = H, H B =} H, the process proceeds to the S47.

In S39, S42, S44, and S46, when adjusting the height position of the beam 18 by driving the Z-axis driving motor 66, the load of the beam 18 is supported by the air cylinder 50, The burden of the Z-axis drive motor 66 and the ball screw 62 is reduced, and height adjustment of the beam 18 can be performed easily and smoothly.

Further, when in the above S45, a non-H _B <H is, whether the beam 18 is to that parallel to the table 14 proceeds to S47, and the table 14 has reached the end position in the Y direction, Check it. In S47, when the table 14 has not reached the end position in the Y direction, the process returns to S34 described above, and the process after S34 is executed again. In addition, in S47, when the table 14 has reached the end position of the Y direction, it progresses to S48 and the board | substrate 11 on the table 14 is carried out by an carrying out apparatus (not shown). Thereafter, the flow advances to S49 to check whether the stop switch (not shown) is operated to ON. In this S49, when a stop switch (not shown) is OFF, it returns to said S31 and repeats the process after S31. In addition, in S49, when the stop switch (not shown) is operated ON, the stage apparatus 10 will be stopped and this control process will be complete | finished this time.

As described above, in the second control method, the table 14 is moved in the Y direction during the actual working process, and the height position of the table 14 with respect to the Y axis direction is set by the Z direction sensors 21A and 21B. Based on this measurement value, the height position of both ends of the beam 18 can be corrected and parallel with respect to the upper surface of the table 14. Therefore, since the beam 18 can always be kept in parallel with the upper surface of the table 14 at a predetermined height position, it becomes possible to precisely process or inspect the substrate 11.

<Industrial Applicability>

In the above embodiment, the configuration in which the Y-direction linear motor 28 moves the table 14 in the Y-direction is mentioned as an example. However, the present invention is not limited thereto, and the stage apparatus having the configuration in which the gantry portion 16 is moved in the Y-direction is also used. It goes without saying that the present invention can be applied.

In addition, in the said embodiment, although the structure which used the ball screw for the Z-axis drive mechanism 20 was mentioned as an example, it is not limited to this, Of course, you may use transmission mechanisms other than a ball screw.

In addition, in the said embodiment, although the structure which provided the pair of Z direction sensors 21A and 21B in the both ends of the beam 18 was mentioned as an example, it is not limited to this, Three or more Z direction sensors 21A and 21B are mentioned. ), And the small inclination of the upper surface of the table may be calculated from the value measured by each sensor.

In addition, in the said Example, the small inclination of the table upper surface was measured in S12-S15 shown in FIG. 7, and the beam 18 with respect to the table upper surface in the state in which the board | substrate 11 was mounted on the table 14 was carried out. Although the process of correct | amending the inclination of () is performed, it is not limited to this, You may make it measure the inclination of the beam 18 with respect to the table 14 whenever the board | substrate 11 is mounted on the table 14. As shown in FIG.

In the above embodiment, in S22 shown in FIG. 8, it is checked whether the Z-direction measurement data measured by the pair of Z-direction sensors 21A and 21B is H _A = H _B , but is not limited thereto. For example, a method of individually adjusting the height positions of both ends of the beam 18 in comparison with the Z direction measurement data measured by the Z direction sensors 21A and 21B with the preset height position as a threshold may be used. good.

According to the present invention, since both ends of the beam are rotatably connected to the pair of Z-axis driving mechanisms by the pair of rotational movement supporting units, the beam height is adjusted by adjusting the height position of the beams by the Z-axis driving mechanism. It is possible to adjust to maintain the parallelism accurately, and in particular, the beam height is finely adjusted to adjust the parallelism of the beam with respect to the upper surface of the table even at the slight inclination of the table planar view accompanied with the enlargement of the table. It can be maintained with high precision.

In addition, according to the present invention, since it has a slide portion which slidably supports either one of the pair of rotational movement support members with respect to the beam, even if the beam is adjusted to have a small angle of inclination with respect to the horizontal direction. The load on the Z-axis drive mechanism is prevented by the slide operation of the slide portion.

In addition, according to the present invention, it has a cylinder for supporting the load of the beam and a pressure adjusting means for maintaining the pressure in the cylinder constant, so that even if the load of the beam increases, the burden on the Z-axis drive mechanism is reduced to increase the load. This can eliminate precision deviations.

Further, according to the present invention, since the table has horizontal driving means for moving the table in the horizontal direction, the parallelism between the substrate and the beam placed on the table can be more precisely secured than the moving of the beam.

Further, according to the present invention, since the pair of Z-axis driving mechanisms raise and lower the beam through the ball screw mechanism, it becomes possible to precisely adjust the parallelism of the beam with respect to the upper surface of the table, and also to load all the loads of the beam on the ball screw mechanism. It is comprised so that it may not work, and it can prevent that structural deviation does not affect the parallelism of a beam by a ball screw mechanism.

In addition, according to the present invention, since the Z-axis adjusting mechanism for adjusting the height position of both ends of the beam so that the beam is parallel to the upper surface of the table is provided in the gantry, the adjustment is performed to maintain the parallelism of the beam with respect to the upper surface of the table accurately. In particular, the height position of the beam can be finely adjusted even at the slight inclination of the table planar view accompanied with the enlargement of the table, so that the parallelism of the beam with respect to the upper surface of the table can be maintained with high accuracy.

Claims (10)

The table where a work is put on the upper surface, A pair of Z-axis drive mechanisms standing on both sides of the table, A beam transversely interposed between the pair of Z-axis drive mechanisms above the table, And a pair of rotational movement supporting portions for supporting both ends of the beam so as to be rotatable with respect to the pair of Z-axis driving mechanisms. The method according to claim 1, And a slide portion for slidably supporting one of the pair of rotary motion support portions with respect to the beam. The method according to claim 1 or 2, The pair of Z-axis drive mechanisms include a cylinder for supporting the load of the beam and pressure adjusting means for maintaining a constant pressure in the cylinder. The method according to claim 1 or 2, A pair of detection means for detecting a distance between the beam and the upper surface of the table; And a control means for driving the pair of Z-axis driving mechanisms so that the detection values by the pair of detection means are equal. The method according to claim 1 or 2, And a horizontal driving means for moving the table in a horizontal direction. The method according to claim 1 or 2, The pair of Z-axis drive mechanisms have a ball screw mechanism for transmitting a motor driving force to the beam, and the stage device lifts and lowers the beam through the ball screw mechanism. Table, In the gantry stage apparatus having a gantry having a beam spanning the upper side of the table, And a Z-axis adjusting mechanism for adjusting the height position of both ends of the beam so that the beam is parallel to the upper surface of the table. The method according to claim 7, The Z-axis adjusting mechanism, A pair of rotational movement supporting portions for supporting both ends of the beam so as to be rotatable; A gantry type stage device, characterized in that it has a slide portion (side) for slidably supporting any one of the pair of rotational movement support portion with respect to the beam. The method according to claim 7 or 8, The pair of Z-axis drive mechanisms have a cylinder for supporting the load of the beam and pressure adjusting means for maintaining a constant pressure in the cylinder. Moving the table horizontally; Measuring the distance between the beam and the table provided to face the upper side of the table, and storing the measurement result; And adjusting the height position of both ends of the beam such that the beam is parallel to the upper surface of the table such that the detected value by the pair of detection means is equal based on the measurement result. Control method of stage device.

Images