KR100692170B1 - In-line type organic electroluminescence manufacturing device - Google Patents

Abstract

(Problem) The present invention provides an inline organic electroluminescent production apparatus with high production efficiency while improving film forming quality.

(Solution means) In the in-line type organic electroluminescent production apparatus, by using a holder in which a mask is integrated, by holding a substrate and placing a cooling plate on the substrate, temperature rise of the substrate is suppressed and continuously conveyed. And the differential exhaust parts D1-D4 are formed in an inside of a apparatus, and it can be set as the structure which can carry out continuously without stopping a board | substrate between process chambers with different vacuum degrees.

Description

In-line type organic electroluminescent manufacturing equipment {IN-LINE TYPE ORGANIC ELECTROLUMINESCENCE MANUFACTURING DEVICE}

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows an example of embodiment of the holder used by the inline type organic electroluminescent manufacturing apparatus which concerns on this invention.

It is a figure which shows another example of embodiment of the holder used by the inline organic EL manufacturing apparatus which concerns on this invention.

FIG. 3 is a view showing a cassette for housing the holder shown in FIGS. 1 and 2.

It is a figure which shows an example of embodiment of the conveying apparatus used by the inline organic EL manufacturing apparatus which concerns on this invention.

It is a figure which shows an example of embodiment of the radiant heat absorption means used by the inline organic EL manufacturing apparatus which concerns on this invention.

FIG. 6 is a graph comparing the effects of the radiant heat absorbing means shown in FIG. 5.

It is a figure which shows an example of embodiment of the cooling member and heat conductive member used in the inline organic electroluminescent manufacturing apparatus which concerns on this invention.

FIG. 8 is a graph comparing the effects of the heat conductive members shown in FIG. 7.

9 is a plan view showing an example of an embodiment of an inline organic EL production apparatus according to the present invention.

10 is a schematic diagram of a conventional cluster type organic EL manufacturing apparatus.

<Explanation of symbols for main parts of drawing>

1, 1A, 1B: Holder

6: cassette

8a, 8b: positioning member

10a, 10b: cryo panel

11: oil structure

12: cooling plate

D1, D2, D3, D4: Differential Exhaust

The present invention relates to an inline organic EL production apparatus which continuously conveys a substrate, deposits evaporation materials such as organic materials, and forms an organic electroluminescent (hereinafter referred to as EL) element.

10, the organic EL manufacturing apparatus currently generally used is shown.

The apparatus shown in FIG. 10 is what is called a cluster type | mold, A conveyance chamber which has a robot hand is formed in polygonal shape, and several process chambers are provided around a conveyance chamber. As shown in FIG. 10, in the case of the organic electroluminescent manufacturing apparatus 40, the film formation process unit 41 is the conveyance chamber 42 which conveys a board | substrate to each process chamber, and the board | substrate delivery opening 43 which carries in a board | substrate. And a cleaning chamber 44 for cleaning the substrate, and film forming chambers 45, 46, 47 for forming a film on the substrate, and these processing chambers are disposed around the transfer chamber 42 via the plurality of gate valves 48. Is placed. Since the organic EL element is composed of a plurality of thin films including an electrode layer, the organic EL manufacturing apparatus 40 is provided with film forming chambers 45, 46, 47 serving as processing chambers for each thin film ("Organic EL story , Daily Industrial Newspaper, p98, from FIG. 53).

In the case of forming a film on the substrate, the substrate carried in the substrate loading opening 43 is opened into the processing chamber (for example, the film forming chamber 45) by opening the gate door 48, and the gate door 48 is opened. After closing to adjust the degree of vacuum, a first layer is formed over the substrate. After the film formation of the first layer is completed, the gate door 48 is opened again to take out the substrate from the film formation chamber 45 and bring the substrate into the next processing chamber (for example, the film formation chamber 46). To form the second layer in the same manner. In this way, the board | substrate with a film | membrane is conveyed to the process unit 50 through the sorghum chamber 49, and is adhere | attached with the cover glass under-processed by the process units 51 and 52, and FPD (flat panel display) The finished product of the organic electroluminescent element which becomes is produced.

(Patent Document 1) Japanese Unexamined Patent Publication No. 2002-348659

(Patent Document 2) Japanese Unexamined Patent Publication No. 2003-157973

Reducing manufacturing costs in FPDs using organic EL devices is a big problem in the future. For this purpose, shortening of the manufacturing time per board | substrate and improvement of the utilization efficiency of a material become essential. By the way, in the cluster type organic EL manufacturing apparatus shown in Fig. 10, it is not only necessary to bring in and take out substrates for each processing chamber with independent processing chambers for each thin film, but also because the vacuum degree is adjusted for each processing chamber, the manufacturing time per sheet is long. there is a problem.

On the other hand, in order to shorten manufacturing time, the organic EL manufacturing apparatus called an inline type is proposed (for example, patent document 1, patent document 2).

The inline organic EL manufacturing apparatus has a structure in which a plurality of film forming chambers for organic EL elements are arranged linearly in the same vacuum container, and the gate valve between these film forming chambers is excluded. At the time of film formation, a film is formed while the substrate is continuously conveyed above the plurality of film formation chambers, thereby shortening the time involved in conveying the substrate and adjusting the degree of vacuum, thereby shortening the manufacturing time.

However, the organic EL manufacturing apparatus includes a plurality of processing chambers (for example, the cleaning chamber 44 and the electrode film forming chamber 47 in FIG. 10) in which the atmosphere (vacuum degree) differs in addition to the film forming chamber for forming the film of the organic EL element. And the like, and even if only the film forming chamber for forming the film of the organic EL element is disposed in the same vacuum container, a gate valve is still required between the other processing chambers. Therefore, when conveying a board | substrate between these process chambers, it is necessary to open and close a gate valve every time it conveys, and it is necessary to adjust a degree of vacuum in each process chamber whenever opening and closing a gate valve. Among them, after the vacuum degree adjusting chamber is installed and the vacuum degree is adjusted in the vacuum adjusting chamber, the substrate is conveyed to the processing chamber. However, since the substrate is not practically capable of continuous conveyance, it takes time for the vacuum degree adjusting. There is a limit to shortening, so improvement of production efficiency cannot be expected.

In the inline organic EL manufacturing apparatus, since the substrate is continuously conveyed in the film forming chamber for forming the film of the organic EL element, the substrate temperature is continuously affected by the influence of the temperature of the evaporation source of the film forming chamber. easy. Increasing the substrate temperature causes re-evaporation of the thin film and causes deterioration of the quality of the thin film. In particular, in order to increase the film formation rate, it is preferable to bring the evaporation source closer to the substrate because the reactive vapor can be reduced, but the substrate temperature is more susceptible to the influence of the evaporation source, thereby improving the film formation speed and improving the film formation quality. Cannot be compatible. In addition, when the evaporation source is kept away from the substrate so as to maintain the substrate temperature properly, the film formation quality is improved, but the amount of reactive vapor is increased and the film formation speed is delayed, which also increases the film formation speed and the film formation quality. Cannot be compatible. That is, in the above-described inline organic EL production apparatus, it is difficult to shorten the production time while improving the film formation quality, and an improvement in production efficiency could not be expected.

Further, in the in-line type organic EL manufacturing apparatus, in the film forming chamber for forming the film of the organic EL element, for example, the film is formed while the substrate is continuously conveyed on the belt transfer apparatus, whereby the position shift of the substrate position is prevented. In the case of a large-sized board | substrate especially, it is also easy to produce | generate, and the board | substrate itself also has a problem of bending, and it was easy to produce the film formation defect.

As described above, in the in-line type organic EL manufacturing apparatus, many problems to be solved remain in view of film formation quality, production efficiency, etc. when mass production is considered.

This invention is made | formed in view of the said subject, Comprising: It aims at providing the inline type organic electroluminescent manufacturing apparatus with high production efficiency while improving film formation quality.

An in-line organic EL manufacturing apparatus according to claim 1 of solving the above problems,

A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum;

It has a conveying means for conveying a board | substrate continuously to the said some process chamber,

An inline organic EL manufacturing apparatus which forms an organic EL element in the said board | substrate through the predetermined process in the said several process chamber,

It has a mask in which the pattern of the thin film formed into a film is formed in the said board | substrate, Comprising: It has the support means which supports the said board | substrate by preventing curvature,

The said conveying means uses the said support means, and conveys the said board | substrate continuously to the said some process chamber, It is characterized by the above-mentioned.

By integrating the mask for patterning and the supporting means for supporting the substrate, the supporting means can be provided with the mask function of the substrate, so that the mask unit is individually conveyed to the manufacturing apparatus, or the mask is mounted on the substrate in the manufacturing apparatus. This is unnecessary, and it is possible to shorten the process time associated with the mask. In addition, since the substrate is held by the support means, the warpage of the substrate due to its own weight or the like can be prevented.

The inline organic EL manufacturing apparatus which concerns on the 2nd of this invention which solves the said subject,

A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum;

It has a conveying means for conveying a board | substrate continuously to the said some process chamber,

An inline organic EL manufacturing apparatus which forms an organic EL element in the said board | substrate through the predetermined process in the said several process chamber,

A first support means having a mask having a pattern of an organic thin film formed on the substrate, the first supporting means supporting the substrate by preventing bending;

A second support means having a mask on which a pattern of an electrode thin film formed on the substrate is formed, and supporting the substrate by preventing bending;

Having exchange means for moving the substrate from the first support means to the second support means within the apparatus,

The said conveying means is characterized by continuously conveying the said board | substrate to the said some process chamber using the said 1st support means or the said 2nd support means.

For example, an exchange means is formed between the process chamber in which the organic thin film is formed and the process chamber in which the electrode thin film is formed, and the substrate is transferred from the first support means to the second support means after mounting of the organic thin film. .

An inline organic EL manufacturing apparatus according to claim 3 of the present invention which solves the above problems,

A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum;

It has a conveying means for conveying a board | substrate continuously to the said some process chamber,

An inline organic EL manufacturing apparatus which forms an organic EL element in the said board | substrate through the predetermined process in the said several process chamber,

It is formed between process chambers with different vacuum degrees from each other, and has a differential exhaust part which can independently control the vacuum degree intermediate | middle of the vacuum degree in each process chamber,

The said conveying means conveys the said board | substrate continuously through the said differential exhaust part between the process chambers with which the said vacuum degree differs, It is characterized by the above-mentioned.

For example, by forming a differential exhaust portion between the processing chamber in which the organic thin film is formed and the processing chamber in which the electrode thin film is formed, it is possible to convey the substrate continuously without the need for a gate valve and without stopping the substrate. The conveyance can be carried out efficiently. In addition, since each processing chamber is connected through the differential exhaust unit, the vacuum degree of each processing chamber does not affect each other.

The inline organic EL manufacturing apparatus which concerns on Claim 4 of this invention which solves the said subject,

A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum;

It has a conveying means for conveying a board | substrate continuously to the said some process chamber,

An inline organic EL manufacturing apparatus which forms an organic EL element in the said board | substrate through the predetermined process in the said several process chamber,

It has a cooling member which suppresses the temperature rise of the said board | substrate,

The said conveying means is a conveyance of the said board | substrate continuously with the said cooling member to the said some process chamber, It is characterized by the above-mentioned.

For example, the cooling member has a good heat dissipation property or a large heat capacity, and thermally conducts from the substrate to the cooling member to suppress the temperature rise of the substrate, and continuously form the film with respect to the substrate even when the conveyance speed of the substrate is increased. It is possible to improve the production efficiency.

The inline organic EL manufacturing apparatus which concerns on Claim 5 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

It is formed between process chambers with different vacuum degrees from each other, and has a differential exhaust part which can independently control the vacuum degree intermediate | middle of the vacuum degree in each process chamber,

The said conveying means is a conveyance of the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means between the process chambers with which the said vacuum degree differs through the said differential exhaust part.

The inline organic EL manufacturing apparatus which concerns on Claim 6 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

The cooling member which suppresses the temperature rise of the said board | substrate is formed in the said support means, the said 1st support means, or the said 2nd support means,

The said conveying means is a conveyance of the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means to the said several process chamber, It is characterized by the above-mentioned.

The inline organic EL manufacturing apparatus which concerns on Claim 7 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

The cooling member which suppresses the temperature rise of the said board | substrate is formed in the said support means, the said 1st support means, or the said 2nd support means,

The said conveying means is a conveyance of the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means between the process chambers with which the said vacuum degree differs through the said differential exhaust part.

The inline organic EL manufacturing apparatus which concerns on Claim 8 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

Forming cleaning means for cleaning the support means, the first support means or the second support means,

And the support means, the first support means or the second support means are made reusable.

In-line type organic EL production site according to claim 9 of the present invention for solving the above problems,

In the inline organic EL manufacturing apparatus,

The said conveying means has a positioning member which determines the position of the said support means, the said 1st support means, or the said 2nd support means, It is characterized by the above-mentioned.

Therefore, also in the conveying means which conveys continuously, since the positioning precision of a support means, a 1st support means, or a 2nd support means improves, the positioning accuracy of the board | substrate itself also improves, and the film formation defect can be prevented.

The inline organic EL manufacturing apparatus which concerns on Claim 10 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

A cassette capable of receiving a plurality of the supporting means, the first supporting means or the second supporting means,

By using the cassette, with the vacuum degree largely changed in a predetermined processing chamber,

The conveying means is characterized by continuously conveying the supporting means, the first supporting means or the second supporting means from the cassette after the change of the degree of vacuum.

For example, in the processing chamber between the processing chamber for film formation and the processing chamber for sealing, the degree of vacuum around the cassette containing the plurality of substrates is converted to high vacuum / atmospheric pressure.

The inline organic EL manufacturing apparatus which concerns on Claim 11 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

The said differential exhaust part is further equipped with the other differential exhaust part with high vacuum degree.

For example, a differential exhaust portion having an intermediate degree of vacuum is not only formed between the processing chambers in which the organic thin film is formed and the processing chamber in which the electrode thin film is formed. By separately forming the differential exhaust units in FIG., The atmosphere of each processing chamber is prevented from affecting each other's processing chambers.

The inline organic EL manufacturing apparatus which concerns on Claim 12 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

A heat conduction member is formed between the substrate and the cooling member to conduct and diffuse heat from the substrate to the cooling member.

As the heat conductive member, for example, a soft material having thermal conductivity and capable of following the surface roughness of the contact surface is used.

The inline organic EL manufacturing apparatus which concerns on Claim 13 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

The cooling member is reusable.

The inline organic EL manufacturing apparatus which concerns on Claim 14 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

A radiation heat absorbing means for absorbing the radiant heat from the substrate and the cooling member or the substrate or the cooling member is formed.

For example, by absorbing the radiant heat from the substrate and the cooling member using the cryo surface of the helium refrigerator as the radiant heat absorbing means, it is possible to continuously form the film with respect to the substrate even when the temperature of the substrate is suppressed and the conveyance speed of the substrate is increased. In this way, production efficiency can be improved.

The inline organic EL manufacturing apparatus which concerns on Claim 15 of this invention which solves the said subject,

In the inline organic EL manufacturing apparatus,

The conveying means makes the conveying speed constant and at the same time,

It is characterized by controlling the film formation rates of the thin films in the plurality of processing chambers, respectively.

Best Mode for Carrying Out the Invention

In order to improve the mass productivity of an inline organic EL manufacturing apparatus, this invention studies the part which concerns on board | substrate conveyance, and the board | substrate temperature which focused on the quality of the formed film | membrane and production efficiency. Some specific embodiments thereof are shown in Figs. 1 to 9, in particular, parts relating to the efficiency of substrate transport are shown in Figs. 1 to 4, parts relating to substrate temperature are shown in Figs. 9, it demonstrates in detail.

(Example 1)

1 and 2 show examples of embodiments of holders used in the inline organic EL production apparatus according to the present invention.

1 (a) and 2 (a) are perspective views of the substrate and the holder, and FIGS. 1 (b) and 2 (b) are AA line arrow directions in FIG. 1 (a), respectively. It is sectional drawing seen from the, and sectional drawing seen from the BB line arrow direction of FIG.

As shown in FIG. 1, the holder 1A (support means) has a cross-shaped frame 3a having an L-shaped cross section which holds the periphery of the rectangular substrate 2a from its lower side, and a central portion of the frame 3a. And a holding pattern 4a for holding the substrate 2a at its lower side, and the pattern of the thin film to be formed in the opening portion formed by the frame 3a and the cross-shaped holding member 4a. The formed mask 5a is disposed. Moreover, the holding member 4a is not limited to a cross shape, For example, one or several combination may be sufficient in the center. In the holder 1A, one board | substrate 2a is provided from above the holder 1A, and the pattern by the mask 5a is formed in the lower surface side of the board | substrate 2a in FIG. In the example, the thin film used as the organic electroluminescent element of four sheets is formed into one sheet | seat 2a. The pattern of the holding member 4a or the mask 5a is determined according to the size of the organic EL element, and from the one substrate 2a, four, six, eight, ... An organic EL device is formed into a film. That is, the holder 1A corresponds to the one board | substrate 2a, and hold | maintains the periphery of one board | substrate 2a by the frame 3a and the holding member 4a, and prevents bending by self weight etc. At the same time, the mask function of the pattern formed on the substrate 2a by the mask 5a is provided. Moreover, the mask 5a is integrated with the holding member 4a, and is located in the side which contacts the board | substrate 2a.

As shown in FIG. 2, the holder 1B (support means) has a plurality of L-shaped cross-section frames 3b for holding the peripheral portion of the rectangular substrate 2b on the lower side thereof (four in FIG. 2). ) It is a planar arrangement and integrated, and the mask 5b in which the pattern of the thin film to be formed in a film is formed is arrange | positioned at the opening part which each frame 3b forms. In the holder 1B, four board | substrates 2b are installed from the upper side of the holder 1B, the pattern by the mask 5b is formed in the lower surface side of the board | substrate 2b in FIG. On each of (2b), a thin film of an organic EL element is formed into a film. That is, the holder 1B corresponds to the board | substrate 2b which is a cut board, hold | maintains the periphery of the board | substrate 2b which is a board cut by the frame 3b, prevents bending by its own weight, etc. ) To provide a mask function of a pattern formed on the substrate 2b.

In addition, although not shown in FIG. 1, FIG. 2, in order to suppress the curvature of the board | substrate 2a, 2b more effectively, even if the pressing member which presses the board | substrate 2a, 2b from the upper side of the board | substrate 2a, 2b is provided. do. For example, the cooling plate 13 in FIG. 7 mentioned later also functions as a pressing member. The substrates 2a and 2b may be held between the frames 3a and 3b and the pressing members by using an electrostatic chuck or a magnet chuck.

The in-line organic EL manufacturing apparatus (henceforth a manufacturing apparatus) which concerns on this invention forms a film, conveying a board | substrate. By conveying a board | substrate using the said holder 1A, 1B, the curvature of a board | substrate can be prevented and a film can be formed, conveying, and the film formation defect according to the curvature of a board | substrate can be prevented. Then, if a holder having a mask in which a different pattern is formed in accordance with the pattern of the thin film is prepared in advance, it is possible to form different thin film patterns. For example, in this manufacturing apparatus, the holder (A: 1st support means) which has the mask for organic thin films, and the holder (B: 2nd support means) which have the mask for electrode thin films are used separately, respectively, and are different, respectively. It becomes possible to form a thin film pattern. And as shown in FIG. 9 mentioned later, the cleaning chambers 24 and 29 which wash | clean a holder are provided, and a holder can be reused by washing and circulating a holder after use, and aiming at the improvement of a production efficiency. can do. Moreover, by integrating a holder and a mask, it is not necessary to convey a mask single body individually, and it is not necessary to provide a conveying apparatus for a mask, etc. separately.

The holder 1 is accommodated in the cassette 6 as shown in FIG. 3, and is attached with the cassette 6 etc. to an apparatus carrying-in port (for example, carrying-in part E1 of FIG. 9). The cassette 6 is formed by forming a plurality of groove portions 6a opposed to each other in a box-shaped case body having an opening and inserting and installing one holder 1 in a pair of groove portions 6a. Is to house the holder 1 in one cassette 6. In this way, by using the cassette 6 that can accommodate the plurality of holders 1 in a place requiring a large change of atmosphere (vacuum degree) such as an apparatus carrying inlet, a plurality of holders, i.e., a plurality of substrates, are used once. By pressure control, it can adjust to a desired atmosphere (pressure), and can shorten the adjustment time of atmosphere (pressure). And, once it is switched to the desired pressure (atmosphere), the film forming process can be carried out while sequentially removing the holder 1 from the cassette 6 and conveying it continuously without affecting the atmosphere (vacuum degree) such as the film forming chamber. Therefore, the extra conveyance time, the adjustment time of atmosphere (vacuum degree), etc. can be reduced, and production efficiency can be improved. For example, in FIG. 9, the atmosphere / vacuum switching chambers 22a and 22b (switching of the air / vacuum), the vacuum / N ₂ switching chamber 31 (switching of the vacuum / N ₂ ), and the N ₂ / air switching chamber 35a , 35b) (N ₂ / atmosphere switching) or the like, the cassette 6 can be used to pass the plurality of holders 1 together with the cassette 6 between processing chambers of different atmospheres (vacuum degrees).

An example of embodiment of the conveying apparatus used by this manufacturing apparatus is shown in FIG.

4A is a schematic view of the conveying apparatus in the film forming chamber viewed from the lateral direction, and FIG. 4B is a sectional view seen from the arrow C-C line in FIG. 4A.

Although the holder 1A has a warpage prevention function and a mask function, by using the positioning members 8a and 8b formed in the conveying apparatus 7 (conveying means), the positional accuracy on the conveying apparatus 7 is improved while being conveyed. It also serves as a guide to improve. Specifically, the conveying apparatus 7 has two belts 7a arranged in a linear shape and a plurality of rollers 7b for driving the belts 7a, and the predetermined position on the two belts 7a. Positioning members 8a and 8b are arrange | positioned at. The positioning member 8a is for determining the position of the advancing direction of the holder 1A, and the positioning member 8b is for determining the position of the direction perpendicular to the advancing direction of the holder 1A. The belt 7a and the roller 7b are disposed at a position that does not affect the film forming portion of the substrate, specifically, at the frame 3a portion of the holder 1A, and can transport the substrate together with the holder 1A. To support it. And when forming a film | membrane, the holder 1A is moved at a fixed predetermined speed so that the film thickness of the thin film formed may become uniform along the conveyance direction of a board | substrate.

In this way, the positioning of the holder 1A at the time of conveyance by the positioning members 8a and 8b is made precisely, so that the positioning of the substrate of the holder 1A is also made accurately. That is, the positioning accuracy at the time of film formation improves also about the evaporation source 9 which is arrange | positioned below the holder 1A and supplies an evaporation material, and can reduce the film formation defect by a position shift. In the present embodiment, the convex positioning members 8a and 8b are formed only on the belt 7a side, but the recesses corresponding to the positioning members 8a and 8b are provided on the holder 1A side. You may position by forming a part and fitting each other, and, conversely, you may form a recessed part in the belt 7a side, and a convex part in the holder 1A side, and position it by fitting. Moreover, when arranging rolls appropriately and maintaining friction force between roll and holder 1A without slipping holder 1A, holder 1A is not a belt conveyor but roller conveyor. You may convey.

In the inline organic EL manufacturing apparatus, in order to improve the production efficiency, the evaporation source for supplying the evaporation material of the thin film is arranged in a straight line in one vacuum chamber, and the film is formed while the substrate is continuously conveyed from above each evaporation source. Doing. In the conventional inline organic EL production apparatus, the substrate temperature tends to rise due to the above configuration, and production efficiency and film formation quality have a trade-off relationship. Therefore, in this manufacturing apparatus, even in the state in which a film is formed while the substrate is continuously conveyed, the temperature rise of the substrate is suppressed so as to obtain a good film forming state, thereby improving production efficiency. Examples of the specific embodiment are shown in FIGS. 5 and 7.

5 is a schematic view showing the inside of a vacuum container in which a plurality of evaporation sources 9 are arranged.

As shown in FIG. 5, in order to suppress the increase in the substrate temperature, the apparatus for manufacturing cryopanels 10a and 10b absorbs radiant heat from a substrate or a cooling plate 12 (see FIG. 7) described later. Means). The cryopanels 10a and 10b are arranged in parallel so as to be close to both sides of the holder 1 in a space which does not prevent deposition of the evaporation material supplied from the evaporation source 9, and thus the number of the evaporation sources 9 is reduced. In accordance with the conveying apparatus, a plurality are installed. The cryopanels 10a and 10b are equivalent to cryopanels used in the cryo pumps and the like, and use cryosides of a refrigerator using liquid He or the like.

Inside the vacuum vessel, there is almost no gas that mediates heat conduction from the substrate since the periphery of the substrate is a vacuum. Therefore, in the present invention, the temperature rise of the substrate is increased by actively absorbing radiant heat from the substrate or the like by using the cryopanels 10a and 10b that can be kept at a low temperature (−20 ° C. to −200 ° C.). To prevent it.

6, the temperature change of the board | substrate with and without using a cryopanel is shown.

This is 25 degrees C, the temperature of the cryopanel 10a, 10b is -200 degreeC, the temperature of the evaporation source 9 is 300 degreeC, the conveyance speed of a board | substrate is 5.8 mm / sec, and the film formation of the initial temperature of a glass substrate is carried out. The recovery was carried out 12 times consecutively.

In the case where the cryopanel of FIG. 6A is not used and the cryopanel of FIG. 6B is used, the increase of the substrate temperature is considerably suppressed due to the cooling by the cryopanel. It can be seen that.

FIG. 7: is sectional drawing which shows the structure in which the heat conductive member and the cooling member were formed in the holder 1A shown in FIG.

The holder shown in FIG. 7 forms the oil structure 11 (heat conductive member) and the cooling plate 12 (cooling member) in the holder 1A shown in FIG. Specifically, the structure 11 is arrange | positioned on the board | substrate 2a hold | maintained by the holder 1A, and the cooling plate 12 is arrange | positioned on the structure 11. These oil structures 11 and the cooling plate 12 are disposed on the surface opposite to the surface on which the film is formed on the substrate 2a. In addition, as long as the thermal conductivity from the substrate 2a to the cooling plate 12 can be sufficiently secured, the oil structure 11 does not necessarily need to be formed.

The above structure is intended to suppress the temperature rise of the substrate 2a by actively performing heat conduction and thermal diffusion from the substrate 2a toward the cooling plate 12 side. Specifically, the cooling plate 12 is made of a material having high thermal conductivity such as Cu, and the substrate 2a is brought into contact with the cooling plate 12 so as to escape the temperature of the substrate 2a by heat conduction and thermal diffusion. This prevents the temperature rise of the substrate 2a itself. And the temperature of the board | substrate 2a containing the cooling plate 12 may not be raised well by setting it as the structure which enlarges the heat capacity of the cooling plate 12 itself, such as increasing the volume of the cooling plate 12 itself. In addition, in order to improve the thermal conductivity of the cooling plate 12 and the substrate 2a, the oil structure 11 which improves the adhesion of the contact surfaces to each other is sandwiched between the cooling plate 12 and the substrate 2a. You may also As the structure 11, a silicone rubber, a graphite sheet, a carbon sheet, etc. are used, for example. Moreover, even if thermal conductivity is about 0.2 W / (m * K), if there is little degassing amount in vacuum and it has favorable adhesiveness with a board | substrate, it can be used as a structure structure, for example, a shell shape can also be used.

In this manufacturing apparatus, before loading the board | substrate 2a, the cooling plate 12 is previously mounted on the board | substrate 2a, and after carrying out film formation and sealing process of the board | substrate 2a, it is carried out from the board | substrate 2a at the time of carrying out. Remove it. In this case, the cooling plate 12 once used is cooled to about 20 ° C and reused. Moreover, in the inside of this manufacturing apparatus, you may mount the cooling plate 12 on the board | substrate 2a before film formation, and remove the cooling plate 12 from the board | substrate 2a after film formation. In this case, if the cooling plate 12 used once can be cooled in this manufacturing apparatus, it is also possible to make the cooling plate 12 circulate in an apparatus, and to reuse it.

8, the temperature change of the board | substrate in the case where the oil structure is not stuck between the board | substrate and a cooling plate, and is pinched is shown.

This conveys the substrate temperature of 25 degreeC, the thickness of the structure 11 (silicone rubber) to 1 mm, the thickness of the cooling plate 12 (Cu) to 5 mm, and the temperature of an evaporation source to 300 degreeC, the board | substrate of the initial temperature of a glass substrate. The speed | rate is set to 5.8 mm / sec, and 12 times of film formation is performed continuously.

In the comparison between the case where the structure of FIG. 8A is not sandwiched and the case of the structure of FIG. 8B, the heat conduction from the substrate 2a to the cooling plate 12 and It can be seen that the thermal diffusion is made through the highly structured contact structure 11, so that the increase in the substrate temperature is significantly suppressed. And by using together the cryo panels 10a and 10b shown in FIG. 5, as shown in FIG.8 (c), it becomes possible to suppress a raise of substrate temperature more effectively.

Thus, since the temperature rise of a board | substrate can be suppressed by the absorption of heat radiation and cooling of a board | substrate using heat conduction, it becomes possible to form a film continuously even in the state which made the conveyance speed of a board | substrate high speed, and improves production efficiency. Can be. In addition, since the temperature rise of the substrate can be suppressed, the film can be formed in a state where the distance between the substrate and the evaporation source is close and the amount of effective vapor is reduced, thereby reducing the waste of the evaporation material.

9, the schematic top view of this manufacturing apparatus is shown.

In addition, "P" in the figure indicates a vacuum pump, "N _2" shows the supply line of nitrogen.

As shown in FIG. 9, this manufacturing apparatus is comprised so that formation of organic electroluminescent element in FPD may be performed inline, and a board | substrate is continuously made by the several process chamber which can control an atmosphere and a vacuum degree independently, and a some process chamber. It has a conveying apparatus to convey, and is comprised so that it may be able to perform predetermined | prescribed process according to each objective in each process chamber under different conditions.

In this manufacturing apparatus, the time taken for opening / closing the gate door 21 and the adjustment time for the degree of vacuum are reduced by reducing the installation point of the gate door 21 as much as possible. As a result, each processing chamber is not stopped without stopping the substrate. The substrate can be continuously conveyed. Specifically, by forming the gate valve 21 only in the connection part with the processing chamber which greatly changes the atmosphere (vacuum degree), and in other parts, the differential exhaust parts D1 to D4 which perform differential exhaust for making the intermediate pressure are formed. The pressure difference between the processing chambers is maintained.

The gate valve 21 is formed before and after the processing chamber in which the atmosphere (vacuum degree) is greatly changed, and the substrates are continuously conveyed in the differential exhaust sections D1 to D4. Before and after, the conveyance of a board | substrate is stopped until it changes to predetermined atmosphere (vacuum degree). Therefore, in this manufacturing apparatus, by using the cassette 6 which can accommodate a plurality of holders holding the substrate, the plurality of holders 1 and the atmosphere around the substrate can be collectively switched together with the cassette 6. The atmosphere around the cassette 6 is changed to atmosphere / vacuum, vacuum / N ₂ , N ₂ / atmosphere and the like in a predetermined processing chamber. Moreover, by using the cassette 6, continuous conveyance of the board | substrate after atmosphere switching can be enabled and the improvement of a production efficiency can be aimed at. In particular, by using the cassette 6 in the processing chambers before and after the sealing chamber 33 which is the inside of the apparatus, the collective change of the atmosphere, the collective movement of the holder 1, and the substrate can be performed to shorten the adjustment time for changing the atmosphere. In addition, the extra waiting time is reduced to prevent deterioration of the processing capacity of the film forming process and the sealing process.

The differential exhaust sections D1 to D4 are formed by partition walls having openings through which the space can pass. In order to maintain the pressure difference between the processing chambers adjacent to the differential exhaust sections D1, D2 and D4 and having different vacuum degrees, the vacuum degree in the differential exhaust sections D1, D2 and D4 is equal to the middle of the vacuum degrees of the respective processing chambers. The degree of vacuum is controlled. The vacuum degree of the differential exhaust parts D1, D2, and D4 is controlled to an appropriate degree of vacuum by using a vacuum pump for evacuating the differential exhaust parts D1, D2 and D4 and a balance N _{2 (} not shown). The differential exhaust unit D3 is formed for a different purpose from the differential exhaust units D1, D2, and D4. Specifically, the differential exhaust unit D3 is formed to have a different degree of vacuum than that of the adjacent process chambers so that the atmosphere between the process chambers does not influence each other. It is controlled at a higher vacuum.

In the present production apparatus, the differential exhaust portions D1 and D2 are formed between the plasma cleaning chamber 24 and the organic EL film formation chamber 25 and between the plasma cleaning chamber 24 and the holder transport chamber 27. The pressure difference in the degree of vacuum between the processing chambers is maintained. For example, when the pressure of the plasma cleaning chamber 24 is P1, the pressure of the organic EL film formation chamber 25 is P3, and P1> P3, the differential multiple of the pressure P2 becomes P1> P2> P3. By forming the base D1, the pressures of P1 and P3 are easily maintained, and the gate valve between the processing chambers is unnecessary. Similarly, since the pressure of the holder conveyance chamber 27 is the same pressure P3 as the pressure of the organic EL film formation chamber 25, the differential exhaust part D2 of the pressure P4 which becomes P1> P4> P3 By forming, it becomes easy to maintain the pressure of P1 and P3, and the gate valve between process chambers is unnecessary.

In addition, a differential exhaust portion D3 having a higher vacuum than the vacuum of both processing chambers is formed between the organic EL film forming chambers 25 and the electrode film forming chambers 28 so that the inert vapors of both processing chambers do not enter each other. . For example, when the pressure in the electrode film forming chamber 28 is set to P7, by forming the differential exhaust portions D3 at a pressure P5 such that P7> P3> P5, the processing chamber atmospheres are not affected with each other. The gate valve in between is made unnecessary. Moreover, when the pressure difference between P7 and P5 is large, the differential exhaust part D4 of the pressure P6 which becomes P7> P6> P5, ie, the adjacent electrode film forming chamber 28 and the differential exhaust part D3, If the differential exhaust part D4 of the pressure P6 intermediate each vacuum degree is formed in series with the differential exhaust part D3, it becomes easy to maintain the pressure difference of the vacuum degree between both processing chambers.

Thus, by providing the differential exhaust parts D1 to D4, continuous conveyance is possible without requiring the installation of the gate door 21 and without stopping the substrate, thereby improving production efficiency.

The movements S1 to S3 of the substrate, the movements K1 to K3 of the cassette 6, and the movements H1 and H2 of the holder 1 in the present production apparatus will be described.

Moreover, the holder (A: 1st support means) which mounted the mask in which the pattern of organic electroluminescent element was formed previously, and the holder in which the mask in which the pattern of the electrode was formed in advance were mounted as a holder (B: 2nd support means), To explain.

The substrate itself moves in the order of S1, S2, S3, and in the moving process, a thin film of an organic EL element is formed in the organic EL film formation chamber 25, an electrode is formed in the electrode film formation chamber 28, Sealed in the sealing process chamber 33, FPD by organic electroluminescent element is manufactured.

The substrate is placed in the holder (A). And the some holder A which has a board | substrate is accommodated in the cassette 6, and it installs in carrying-in part E1. When the manufacturing apparatus starts up, the gate valve 21a is opened, the cassette 6 is moved to the standby / vacuum switching chamber 22a, the gate valve 21a is closed, and the vacuum pump is supplied to the vacuum pump in the standby / vacuum switching chamber 22a. This exhausts air from the atmosphere to a predetermined degree of vacuum. When the predetermined vacuum degree is reached, the gate valve 21b is opened to move the cassette 6 into the cassette waiting room 23. From this cassette waiting room 23 to the mask holder replacement chamber 26, the holder A is continuously conveyed with the substrate. After carrying out all the holders A from the cassette 6, the holder A after use for the empty cassette 6, ie, the empty holder A without a substrate, is returned, and then the empty holder A Together, the cassette 6 is moved to the atmosphere / vacuum switching chamber 22b. After the gate valve 21c is closed, the atmospheric / vacuum switching chamber 22b returns to atmospheric pressure, and after opening the gate valve 21d, the cassette 6 is carried out to the carrying out portion E2.

As shown in the cassette movement range K1 of FIG. 9, since the cassette 6 used for carrying in the substrate and the holder A moves so as to be circulated only within a predetermined area, at least two or more cassettes 6 are provided. By using, it is possible to reduce the time associated with the air / vacuum switching by increasing the air / vacuum switching independently in the air / vacuum switching chambers 22a and 22b, thereby increasing the production efficiency. In addition, if the atmosphere of the next cassette 6 is switched to vacuum in the atmosphere / vacuum switching chamber 22a while the plurality of holders A are continuously conveyed from the cassette waiting chamber 23, the atmosphere / vacuum switching chamber 22a ), The cassette 6 can be sequentially moved from the cassette waiting room 23 to the cassette waiting room 23, and the plurality of holders A contained in the other cassette 6 can be continuously conveyed into the processing chamber inside the production apparatus.

From the cassette 6 moved to the cassette waiting room 23, the holder A is sequentially conveyed to the process chamber inside this manufacturing apparatus. Initially, the plasma cleaning chamber (24: cleaning means) is moved to, is the film formation face of the substrate with a mask attached to the holder (A) is cleaned using, for example, O ₂ plasma. The cleaned holder A is sequentially conveyed to the organic EL film formation chamber 25 through the differential exhaust part D1, and a plurality of organic thin films are formed into a film. Since the organic EL film formation chamber 25 has the conveying apparatus shown in FIG. 4, the cryopanel shown in FIG. 5, the cooling plate shown in FIG. 7, etc., conveyance is possible without the position of the holder A shifting | deviating. Moreover, a film can be formed by suppressing the temperature rise of a board | substrate to a predetermined range. In the organic EL film formation chamber 25, the organic thin film of predetermined thickness is formed by making the conveyance speed of a conveyance apparatus into a fixed predetermined speed, and setting the film formation speed of each organic thin film suitably. In the organic EL film forming chamber 25, a plurality of evaporation sources and the like are formed in accordance with the number of laminated films and the purpose thereof.

After the organic thin film is formed in the organic EL film formation chamber 25, the holder A having the substrate is sequentially conveyed to the mask holder exchange chamber 26 (exchange means), where only the substrate is separated from the holder A. The holder is moved to the holder B and mounted. That is, the holder which supports a board | substrate is exchanged with the holder B for electrodes by the holder A for organic electroluminescent elements.

The separated holder A passes through the holder transfer chamber 27 and is washed in the plasma cleaning chamber 24 via the differential exhaust unit D2, and then sequentially into the cassette 6 of the cassette waiting chamber 23. Is returned. When the holder A of the maximum number of sheets is returned to the cassette 6, the cassette 6 is moved to the atmosphere / vacuum switching chamber 22b, is switched to the atmosphere, and then carried out to the carrying out portion E2. Thus, as shown to the movement trace H1 of the holder of FIG. 9, holder A is carried in with the cassette 6 from carrying-in part E1, and after passing through several process chambers, a plasma cleaning chamber It wash | cleans in 24 and it returns to carrying-out part E2 with the cassette 6. As shown in FIG. Since the holder A is cleaned in the plasma cleaning chamber 24 and can be reused, for example, only the substrate is carried in the cassette waiting chamber 23 or the like so that the substrate can be installed in the holder A. Just set in section (E1).

On the other hand, the electrode holder B is accommodated in the cassette 6 in the state in which the board | substrate is not provided, and is attached to the carry-in part E3. When the production apparatus is started, by opening the gate valve (21g) moving a cassette (6) to the atmosphere / vacuum / N ₂ jeonhwansil (35a) and close the gate valve (21g). Thereafter, the air / vacuum / N ₂ switching chamber 35a is evacuated from the atmosphere to a predetermined vacuum degree by a vacuum pump, and when the predetermined vacuum degree is reached, N ₂ is supplied to switch to the N ₂ atmosphere. And the gate valve 21h is opened and the cassette 6 is moved to the cassette waiting room 34. After carrying out all the holders B from the cassette 6, the holder B after use for the empty cassette 6 is returned. At this time, the organic EL element is formed in the holder B, and the board | substrate sealed is provided. Thereafter, the cassette 6 is moved to the standby / vacuum / N ₂ switching chamber 35b together with the substrate and the holder B. After the gate valve 21i is closed, the standby / vacuum / N ₂ switching chamber 35b is moved. Return to atmospheric pressure. After the atmosphere / vacuum / N ₂ switching chamber 35b returns to atmospheric pressure, the gate valve 21j is opened, and the cassette 6 is carried out to the carrying out portion E4 together with the substrate and the holder B. As shown in FIG.

As shown in the cassette movement range K3 of FIG. 9, the cassette 6 used for carrying in the holder B also moves so as to be circulated only within a predetermined area. Therefore, when at least two or more cassettes 6 are used, the air / vacuum / N ₂ is switched by independently switching the air / vacuum in the air / vacuum / N ₂ switching chambers 35a and 35b. It is possible to reduce production time and to increase production efficiency. In addition, if the atmosphere of the next cassette 6 is switched to N ₂ in the standby / vacuum / N ₂ switching chamber 35a while the plurality of holders B are continuously conveyed from the cassette waiting chamber 34, the standby / The cassette 6 can be sequentially moved from the vacuum / N ₂ switching chamber 35a to the cassette waiting room 34, and the plurality of holders B contained in the other cassette 6 are continuously conveyed into the processing chamber inside the production apparatus. It becomes possible.

As shown in the movement trace H2 of the holder of FIG. 9, the holder B is carried in from the cassette 6 moved from the carrying-in part E3 with the cassette 6, and moved to the cassette waiting room 34 sequentially. It is conveyed into a process chamber and it returns to carrying-out part E4 with the cassette 6 after that. In the present manufacturing apparatus, the holder B is moved from the cassette 6 moved to the cassette waiting room 34 through the sealing processing chamber 33 to the cassette 6 of the cassette waiting room 32. Then, the gate valve 21f is opened, the holder B is moved to the vacuum / N ₂ switching chamber 31 together with the cassette 6, and the gate valve 21f is closed. Then, the vacuum pump is used to form an N ₂ atmosphere. To a predetermined vacuum degree. After reaching the predetermined vacuum degree, the gate valve 21e is opened to move the holder B together with the cassette 6 to the cassette waiting room 30. And the holder B is conveyed sequentially from the cassette 6 moved to the cassette waiting room 30, and it wash | cleans with a mask in the holder cleaning room 29 (cleaning means), and the differential exhaust parts D4 and D3 are removed. It passes and is conveyed to the holder exchange chamber 26.

In the holder exchange chamber 26, the board | substrate which was moved to the holder B, and was attached is passed through the differential exhaust parts D3 and D4 with the holder B, and is conveyed to the electrode film formation chamber 28 sequentially. In the electrode film formation chamber 28, a metal thin film serving as a wiring of the organic EL element is formed. The substrate on which the metal thin film is formed is sequentially returned to the cassette 6 of the cassette waiting room 30 together with the holder B. FIG. When the holder B of the maximum payload is returned to the cassette 6, the gate valve 21c is opened to move the holder B together with the cassette 6 to the vacuum / N ₂ switching chamber 31, and the gate valve ( After 21e) is closed, N ₂ is supplied to switch from vacuum atmosphere to N ₂ atmosphere. Then, the gate valve 21f is opened, the holder B along with the cassette 6 is moved to the cassette waiting room 32, and the gate valve 21f is closed. Then, the holder B is sequentially conveyed from the cassette 6 moved to the cassette waiting room 32 to the sealing process chamber 33, and the organic EL element is sealed using a sealing material. After sealing, the holder B is sequentially conveyed to the cassette 6 of the cassette waiting room 34, and when the holder B of the maximum number of loaded water is returned to the cassette 6, the gate valve 21i is opened to open the cassette 6. ) And holder B to the atmosphere / vacuum / N ₂ switching chamber 35b. After closing the gate valve 21i, the standby / vacuum / N ₂ switching chamber 35b is returned to atmospheric pressure, and then the gate valve 21j is opened to open the holder B together with the cassette 6 and to carry out the ejection portion E4. Export to). At this time, the organic EL element is formed together with the holder B, and the substrate is carried out in a state in which the FPD of the sealed substrate, that is, the FPD of the organic EL element is completed.

According to the present invention, since the support means (holder) for supporting the substrate and the substrate mask are integrated and the substrate is held by the holder, the substrate is prevented from bending with a simple structure and the mask function is provided to the holder. can do. By preventing the warping of the substrate, it is possible to reduce film formation defects due to the warpage of the substrate, and by providing the mask function to the holder, it is possible to shorten the process time associated with the mask, thereby improving production efficiency. Then, by attaching a mask in which a pattern is formed in accordance with the thin film to be formed into the holder, and replacing the holder in the manufacturing apparatus, a thin film having a different pattern can be formed on the substrate.

According to the present invention, since the intermediate pressure chamber formed by the differential exhaust unit is formed between the processing chambers having different vacuum degrees, there is no need to provide a gate valve between the processing chambers having different vacuum degrees, and pressure adjustment is also unnecessary. It is possible to convey continuously without stopping. As a result, the speed | rate of conveyance speed becomes easy and a production efficiency can be improved.

ADVANTAGE OF THE INVENTION According to this invention, since the cooling member through a heat conductive member, the radiation heat absorbing means which absorbs radiant heat, etc. are used, the temperature rise of a board | substrate can be suppressed and it becomes possible to form a film continuously at a high conveyance speed, and to produce The efficiency can be improved. Further, by suppressing the temperature rise of the substrate, the distance between the substrate and the evaporation source can be made close, the amount of reactive vapor can be reduced, and the waste of the evaporation material can be reduced.

According to this invention, since the positioning member of a holder was formed in the conveying means, the precision of positioning in the process chamber which forms a film | membrane can be improved, the occurrence of a film formation defect can be prevented, and production efficiency can be improved. .

According to the present invention, since a cassette capable of accommodating a plurality of holders is used not only in the carrying in and out portions of the apparatus, but also between the processing chambers where the pressure change inside the apparatus is large, the degree of vacuum around the plurality of substrates and the holder together with the cassette can be improved. By changing collectively, it is possible to shorten the adjustment time accompanying the change of the degree of vacuum, to reduce the extra waiting time, and to improve the production efficiency by fully utilizing the processing capacity of the processing chamber for film formation and the processing chamber for sealing. Can be.

Claims (16)

A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum; It has a conveying means for conveying a board | substrate continuously to the said some process chamber, An inline organic electroluminescent production apparatus which forms an organic electroluminescent element on the substrate through predetermined processing in the plurality of processing chambers, And a supporting means for supporting the substrate by preventing bending while providing a mask on which a pattern of a thin film to be formed on the substrate is formed. The said conveying means uses a said support means, and conveys the said board | substrate to the said some process chamber continuously, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum; It has a conveying means for conveying a board | substrate continuously to the said some process chamber, An inline organic electroluminescent production apparatus which forms an organic electroluminescent element on the substrate through predetermined processing in the plurality of processing chambers, A first support means having a mask having a pattern of an organic thin film formed on the substrate, the first supporting means supporting the substrate by preventing bending; A second support means having a mask on which a pattern of an electrode thin film formed on the substrate is formed, and supporting the substrate by preventing bending; Having exchange means for moving the substrate from the first support means to the second support means within the apparatus, The said conveying means uses a said 1st support means or a said 2nd support means, and conveys the said board | substrate to the said some process chamber continuously, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum; It has a conveying means for conveying a board | substrate continuously to the said some process chamber, An inline organic electroluminescent production apparatus which forms an organic electroluminescent element on the substrate through predetermined processing in the plurality of processing chambers, It is formed between process chambers with different vacuum degrees from each other, and has a differential exhaust part which can independently control the vacuum degree of the vacuum degree in each adjacent process chamber, The said conveying means conveys the said board | substrate continuously through the said differential exhaust part between process chambers with which the said vacuum degree differs, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. A plurality of process chambers capable of independently controlling the atmosphere and the degree of vacuum; It has a conveying means for conveying a board | substrate continuously to the said some process chamber, An inline organic electroluminescent production apparatus which forms an organic electroluminescent element on the substrate through predetermined processing in the plurality of processing chambers, It has a cooling member which suppresses the temperature rise of the said board | substrate, The said conveying means conveys the said board | substrate continuously with the said cooling member to the said some process chamber, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method according to claim 1 or 2, It is formed between process chambers with different vacuum degrees from each other, and has a differential exhaust part which can independently control the vacuum degree of the vacuum degree in each adjacent process chamber, The said conveying means conveys the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means between the process chambers with which the said vacuum degree differs through the said differential exhaust part. Organic electro luminescence manufacturing apparatus. The method according to claim 1 or 2, The cooling member which suppresses the temperature rise of the said board | substrate is formed in the said support means, the said 1st support means, or the said 2nd support means, The said conveying means conveys the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means to the said some process chamber, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. 6. The cooling member according to claim 5, wherein a cooling member that suppresses the temperature rise of the substrate is formed in the supporting means, the first supporting means, or the second supporting means, The said conveying means conveys the said board | substrate continuously using the said support means, the said 1st support means, or the said 2nd support means between the process chambers with which the said vacuum degree differs through the said differential exhaust part. Organic electro luminescence manufacturing apparatus. The method according to claim 1 or 2, Forming cleaning means for cleaning the support means, the first support means or the second support means, And said support means, said first support means or said second support means are made reusable. Inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method according to claim 1 or 2, The said conveying means has a positioning member which determines the position of the said support means, the said 1st support means, or the said 2nd support means, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method according to claim 1 or 2, Has a cassette which can accommodate a plurality of the supporting means, the first supporting means or the second supporting means, By using the cassette, with the vacuum degree largely changed in a predetermined processing chamber, The said conveying means conveys the said support means, the said 1st support means, or the said 2nd support means continuously from the said cassette after a change of a vacuum degree, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method of claim 3, wherein The said differential exhaust part is further equipped with the other differential exhaust part whose vacuum degree is higher than the vacuum degree of each adjacent process chamber, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method of claim 4, wherein An apparatus for producing an inline organic electroluminescence between the substrate and the cooling member, wherein a heat conductive member for conducting and diffusing heat from the substrate to the cooling member is formed. The method of claim 4, wherein The said cooling member is reuseable, The inline type organic electroluminescent manufacturing apparatus characterized by the above-mentioned. The method according to any one of claims 1 to 3, An apparatus for producing an in-line type organic electroluminescent device, comprising: radiant heat absorbing means for absorbing radiant heat from the substrate. The method according to any one of claims 1 to 4, The conveying means makes the conveying speed constant and at the same time, An apparatus for producing an inline organic electroluminescence, characterized in that the film formation rates of thin films in a plurality of processing chambers are controlled respectively. The method of claim 4, wherein An apparatus for producing an in-line type organic electroluminescence, comprising: radiant heat absorbing means for absorbing radiant heat from the substrate and the cooling member.

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