KR100647012B1 - 루츠 로터와 스크루 로터 복합건식진공펌프 - Google Patents
루츠 로터와 스크루 로터 복합건식진공펌프 Download PDFInfo
- Publication number
- KR100647012B1 KR100647012B1 KR1020060071730A KR20060071730A KR100647012B1 KR 100647012 B1 KR100647012 B1 KR 100647012B1 KR 1020060071730 A KR1020060071730 A KR 1020060071730A KR 20060071730 A KR20060071730 A KR 20060071730A KR 100647012 B1 KR100647012 B1 KR 100647012B1
- Authority
- KR
- South Korea
- Prior art keywords
- rotor
- roots
- rotors
- screw
- vacuum pump
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0021—Systems for the equilibration of forces acting on the pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2210/00—Fluid
- F04C2210/22—Fluid gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060071730A KR100647012B1 (ko) | 2006-07-28 | 2006-07-28 | 루츠 로터와 스크루 로터 복합건식진공펌프 |
TW096127115A TWI438342B (zh) | 2006-07-28 | 2007-07-25 | 具有魯式與螺旋轉子之複合型乾式真空幫浦 |
US11/878,665 US7611340B2 (en) | 2006-07-28 | 2007-07-26 | Composite dry vacuum pump having roots and screw rotor |
EP07252967A EP1882856B1 (en) | 2006-07-28 | 2007-07-27 | Complex dry vacuum pump having Roots and screw rotors |
CN2007101376267A CN101158353B (zh) | 2006-07-28 | 2007-07-27 | 具有罗茨转子和螺旋转子的复合干式真空泵 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060071730A KR100647012B1 (ko) | 2006-07-28 | 2006-07-28 | 루츠 로터와 스크루 로터 복합건식진공펌프 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100647012B1 true KR100647012B1 (ko) | 2006-11-23 |
Family
ID=37712756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060071730A KR100647012B1 (ko) | 2006-07-28 | 2006-07-28 | 루츠 로터와 스크루 로터 복합건식진공펌프 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100647012B1 (zh) |
CN (1) | CN101158353B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101613161B1 (ko) * | 2014-09-05 | 2016-04-18 | 주식회사 우성진공 | 2단형 건식 진공펌프 |
CN105649980A (zh) * | 2016-03-22 | 2016-06-08 | 西安交通大学 | 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵 |
KR20200060267A (ko) * | 2018-11-22 | 2020-05-29 | (주)엘오티베큠 | 마모 발생을 방지하는 진공펌프 |
CN112780563A (zh) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | 双级干式真空泵 |
CN116591954A (zh) * | 2023-04-14 | 2023-08-15 | 北京通嘉宏瑞科技有限公司 | 一种转子组件及泵体结构 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
CN102280965B (zh) * | 2010-06-12 | 2013-07-24 | 中国科学院沈阳科学仪器股份有限公司 | 真空泵用屏蔽电机 |
CN102444564B (zh) * | 2011-11-21 | 2014-12-24 | 浙江飞越机电有限公司 | 一体式真空泵 |
CN104100528B (zh) * | 2013-04-07 | 2016-03-16 | 吴为国 | 一种罗茨鼓风机叶轮的制造方法及罗茨鼓风机 |
DE102016216279A1 (de) * | 2016-08-30 | 2018-03-01 | Leybold Gmbh | Vakuumpumpen-Schraubenrotor |
CN114607600B (zh) * | 2020-12-09 | 2023-03-21 | 东北大学 | 一种新型多级罗茨真空泵 |
CN116696772A (zh) * | 2023-05-06 | 2023-09-05 | 北京通嘉宏瑞科技有限公司 | 转子片、转子及真空泵 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60187785A (ja) | 1984-03-05 | 1985-09-25 | Hitachi Ltd | 無潤滑式スクリユ形真空ポンプ |
JPS63239389A (ja) | 1987-03-25 | 1988-10-05 | Anretsuto:Kk | 半割り型ケ−シング使用の多段式ル−ツロ−タの軸シ−ル |
JPH11270482A (ja) | 1998-03-20 | 1999-10-05 | Dia Shinku Kk | 真空ポンプ |
JP2000170679A (ja) | 1998-12-04 | 2000-06-20 | Toyota Autom Loom Works Ltd | 多段ルーツポンプ及び多段ポンプ装置 |
-
2006
- 2006-07-28 KR KR1020060071730A patent/KR100647012B1/ko active IP Right Grant
-
2007
- 2007-07-27 CN CN2007101376267A patent/CN101158353B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60187785A (ja) | 1984-03-05 | 1985-09-25 | Hitachi Ltd | 無潤滑式スクリユ形真空ポンプ |
JPS63239389A (ja) | 1987-03-25 | 1988-10-05 | Anretsuto:Kk | 半割り型ケ−シング使用の多段式ル−ツロ−タの軸シ−ル |
JPH11270482A (ja) | 1998-03-20 | 1999-10-05 | Dia Shinku Kk | 真空ポンプ |
JP2000170679A (ja) | 1998-12-04 | 2000-06-20 | Toyota Autom Loom Works Ltd | 多段ルーツポンプ及び多段ポンプ装置 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101613161B1 (ko) * | 2014-09-05 | 2016-04-18 | 주식회사 우성진공 | 2단형 건식 진공펌프 |
CN105649980A (zh) * | 2016-03-22 | 2016-06-08 | 西安交通大学 | 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵 |
CN105649980B (zh) * | 2016-03-22 | 2017-04-26 | 西安交通大学 | 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵 |
KR20200060267A (ko) * | 2018-11-22 | 2020-05-29 | (주)엘오티베큠 | 마모 발생을 방지하는 진공펌프 |
KR20200060303A (ko) | 2018-11-22 | 2020-05-29 | (주)엘오티베큠 | 마모 발생을 방지하는 진공펌프 |
KR102119071B1 (ko) * | 2018-11-22 | 2020-06-04 | (주)엘오티베큠 | 마모 발생을 방지하는 진공펌프 |
KR102178374B1 (ko) * | 2018-11-22 | 2020-11-13 | (주)엘오티베큠 | 마모 발생을 방지하는 진공펌프 |
CN112780563A (zh) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | 双级干式真空泵 |
CN116591954A (zh) * | 2023-04-14 | 2023-08-15 | 北京通嘉宏瑞科技有限公司 | 一种转子组件及泵体结构 |
CN116591954B (zh) * | 2023-04-14 | 2023-11-28 | 北京通嘉宏瑞科技有限公司 | 一种转子组件及泵体结构 |
Also Published As
Publication number | Publication date |
---|---|
CN101158353B (zh) | 2011-03-30 |
CN101158353A (zh) | 2008-04-09 |
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