KR100647012B1 - 루츠 로터와 스크루 로터 복합건식진공펌프 - Google Patents

루츠 로터와 스크루 로터 복합건식진공펌프 Download PDF

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Publication number
KR100647012B1
KR100647012B1 KR1020060071730A KR20060071730A KR100647012B1 KR 100647012 B1 KR100647012 B1 KR 100647012B1 KR 1020060071730 A KR1020060071730 A KR 1020060071730A KR 20060071730 A KR20060071730 A KR 20060071730A KR 100647012 B1 KR100647012 B1 KR 100647012B1
Authority
KR
South Korea
Prior art keywords
rotor
roots
rotors
screw
vacuum pump
Prior art date
Application number
KR1020060071730A
Other languages
English (en)
Korean (ko)
Inventor
황태경
노명근
오흥식
Original Assignee
(주)엘오티베큠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)엘오티베큠 filed Critical (주)엘오티베큠
Priority to KR1020060071730A priority Critical patent/KR100647012B1/ko
Application granted granted Critical
Publication of KR100647012B1 publication Critical patent/KR100647012B1/ko
Priority to TW096127115A priority patent/TWI438342B/zh
Priority to US11/878,665 priority patent/US7611340B2/en
Priority to CN2007101376267A priority patent/CN101158353B/zh
Priority to EP07252967A priority patent/EP1882856B1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020060071730A 2006-07-28 2006-07-28 루츠 로터와 스크루 로터 복합건식진공펌프 KR100647012B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020060071730A KR100647012B1 (ko) 2006-07-28 2006-07-28 루츠 로터와 스크루 로터 복합건식진공펌프
TW096127115A TWI438342B (zh) 2006-07-28 2007-07-25 具有魯式與螺旋轉子之複合型乾式真空幫浦
US11/878,665 US7611340B2 (en) 2006-07-28 2007-07-26 Composite dry vacuum pump having roots and screw rotor
CN2007101376267A CN101158353B (zh) 2006-07-28 2007-07-27 具有罗茨转子和螺旋转子的复合干式真空泵
EP07252967A EP1882856B1 (en) 2006-07-28 2007-07-27 Complex dry vacuum pump having Roots and screw rotors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060071730A KR100647012B1 (ko) 2006-07-28 2006-07-28 루츠 로터와 스크루 로터 복합건식진공펌프

Publications (1)

Publication Number Publication Date
KR100647012B1 true KR100647012B1 (ko) 2006-11-23

Family

ID=37712756

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060071730A KR100647012B1 (ko) 2006-07-28 2006-07-28 루츠 로터와 스크루 로터 복합건식진공펌프

Country Status (2)

Country Link
KR (1) KR100647012B1 (zh)
CN (1) CN101158353B (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101613161B1 (ko) * 2014-09-05 2016-04-18 주식회사 우성진공 2단형 건식 진공펌프
CN105649980A (zh) * 2016-03-22 2016-06-08 西安交通大学 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵
KR20200060303A (ko) 2018-11-22 2020-05-29 (주)엘오티베큠 마모 발생을 방지하는 진공펌프
CN112780563A (zh) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 双级干式真空泵
CN116591954A (zh) * 2023-04-14 2023-08-15 北京通嘉宏瑞科技有限公司 一种转子组件及泵体结构

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
CN102280965B (zh) * 2010-06-12 2013-07-24 中国科学院沈阳科学仪器股份有限公司 真空泵用屏蔽电机
CN102444564B (zh) * 2011-11-21 2014-12-24 浙江飞越机电有限公司 一体式真空泵
CN104100528B (zh) * 2013-04-07 2016-03-16 吴为国 一种罗茨鼓风机叶轮的制造方法及罗茨鼓风机
DE102016216279A1 (de) * 2016-08-30 2018-03-01 Leybold Gmbh Vakuumpumpen-Schraubenrotor
CN114607600B (zh) * 2020-12-09 2023-03-21 东北大学 一种新型多级罗茨真空泵
CN116696772A (zh) * 2023-05-06 2023-09-05 北京通嘉宏瑞科技有限公司 转子片、转子及真空泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187785A (ja) 1984-03-05 1985-09-25 Hitachi Ltd 無潤滑式スクリユ形真空ポンプ
JPS63239389A (ja) 1987-03-25 1988-10-05 Anretsuto:Kk 半割り型ケ−シング使用の多段式ル−ツロ−タの軸シ−ル
JPH11270482A (ja) 1998-03-20 1999-10-05 Dia Shinku Kk 真空ポンプ
JP2000170679A (ja) 1998-12-04 2000-06-20 Toyota Autom Loom Works Ltd 多段ルーツポンプ及び多段ポンプ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187785A (ja) 1984-03-05 1985-09-25 Hitachi Ltd 無潤滑式スクリユ形真空ポンプ
JPS63239389A (ja) 1987-03-25 1988-10-05 Anretsuto:Kk 半割り型ケ−シング使用の多段式ル−ツロ−タの軸シ−ル
JPH11270482A (ja) 1998-03-20 1999-10-05 Dia Shinku Kk 真空ポンプ
JP2000170679A (ja) 1998-12-04 2000-06-20 Toyota Autom Loom Works Ltd 多段ルーツポンプ及び多段ポンプ装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101613161B1 (ko) * 2014-09-05 2016-04-18 주식회사 우성진공 2단형 건식 진공펌프
CN105649980A (zh) * 2016-03-22 2016-06-08 西安交通大学 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵
CN105649980B (zh) * 2016-03-22 2017-04-26 西安交通大学 一种便于测量端面间隙及调整转子间间隙的罗茨真空泵
KR20200060303A (ko) 2018-11-22 2020-05-29 (주)엘오티베큠 마모 발생을 방지하는 진공펌프
KR20200060267A (ko) * 2018-11-22 2020-05-29 (주)엘오티베큠 마모 발생을 방지하는 진공펌프
KR102119071B1 (ko) * 2018-11-22 2020-06-04 (주)엘오티베큠 마모 발생을 방지하는 진공펌프
KR102178374B1 (ko) * 2018-11-22 2020-11-13 (주)엘오티베큠 마모 발생을 방지하는 진공펌프
CN112780563A (zh) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 双级干式真空泵
CN116591954A (zh) * 2023-04-14 2023-08-15 北京通嘉宏瑞科技有限公司 一种转子组件及泵体结构
CN116591954B (zh) * 2023-04-14 2023-11-28 北京通嘉宏瑞科技有限公司 一种转子组件及泵体结构

Also Published As

Publication number Publication date
CN101158353A (zh) 2008-04-09
CN101158353B (zh) 2011-03-30

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