KR100625030B1 - 액정표시소자의 제조방법 - Google Patents
액정표시소자의 제조방법 Download PDFInfo
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- KR100625030B1 KR100625030B1 KR1020010081772A KR20010081772A KR100625030B1 KR 100625030 B1 KR100625030 B1 KR 100625030B1 KR 1020010081772 A KR1020010081772 A KR 1020010081772A KR 20010081772 A KR20010081772 A KR 20010081772A KR 100625030 B1 KR100625030 B1 KR 100625030B1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133519—Overcoatings
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
Abstract
Description
Claims (7)
- 기판 상에 게이트전극 및 게이트패드를 형성하는 단계와;상기 게이트전극 및 게이트 패드를 덮도록 게이트절연막을 형성하는 단계와;상기 게이트절연막 상에 반도체층을 형성하는 단계와;상기 게이트절연막 상에 소스 및 드레인전극과 데이터패드를 형성하는 단계와;상기 게이트절연막 상에 무기보호막을 형성하는 단계와;상기 무기보호막을 관통하여 상기 드레인전극 및 상기 데이터패드를 각각 노출시키는 제1 드레인접촉홀과 제1 데이터접촉홀을 형성함과 아울러 상기 게이트절연막의 일부와 상기 무기보호막을 관통하여 상기 게이트패드영역 위에 위치하는 게이트절연막을 노출시키는 제1 게이트접촉홀을 형성하는 단계와;상기 무기보호막 상에 유기보호막을 형성하는 단계와;상기 유기보호막을 관통하여 상기 드레인전극 및 상기 데이터패드 각각을 노출시키는 제2 드레인접촉홀과 제2 데이터접촉홀을 형성함과 아울러 상기 게이트 패드영역 위에 위치하는 상기 게이트절연막을 노출시키는 제2 게이트접촉홀을 형성하는 단계와;상기 게이트패드영역 위에 위치하는 상기 게이트 절연막을 제거하여 상기 게이트패드를 노출시키는 단계와;상기 유기보호막 상에 투명전극패턴을 형성하는 단계를 포함하는 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 1 항에 있어서,상기 제1 드레인접촉홀, 제1 데이터접촉홀 및 제1 게이트접촉홀을 형성하는 단계는상기 무기보호막 상에 하프턴 마스크에 의해 위치별로 두께가 다른 포토레지스트패턴을 형성하는 단계와;상기 포토레지스트패턴을 이용하여 상기 무기보호막 및 게이트절연막 중 적어도 한 층을 식각하는 단계를 포함하는 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 1 항에 있어서,상기 유기보호막은 포토아크릴인 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 1 항에 있어서,상기 게이트패드는 하층금속과 상층금속이 순차적으로 적층된 2층 구조로 형성되는 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 4 항에 있어서,상기 제1 및 제2 게이트접촉홀은 상기 상층 금속을 관통하여 하층 금속을 노출시키는 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 4 항에 있어서,상기 게이트패드의 상층 금속은 몰리브덴(Mo)인 것을 특징으로 하는 액정표시소자의 제조방법.
- 제 4 항에 있어서,상기 게이트패드의 하층 금속은 알루미늄-네오듐(AlNd)인 것을 특징으로 하는 액정표시소자의 제조방법.
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KR1020010081772A KR100625030B1 (ko) | 2001-12-20 | 2001-12-20 | 액정표시소자의 제조방법 |
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KR1020010081772A KR100625030B1 (ko) | 2001-12-20 | 2001-12-20 | 액정표시소자의 제조방법 |
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KR100625030B1 true KR100625030B1 (ko) | 2006-09-20 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140081408A (ko) * | 2012-12-21 | 2014-07-01 | 엘지디스플레이 주식회사 | 콘택홀 형성방법 및 박막트랜지스터 어레이 기판의 제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10232409A (ja) * | 1996-12-18 | 1998-09-02 | Nec Corp | 薄膜トランジスタアレイ基板およびその製造方法 |
KR20010002661A (ko) * | 1999-06-16 | 2001-01-15 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 및 그 제조 방법 |
KR20010010117A (ko) * | 1999-07-16 | 2001-02-05 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판의 제조 방법 |
KR20010054687A (ko) * | 1999-12-07 | 2001-07-02 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 및 그의 제조 방법 |
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2001
- 2001-12-20 KR KR1020010081772A patent/KR100625030B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10232409A (ja) * | 1996-12-18 | 1998-09-02 | Nec Corp | 薄膜トランジスタアレイ基板およびその製造方法 |
KR20010002661A (ko) * | 1999-06-16 | 2001-01-15 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 및 그 제조 방법 |
KR20010010117A (ko) * | 1999-07-16 | 2001-02-05 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판의 제조 방법 |
KR20010054687A (ko) * | 1999-12-07 | 2001-07-02 | 윤종용 | 액정 표시 장치용 박막 트랜지스터 기판 및 그의 제조 방법 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140081408A (ko) * | 2012-12-21 | 2014-07-01 | 엘지디스플레이 주식회사 | 콘택홀 형성방법 및 박막트랜지스터 어레이 기판의 제조방법 |
KR102081103B1 (ko) * | 2012-12-21 | 2020-02-25 | 엘지디스플레이 주식회사 | 콘택홀 형성방법 및 박막트랜지스터 어레이 기판의 제조방법 |
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