KR100622616B1 - 유기실란의 분해에 의한 실리카 제조방법 - Google Patents
유기실란의 분해에 의한 실리카 제조방법 Download PDFInfo
- Publication number
- KR100622616B1 KR100622616B1 KR1019990059314A KR19990059314A KR100622616B1 KR 100622616 B1 KR100622616 B1 KR 100622616B1 KR 1019990059314 A KR1019990059314 A KR 1019990059314A KR 19990059314 A KR19990059314 A KR 19990059314A KR 100622616 B1 KR100622616 B1 KR 100622616B1
- Authority
- KR
- South Korea
- Prior art keywords
- compound
- producing
- silica
- optical
- preform
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/02—Elongated flat flame or slit-nozzle type
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/22—Inert gas details
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/32—Non-halide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/87—Controlling the temperature
Abstract
Description
Claims (10)
- a) 유기실리콘 화합물을 기화하는 단계;b) 기화상태의 상기 유기실리콘 화합물을 열분해하여 비결정상 용융 실리카입자를 제공하는 단계;c) 상기 비결정상 용융 실리카입자를 지지물상에서 분해하는 단계; 를 포함하여 이루어지고,상기 유기실리콘 화합물은 하기의 화학식을 가짐을 특징으로 하는 광학 실리카 프리폼의 제조방법:이때, R1, R2 및 R3는 각각 독립적으로 수소, 메틸, 에틸, 프로필, 이소프로필, 또는 R5, R6 및 R7이 각각 독립적으로 메틸, 에틸, 프로필 또는 이소프로필인 -Si-(R5R6R7) 기이고상기 R4는 R5, R6 및 R7이 상기 정의된 것과 같고 m은 0과 3 사이의 정수인 -(CH2)m-Si-(R5R6R7) 기임.
- 제 1 항에 있어서,상기 R1, R2 및 R3기 중 두 개 이상이 수소외의 것임을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,상기 화합물은 실온에서 액체임을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,상기 화합물은 140℃ 미만의 끓는점을 가짐을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,상기 화합물은 70℃와 140℃ 사이의 끓는점을 가짐을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,상기 화합물은 헥사메틸디실란, 트리스(트리메틸실릴)실란, 및 비스(트리메틸실릴)메탄으로 이루어진 군으로부터 선택됨을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,상기 a)단계에서 화합물의 증기는 불활성 기체에 의해 혼입됨을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 7 항에 있어서,a)단계는 상기 화합물의 끓는점 이상의 온도에서 수행됨을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,a)단계는 30℃와 140℃ 사이의 온도와 0바와 3바 사이의 압력에서 수행됨을 특징으로 하는 광학실리카 프리폼의 제조방법.
- 제 1 항에 있어서,b)단계는 가연성 기체와 과량의 산소 존재하에서 수행됨을 특징으로 하는 광학실리카 프리폼의 제조방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98830786 | 1998-12-28 | ||
EP98830786 | 1998-12-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000052522A KR20000052522A (ko) | 2000-08-25 |
KR100622616B1 true KR100622616B1 (ko) | 2006-09-11 |
Family
ID=8236934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990059314A KR100622616B1 (ko) | 1998-12-28 | 1999-12-20 | 유기실란의 분해에 의한 실리카 제조방법 |
Country Status (12)
Country | Link |
---|---|
EP (1) | EP1016635B1 (ko) |
JP (1) | JP2000272925A (ko) |
KR (1) | KR100622616B1 (ko) |
CN (1) | CN1195691C (ko) |
AR (1) | AR022025A1 (ko) |
AT (1) | ATE303978T1 (ko) |
AU (1) | AU757883B2 (ko) |
BR (1) | BR9905998A (ko) |
CA (1) | CA2292985C (ko) |
DE (1) | DE69927121T2 (ko) |
ES (1) | ES2248961T3 (ko) |
NZ (1) | NZ501866A (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001019465A (ja) | 1999-07-07 | 2001-01-23 | Shin Etsu Chem Co Ltd | エキシマレーザ用合成石英ガラス部材及びその製造方法 |
AU6158900A (en) * | 1999-07-19 | 2001-02-05 | Linde Gas Aktiengesellschaft | Methods for producing highly pure silicon dioxide glass and burner for carrying out this method |
DE60105191D1 (de) | 2000-12-19 | 2004-09-30 | Pirelli & C Spa | Abscheidungsbrenner mit mehreren flammen und verfahren zur herstellung von vorformen für optische fasern |
ATE501095T1 (de) | 2001-05-30 | 2011-03-15 | Prysmian Spa | Verfahren und brenner zum herstellen einer glasvorform für optische fasern durch abscheidung aus der dampfphase |
KR100446937B1 (ko) * | 2001-10-22 | 2004-09-01 | 김형준 | 탄화규소 박막증착방법 및 장치 |
DE202008017383U1 (de) * | 2008-12-19 | 2009-08-20 | J-Fiber Gmbh | Glas, insbesondere Glasfaser-Preform |
CN102320732A (zh) * | 2011-08-25 | 2012-01-18 | 长飞光纤光缆有限公司 | 一种制备光纤预制棒的方法 |
CN103073005A (zh) * | 2013-01-14 | 2013-05-01 | 浙江大学 | 一种燃烧四甲基硅烷制备白炭黑的方法及其制备装置 |
US10745804B2 (en) * | 2017-01-31 | 2020-08-18 | Ofs Fitel, Llc | Parallel slit torch for making optical fiber preform |
JP7058627B2 (ja) * | 2019-06-11 | 2022-04-22 | 信越化学工業株式会社 | 光ファイバ用多孔質ガラス母材の製造装置および製造方法 |
JP7449842B2 (ja) * | 2020-11-02 | 2024-03-14 | 信越化学工業株式会社 | 多孔質ガラス母材の製造方法及び製造装置 |
CN112569735A (zh) * | 2020-11-27 | 2021-03-30 | 株洲宏大高分子材料有限公司 | 一种烟气制酸系统尾气管道中硫酸烟雾的去除方法与装置 |
CN113401912B (zh) * | 2021-07-06 | 2023-03-07 | 苏州大学 | 一种调控火焰法合成二氧化硅颗粒尺寸的装置和方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51102014A (en) * | 1974-11-01 | 1976-09-09 | Komatsu Denshi Kinzoku Kk | Kojundotomeigarasutaino seizohoho |
JPS5263213A (en) * | 1975-11-20 | 1977-05-25 | Komatsu Denshi Kinzoku Kk | Process for preparing highhpurity transparent silica glass products |
GB2071644B (en) * | 1980-02-22 | 1984-03-14 | Sumitomo Electric Industries | Radiation resistant optical fibres and a process for the production thereof |
US5043002A (en) * | 1990-08-16 | 1991-08-27 | Corning Incorporated | Method of making fused silica by decomposing siloxanes |
DE4026371A1 (de) * | 1990-08-21 | 1992-02-27 | Daimler Benz Ag | Verfahren zur herstellung eines quarzglasrohlings |
JP2835540B2 (ja) * | 1991-06-29 | 1998-12-14 | 信越石英株式会社 | エキシマレーザー用石英ガラス部材の製造方法 |
GB9312634D0 (en) * | 1993-06-18 | 1993-08-04 | Tsl Group Plc | Improvements in vitreous silica manufacture |
TW328971B (en) * | 1995-10-30 | 1998-04-01 | Dow Corning | Method for depositing Si-O containing coatings |
-
1999
- 1999-12-01 EP EP99204072A patent/EP1016635B1/en not_active Expired - Lifetime
- 1999-12-01 DE DE69927121T patent/DE69927121T2/de not_active Expired - Lifetime
- 1999-12-01 ES ES99204072T patent/ES2248961T3/es not_active Expired - Lifetime
- 1999-12-01 AT AT99204072T patent/ATE303978T1/de not_active IP Right Cessation
- 1999-12-16 NZ NZ501866A patent/NZ501866A/en not_active IP Right Cessation
- 1999-12-20 KR KR1019990059314A patent/KR100622616B1/ko not_active IP Right Cessation
- 1999-12-21 CA CA002292985A patent/CA2292985C/en not_active Expired - Fee Related
- 1999-12-24 AU AU65501/99A patent/AU757883B2/en not_active Ceased
- 1999-12-27 AR ARP990106761A patent/AR022025A1/es not_active Application Discontinuation
- 1999-12-27 JP JP11369580A patent/JP2000272925A/ja active Pending
- 1999-12-28 CN CNB991270746A patent/CN1195691C/zh not_active Expired - Lifetime
- 1999-12-28 BR BR9905998-3A patent/BR9905998A/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU6550199A (en) | 2000-06-29 |
DE69927121D1 (de) | 2005-10-13 |
CN1258651A (zh) | 2000-07-05 |
AU757883B2 (en) | 2003-03-13 |
ATE303978T1 (de) | 2005-09-15 |
CN1195691C (zh) | 2005-04-06 |
BR9905998A (pt) | 2001-03-20 |
KR20000052522A (ko) | 2000-08-25 |
ES2248961T3 (es) | 2006-03-16 |
CA2292985A1 (en) | 2000-06-28 |
EP1016635A1 (en) | 2000-07-05 |
JP2000272925A (ja) | 2000-10-03 |
EP1016635B1 (en) | 2005-09-07 |
AR022025A1 (es) | 2002-09-04 |
DE69927121T2 (de) | 2006-06-14 |
CA2292985C (en) | 2007-06-26 |
NZ501866A (en) | 2001-06-29 |
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