DE69927121T2 - Verfahren zur Herstellung von Siliciumdioxyd durch Zersetzung eines Organosilans - Google Patents

Verfahren zur Herstellung von Siliciumdioxyd durch Zersetzung eines Organosilans Download PDF

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Publication number
DE69927121T2
DE69927121T2 DE69927121T DE69927121T DE69927121T2 DE 69927121 T2 DE69927121 T2 DE 69927121T2 DE 69927121 T DE69927121 T DE 69927121T DE 69927121 T DE69927121 T DE 69927121T DE 69927121 T2 DE69927121 T2 DE 69927121T2
Authority
DE
Germany
Prior art keywords
organosilane
decomposition
preparation
silicon dioxide
dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69927121T
Other languages
English (en)
Other versions
DE69927121D1 (de
Inventor
Giacomo Stefano Roba
Marco Arimondi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Prysmian Cavi e Sistemi Energia SRL
Original Assignee
Pirelli and C SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pirelli and C SpA filed Critical Pirelli and C SpA
Application granted granted Critical
Publication of DE69927121D1 publication Critical patent/DE69927121D1/de
Publication of DE69927121T2 publication Critical patent/DE69927121T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/02—Elongated flat flame or slit-nozzle type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/22—Inert gas details
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature
DE69927121T 1998-12-28 1999-12-01 Verfahren zur Herstellung von Siliciumdioxyd durch Zersetzung eines Organosilans Expired - Lifetime DE69927121T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98830786 1998-12-28

Publications (2)

Publication Number Publication Date
DE69927121D1 DE69927121D1 (de) 2005-10-13
DE69927121T2 true DE69927121T2 (de) 2006-06-14

Family

ID=8236934

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69927121T Expired - Lifetime DE69927121T2 (de) 1998-12-28 1999-12-01 Verfahren zur Herstellung von Siliciumdioxyd durch Zersetzung eines Organosilans

Country Status (12)

Country Link
EP (1) EP1016635B1 (de)
JP (1) JP2000272925A (de)
KR (1) KR100622616B1 (de)
CN (1) CN1195691C (de)
AR (1) AR022025A1 (de)
AT (1) ATE303978T1 (de)
AU (1) AU757883B2 (de)
BR (1) BR9905998A (de)
CA (1) CA2292985C (de)
DE (1) DE69927121T2 (de)
ES (1) ES2248961T3 (de)
NZ (1) NZ501866A (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001019465A (ja) * 1999-07-07 2001-01-23 Shin Etsu Chem Co Ltd エキシマレーザ用合成石英ガラス部材及びその製造方法
WO2001005719A1 (de) * 1999-07-19 2001-01-25 Linde Gas Aktiengesellschaft Verfahren zur herstellung von hochreinem siliziumdioxid glas und brenner zur durchführung des verfahrens
DE60105191D1 (de) 2000-12-19 2004-09-30 Pirelli & C Spa Abscheidungsbrenner mit mehreren flammen und verfahren zur herstellung von vorformen für optische fasern
JP4165879B2 (ja) 2001-05-30 2008-10-15 ピレリ・アンド・チ・ソチエタ・ペル・アツィオーニ 気相成長法によりガラス光ファイバ予成型品を製造する方法及び装置
KR100446937B1 (ko) * 2001-10-22 2004-09-01 김형준 탄화규소 박막증착방법 및 장치
DE202008017383U1 (de) * 2008-12-19 2009-08-20 J-Fiber Gmbh Glas, insbesondere Glasfaser-Preform
CN102320732A (zh) * 2011-08-25 2012-01-18 长飞光纤光缆有限公司 一种制备光纤预制棒的方法
CN103073005A (zh) * 2013-01-14 2013-05-01 浙江大学 一种燃烧四甲基硅烷制备白炭黑的方法及其制备装置
US10745804B2 (en) * 2017-01-31 2020-08-18 Ofs Fitel, Llc Parallel slit torch for making optical fiber preform
JP7058627B2 (ja) * 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
JP7449842B2 (ja) * 2020-11-02 2024-03-14 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN112569735A (zh) * 2020-11-27 2021-03-30 株洲宏大高分子材料有限公司 一种烟气制酸系统尾气管道中硫酸烟雾的去除方法与装置
CN113401912B (zh) * 2021-07-06 2023-03-07 苏州大学 一种调控火焰法合成二氧化硅颗粒尺寸的装置和方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51102014A (en) * 1974-11-01 1976-09-09 Komatsu Denshi Kinzoku Kk Kojundotomeigarasutaino seizohoho
JPS5263213A (en) * 1975-11-20 1977-05-25 Komatsu Denshi Kinzoku Kk Process for preparing highhpurity transparent silica glass products
GB2071644B (en) * 1980-02-22 1984-03-14 Sumitomo Electric Industries Radiation resistant optical fibres and a process for the production thereof
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
DE4026371A1 (de) * 1990-08-21 1992-02-27 Daimler Benz Ag Verfahren zur herstellung eines quarzglasrohlings
JP2835540B2 (ja) * 1991-06-29 1998-12-14 信越石英株式会社 エキシマレーザー用石英ガラス部材の製造方法
GB9312634D0 (en) * 1993-06-18 1993-08-04 Tsl Group Plc Improvements in vitreous silica manufacture
TW328971B (en) * 1995-10-30 1998-04-01 Dow Corning Method for depositing Si-O containing coatings

Also Published As

Publication number Publication date
ES2248961T3 (es) 2006-03-16
CA2292985C (en) 2007-06-26
BR9905998A (pt) 2001-03-20
EP1016635B1 (de) 2005-09-07
AU757883B2 (en) 2003-03-13
AU6550199A (en) 2000-06-29
KR20000052522A (ko) 2000-08-25
NZ501866A (en) 2001-06-29
AR022025A1 (es) 2002-09-04
KR100622616B1 (ko) 2006-09-11
EP1016635A1 (de) 2000-07-05
CN1258651A (zh) 2000-07-05
CA2292985A1 (en) 2000-06-28
DE69927121D1 (de) 2005-10-13
CN1195691C (zh) 2005-04-06
JP2000272925A (ja) 2000-10-03
ATE303978T1 (de) 2005-09-15

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Owner name: PRYSMIAN CAVI E SISTEMI ENERGIA S.R.L., MAILAN, IT