KR100549560B1 - 물리적 증착 부품과 그 형성방법 - Google Patents

물리적 증착 부품과 그 형성방법 Download PDF

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KR100549560B1
KR100549560B1 KR1020037005865A KR20037005865A KR100549560B1 KR 100549560 B1 KR100549560 B1 KR 100549560B1 KR 1020037005865 A KR1020037005865 A KR 1020037005865A KR 20037005865 A KR20037005865 A KR 20037005865A KR 100549560 B1 KR100549560 B1 KR 100549560B1
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South Korea
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Korean (ko)
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KR20030045147A (ko
Inventor
쿠퍼매튜에스.
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허니웰 인터내셔널 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR1020037005865A 2000-10-27 2003-04-28 물리적 증착 부품과 그 형성방법 Expired - Fee Related KR100549560B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/699,897 2000-10-27
US09/699,897 US7041204B1 (en) 2000-10-27 2000-10-27 Physical vapor deposition components and methods of formation
PCT/US2001/051243 WO2002066699A2 (en) 2000-10-27 2001-10-26 Physical vapor deposition components and methods of formation

Publications (2)

Publication Number Publication Date
KR20030045147A KR20030045147A (ko) 2003-06-09
KR100549560B1 true KR100549560B1 (ko) 2006-02-08

Family

ID=24811380

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020037005865A Expired - Fee Related KR100549560B1 (ko) 2000-10-27 2003-04-28 물리적 증착 부품과 그 형성방법

Country Status (7)

Country Link
US (2) US7041204B1 (https=)
EP (1) EP1501960A2 (https=)
JP (1) JP2004533539A (https=)
KR (1) KR100549560B1 (https=)
CN (1) CN1551927A (https=)
AU (1) AU2002255471A1 (https=)
WO (1) WO2002066699A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030002043A1 (en) * 2001-04-10 2003-01-02 Kla-Tencor Corporation Periodic patterns and technique to control misalignment
US20040129559A1 (en) * 2002-04-12 2004-07-08 Misner Josh W. Diffusion bonded assemblies and fabrication methods
US20080078268A1 (en) 2006-10-03 2008-04-03 H.C. Starck Inc. Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof
US7776166B2 (en) * 2006-12-05 2010-08-17 Praxair Technology, Inc. Texture and grain size controlled hollow cathode magnetron targets and method of manufacture
US20080145688A1 (en) 2006-12-13 2008-06-19 H.C. Starck Inc. Method of joining tantalum clade steel structures
US9279178B2 (en) 2007-04-27 2016-03-08 Honeywell International Inc. Manufacturing design and processing methods and apparatus for sputtering targets
US8197894B2 (en) 2007-05-04 2012-06-12 H.C. Starck Gmbh Methods of forming sputtering targets
US8246903B2 (en) 2008-09-09 2012-08-21 H.C. Starck Inc. Dynamic dehydriding of refractory metal powders
US9412568B2 (en) 2011-09-29 2016-08-09 H.C. Starck, Inc. Large-area sputtering targets

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4481470A (en) 1981-07-29 1984-11-06 The United States Of America As Represented By The United States Department Of Energy Method for determining the hardness of strain hardening articles of tungsten-nickel-iron alloy
JPS59108970A (ja) 1982-12-13 1984-06-23 Nippon Steel Corp 鋼材の磁気特性測定方法
JPS6314864A (ja) 1986-07-08 1988-01-22 Ulvac Corp Ｃｏ基合金スパツタタ−ゲツトおよびその製造法
JPS63270461A (ja) 1986-12-26 1988-11-08 Teijin Ltd 対向ターゲット式スパッタ装置
US5087297A (en) 1991-01-17 1992-02-11 Johnson Matthey Inc. Aluminum target for magnetron sputtering and method of making same
JPH06104120A (ja) 1992-08-03 1994-04-15 Hitachi Metals Ltd 磁気記録媒体用スパッタリングターゲットおよびその製造方法
US5282947A (en) 1992-08-13 1994-02-01 Vlsi Technology, Inc. Magnet assembly for enhanced sputter target erosion
JP2857015B2 (ja) 1993-04-08 1999-02-10 株式会社ジャパンエナジー 高純度アルミニウムまたはその合金からなるスパッタリングターゲット
US5590389A (en) 1994-12-23 1996-12-31 Johnson Matthey Electronics, Inc. Sputtering target with ultra-fine, oriented grains and method of making same
JPH08253859A (ja) 1995-03-16 1996-10-01 Sumitomo Metal Mining Co Ltd スパッタリング装置
JP3413782B2 (ja) 1995-03-31 2003-06-09 日立金属株式会社 スパッタリング用チタンタ−ゲットおよびその製造方法
US5741377A (en) 1995-04-10 1998-04-21 Martin Marietta Energy Systems, Inc. Structures having enhanced biaxial texture and method of fabricating same
US5658442A (en) 1996-03-07 1997-08-19 Applied Materials, Inc. Target and dark space shield for a physical vapor deposition system
FR2756572B1 (fr) 1996-12-04 1999-01-08 Pechiney Aluminium Alliages d'aluminium a temperature de recristallisation elevee utilisee dans les cibles de pulverisation cathodiques
US6123783A (en) 1997-02-06 2000-09-26 Heraeus, Inc. Magnetic data-storage targets and methods for preparation
EP1015902A2 (en) 1997-04-01 2000-07-05 Redcliffe Magtronics Limited An apparatus and method of measuring the magnetic field distribution of a magnetic sample
CA2203601C (en) 1997-04-24 2004-03-16 James R. Booker Apparatus and method of detecting loss of cross-sectional area of magnetic metallic strength members used in conductors such as aluminum conductor steel reinforced ("acsr") conductors
JP3403918B2 (ja) 1997-06-02 2003-05-06 株式会社ジャパンエナジー 高純度銅スパッタリングタ−ゲットおよび薄膜
US5993621A (en) 1997-07-11 1999-11-30 Johnson Matthey Electronics, Inc. Titanium sputtering target
US6391172B2 (en) 1997-08-26 2002-05-21 The Alta Group, Inc. High purity cobalt sputter target and process of manufacturing the same
ATE308761T1 (de) 1998-03-30 2005-11-15 Sentron Ag Magnetfeldsensor
US6086725A (en) * 1998-04-02 2000-07-11 Applied Materials, Inc. Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life
US6323055B1 (en) 1998-05-27 2001-11-27 The Alta Group, Inc. Tantalum sputtering target and method of manufacture
US6071389A (en) 1998-08-21 2000-06-06 Tosoh Smd, Inc. Diffusion bonded sputter target assembly and method of making
WO2000040770A1 (en) 1998-12-29 2000-07-13 Tosoh Smd, Inc. Diffusion bonded sputter target assembly and method of making same
US6342114B1 (en) 1999-03-31 2002-01-29 Praxair S.T. Technology, Inc. Nickel/vanadium sputtering target with ultra-low alpha emission
US6258217B1 (en) 1999-09-29 2001-07-10 Plasma-Therm, Inc. Rotating magnet array and sputter source
US6299740B1 (en) 2000-01-19 2001-10-09 Veeco Instrument, Inc. Sputtering assembly and target therefor
US6454911B1 (en) 2000-06-01 2002-09-24 Honeywell International Inc. Method and apparatus for determining the pass through flux of magnetic materials
WO2002086183A1 (en) 2001-04-19 2002-10-31 Honeywell International Inc. Diffusion bonded assemblies and fabrication methods

Also Published As

Publication number Publication date
EP1501960A2 (en) 2005-02-02
CN1551927A (zh) 2004-12-01
US7041204B1 (en) 2006-05-09
KR20030045147A (ko) 2003-06-09
US20040221930A1 (en) 2004-11-11
WO2002066699A2 (en) 2002-08-29
WO2002066699A3 (en) 2004-12-09
AU2002255471A1 (en) 2002-09-04
JP2004533539A (ja) 2004-11-04

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