KR100548777B1 - 잉크젯헤드 및 그 제조방법 - Google Patents
잉크젯헤드 및 그 제조방법 Download PDFInfo
- Publication number
- KR100548777B1 KR100548777B1 KR1019990029114A KR19990029114A KR100548777B1 KR 100548777 B1 KR100548777 B1 KR 100548777B1 KR 1019990029114 A KR1019990029114 A KR 1019990029114A KR 19990029114 A KR19990029114 A KR 19990029114A KR 100548777 B1 KR100548777 B1 KR 100548777B1
- Authority
- KR
- South Korea
- Prior art keywords
- lower electrode
- piezoelectric element
- upper electrode
- electrode
- substrate
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
Claims (9)
- 다 수개의 노즐이 형성된 기판과,상기 기판에 본딩되며, 상면에 하부전극이 형성된 다이어프램(diaphragm)과,상기 하부전극에 본딩되며, 순차적으로 형성된 피에조소자와 상부전극과,상기 하부전극 상에 상기 피에조소자를 덮으며, 상기 상부전극을 노출시키도록 형성된 평탄화막과,상기 평탄화막 상에 상기 상부전극과 연결되도록 형성된 배선을 포함한 잉크젯헤드.
- 청구항 1에 있어서,상기 기판은 유리 또는 반도체웨이퍼인 것이 특징인 잉크젯헤드.
- 청구항 1에 있어서,상기 평탄화막은 유기절연막인 것이 특징인 잉크젯헤드.
- 청구항 1에 있어서,상기 다이어프램은 유리 또는 플라스틱인 것이 특징인 잉크젯헤드.
- 일면에 다 수개의 노즐이 형성된 기판을 준비하는 공정과,상면에 하부전극이 형성된 다이어프램을 준비하는 공정과,상기 기판 상에 상기 하부전극이 노출되도록 상기 다이어프램을 본딩시키는 공정과,상기 하부전극과 연결되도록 상부전극이 형성된 피에조소자를 본딩시키는 공정과,상기 하부전극 상에 상기 피에조소자를 덮으며, 상기 상부전극을 노출시키도록 평탄화막을 형성하는 공정과,상기 평탄화막 상에 상기 상부전극과 연결되도록 배선을 하는 공정을 구비한 잉크젯헤드의 제조방법.
- 청구항 5에 있어서,상기 평탄화막은 유기절연막인 것이 특징인 잉크젯헤드의 제조방법.
- 청구항 5에 있어서,상기 평탄화막 형성은 상기 피에조소자의 표면이 노출되도록 에치백하는 공정을 포함한 것이 특징인 잉크젯헤드의 제조방법.
- 청구항 5에 있어서,상기 평탄화막 형성은 상기 피에조소자의 표면이 노출되도록 에슁처리를 진행시키는 공정을 포함한 것이 특징인 잉크젯헤드의 제조방법.
- 청구항 5에 있어서,상기 다이어프램은 유리 또는 플라스틱인 것이 특징인 잉크젯헤드의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990029114A KR100548777B1 (ko) | 1999-07-19 | 1999-07-19 | 잉크젯헤드 및 그 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990029114A KR100548777B1 (ko) | 1999-07-19 | 1999-07-19 | 잉크젯헤드 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010010308A KR20010010308A (ko) | 2001-02-05 |
KR100548777B1 true KR100548777B1 (ko) | 2006-02-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990029114A KR100548777B1 (ko) | 1999-07-19 | 1999-07-19 | 잉크젯헤드 및 그 제조방법 |
Country Status (1)
Country | Link |
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KR (1) | KR100548777B1 (ko) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0929965A (ja) * | 1995-07-18 | 1997-02-04 | Fujitsu Ltd | インクジェットヘッド及びその圧電素子の形成方法 |
JPH09277520A (ja) * | 1996-04-10 | 1997-10-28 | Seiko Epson Corp | インクジェットプリンタヘッドとインクジェットプリンタヘッドの製造方法 |
JPH10128973A (ja) * | 1996-10-28 | 1998-05-19 | Seiko Epson Corp | 圧電体素子及びその製造方法 |
JPH10226071A (ja) * | 1996-12-09 | 1998-08-25 | Seiko Epson Corp | インクジェット式記録ヘッド |
JPH11334062A (ja) * | 1998-05-27 | 1999-12-07 | Mita Ind Co Ltd | インクジェットヘッド |
-
1999
- 1999-07-19 KR KR1019990029114A patent/KR100548777B1/ko not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0929965A (ja) * | 1995-07-18 | 1997-02-04 | Fujitsu Ltd | インクジェットヘッド及びその圧電素子の形成方法 |
JPH09277520A (ja) * | 1996-04-10 | 1997-10-28 | Seiko Epson Corp | インクジェットプリンタヘッドとインクジェットプリンタヘッドの製造方法 |
JPH10128973A (ja) * | 1996-10-28 | 1998-05-19 | Seiko Epson Corp | 圧電体素子及びその製造方法 |
JPH10226071A (ja) * | 1996-12-09 | 1998-08-25 | Seiko Epson Corp | インクジェット式記録ヘッド |
JPH11334062A (ja) * | 1998-05-27 | 1999-12-07 | Mita Ind Co Ltd | インクジェットヘッド |
Also Published As
Publication number | Publication date |
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KR20010010308A (ko) | 2001-02-05 |
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