KR100468437B1 - FOUP door lock/unlock device for FOUP opener - Google Patents

Abstract

The present invention relates to a hoop door opening and closing device of a FOUP opener for locking or unlocking a FOUP door.

The opening and closing device is a drive motor 210; Worm 220 is installed on the shaft of the drive motor 210; A worm gear 230 corresponding to the worm 220; A first pulley 250 having the worm gear 230 arranged therein; A second pulley 260 which is transmitted from the first pulley 250 as a belt 240; And a rat which is connected to each of the shafts of the first and second pulleys 250 and 260 and protrudes outward of the door holder 100 so that its tip corresponds to the door locking hole 126 of the hoop to release the door lock. It includes a cheetah 270, the first and second cover 310, the first member 320, the second member 330 in order to stretch and adjust the belt stretch in the state wound on the pulley 230 installed in two places The belt tensioner 300 includes a tightening bolt 340 that extends and stretches both ends of the belt through the tightening holes 324 and 334 of the first and second members 320 and 330.

This device is characterized in that the latching and unlocking of the latch key is performed accurately without any error in the rotation angle.

Description

FOOP door lock / unlock device for FOUP opener}

The present invention is a kind of 300mm wafer transfer container for conveying a wafer after loading a predetermined number of wafers. The hoop door opening and closing device of the opener is improved. It is about.

1 shows an example of a hoop and a hoop opener known in the art.

The hoop 120 of the figure is separated into a hoop body 121 and the hoop door 122, the support hole 124 and the locking hole 126 is installed in the hoop door 122.

The hoop opener 100 includes a door holder 110 which releases the door lock in the frame 130 and moves forward and backward, and a lifting frame body which moves the door holder 110 up and down from the rear.

Conventionally, the sucker 112 of the door holder 110 is adsorbed to the support hole 124 of the hoop door 122 to support the door, and then the latch hole 114 is inserted into the lock hole 126 to rotate. After the door 122 is released, the door holder 110 is reversed to separate the hoop door 122 to open the hoop interior, and the backward door holder 110 integrated with the door 122 is a lifting frame. By the frame 120 is lowered. Subsequently, a predetermined wafer extracting means is operated in the process equipment inside the frame 130 to move the wafers accommodated in the hoop one by one into the wafer processing step. When the withdrawal of the wafer is completed, the lowered lifting frame rises and stops at the frame entrance, and the door holder 110 therein moves forward to the hoop side to contact the hoop and the door and locks the door.

Particularly, according to the conventional hoop door opening and closing device installed in such a door holder, a structure in which a latch key is exposed to the front of the door holder and a worm, a worm gear and a driving motor are installed behind the door holder is known.

The conventional hoop door opening and closing device has some disadvantages as follows.

First, install the worm and worm gear on each latch key, install the latch key on the worm gear's central shaft to the front of the door holder, connect the first worm shaft to the drive motor shaft, and the second worm shaft by the auxiliary shaft. The latch key was driven simultaneously.

However, it is difficult to provide an auxiliary shaft in one drive motor shaft, the complexity of the device occurs even through an axis switching device, and the drive shaft is long, resulting in latch key operation errors.

Second, the worm gear structure according to each ratchet key has a high angle error occurrence rate as the structure of the device has a complicated soccer ball structure with a ratchet key in the design of the device.

An object of the present invention is to simplify the structure of the switchgear to improve the complexity of the various devices in the rear of the door holder, and to provide a ratchet key driving apparatus of a novel method which reduces the occurrence of an angular error.

1 is a perspective view showing an example of a conventional hoop opener and hoop,

Figure 2a is a front perspective view of the door holder to which the present invention hoop door opening and closing device is applied,

Figure 2b is a rear perspective view of the door holder to which the present invention hoop door opening and closing device is applied,

Figure 3a is a rear open perspective view of the door holder to which the invention hoop door opening and closing device is applied, Figure 3b is a rear view of the door holder to which the invention hoop door opening and closing device is applied,

Figure 4a is a cross-sectional view taken along line AA of Figure 3a for explaining the latch key opening and closing operation of the hoop door opening and closing device of the present invention, Figure 4b is a cross-sectional view taken along line BB of Figure 3a for explaining the latch key opening and closing operation of the hoop door opening and closing device of the present invention. Is,

Figure 5a is an exploded perspective view of the belt stretching means of the hoop door opening and closing device of the present invention, Figures 5b, 5c is a combined perspective view showing the first and second operating conditions.

※ Explanation of code for main part of drawing

200: drive means ..... 210: drive motor,

220: Worm ......... 230: Worm Gear,

240: belt ... 250: first pulley,

260: second pulley ...... 300: belt stretching means,

310: cover ...... 312: protruding,

320: first member ..... 322: seating groove,

324: Fasteners ......... 326: Sliding plane,

330: second member ............... 332

334: Fasteners ............... 336:

338: Tightening hole ............... 340: Tightening bolt.

The present invention hoop door opening and closing device for achieving the above object is a latch key protruding in front of the door holder, a rotating cylinder tightened fixed to the shaft of the latch key, a fixed body fixed to the door holder side, and this fixed body A first opening and closing means interposed between the rotating cylinder and the bearing to enable sliding of the rotating cylinder, and a first pulley integrally formed with a worm gear on an outer side of the rotating cylinder; A latch key protruding forward of the door holder, a rotating cylinder fastened to the shaft of the latch key, a fixing body fixed to the door holder side, and a sliding of the rotating cylinder interposed between the fixing body and the rotating cylinder. A second opening / closing means comprising a bearing to enable the second pulley and a second pulley arranged behind the latch key; A belt wound between the first and second pulleys of the first and second opening and closing means; Drive means comprising a worm vertically connected to the worm gear of the first pulley and a drive motor connected to the worm in a vertical axis; An input / output sensor for detecting a rotation angle installed behind the second pulley of the second opening / closing means; In order to stretch and adjust the stretch in the state of being wound on the pulleys installed in two places, the first and second cover formed with a projection, and the seating groove is formed on the bottom so that the first cover is seated, and a fastening hole is formed on the front, Both sides of the upper surface form a sliding surface and a first member on which one end of the belt is fixed, and the second cover is seated, and at the same time, a slide surface is formed on the bottom surface so as to be aligned on the horizontal line with the first member, and communicates with the tightening hole in front. And a belt extension means comprising a second member for supporting the other end of the belt to form a tightening hole, and a tightening bolt for tightening both ends of the belt by tightening through the respective fastening holes of the first and second members.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a front perspective view of the door holder to which the hoop door opening and closing device of the present invention is applied, and FIG. 3a is a rear open perspective view of the door holder to which the hoop door opening and closing device of the present invention is applied, and FIG. 3b is a hoop door opening and closing device of the present invention. Figure 4a is a cross-sectional view taken along line AA of Figure 3a for explaining the latch key opening and closing operation of the hoop door opening and closing device of the present invention, Figure 4b illustrates the latch key opening and closing operation of the hoop door opening and closing device of the present invention. It is sectional drawing along the BB line | wire of FIG. 3A for the following.

According to the present invention, the hoop door opening and closing device according to the drawings provides a plurality of latch keys 270 side by side in front of the door holder 100.

The latch keys 270 protrude toward the front of the door holder 100, and the rotating cylinders 280 are fastened to the rear of the door holder 100 at the rear end shaft of the latch key 270.

The rotating cylinders 280 are rotatably installed via a bearing 284 between the fixed body 282 fixed inside the door holder 100. One of the rotating cylinders 280 forms a first pulley 250 in which a worm gear 230 is integrally formed on the outside thereof, and the other rotating cylinder 280 is not implemented with the worm gear 230.

The belt 240 is wound and transmitted between the first and second pulleys 250 and 260. The worm 220 vertically connected to the worm gear 230 of the first pulley 250 is independent. Is installed, the rotational axis of the drive motor 210 is connected to the vertical axis of the worm 220.

Meanwhile, the rotation angle detecting input / output sensors 290 and 292 are installed at a predetermined angle in the second pulley 260 to detect the rotation angle of the second pulley 260. The output signal of the detected angle signal is to control the driving time of the drive motor 210 by a known control circuit, but this degree of technology is a technology that can be easily implemented by those skilled in the art of control circuits, and a detailed description thereof will be omitted. .

In general, when the latch key on the second pulley shaft reaches a small angle by driving the driving motor, the sensors 290 and 292 detect this and send a stop signal through a control circuit. Is stopped. The reverse operation of the latch key is reversed.

5A and 5B of the accompanying drawings show the belt stretching means 300 of the present invention.

The belt transmission structure of the present invention according to the drawing is installed to adjust the sagging of the belt.

That is, the belt stretching means 300 is composed of a first cover 310, the first member 320, the second member 330, and the tightening bolt 340.

The first cover 310 forms a protrusion 312, the first member 320 forms a seating groove 322 in the bottom surface so that the first cover 310 is seated, the fastening hole 324 in the front ) And one end of the belt 240 is fixed to both sides of the upper surface to form a sliding surface 326.

The second member 330 forms a slide surface 336 at the bottom thereof so that the second cover 310 is seated and at the same time aligned with the first member 320 on a horizontal line, and communicates with the tightening hole 324 in front. A tightening hole 334 is formed to support the other end of the belt.

The tightening bolt 340 passes through the tightening holes 324 and 334 of the first and second members 320 and 330 to tighten both ends of the belt.

In the present invention, the hoop door opening and closing device formed as described above is driven by the worm 220 when the driving means 200 is driven to rotate the worm gear 230 of the first pulley 250 and the first pulley by the worm gear 230. 250 is rotated, the belt 240 is moved by the rotation of the first pulley (250). As the belt 240 moves, the second pulley 260 rotates at the same time so that each latch key 270 rotates at a predetermined angle. When the latch keys 270 rotate, the lock hole of the hoop door is rotated to release the locked hoop door.

In particular, the belt stretching means 300 of the present invention is precisely the two pulleys by adjusting the expansion and contraction occurs when the belt 220 is wound on the first, second pulleys 250, 260 installed in two places Achieve angular rotation.

That is, the first member 320 below the fastener 338 that penetrates the long hole 332 by tightening the fastening bolt 340 when the end of the belt 240 is tightened in the state of FIG. 5B, the fastener 338. Is pulled together (converted to state attached to figure 5c).

As described above, the hoop door opening and closing device of the hoop opener according to the present invention can stretch and adjust the belt between the first pulley and the second pulley, thereby improving the accuracy of the rotation angle of the pulley.

Therefore, the hoop door opening device of the hoop opener of the present invention is to improve the complexity of the structure for opening and closing the latch key in the rear of the door holder to implement a simple and excellent assembly opening and closing device.

In particular, the hoop door opening and closing device of the hoop opener of the present invention provides a control structure that enables the tightening control between the latch key and the pulley to provide a control structure that allows the release of the latch key as well as the slack of the belt. To improve the disadvantages of the rotation angle error significantly reduced the driving performance of the latch key to provide a hoop door opening and closing device.

Claims (2)

In the hoop door opener of the hoop opener, A latch key 270 protruding forward of the door holder 100, a rotating cylinder 280 fastened to the shaft of the latch key 270, and a fixed body 282 fixed to the door holder 100 side. And a bearing 284 interposed between the fixed body 282 and the rotating cylinder 280 to allow the rotating cylinder 280 to slide, and a worm gear integrally with the outside of the rotating cylinder 280. First opening and closing means consisting of a first pulley 250 forming a 230; A latch key 270 protruding forward of the door holder 100, a rotating cylinder 280 fastened to the shaft of the latch key 270, and a fixed body 282 fixed to the door holder 100 side. And a bearing 284 interposed between the fixed body 282 and the rotating cylinder 280 to allow the rotating cylinder 280 to slide, and a second pulley arranged behind the latch key 270. A second opening and closing means consisting of 260; A belt 240 wound between the first and second pulleys 250 and 260 of the first and second opening and closing means; Drive means consisting of a worm 220 vertically connected to the worm gear 230 of the first pulley 250 and a drive motor 210 connected to the worm 220 in a vertical axis; And The hoop door opening and closing device of the hoop opener including an input / output sensor (290) (292) for detecting the rotation angle installed behind the second pulley (250) of the second opening and closing means. The method of claim 1, The belt 240 includes a first and a second cover 310 forming a protrusion 312 to elastically adjust the sag in a state in which the belt 240 is wound around the first and second pulleys 250 and 260 installed in two places; A seating groove 322 is formed on the bottom surface of the first cover 310 to be seated thereon, a fastening hole 324 is formed on the front surface thereof, and a sliding surface 326 is formed on both sides of the upper surface thereof so that one end of the belt 240 is formed. A first member 320 which is fixed; At the same time as the second cover 310 is seated, the slide surface 336 is formed on the bottom surface of the second cover 310 so as to be aligned with the first member 320 on the horizontal line, and the tightening hole 334 communicating with the tightening hole 324 is provided in front. A second member 330 formed to support the other end of the belt 240; Further comprising a belt tensioner 300 consisting of a tightening bolt 340 is tightened at both ends of the belt by tightening through each of the tightening holes 324, 334 of the first, second members 320, 330. Hoop door switchgear for hoop opener.