KR100456792B1 - Belting Apparatus for mechanical restrained backlash - Google Patents

Belting Apparatus for mechanical restrained backlash Download PDF

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Publication number
KR100456792B1
KR100456792B1 KR10-2002-0071961A KR20020071961A KR100456792B1 KR 100456792 B1 KR100456792 B1 KR 100456792B1 KR 20020071961 A KR20020071961 A KR 20020071961A KR 100456792 B1 KR100456792 B1 KR 100456792B1
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South Korea
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pulley
belt
wound
backlash
opposite direction
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KR10-2002-0071961A
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Korean (ko)
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KR20040043602A (en
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김윤창
임정호
이은철
송진규
임철영
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세크론 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
  • Manipulator (AREA)

Abstract

본 발명은 백래쉬가 억제된 벨트 장치에 관한 것으로서, 양단이 인장력으로 구속된 벨트(10)와, 이 벨트(10)의 경로 상에 감기는 구동풀리(15)와, 이 구동풀리(15)를 중심으로 한 측의 벨트(10)로 감기며 구동풀리(15)와 동일한 방향으로 회전이 일어나는 가이드풀리(20)와, 이 가이드풀리(20)와 연속되어 반대방향으로 회전이 일어나도록 벨트가 감기는 제1이송풀리(25)와, 상기 구동풀리(15)를 중심으로 다른 측의 벨트(10)에 감기며 상기 구동풀리(15) 및 가이드풀리(20)와 반대 방향으로 회전하도록 벨트(10)가 감기는 보조풀리(30)와, 이 보조풀리(30)에 연속되어 반대방향으로 회전하도록 벨트(10)가 감기는 지지풀리(35)와, 이 지지풀리(35)에 연속되어 반대방향으로 회전하도록 벨트(10)가 감기는 제2이송풀리(40)로 구성되고, 상기 제1이송풀리(25)와 제2이송풀리(40)는 조인트캐리어(45)에 설치되어 상기 구동풀리(15)의 구동시 벨트(10)의 백래쉬가 최대한 억제되도록 벨트(10)양단에 소정의 인장력이 가해지고 있다.The present invention relates to a belt device in which backlash is suppressed and includes a belt (10) having both ends constrained by a tensile force, a drive pulley (15) wound on a path of the belt (10), and the drive pulley (15). A guide pulley 20 which is wound around the belt 10 on one side and rotates in the same direction as the driving pulley 15, and the belt is wound so that rotation occurs in the opposite direction in succession with the guide pulley 20. The belt 10 is wound around the first transfer pulley 25 and the belt 10 on the other side about the driving pulley 15 and rotates in a direction opposite to the driving pulley 15 and the guide pulley 20. ) The auxiliary pulley (30) wound around, the support pulley (35) on which the belt (10) is wound so as to be rotated in the opposite direction in succession to the auxiliary pulley (30), and in the opposite direction continuous to the support pulley (35). The second conveying pulley 40 is wound around the belt 10 so as to rotate, the first conveying pulley 25 and the second conveying pulley 40 A predetermined tensile force is applied to both ends of the belt 10 so that the backlash of the belt 10 is restrained to the maximum while being installed in the ste carrier 45.

Description

백래쉬가 억제된 벨트 장치{Belting Apparatus for mechanical restrained backlash}Belting Apparatus with Reduced Backlash {Belting Apparatus for mechanical restrained backlash}

본 발명은 벨트가 모터에 결합된 풀리에 의해 밀착 회전되어, 벨트에 결합된 이송물이 이동될 때 정밀한 위치제어를 위한 백래쉬가 억제된 벨트 장치에 관한 것으로서, 보다 상세하게는 분할 된 반도체패키지가 트레이에 적재되는 트레이트랜스퍼에서 트레이를 소정의 피치간격으로 정밀이송하는 장치이다. 종래에는 벨트가 양축이 고정된 풀리에 설치되어 풀리의 구동으로 벨트가 회전되어 물체를 이송하였으나, 이러한 벨트 장치는 소정 시간동안 구동되면 벨트가 늘어나 처짐이 발생되어 정밀한 위치제어에서는 쉽게 오차가 발생할 우려가 있었다.The present invention relates to a belt device in which the backlash for precise position control is suppressed when the belt is closely rotated by a pulley coupled to a motor, and the conveyance coupled to the belt is moved, and more particularly, a divided semiconductor package is provided. It is a device for precisely transferring a tray at a predetermined pitch interval in a tray transfer stacked on the tray. Conventionally, a belt is installed on a pulley having both shafts fixed, and a belt is rotated to transfer an object by driving of the pulley. However, when the belt device is driven for a predetermined time, the belt is stretched and sag occurs, and an error may occur easily in precise position control. There was.

본 발명의 목적은 이러한 문제점을 해결하고자 안출된 것으로, 벨트의 양단이 인장되어 조인트캐리어가 이동될 수 있도록 벨트와 풀리가 구성되고 벨트가 구동되기 전에 벨트의 처짐을 억제하기 위해서 벨트의 양단이 소정의 인장력으로 고정되면 벨트로 이송되는 물체의 위치가 제어될 때, 기계적인 오차가 발생되지 않는 백래쉬가 억제된 벨트 장치를 제공함에 있다.An object of the present invention is to solve this problem, the belt and pulley is configured so that both ends of the belt can be tensioned to move the joint carrier, and both ends of the belt are predetermined to suppress the sagging of the belt before the belt is driven. It is to provide a belt device is suppressed backlash that does not cause a mechanical error when the position of the object to be transferred to the belt is controlled by the tension force of the.

도 1은 본 발명에 따른 사시도이다.1 is a perspective view according to the present invention.

도 2는 본 발명에서 백래쉬를 억제하면서 조인트캐리어의 이송과정을 설명하기 위한 정면도이다.Figure 2 is a front view illustrating the transfer process of the joint carrier while suppressing the backlash in the present invention.

※도면의 주요부분에 대한 부호의 설명※ Explanation of symbols for main parts of drawing

10: 벨트 15: 구동풀리10 belt 15 drive pulley

20: 가이드풀리 25: 제1이송풀리20: guide pulley 25: first feed pulley

30: 보조풀리 35: 지지풀리30: auxiliary pulley 35: support pulley

40: 제2이송풀리 45: 조인트캐리어40: second feed pulley 45: joint carrier

65: 모터 70: 인장력65: motor 70: tensile force

상기 목적을 달성하기 위한 본 발명에 따른 백래쉬가 억제된 벨트 장치는 양단이 인장력으로 구속된 벨트와, 이 벨트의 경로 상에 감기는 구동풀리와, 이 구동풀리를 중심으로 한 측의 벨트로 감기며 구동풀리와 동일한 방향으로 회전이 일어나는 가이드풀리와, 이 가이드풀리와 연속되어 반대방향으로 회전이 일어나도록 벨트가 감기는 제1이송풀리와, 상기 구동풀리를 중심으로 다른 측의 벨트에 감기며 상기 구동풀리 및 가이드풀리와 반대 방향으로 회전하도록 벨트가 감기는 보조풀리와, 이 보조풀리에 연속되어 반대방향으로 회전하도록 벨트가 감기는 지지풀리와, 이 지지풀리에 연속되어 반대방향으로 회전하도록 벨트가 감기는 제2이송풀리로 구성되고, 상기 제1이송풀리와 제2이송풀리는 직선 운동되는 조인트캐리어에 설치되는 것을 특징으로 한다.The belt device with the backlash suppressed according to the present invention for achieving the above object is a belt with both ends restrained by a tensile force, a drive pulley wound on the path of the belt, and a belt around the drive pulley as a center. A guide pulley in which rotation occurs in the same direction as the driving pulley, a first transfer pulley in which the belt is wound so as to be rotated in the opposite direction in succession with the guide pulley, and wound around the belt on the other side around the driving pulley. An auxiliary pulley on which the belt is wound so as to rotate in the opposite direction to the drive pulley and the guide pulley, a support pulley on which the belt is wound so as to rotate in the opposite direction in succession to the auxiliary pulley, and to rotate in the opposite direction in succession to the support pulley The belt is composed of a second feed pulley is wound, the first feed pulley and the second feed pulley is characterized in that it is installed in a linear carrier joint movement The.

이하, 본 발명의 구체적인 실시 예를 첨부한 도면을 참조하여 상세히 설명한다. 도 1은 본 발명에 따른 사시도이고, 도 2는 본 발명에서 백래쉬를 억제하면서 조인트캐리어의 이송과정을 설명하기 위한 정면도이다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is a perspective view according to the present invention, Figure 2 is a front view for explaining the transfer process of the joint carrier while suppressing the backlash in the present invention.

본 발명은 우선, 모터(65)로 구동되는 구동풀리(15)가 설치된다. 설명의 편리를 위해서 벨트(10)가 풀리에서 분리되어 펼쳐졌을 때를 기준으로 풀리에 밀착되는 면을 상면과 하면으로 나누어 설명하면, 상기 구동풀리(15)에 벨트(10)의 상면이 밀착되고 상기 구동풀리(15)의 상부에 벨트(10)의 상면이 감겨 같은 방향으로 회전되도록 가이드풀리(20)가 설치된다. 상기 가이드풀리(20)에 상면이 밀착된 벨트(10)는 풀리가 자유롭게 직선 이동되는 제1이송풀리(25)에 하면이 밀착되어 감기고 상기 가이드풀리(20)에서 이어지는 벨트(10)방향과 반대방향으로 연속된다.In the present invention, first, a drive pulley 15 driven by a motor 65 is provided. For convenience of description, when the belt 10 is separated from the pulley and unfolded, the surface that is in close contact with the pulley is divided into upper and lower surfaces, and the upper surface of the belt 10 is in close contact with the driving pulley 15. The guide pulley 20 is installed on the driving pulley 15 so that the upper surface of the belt 10 is wound and rotated in the same direction. The belt 10 having an upper surface closely adhered to the guide pulley 20 has a lower surface closely wound on the first transfer pulley 25 in which the pulley is freely linearly moved, and is opposite to the direction of the belt 10 which is continued from the guide pulley 20. Continuous in the direction.

상기 제1이송풀리(25)의 축은 물체가 놓여지는 조인트캐리어에 베어링으로 결합되며, 상기 제1이송풀리(25)를 경유한 벨트(10)는 상기 가이드풀리(20)의 상부에 소정의 인장력(70)으로 고정된다. 상기 구동풀리(15)의 우측 상부에는 상기 벨트(10)의 하면이 밀착 지지되는 보조풀리(30)가 설치된다. 상기 보조풀리(30)를 경유한 벨트(10)는 상기 가이드풀리(20)와 일직선으로 설치되는 지지풀리(35)에 상면이 밀착되어 감기고, 상기 조인트캐리어로 이어진다. 상기 조인트캐리어(45)로 이어진 벨트는(10) 상기 제1이송풀리(25)와 소정간격으로 배치되며 축의 양단이 조인트캐리어(10)에 베어링으로 결합되는 제2이송풀리(40)에 하면이 감기어 조인트캐리어에 들어온 방향과 반대방향인 우측에 소정의 인장력(70)으로 고정된다.The shaft of the first feed pulley 25 is coupled to a joint carrier on which an object is placed by a bearing, and the belt 10 passing through the first feed pulley 25 has a predetermined tensile force on the upper portion of the guide pulley 20. It is fixed at 70. The upper side of the right side of the drive pulley 15 is provided with an auxiliary pulley 30 in which the lower surface of the belt 10 is tightly supported. The belt 10 passing through the auxiliary pulley 30 has an upper surface closely wound on the support pulley 35 installed in a straight line with the guide pulley 20, and leads to the joint carrier. The belt connected to the joint carrier 45 is disposed at a predetermined interval from the first transfer pulley 25 and has a lower surface on the second transfer pulley 40 having both ends of the shaft coupled to the joint carrier 10 as bearings. It is fixed by a predetermined tension force 70 on the right side opposite to the direction entered into the joint carrier.

상기 구동풀리(15)가 모터(65)의 구동으로 시계방향으로 회전되면, 구동풀리(15)와 다른 풀리에 밀착된 벨트(10)는 가이드풀리(20)쪽으로 이송되어 벨트(10)의 좌측 단이 고정된 가이드풀리(20)와 제1이송풀리(25)사이의 벨트(10)길이는 늘어나고 상대적으로 벨트(10)의 우측단이 고정된 지지풀리(35)와 제2이송풀리(40)사이의 벨트(10)길이는 짧아져서 상기 조인트캐리어는 우측으로 이송된다. 상기 구동풀리(15)가 모터(65)의 구동으로 반시계방향으로 회전되면 조인트캐리어를 기준으로 좌측벨트(10)의 길이는 짧아지고, 우측벨트(10)의 길이는 늘어나서 조인트캐리어는 좌측으로 이송된다.When the driving pulley 15 is rotated clockwise by the driving of the motor 65, the belt 10 closely attached to the driving pulley 15 and the other pulley is transferred toward the guide pulley 20 to the left side of the belt 10. The length of the belt 10 between the guide pulley 20 and the first feed pulley 25 fixed at the end thereof is increased, and the support pulley 35 and the second feed pulley 40 having the right end of the belt 10 fixed to each other relatively. The length of the belt 10 between the two is shortened so that the joint carrier is conveyed to the right. When the driving pulley 15 is rotated counterclockwise by the driving of the motor 65, the length of the left belt 10 is shortened based on the joint carrier, and the length of the right belt 10 is extended so that the joint carrier is moved to the left side. Transferred.

따라서, 본 발명에 의하면 상기 벨트의 좌우측 단이 고정되고, 상기 제1이송풀리와 제2이송풀리가 조인트캐리어에 좌우측으로 직선이동 될 수 있게 설치되면 조인트캐리어의 위치가 제어될 때, 백래쉬가 억제되어 기계적인 오차가 발생되지 않는 효과를 얻을 수 있다.Therefore, according to the present invention, if the left and right ends of the belt are fixed and the first and second feed pulleys are installed to be linearly moved left and right on the joint carrier, the backlash is suppressed when the position of the joint carrier is controlled. It is possible to obtain the effect that no mechanical error occurs.

이상에서 본 발명은 기재된 구체 예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부됨은 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various changes and modifications are possible within the technical scope of the present invention, and it is obvious that such modifications and modifications belong to the claims.

Claims (1)

양단이 인장력으로 구속된 벨트와, 이 벨트의 경로 상에 감기는 구동풀리와, 이 구동풀리를 중심으로 한 측의 벨트로 감기며 구동풀리와 동일한 방향으로 회전이 일어나는 가이드풀리와, 이 가이드풀리와 연속되어 반대방향으로 회전이 일어나도록 벨트가 감기는 제1이송풀리와, 상기 구동풀리를 중심으로 다른 측의 벨트에 감기며 상기 구동풀리와 반대 방향으로 회전하도록 벨트가 감기는 보조풀리와, 이 보조풀리에 연속되어 반대방향으로 회전하도록 벨트가 감기는 지지풀리와, 이 지지풀리에 연속되어 반대방향으로 회전하도록 벨트가 감기는 제2이송풀리로 구성되고, 상기 제1이송풀리와 제2이송풀리는 물체를 이송하기 위해 직선 운동되는 조인트캐리어에 설치되는 것을 특징으로 하는 백래쉬가 억제된 벨트 장치.A belt with both ends constrained by a tensile force, a drive pulley wound on the path of the belt, a guide pulley wound around the drive pulley with a belt on its side and rotating in the same direction as the drive pulley, and the guide pulley A first transfer pulley in which the belt is wound so as to be rotated in the opposite direction in succession with the auxiliary pulley; A support pulley on which the belt is wound so as to be rotated in the opposite direction in succession to the auxiliary pulley, and a second feed pulley on which the belt is wound so as to be rotated in the opposite direction in succession to the support pulley. A backlash-suppressed belt device, characterized in that the feed pulley is installed on a joint carrier which is linearly moved to convey an object.
KR10-2002-0071961A 2002-11-19 2002-11-19 Belting Apparatus for mechanical restrained backlash KR100456792B1 (en)

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Publication number Priority date Publication date Assignee Title
CN204549993U (en) * 2015-04-23 2015-08-12 张伟强 A kind of straight-line motion reinforcement module adopting assembly pulley

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62292472A (en) * 1986-06-13 1987-12-19 Canon Inc Carriage belt device
JPS63140158A (en) * 1986-11-29 1988-06-11 Juki Corp Xy drive device
JPH0632629A (en) * 1992-07-14 1994-02-08 Nippon Sheet Glass Co Ltd Device for reciprocatively transporting platy material
KR20000054944A (en) * 1999-02-02 2000-09-05 정명세 Parallel gear-pulley system with reduced backlash

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62292472A (en) * 1986-06-13 1987-12-19 Canon Inc Carriage belt device
JPS63140158A (en) * 1986-11-29 1988-06-11 Juki Corp Xy drive device
JPH0632629A (en) * 1992-07-14 1994-02-08 Nippon Sheet Glass Co Ltd Device for reciprocatively transporting platy material
KR20000054944A (en) * 1999-02-02 2000-09-05 정명세 Parallel gear-pulley system with reduced backlash

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