KR100446792B1 - 웨이퍼의 슬라이딩 방지를 위한 상하 수직운동 가능한가이드 핀 - Google Patents
웨이퍼의 슬라이딩 방지를 위한 상하 수직운동 가능한가이드 핀 Download PDFInfo
- Publication number
- KR100446792B1 KR100446792B1 KR10-2002-0002094A KR20020002094A KR100446792B1 KR 100446792 B1 KR100446792 B1 KR 100446792B1 KR 20020002094 A KR20020002094 A KR 20020002094A KR 100446792 B1 KR100446792 B1 KR 100446792B1
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- guide pin
- susceptor
- chamber
- lift
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (3)
- 상면에 웨이퍼가 안착되는 서셉터에 설치되어, 상기 웨이퍼를 가이드 하는 가이드 핀으로서,상기 서셉터의 하단에서 관통 삽입되어 상기 웨이퍼의 가장자리를 따라 돌출 배열되는 다수의 가이드 핀과;상기 가이드 핀을 승강시키는 구동수단을 포함하는 가이드 핀
- 청구항 1에 있어서,상기 가이드 핀은 세라믹 또는 스테인리스-스틸 중 선택된 하나의 재질인 가이드 핀
- 청구항 제1에 있어서,상기 구동수단은 공기실린더 또는 모터 중 선택된 하나인 가이드핀
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0002094A KR100446792B1 (ko) | 2002-01-14 | 2002-01-14 | 웨이퍼의 슬라이딩 방지를 위한 상하 수직운동 가능한가이드 핀 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0002094A KR100446792B1 (ko) | 2002-01-14 | 2002-01-14 | 웨이퍼의 슬라이딩 방지를 위한 상하 수직운동 가능한가이드 핀 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030061557A KR20030061557A (ko) | 2003-07-22 |
KR100446792B1 true KR100446792B1 (ko) | 2004-09-04 |
Family
ID=32217987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0002094A KR100446792B1 (ko) | 2002-01-14 | 2002-01-14 | 웨이퍼의 슬라이딩 방지를 위한 상하 수직운동 가능한가이드 핀 |
Country Status (1)
Country | Link |
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KR (1) | KR100446792B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101054481B1 (ko) * | 2007-02-09 | 2011-08-04 | 도쿄엘렉트론가부시키가이샤 | 재치대 구조, 이를 이용한 처리 장치, 이 장치의 사용 방법, 및 이를 실행시키는 프로그램을 격납한 컴퓨터 판독가능 기록매체 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8365682B2 (en) * | 2004-06-01 | 2013-02-05 | Applied Materials, Inc. | Methods and apparatus for supporting substrates |
KR100801471B1 (ko) * | 2006-03-30 | 2008-02-12 | 주식회사 아이피에스 | 웨이퍼 로딩 장치 |
KR100970413B1 (ko) * | 2008-09-26 | 2010-07-15 | 주식회사 부강금속조명 | 열순환배출이 가능한 조명 등기구 |
-
2002
- 2002-01-14 KR KR10-2002-0002094A patent/KR100446792B1/ko active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101054481B1 (ko) * | 2007-02-09 | 2011-08-04 | 도쿄엘렉트론가부시키가이샤 | 재치대 구조, 이를 이용한 처리 장치, 이 장치의 사용 방법, 및 이를 실행시키는 프로그램을 격납한 컴퓨터 판독가능 기록매체 |
US9177846B2 (en) | 2007-02-09 | 2015-11-03 | Tokyo Electron Limited | Placing bed structure, treating apparatus using the structure, and method for using the apparatus |
US10388557B2 (en) | 2007-02-09 | 2019-08-20 | Tokyo Electron Limited | Placing bed structure, treating apparatus using the structure, and method for using the apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR20030061557A (ko) | 2003-07-22 |
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