KR100402846B1 - Surface treatment device - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus, in which liquid is forcibly separated from both sides of a plate-like product being conveyed in the surface treatment tank upstream in the conveying direction of the conveyance guide, and the tip of the plate-shaped article collides with the conveying guide. The liquid flow guide guide means is formed in the conveying path surrounded by both conveying guides while avoiding the above-mentioned. The liquid flow guide guide means is provided reliably to introduce between the conveying guides while arranging the attitude of the flat substance in the liquid. It is characterized by providing a surface treatment apparatus.

Description

Surface Treatment Equipment {SURFACE TREATMENT DEVICE}

The present invention includes a pair of conveying guides spaced apart in the width direction in the surface treatment tank, and enables the conveying of the plate-like article while maintaining the longitudinal suspension attitude of the plate-shaped article in the conveying direction along the conveying path surrounded by both conveying guides. The surface treatment apparatus which surface-treats on the flat-form object in conveyance.

In the surface treatment method of the object to be processed, each of the arranged treatment tanks can be transported in turn, the object to be treated is immersed in the first treatment tank, and the treatment is carried out for a predetermined time. It returns to a process tank and performs the said process for a predetermined time in the next process tank. Hereinafter, a batch method of repeating the same procedure and processing by immersing the object in a processing tank long in the conveying direction, maintaining the immersion state of the object and continuously conveying it from the upstream side to the downstream side in the conveying direction There is a continuous method.

In the case where the object to be treated is a flat plate and treated in a vertical suspension position, the arrangement method tends to cause variation in surface treatment quality for each treatment tank, that is, for each flat plate. This is because there are variations in the composition of the treatment liquid, the power supply type, the power concentration, and the masking effect.

On the other hand, in the continuous method, the variation of the surface treatment quality is very small and the productivity is high for each flat form. In this way, for example, in the case of a printed wiring board (flat plate), a continuous method is often employed.

In this continuous surface treatment apparatus, the plate-shaped object is attached to the conveying means either directly or indirectly through a hanger, for example in a longitudinal suspension posture. That is, each surface (both sides) of a flat-form thing is attached in a conveyance path, ie, a posture parallel to a conveyance direction.

Here, when the conveying means is driven, each plate-like article is continuously conveyed in the conveying direction along the conveying path with the longitudinal suspension attitude maintained. Then, the power is fed from the power supply means to the respective flat plate-shaped objects during conveyance (transition) in the surface treatment tank. Therefore, the surface treatment conditions of each plate-shaped object can be made uniform, and high quality surface treatment (for example, plating process) without a deviation can be performed.

However, a thin plate (both dimensions) for each printed wiring board is also affected by the conveying speed, but when the conveyed liquid is conveyed in the processing liquid, bending and bending occur in the direction perpendicular to the conveying direction. In addition, oscillation or vibration may occur. This is inevitably deteriorated because the distance between electrodes in the treatment tank is varied. In addition, there is a fear that damage to the printed wiring board, deformation of the built-in member itself, or the like may occur due to the collision with the processing vessel built-in member.

Therefore, the applicant of the present invention is a guide post 81 in a state spaced apart in the vertical direction on both sides of the conveying path (R) and extended in the conveying (X) direction in the processing tank 10, as shown in Figs. The apparatus which provided the conveyance guide means 80 which has several wire (conveyance guide) 82 provided in () is proposed (for example, Japanese Patent Application No. 2000-38682). The horizontal space | interval (width) Dg between the conveyance guides 82 is 16 mm, for example.

In this way, by restricting the workpiece free movement in the liquid Q and in the distance Dg, it is possible to prevent the bending deformation of the work W and the like while maintaining the longitudinal suspension posture of the work W. The conveyance guide can be performed along (R). In other words, the plate-like article W could be transported stably and smoothly. That is, high quality processing can be performed. The speed of conveyance in the liquid can also be increased.

By the way, the more the conveyance speed of the flat-shaped object (for example, a printed wiring board) in liquid Q is made higher, the production efficiency can be improved uniquely. However, the higher the conveyance speed of the plate-like article in the X direction in the liquid Q, the higher the liquid resistance applied to the tip Wa of the plate-like article W, so that the plate-like article is in a direction orthogonal to the X-direction. Bend, fold or oscillate. As a result, it becomes difficult to introduce the front end Wa of the flat plate member between the rear batch conveyance guides 81 (82) having a small distance Dg. This cannot exhibit the function of the conveyance guide 81 (82) which was cut off, and becomes meaningless. That is, when the tip Wa of the flat plate collides with the tip side of the conveyance guide 81 (82), smooth conveyance cannot be performed, so that surface treatment cannot be performed and deformation of the printed wiring board W itself or the processing tank interior is performed. Causes destruction. If the workpiece W is likely to bend, bend, or swing in a direction orthogonal to (or intersecting) the X direction on the upstream side in the X direction, the distance Dg between the conveyance guides 81 (82) is further reduced. I can't (narrow) it.

In other words, it becomes difficult to further suppress the fluctuation width of the printed wiring board W being conveyed, which further hinders further improvement in processing quality. In addition, the distance between the printed wiring board (surface) and the electrode in the processing tank becomes large, resulting in an increase in the size of the power supply means.

Further, when the flat plate (printed wiring board) is taken out from the conveyance guide 82 (81), it is only taken out into the wide liquid Q in the surface treatment tank 10, so that the above problem does not occur.

An object of the present invention is to provide a surface treatment apparatus which is reliably introduced between conveyance guides while adjusting the attitude of a flat plate in a liquid.

1 is a plan view for explaining a surface treatment apparatus according to an embodiment of the present invention;

2 is a side view for explaining a surface treatment apparatus according to the embodiment of the present invention;

3 is a front view for explaining a surface treatment apparatus according to the embodiment of the present invention;

4 is an enlarged view for explaining an introduction rectifying plate, a liquid jetting hole, and a projection guide of a surface treatment apparatus according to an embodiment of the present invention;

5 is a plan view for explaining a conveyance guide means in a conventional example;

It is a side view for demonstrating the conveyance guide means in a prior art example.

* Explanation of symbols for the main parts of the drawings

10: surface treatment tank 10A: immersion injection guide tank (surface treatment tank)

10B: Plating Treatment Tank (Surface Treatment Tank) 19: Liquid Classification Introduction Guide Means

31: introduction rectifying plate 33: liquid fractionator

41: liquid circulation system 42: suction pipe

43: circulation pump 45: supply pipe

51: projection guide 60: electrode

70: vertical suspension posture maintenance means 71: frame

72: movable member 73: sandwiching member

80: conveying guide means 81: guide post (conveying guide)

82: wire (carrying guide) R: transport path

X: conveying direction

W: Work (printed wiring board… flat shape)

Wa: Tip portion Du: Spacing on the upstream side (width)

Dd: downstream spacing (width) Dg: spacing of conveyance guides

S: space

The invention of claim 1 includes a pair of conveying guides spaced apart in the width direction in a surface treatment tank, and is capable of conveying the flattened article while maintaining the longitudinal suspension posture of the flattened article in the conveying direction along a conveying path surrounded by both conveying guides. In the surface treatment apparatus which surface-treats the conveying flat plate shape, liquid is forcibly sorted from the both sides of the said flat plate material conveying the inside of the said surface treatment tank to the upstream side of the said conveyance guide in the conveyance direction, It is a surface treatment apparatus provided with the liquid classification introduction guide means formed so that the front-end | tip of the said flat-shaped object can be guided in the conveyance path enclosed by the said two conveyance guides reliably, while avoiding the collision of the front-end | tip part of a flat-form thing.

In this invention, the flat plate is conveyed to the liquid flow guide guide means provided on the upstream side in the conveying direction of the conveying guide while conveying the liquid in the surface treatment tank in the conveying direction along the conveying path.

The liquid flow guide guide means separates the posture of the flat plate by forcibly classifying the liquid from both sides of the flat plate, and the space is spaced apart in the width direction of the processing tank while avoiding the tip of the flat plate from colliding with the transfer guide provided downstream. A tip end of the flat plate can be introduced into the conveying path surrounded by both conveying guides.

That is, it introduces and guides reliably between conveyance guides, arranging the attitude | position of the flat-like thing in a liquid. Therefore, the conveyance speed of the flat plate (printed wiring board) in the liquid can be speeded up, and production efficiency can be improved. Since the tip end of the flat plate can be avoided from colliding with the tip side of the conveying guide, smooth conveyance can be performed, and deformation and destruction of the flat plate itself and the processing vessel interior can be prevented. In addition, since the distance between the conveying guides can be made smaller, further improvement in the processing quality can be achieved, and in the case of electrolytic treatment, the distance between the poles can be made small, so that the power supply means can be miniaturized.

In addition, in the invention of claim 2, the liquid flow is directed toward the downstream side from the upstream side of the conveying direction when the liquid flow-introducing guide means forcibly classifies the liquid from both sides of the plate-like article. It is a surface treatment apparatus formed so that liquid classification is possible so that it may flow and contact.

In this invention, the liquid jet introduction guide means is a liquid on both sides of the plate-shaped product on the upstream side of the conveying direction of the conveying guide so that the flow of liquid is directed from the upstream side to the downstream side in the conveying direction and flows into each face of the flat-shaped product. Force classification Therefore, the same operation and effect as in the case of the invention of claim 1 can be exhibited, and since the flow of liquid itself exerts a force on the flat guide, the guide can be introduced more smoothly.

In addition, the invention of claim 3 further includes a pair of introduction rectifying plates provided on the liquid crystal introduction guide means such that the upstream side of the conveying direction is wider and the downstream side is narrower; A plurality of liquid sorting spheres capable of classifying liquid toward each side of the flat face facing in the tank, and the liquids sorted from each liquid sorting sphere are sucked from below between both inlet rectifying plates, and the liquid is drawn back into each liquid sorting sphere. It is a surface treatment apparatus provided with the liquid circulation system to supply.

In this invention, the plate-shaped object is guided between a pair of introduction rectifying plates constituting the liquid flow guide guide means while conveying the liquid in the surface treatment tank in the conveying direction. The pair of introduction rectifying plates are provided so that the upstream side in the conveying direction is wider and the downstream side is narrower.

In this way, the tip of the flat plate can be reliably and easily introduced between the wide upstream side rectifying plates, and the speed of liquid flow can be increased by moving from the upstream side to the downstream side in the conveying direction by the throttling action. And inducing (or pushing) the front end side of the plate-shaped object being conveyed toward the conveyance guide.

Furthermore, liquid is sorted toward each surface (both sides) of the plate-shaped object facing in the surface treatment tank from a plurality of liquid flow dividing holes provided in each introduction rectifying plate. This liquid is recovered and recycled in the liquid circulation system. That is, the liquid sorted from each liquid jet port toward each face of the flat plate is sucked from the lower side between the two rectifying plates after correcting the posture of the flat plate, and the lower end side of the flat plate being conveyed is placed downward. Causing a pull (or push) action towards the end. Then, the liquid is again supplied to each liquid fractionation port.

Therefore, the same effect as the case of each invention of Claims 2 and 3 can be exhibited, and the attitude | position of the plate-shaped object (surface) can be stably and reliably maintained by the cooperative action of the liquid flow and the form of both rectification plates. At the same time, the distance between the conveying guides can be further narrowed, so that the surface treatment quality can be further improved.

Further, the invention of claim 4 is an inclined posture in which each of the introduction rectifying plates has an elongated shape extending in the conveying direction, and the upstream position in the conveying direction is high and the downstream position is lowered. Is a surface treatment apparatus provided with a plurality of projection guides protruding in the direction toward each surface of the flat plate in the vertical direction.

In this invention, the plurality of projection guides are provided in each introduction rectifying plate in an elongated shape extending in the conveying direction, spaced in the vertical direction, and inclined posture in which the upstream position in the conveying direction is high and the downstream position is lowered. . That is, a space can be secured (established) between each projection guide (flat plate-like object) and each introduction rectifying plate.

In this way, for example, even if the lower end of the flat plate (surface) is bent in the width direction of the processing tank, the curved portion of the flat plate (lower end) can be accommodated in the space, so that it adheres to each introduction rectifying plate. It can prevent.

Moreover, since the space | interval of a conveyance guide can be further narrowed, surface treatment quality can be improved further. Further, even if the lower end portion is placed on any of the protrusion guides due to the bending of the flat plate (face) or the like, the lower end portion is engaged with the narrowing piece since the lower end portion is moved away from the protrusion guide (distinguish) as it goes downstream. There is no

Therefore, the same effect as the case of each invention of Claim 2 and Claim 3 can be exhibited, and smooth conveyance and surface treatment quality can be improved further.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail with reference to drawings.

As shown in Figs. 1 to 4, the surface treatment apparatus is provided with a liquid flow guide guide means 30 upstream in the conveyance (X) direction of the conveyance guide 80, and conveyance guide means 80 ( The liquid is forcibly sorted from both sides of the plate-shaped object (work W) being conveyed in the surface treatment tank 10 (10A) in the upstream side of the wire 82 ... the guide post 81 in the X direction. The tip portion Wa of the workpiece W is prevented from colliding with the conveying guide (wires 82 ... guide posts 81) while the tip portion Wa is moved to both conveying guides [wires 82 (guide posts 81). It is formed in the conveyance path R enclosed by] so that introduction guidance can be carried out reliably.

The basic structure and function of this surface treatment apparatus include a pair of conveyance guides (wires 82) spaced apart in the width direction in the surface treatment tanks 10 and 10B in the same manner as in the conventional case (FIGS. 5 and 6). The workpiece W can be conveyed and is being conveyed while maintaining the longitudinal suspension posture of the plate-shaped article (work W) in the X direction along the conveyance path R surrounded by both conveying guides 82. ) Can be surface treated. In the present surface treatment apparatus, a plating treatment apparatus capable of plating (surface treatment) on a printed wiring board (flat plate member… work W) is constituted.

In FIG. 1, the surface treatment tank 10 is comprised by 10A of immersion injection guide tanks of the upstream of X direction conveniently, and 10B of plating process (electrolytic treatment) tanks of the downstream. The whole 10A, 10B can be handled as a plating process (electrolytic process) tank.

In the plating treatment (electrolytic treatment) tank 10B, the same conveyance guide means 80 as in the case of the conventional example (FIGS. 5 and 6) is provided, and the downstream side of the X-direction (10. The right side in the figure) is provided with a liquid jet introduction guide means 30, and in this embodiment, a vertical suspension posture maintaining means 70 is provided on the upstream side (immersion input side ... left in the figure).

In the immersion introduction guide tank 10A, the flat plate-like product (printed wiring board ... work W) is lowered in the Y direction in FIG. 2 by lifting and lowering means (not shown), and immersed in the processing tank 10A.

The lowering speed of the workpiece W in the Y direction during the immersion is performed by the surface treatment tank 10 (10A, 10B) from the viewpoint of facilitating acceleration of work removal (loading and unloading) to the conveying means (or lifting and lowering means). Is set higher than the conveyance speed in the X direction.

In this way, a strong liquid resistance is received when the plate-shaped object W is immersed in the liquid Q on the immersion input side of the immersion injection guide tank 10A. Thus, the workpiece W is perpendicular to the X direction (or crosses). Deformation (curvature, bending, etc.) of the direction to be easy to generate | occur | produce. If left unattended, there is a risk of damage to the work W itself or the processing tank interior (for example, piping).

Thus, in this embodiment, a pair of frame bodies 71 which are spaced apart in the vertical direction in FIG. 1 and a plurality of frame bodies 71 spaced apart in the vertical direction in FIG. 2 and extended in the left and right directions (X directions) are spaced apart from each other. The vertical suspension posture holding means (70) consisting of the holding members (73) is provided. Each frame 71 is composed of two movable members 72 separated in the X direction in FIG.

That is, the two frame bodies 71 are clamped as shown in FIG. 1 by bringing both frame bodies 71 (both clamping members 73 on both sides) closer to the immersion injection guide tank 10A. When the workpiece W is immersed in the liquid for each step (), the deformation of the workpiece W in the processing tank in the width direction due to the liquid resistance can be prevented. That is, it can be immersed immediately, maintaining the vertical suspension posture of the workpiece | work W.

After the workpiece is immersed in the immersion injection guide tank 10A, the work W is opened by spaced apart from the frame 71 (each clamping member 73 on both sides) so that the vertical suspension posture is maintained. Does not impede smooth conveyance in the X direction by the conveying means (not shown).

Here, the liquid jet introduction guide means 30 is an immersion injection guide tank 10A on the upstream side in the X direction of the conveyance guide means 80 (that is, the conveyance guide 82 (guide post 81) constituting this). The liquid is forcibly sorted from both sides of the workpiece W conveying the inside to prevent the collapse of the longitudinal suspension posture of the workpiece W, while avoiding the tip Wa of colliding with the conveying guide 82. Since it is a means for reliably introducing and introducing the tip part Wa in the conveyance path R enclosed by both conveyance guides 82, a structure is not specifically limited if this effect (function) can be expressed.

As shown in FIG. 1, the liquid jet introduction guide means 30 in this embodiment has a bracket 15 so that the upstream side in the X direction has a wide width of the interval Du and the downstream side has a narrow width of the interval Dd. A pair of inlet rectifying plates 31 are installed on the guide side (right side) in the immersion inlet guide tank 10A (fixed installation), and each inlet rectifying plate 31 is provided with 10, a plurality of liquid flow dividing holes 33 for dividing liquid toward the respective surfaces of the workpiece W facing each other are provided. Such a structure makes it easy to manufacture and assemble, and it is easy to establish a smooth and proper flow of liquid.

As shown in FIGS. 1 and 3, the specific structure of each introduction rectifying plate 31 is perforated on the inward facing surface (introducing rectifying surface) while temporarily holding the circulating liquid supplied from the supply pipe 45 in the inner receiving space. Each liquid fractionator 33 has a box shape capable of dispensing liquid. As shown in Figs. 4A and 4B, the liquid jet port 33 (upstream side 33U and downstream side 33D) has a right side (2/3) of each introduction rectifying plate 31. As shown in Figs. It is provided in the area | region, and is not provided in the left (1/3) area | region. This is to achieve stable guidance by exposing to the fractionation liquid after the introduction of the tip Wa of the workpiece W.

Each liquid jet port 33 of the liquid jet introduction guide means 30 is directed from the upstream side in the X direction to the downstream side as shown in FIG. 4 and flows into the respective surfaces of the workpiece W to be in contact with each other. It is installed in the direction (shape) which can generate the liquid flow of. In other words, while pressing both sides of the workpiece W with the flow of liquid F, the workpiece W is exerted in the X direction, and the longitudinal suspension posture of the workpiece W is enhanced while enhancing the anti-curve action of the tip portion Wa. It is formed to be maintainable.

Here, the space | interval (width) Du on the upstream side between the introduction rectification plates 31 is 110 mm, for example, and the space | interval (width) Dd on the downstream side is 14 mm, for example. Since the downstream width Dd is smaller (narrower) than the distance Dg (for example, 16 mm) between the conveyance guides 82, the workpiece W that has passed through the liquid jet introduction guide means 30 (for example, For example, 1 mm of thickness can be reliably introduced to the conveyance guide 82 (guide post 81) of a rear arrangement.

In addition, as shown in FIGS. 4A and 4B, the inner surface of each introduction rectifying plate 31 faces the respective surfaces of the workpiece W in the immersion injection guide tank 10A (in the treatment tank). A plurality of projection guides 51 protruding in the width direction) are provided spaced apart in the vertical direction.

For example, when the lower end part of the workpiece | work W is partially curved, the space S which can accommodate the said curved part is formed in the width direction within a process tank, and between the upper and lower protrusion guide 51. FIG. In this way, the curved portions can be prevented from sticking to the respective introduction rectifying plates 31.

In addition, in this embodiment, not only the one or two protrusion guides 51 which are necessary in order to form the said sticking preventing space S are provided in the lower part of each introduction rectification board 31, but the said sticking prevention is A plurality of projection guides 51 are provided spaced apart from each other in the vertical direction irrespective of this. In this way, the adaptability to the size (vertical dimension) of the workpiece | work W can be expanded.

Moreover, as shown in FIG.4 (b), each projection guide 51 is provided in the inclined posture which is elongate shape extended in a X direction, high upstream position of a X direction, and low downstream position. . Even if a part (lower end) of the workpiece W is bent and placed on the projection guide 51, the workpiece W can be automatically canceled while being loaded in the X direction while preventing further engagement.

The liquid fractionated from each liquid fractionator 33 is recycled to the liquid circulation system 41. That is, the liquid classified in the F direction from each of the liquid dividing holes 33 is recovered to the recovery tank 19 below it between the two introduction rectifying plates 31 after contacting the workpiece W and at the same time the suction pipe 42 Inhaled). Then, the liquid is supplied to the liquid flow dividing holes 33 again through the circulation pump 43 and the supply pipe 45.

However, in the embodiment of such a structure, the vertical suspension attitude holding means 70 shown in FIG. 2 is actuated, and it lowers in the Y direction, maintaining the vertical suspension attitude of the workpiece | work W, and the said workpiece | work W is surface-treated tank ( Immerse in liquid Q in 10A). Then, the conveying guide means 80 (liquid classification guide guide means provided on the upstream side in the X direction of the conveying guide 82) while conveying the liquid Q in the X direction by the conveying means ( To 30).

The liquid flow guide guide means 30 forces the liquid Q in the F direction from both sides (left and right surfaces) of the workpiece W to arrange the posture of the flat plate shape, and the tip portion Wa on the downstream side in the X direction. Guides the leading end Wa of the workpiece W into the conveying path R surrounded by both conveying guides 82 while avoiding the collision with the conveying guide (wire 82 ... guide post 81). Can be.

That is, since it is possible to reliably introduce and guide the conveyance guides (wires 82) while arranging the posture of the flat article W in the liquid Q, the conveyance speed of the flat article W in the liquid can be increased. Can improve the production efficiency.

Moreover, since the front end Wa of the workpiece | work W can avoid the collision with the front end side (guide post 81) of a conveyance guide (wire 82), smooth conveyance can be carried out and the flat-shaped object itself and a process can be avoided. It can prevent deformation and destruction of tank interior. Further, since the distance Dg between the conveyance guides (wires 82 ... guide posts 81) can be made small, further improvement in processing quality can be achieved and the distance between the poles can be made small, so that the power supply means can be made smaller. You can also plan. Further, the liquid flow guide guide means 30 is a conveyance guide (wire 82 ... guide post 81) so that the flow of liquid flows from the upstream side in the X direction to the downstream side and flows and contacts each surface of the workpiece W. Since the liquid is forcibly separated from both sides of the workpiece W on the upstream side of X direction in the X direction, the workpiece W can be applied to the conveyance guide 80 by the flow of the liquid itself. Therefore, a smoother introduction guide can be provided.

Further, the liquid jet introduction guide means 30 guides the workpiece W between the pair of introduction rectifying plates 31 while conveying the liquid flow in the immersion injection guide tank 10A in the X direction. The pair of introduction rectifying plates 31 are provided so that the upstream side in the X-direction is wide (interval Du) and the downstream side is narrow (interval Dd). In this way, the velocity of the liquid flow can be increased as it moves from the upstream side to the downstream side in the X direction, and the front end Wa of the workpiece W being conveyed is pulled (or pushed) toward the conveyance guide 82. May cause action.

Moreover, the liquid Q is classified toward each surface of the workpiece | work W which faces in the surface treatment tank 10 from the some liquid fractionation port 33 provided in each introduction rectification plate 31. As shown in FIG. This liquid Q is recovered and recycled in the liquid circulation system 41.

That is, the liquid Q sorted from each liquid jet port 33 toward each face of the work W is moved from the lower side between the two introduction rectifying plates 31 after the posture of the flat work W is corrected. It sucks in by the suction pipe 42, and causes the effect | action which pulls in (or pushes) the lower end side of the workpiece | work W in conveyance down. Then, the liquid is again supplied to the respective liquid flow ports 33 through the supply pipe 45.

Therefore, the attitude | position of the plate-shaped object (surface) can be maintained stably and reliably by the cooperative action of the liquid Q flow and the form of both introduction rectification plates 31, and the space | interval of the conveyance guide 82 is further maintained. Since it can be narrowed, the surface treatment quality can be improved further.

Moreover, it is an inclined posture in which the elongate shape extended in the X direction to each introduction rectifying plate 31, and the upstream position of X direction is high, and a downstream position becomes low, and the workpiece | work W in the surface treatment tank 10 is carried out. The plurality of protrusion guides 51 protruding in the direction toward each surface of the center and spaced apart in the vertical direction may secure a space S between the protrusion guides (flat plate) and each of the introduction rectifying plates 31. .

In this way, for example, even if the lower end of the plate-like object (surface) is curved, for example, the curved portion of the plate-like object (lower end) can be accommodated in the space S, and sticking to each introduction rectifying plate 31. It can prevent.

Moreover, since the space | interval Dg of the conveyance guide 82 can be narrowed further, surface treatment quality can be improved further. Moreover, even if the lower end part may be mounted on some protrusion guide 51 by curvature etc., since the lower end part goes to the downstream side, it moves away from the said projection guide 51 (aways), and the said lower end part Does not engage the projection guide 51. Smooth conveyance and surface treatment can be further improved.

In addition, since the surface treatment apparatus constitutes a plating apparatus in which a printed wiring board that is a flat plate is plated, it is possible to reliably produce a high quality printed wiring board.

According to the invention of claim 1, conveying surrounded by both conveying guides while forcibly classifying the liquid from both sides of the plate-like object conveying the inside of the surface treatment tank upstream in the conveying direction of the conveying guide and avoiding the tip portion colliding with the conveying guide. Since the surface treatment apparatus is provided with a liquid fractionation introduction guide means formed so as to be able to be introduced into the furnace reliably, it is possible to speed up the conveyance speed of the flat product in the liquid, thereby improving the production efficiency.

Since the tip of the flat plate can be avoided from colliding with the tip of the conveying guide, smooth conveyance can be achieved and deformation and destruction of the flat plate itself and the processing vessel interior can be prevented.

In addition, since the distance between the conveying guides can be made smaller, further improvement in processing quality can be achieved, and in the case of electrolytic treatment, the distance between the poles can be made small, so that the power supply means can be miniaturized.

Further, according to the invention of claim 2, the liquid flows in such a manner that the liquid flows from the upstream side to the downstream side in the conveying direction and flows on each side of the plate-shaped object when the liquid jetting guide means forcibly classifies the liquid from both sides of the plate-shaped object. Since it is formed so that it can be classified, the same effect as the case of the invention of Claim 1 can be exhibited, and since a flat object can be exerted to the conveyance guide side by the liquid flow itself, a smoother introduction guide can be performed.

In addition, according to the invention of claim 3, the liquid fractionation introduction guide means is provided with a pair of introduction rectifying plates provided so that the upstream side in the conveying direction is wider and the downstream side is narrower, and each introduction rectifying plate is provided in the surface treatment tank. A plurality of liquid sorting ports capable of classifying liquid toward each face of the flat plate facing each other, and a liquid circulation system that sucks the sorting liquid from each liquid sorting plate from the lower side between the two rectifying plates and supplies the liquid back to each liquid sorting port. Since it has such a structure, it can have the same effect as the case of each invention of Claims 2 and 3, and the posture of a flat-form object (surface) is made by the cooperative action of the flow of a liquid and the shape of both introduction rectification plates. It is possible to maintain stable and reliable and at the same time narrow the gap between the conveying guides further improves the quality of the surface treatment Can.

Further, according to the invention of claim 4, each of the rectifying plates has an elongated shape extending in the conveying direction, the inclined posture of which the upstream position in the conveying direction is high and the downstream position is lowered, and the plate-shaped object in the surface treatment tank. Since a plurality of projection guides protruding in the direction toward each surface are provided spaced apart in the vertical direction, even if the lower end of the flat plate (surface) is curved, for example, in the width direction in the treatment tank, the curved portion of the flat plate (lower end) The part can be accommodated in the space and can be prevented from sticking to each introduction rectifying plate. Moreover, since the space | interval of a conveyance guide can be further narrowed, surface treatment quality can be improved further. In addition, even if the lower end portion may be placed on any of the projection guides due to the curvature of the flat plate (surface) or the like, the lower end portion does not engage with the clamping piece since the lower end portion moves away from the projection guide (distinguish) as it goes downstream. . Therefore, each invention of Claims 2 and 3 can have the same effect as the case, and can further improve smooth conveyance and surface treatment quality.

Claims (4)

A pair of conveyance guides spaced apart in the width direction in the surface treatment tank, and the said plate-shaped object can be conveyed while maintaining the longitudinal suspension posture of a flat-shaped object in the conveyance direction along the conveyance path enclosed by both conveying guides, and is conveying In the surface treatment apparatus which surface-treats a flat-shaped object, Has a liquid flow guide guide means provided upstream in the conveying direction of the conveying guide, The liquid flow dividing means includes a pair of introduction rectifying plates disposed so that the upstream side in the conveying direction is wider and the downstream side is narrower; It is provided in each inlet rectifying plate, and is provided with the some liquid fractionation port which can classify liquid toward each surface of the said flat plate shape faced in the said surface treatment tank, The liquid is forcibly sorted into the plurality of liquid outlets provided in the pair of introduction rectifying plates from both sides of the plate-like article conveying the inside of the surface treatment tank, thereby avoiding the tip portion of the plate-shaped article from colliding with the conveyance guide. The front end portion of the plate-like article can be reliably introduced and guided in a conveying path surrounded by the two conveying guides. The method of claim 1, And the plurality of liquid fractionation ports are formed so that the liquid flows can be separated so that the liquid flows from the upstream side to the downstream side in the conveying direction and flows into and contacts each surface of the flat plate. The method of claim 1, The liquid jet introduction guide means further comprises a liquid circulation system which sucks the liquid ejected from each liquid jet from the lower side between the two rectifying plates and supplies the liquid to each liquid jet again. Device. The method according to any one of claims 1 to 3, Each introduction rectifying plate has an elongated shape extending in the conveying direction, an inclined posture having a high upstream position in the conveying direction and a lower downstream position, and each face of the plate-like article in the surface treatment tank. Surface treatment apparatus characterized in that the plurality of projection guides projecting in the direction toward the spaced apart in the vertical direction.