KR100372322B1 - 검사장치 - Google Patents

검사장치 Download PDF

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Publication number
KR100372322B1
KR100372322B1 KR1019940001664A KR19940001664A KR100372322B1 KR 100372322 B1 KR100372322 B1 KR 100372322B1 KR 1019940001664 A KR1019940001664 A KR 1019940001664A KR 19940001664 A KR19940001664 A KR 19940001664A KR 100372322 B1 KR100372322 B1 KR 100372322B1
Authority
KR
South Korea
Prior art keywords
light
lens
sample surface
aperture
inspection apparatus
Prior art date
Application number
KR1019940001664A
Other languages
English (en)
Korean (ko)
Other versions
KR950010004A (ko
Inventor
하가가스미
Original Assignee
가부시기가이샤뉴크리에이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤뉴크리에이션 filed Critical 가부시기가이샤뉴크리에이션
Publication of KR950010004A publication Critical patent/KR950010004A/ko
Application granted granted Critical
Publication of KR100372322B1 publication Critical patent/KR100372322B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
KR1019940001664A 1993-09-17 1994-01-29 검사장치 KR100372322B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25495693A JP3325095B2 (ja) 1993-09-17 1993-09-17 検査装置
JP5-254956 1993-09-17

Publications (2)

Publication Number Publication Date
KR950010004A KR950010004A (ko) 1995-04-26
KR100372322B1 true KR100372322B1 (ko) 2003-05-16

Family

ID=17272202

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940001664A KR100372322B1 (ko) 1993-09-17 1994-01-29 검사장치

Country Status (2)

Country Link
JP (1) JP3325095B2 (ja)
KR (1) KR100372322B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100790745B1 (ko) * 2003-09-23 2007-12-31 동부일렉트로닉스 주식회사 광학장치의 램프 유닛

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6310689B1 (en) 1996-08-23 2001-10-30 Asahi Kogaku Kogyo Kabushiki Kaisha Pattern reading apparatus
KR20010101041A (ko) * 1998-11-30 2001-11-14 기시모토 마사도시 측정장치
JP4911675B2 (ja) * 2006-02-20 2012-04-04 株式会社日立国際電気 マクロ観察機能を備えた線幅測定装置
JP6241897B2 (ja) * 2016-01-29 2017-12-06 株式会社アヤハエンジニアリング フィルム検査装置及びフィルム検査方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4854708A (en) * 1987-01-13 1989-08-08 Rotlex Optics Ltd. Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4854708A (en) * 1987-01-13 1989-08-08 Rotlex Optics Ltd. Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100790745B1 (ko) * 2003-09-23 2007-12-31 동부일렉트로닉스 주식회사 광학장치의 램프 유닛

Also Published As

Publication number Publication date
JPH0783845A (ja) 1995-03-31
KR950010004A (ko) 1995-04-26
JP3325095B2 (ja) 2002-09-17

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