KR100349618B1 - 정전 용량식 센서 - Google Patents

정전 용량식 센서 Download PDF

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Publication number
KR100349618B1
KR100349618B1 KR1020007001356A KR20007001356A KR100349618B1 KR 100349618 B1 KR100349618 B1 KR 100349618B1 KR 1020007001356 A KR1020007001356 A KR 1020007001356A KR 20007001356 A KR20007001356 A KR 20007001356A KR 100349618 B1 KR100349618 B1 KR 100349618B1
Authority
KR
South Korea
Prior art keywords
electrode
capacitive sensor
electrodes
edge
positioning error
Prior art date
Application number
KR1020007001356A
Other languages
English (en)
Korean (ko)
Other versions
KR20010022756A (ko
Inventor
이시쿠라요시유키
Original Assignee
야마타케 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야마타케 코포레이션 filed Critical 야마타케 코포레이션
Publication of KR20010022756A publication Critical patent/KR20010022756A/ko
Application granted granted Critical
Publication of KR100349618B1 publication Critical patent/KR100349618B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
KR1020007001356A 1998-06-09 1999-06-08 정전 용량식 센서 KR100349618B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP?10-160420 1998-06-09
JP16042098A JP3339563B2 (ja) 1998-06-09 1998-06-09 静電容量式センサ
PCT/JP1999/003038 WO1999064833A1 (fr) 1998-06-09 1999-06-08 Capteur de type capacitif

Publications (2)

Publication Number Publication Date
KR20010022756A KR20010022756A (ko) 2001-03-26
KR100349618B1 true KR100349618B1 (ko) 2002-08-24

Family

ID=15714550

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007001356A KR100349618B1 (ko) 1998-06-09 1999-06-08 정전 용량식 센서

Country Status (7)

Country Link
US (1) US6411107B1 (de)
EP (1) EP1004865B1 (de)
JP (1) JP3339563B2 (de)
KR (1) KR100349618B1 (de)
CN (1) CN1138132C (de)
DE (1) DE69941245D1 (de)
WO (1) WO1999064833A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001356062A (ja) * 2000-06-13 2001-12-26 Yamatake Corp 容量式圧力センサ
US7880481B2 (en) * 2007-12-19 2011-02-01 Infineon Technologies Ag Capacitive sensor and measurement system
JP5400560B2 (ja) * 2009-10-16 2014-01-29 アズビル株式会社 静電容量型センサ
DE102014210122A1 (de) * 2014-05-27 2015-12-03 Robert Bosch Gmbh Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids, Verfahren zum Betreiben einer Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids sowie Verfahren zum Herstellen einer Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids
CN105606269B (zh) * 2015-09-11 2018-04-03 东南大学 一种具有高线性度的电容式压力传感器及其制备方法
CN106017718B (zh) * 2016-07-28 2018-04-06 国网山西省电力公司忻州供电公司 柔性温度传感器
JP2018115873A (ja) * 2017-01-16 2018-07-26 凸版印刷株式会社 センサシート
CN107588870B (zh) * 2017-09-01 2024-06-07 襄阳臻芯传感科技有限公司 一种抗介质敏感的陶瓷电容压力传感器及其制造方法
JP6981885B2 (ja) * 2018-01-23 2021-12-17 アズビル株式会社 静電容量型圧力センサの異常検知方法および装置
CN112195763B (zh) * 2020-09-29 2021-11-30 湖南中大检测技术集团有限公司 一种桥梁支座及一种桥梁支座的智能监测方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2978638A (en) * 1959-01-26 1961-04-04 Sperry Rand Corp Coercion-free capacitance bridge pick-off
JPS496968A (de) * 1972-04-06 1974-01-22
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
US4178621A (en) * 1978-01-23 1979-12-11 Motorola, Inc. Electromechanical pressure transducer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4794321A (en) * 1987-11-27 1988-12-27 Dotsko Enterprises, Inc. Variable capacity proximity sensor
DE4031791A1 (de) * 1990-10-08 1992-04-09 Leybold Ag Sensor fuer ein kapazitaetsmanometer
JP2815279B2 (ja) * 1993-03-30 1998-10-27 本田技研工業株式会社 圧力センサー
JP2819995B2 (ja) * 1993-07-08 1998-11-05 松下電器産業株式会社 静電容量型重量センサ素子およびその製造法
US5424650A (en) * 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
JP3135779B2 (ja) * 1994-03-18 2001-02-19 キヤノン株式会社 情報処理装置
JP3233791B2 (ja) 1994-08-25 2001-11-26 株式会社山武 差動容量反転積分器及びこれを用いた静電容量変化量検出装置

Also Published As

Publication number Publication date
DE69941245D1 (de) 2009-09-24
EP1004865A4 (de) 2008-05-07
CN1273633A (zh) 2000-11-15
CN1138132C (zh) 2004-02-11
JP3339563B2 (ja) 2002-10-28
KR20010022756A (ko) 2001-03-26
EP1004865A1 (de) 2000-05-31
EP1004865B1 (de) 2009-08-12
JPH11351978A (ja) 1999-12-24
US6411107B1 (en) 2002-06-25
WO1999064833A1 (fr) 1999-12-16

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