KR100337259B1 - Method and apparatus for removing photoresist from glass substrate of liquid crystal display - Google Patents

Method and apparatus for removing photoresist from glass substrate of liquid crystal display Download PDF

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Publication number
KR100337259B1
KR100337259B1 KR1020000070197A KR20000070197A KR100337259B1 KR 100337259 B1 KR100337259 B1 KR 100337259B1 KR 1020000070197 A KR1020000070197 A KR 1020000070197A KR 20000070197 A KR20000070197 A KR 20000070197A KR 100337259 B1 KR100337259 B1 KR 100337259B1
Authority
KR
South Korea
Prior art keywords
cleaning solution
glass substrate
liquid crystal
crystal display
removing photoresist
Prior art date
Application number
KR1020000070197A
Other languages
Korean (ko)
Inventor
Seung Min Noh
Original Assignee
Systems Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Systems Technology Inc filed Critical Systems Technology Inc
Priority to KR1020000070197A priority Critical patent/KR100337259B1/en
Application granted granted Critical
Publication of KR100337259B1 publication Critical patent/KR100337259B1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
    • G03F7/343—Lamination or delamination methods or apparatus for photolitographic photosensitive material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/918—Delaminating processes adapted for specified product, e.g. delaminating medical specimen slide
    • Y10S156/919—Delaminating in preparation for post processing recycling step
    • Y10S156/922—Specified electronic component delaminating in preparation for recycling
    • Y10S156/924—Delaminating display screen, e.g. cathode-ray, LCD screen

Abstract

PURPOSE: A method and an apparatus for removing photoresist from a glass substrate of a liquid crystal display are provided to dip a poor glass substrate in a swelling bath containing a cleaning solution used for removing photoresist from the poor glass substrate. CONSTITUTION: A cassette(13) in which a plurality of poor glass substrates are loaded is dipped in a swelling bath(20) filled with a cleaning solution. The cleaning solution filled in the swelling bath is continuously circulated from an external cleaning solution tank(21) in order to improve cleaning effect of photoresist. The cleaning solution is vibrated according to the ultrasonic vibration device. The cleaning solution is completely discharged from the swelling bath into the cleaning solution tank. The surface of photoresist coated on the poor glass substrates is air-dried.
KR1020000070197A 2000-11-24 2000-11-24 Method and apparatus for removing photoresist from glass substrate of liquid crystal display KR100337259B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020000070197A KR100337259B1 (en) 2000-11-24 2000-11-24 Method and apparatus for removing photoresist from glass substrate of liquid crystal display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020000070197A KR100337259B1 (en) 2000-11-24 2000-11-24 Method and apparatus for removing photoresist from glass substrate of liquid crystal display

Publications (1)

Publication Number Publication Date
KR100337259B1 true KR100337259B1 (en) 2002-05-17

Family

ID=37479985

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000070197A KR100337259B1 (en) 2000-11-24 2000-11-24 Method and apparatus for removing photoresist from glass substrate of liquid crystal display

Country Status (1)

Country Link
KR (1) KR100337259B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101085446B (en) * 2006-06-09 2010-11-10 K.C.科技股份有限公司 Precoated roller cleaning unit and cleaning method, substrate application device
KR101010486B1 (en) * 2003-12-30 2011-01-21 엘지디스플레이 주식회사 An alignment strip device and the stripping method
KR20170059064A (en) * 2015-11-19 2017-05-30 삼성디스플레이 주식회사 Window reworking system and method of reworking window

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101010486B1 (en) * 2003-12-30 2011-01-21 엘지디스플레이 주식회사 An alignment strip device and the stripping method
CN101085446B (en) * 2006-06-09 2010-11-10 K.C.科技股份有限公司 Precoated roller cleaning unit and cleaning method, substrate application device
TWI384526B (en) * 2006-06-09 2013-02-01 K C Tech Co Ltd Priming roller cleaning unit
KR20170059064A (en) * 2015-11-19 2017-05-30 삼성디스플레이 주식회사 Window reworking system and method of reworking window
KR102418606B1 (en) * 2015-11-19 2022-07-08 삼성디스플레이 주식회사 Window reworking system and method of reworking window

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