JP3018964B2 - Cleaning method and cleaning device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for cleaning articles, and more particularly to a method and apparatus for draining water without leaving water droplets on the surface of the cleaned article. INDUSTRIAL APPLICABILITY The present invention is particularly suitable for, for example, cleaning and draining the surface of a plate-like article, and for example, a glass substrate cleaning apparatus and method used in display devices of various principles such as a fluorescent display tube, a liquid crystal display device, and a plasma display device. Is effective as

[0002]

2. Description of the Related Art In various display devices such as a fluorescent display tube, a liquid crystal display device, and a plasma display device, a wiring pattern is generally formed on a glass substrate. In this case, in order to form a wiring pattern on a glass substrate, the glass substrate is cut in advance into a size corresponding to one or a predetermined number of display areas to be formed, and the glass substrate is washed. To remove dust and dirt. Thereafter, a thin film of Al or ITO serving as an electrode material is deposited on the surface of the glass substrate by a sputtering method or the like, and a desired wiring pattern is formed by a photolithography method.

In general, the thickness of a wiring pattern is 1 μm to several μm.
m, the film is formed while dust or the like adheres to the glass substrate. If the film is formed, the portion becomes a pinhole or a sufficient adhesion strength to the glass substrate is not obtained. It causes peeling. Therefore, the cleaning step before the sputtering is an important step.

FIG. 5 shows a conventional cleaning apparatus. The cleaning device includes a contact cleaning unit 100, an ultrasonic cleaning unit 101, and a draining unit 102. In the contact cleaning unit 100, the detergent is sprayed on the front and back surfaces of the glass substrate 103 by the detergent spray device 105 while being transported by the plurality of pairs of transfer rollers 104 contacting only the both side edges thereof. The front and back surfaces are cleaned. Next, the front and back surfaces of the glass substrate 103 are rinsed by the pure water injection device 107 and the roller brush 108, and water on the front and back surfaces of the glass substrate 103 is sucked by the water absorbing roller 109. The glass substrates 103 are stored in the cassette 110 by a plurality of predetermined sheets, and the cassette 110 and the ultrasonic cleaning unit 10 in the next step are stored together.
Sent to 1.

[0005] The ultrasonic cleaning unit 101 has eight independent storage tanks from one to eight. Each of the first to eighth tanks is provided with an ultrasonic oscillator for generating an ultrasonic wave in the liquid stored in each tank. Pure water containing a detergent is stored in the first and second tanks, and is heated and maintained at about 50 ° C. Pure water for rinsing the glass substrate is stored in tanks 3 and 4, and about 5
Heated and maintained at 0 ° C. Pure water that is not heated is stored in 5 to 8 tanks. The glass substrate 103 stored in the cassette 110 and transported to the ultrasonic cleaning unit 101 is sequentially immersed in the liquid in each of the tanks and transported by a transport device (not shown). The glass substrate 10 is provided by providing a plurality of tanks.
By sequentially immersing 3 in clean pure water for cleaning, a high cleaning effect can be obtained.

[0006] The drainer 102 has three independent storage tanks of nine, ten, and eleven tanks. The 9 and 10 tanks contain Freon liquid. The 11 tanks contain Freon vapor. CFC has a specific gravity of 1.55, which is larger than that of water, and has the property of not being dissolved in water. Therefore, if the glass substrate 103 with the water droplets is exposed to a chlorofluorocarbon solution or a chlorofluorocarbon atmosphere, the water attached to the glass substrate 103 can be separated by floating.

[0007]

As described above, in the conventional cleaning apparatus, chlorofluorocarbon is used in the draining process. However, chlorofluorocarbon causes destruction of the ozone layer. Therefore, regulations are tightened from the viewpoint of protection of the global environment. In the near future, its use will be banned entirely. Therefore, the draining device in the conventional cleaning device cannot be used.

[0008] An object of the present invention is to provide a cleaning apparatus and a cleaning method capable of draining without using Freon.

[0009]

According to a first aspect of the present invention, there is provided a cleaning method comprising: a contact cleaning step of contacting a cleaning member with a surface of a body to be cleaned to clean the surface of the body to be cleaned; An ultrasonic cleaning step of immersing the passed object to be cleaned in a cleaning liquid vibrating with an ultrasonic wave to clean the object, and the cleaning object passing through the ultrasonic cleaning step is supplied with pure water and overflows with pure water.
After being immersed in pure water at 50 ° C. or higher and stored at 40 ° C. or higher in a immersion tank, the temperature of the pure water is 10 mm / sec or less in a direction substantially perpendicular to the surface of the pure water. a draining step of pulling relatively the cleaning object at a speed, a
In the cleaning method having, in the draining step,
Before lifting the object to be cleaned from the pure water,
Supply of pure water and heating of the pure water in the immersion tank are stopped for a predetermined time.
Stop to prevent ripples on the surface of pure water in the immersion tank
Things .

[0010]

[0011]

According to a second aspect of the present invention, in the cleaning method of the first aspect, between the ultrasonic cleaning step and the draining step, the object to be cleaned that has passed through the ultrasonic cleaning step is removed. The method is characterized by having a preheating step of immersing in pure water having a higher temperature than the cleaning body and heating.

According to a third aspect of the present invention, in the cleaning method of the first aspect, the pure water into which the object to be cleaned is immersed in the draining step is pure water that has passed through a filter having a filtration accuracy of 1 μm or less. It is characterized by being.

According to a fourth aspect of the present invention, in the cleaning method of the first aspect, the pure water contains ozone.

[0015]

According to a fifth aspect of the present invention, there is provided a cleaning apparatus, comprising: a contact cleaning section provided with a cleaning member for cleaning a body to be cleaned by contacting the body to be transported; and a cleaning section cleaned by the contact cleaning section. A cleaning tank for storing a cleaning liquid in which the body is immersed, an ultrasonic cleaning unit including an ultrasonic generation unit for generating ultrasonic waves in the cleaning liquid in the cleaning tank, and the ultrasonic cleaning unit. An immersion tank for storing pure water into which the object to be cleaned is immersed, and the object to be cleaned relatively moved at a desired speed between the pure water in the immersion tank and the upper side of the pure water in the immersion tank. A drain unit provided with a moving unit for performing the cleaning; and a transport unit for transporting the object to be cleaned between the contact cleaning unit, the ultrasonic cleaning unit, and the drain unit.

[0017] The cleaning device according to the sixth aspect is characterized by the following.
5. The cleaning apparatus according to 5 , wherein a preheating tank for storing pure water having a higher temperature than that of the cleaned object to be washed and immersing the cleaned object to be cleaned is provided in the pure water of the preheating tank. And a moving means for moving at a desired speed between the pure water in the preheating tank and the pure water in the preheating tank. And a preheating unit for raising at a speed higher than a predetermined speed is provided between the ultrasonic cleaning unit and the draining unit.

[0018] The cleaning device according to the ninth aspect provides the cleaning device according to the first aspect.
5. The cleaning apparatus according to claim 5 , further comprising a cassette in which the body to be cleaned cleaned by the contact cleaning unit is stored, wherein the transport unit transports the cassette storing the body to be cleaned.

[0019] The cleaning apparatus according to the eighth aspect is characterized in that:
5. The cleaning apparatus according to 5 , wherein a filter having a filtration accuracy of 3 to 0.5 [mu] m is provided in a pipe for supplying pure water to the immersion tank of the drain section.

[0020] The cleaning device according to the ninth aspect provides a cleaning device according to the first aspect.
5. In the cleaning device according to 5, the immersion tank of the draining section is:
It is characterized by having an auxiliary tank for receiving pure water overflowing from the immersion tank.

According to a tenth aspect of the present invention, in the cleaning apparatus of the ninth aspect , a circulation pump and a filter are provided in a pipe for circulating the pure water received by the auxiliary tank to the immersion tank. It is characterized by.

A cleaning apparatus according to an eleventh aspect is characterized in that in the cleaning apparatus according to the eighth or tenth aspect , a plurality of the filters are provided.

[0023]

FIG. 1 shows a first embodiment of the present invention.
This will be described with reference to FIG. The cleaning device of the present example is a device for cleaning the surface of a glass substrate as a body to be cleaned. This glass substrate is, for example, a glass substrate that constitutes a part of an envelope of the fluorescent display device. The cleaning apparatus of this example controls a contact cleaning unit, an ultrasonic cleaning unit, a draining unit 1, a transport unit that transports a cassette 2 containing a glass substrate between these units, and controls the units and the transport unit. It has a control unit. The mechanical configuration of the contact cleaning unit and the ultrasonic cleaning unit is substantially the same as the conventional technology described with reference to FIG. 5, and the present apparatus is mainly characterized by the configuration and operation of the draining unit 1.

The contact cleaning section includes a cleaning member such as a rotary brush for cleaning the body to be cleaned by contacting the body to be transferred. The ultrasonic cleaning unit includes a plurality of cleaning tanks for storing a cleaning liquid or pure water in which the object to be cleaned cleaned in the contact cleaning unit is immersed, and generates ultrasonic waves in the cleaning liquid or pure water in each cleaning tank. And an ultrasonic wave generating means. Further, in the present embodiment, the objects to be cleaned cleaned by the contact cleaning unit are stored in the cassette 2 for every predetermined number of sheets, and the cassette 2 is transported by the transport unit to the contact cleaning unit, the ultrasonic cleaning unit, and the draining unit 1. Is transported between

Although the contact cleaning unit and the ultrasonic cleaning unit are substantially the same as the conventional one, pure water used in at least a part of the cleaning apparatus of this embodiment including these parts is used in the conventional cleaning apparatus. Is different from pure water. That is, the pure water used in the conventional cleaning apparatus was pure water produced using an ion exchange resin, but the pure water used in at least a part of the present apparatus is pure water produced in a pure water producing apparatus. Pure water in which water is stored in a storage tank and ozone is generated therein by an ozone generator to contain 0.1 to 0.5 ppm of ozone. Ozone has a function of decomposing bacteria and minute organic substances in pure water, and suppresses the growth of bacteria in pure water. Ozone is O
_Since it decomposes into ₃ → O ₂ + (O) to generate nascent oxygen, it has an oxidizing effect, and the same cleaning effect as acid cleaning can be expected. Since the ozone-containing pure water decomposes ozone when heated, it can be used in a contact cleaning unit that does not heat pure water. Further, in the ultrasonic cleaning section, it can be used in 5 to 8 tanks that do not heat pure water.

When ordinary pure water is used instead of the above-described pure water containing ozone, the pure water in 5 to 8 tanks may be heated in the ultrasonic cleaning section. In this case, since the glass substrate is heated immediately before entering the water draining section 1 described later, a preheating effect can be advantageously obtained as a pre-process of the water draining step of heating the glass substrate.

Next, the drainer 1 which is a main feature of the configuration and operation of the present embodiment will be described. The drainer 1 shown in FIG. 1 is installed next to the above-described ultrasonic cleaning unit.
The draining section 1 is provided with an immersion tank 3 for storing pure water in which the object to be cleaned cleaned by the ultrasonic cleaning section is immersed. The immersion tank 3 is a stainless steel container having an open upper surface. Inside the immersion tank 3, a steam pipe 4 as a heating means is installed. Steam pipe 4 in immersion tank 3
Are guided to the outside through both ends of the immersion tank 3. Steam is supplied into the steam pipe 4 from an external steam supply means (not shown), and the liquid (pure water) contained in the immersion tank 3 is heated to a desired temperature and can be maintained at the same temperature. . The immersion tank 3 is provided with an auxiliary tank 5 for receiving pure water overflowing from the immersion tank 3.

The draining unit 1 is provided with a moving means 6 near the immersion tank 3. The moving means 6 has a holding device 6a for holding the cassette 2 containing the glass substrates, and an elevating device 6b for moving the holding device 6a in the vertical direction. According to the present moving means 6, the cassette 2 is raised and lowered at a desired speed between the pure water in the immersion tank 3 and the upper side of the pure water in the immersion tank 3, and the glass substrate stored in the cassette 2 is converted into pure water. The glass substrate immersed or immersed in pure water can be pulled out of pure water. The direction in which the cassette 2 is moved up and down by the moving means 6 depends on the dipping tank 3.
Is a direction (vertical direction) substantially perpendicular to the surface (horizontal plane) of the pure water.

The auxiliary tank 5 and the immersion tank 3 communicate with each other through a pipe 7. A circulation pump 8 and filters 9 and 10 are provided in the middle of the pipe 7. The circulation pump 8 is
Is circulated through the immersion tank 3. Filters 9 and 10 are
In order to remove undesired dust when forming a wiring conductor on the surface of a glass substrate, the range of filtration accuracy is 3 to 0.5 μm.
m, and in this example, 1-3 μm
Two filters are used, a first filter 9 of m and a second filter 10 of 1 to 0.5 μm. Thereby, while circulating and using between the auxiliary tank 5 and the immersion tank 3, particles that harm the cleaning are removed from the pure water.

The transport means of the apparatus is a cassette 2 containing one or more glass substrates that have been contact-cleaned.
Which has a function of transporting the water between the contact cleaning unit, the ultrasonic cleaning unit, and the draining unit 1. The configuration may be any as long as it achieves the above-mentioned functions. For example, a holding device for stably holding the cassette 2 and a moving device for moving the holding device up and down arbitrarily and moving the cassette 2 along each part are provided. I just need.

The control means of the apparatus can be constituted by a microcomputer or the like, for example. The control means controls the components and the transport according to preset procedures, data necessary for cleaning input from various sensors (not shown) installed in the components, and operation data input by an operator as necessary. A desired number of glass substrates can be cleaned with desired specifications in the shortest time by optimally controlling means and the like.

The operation of the above configuration will be described. The glass substrate is sprayed with water or detergent while being transferred, and the front and back surfaces are cleaned by a cleaning member such as a rotating brush. The glass substrate cleaned in the contact cleaning section is stored in the cassette 2. When storing the substrate in the cassette 2, a device that can handle the substrate only in contact with the side surface (the surface parallel to the plate thickness direction) or the side edge of the substrate without touching the front and back surfaces of the substrate is used. The cassette 2 containing a predetermined number of glass substrates is transported to the ultrasonic cleaning unit by the transport unit.

The cassette 2 containing the glass substrates is sequentially immersed in a plurality of cleaning tanks of the ultrasonic cleaning unit to be cleaned. The glass substrate in the cassette 2 cleaned in the ultrasonic cleaning unit is transferred to the draining unit 1 by the transfer unit.

The transport means transfers the cassette 2 to the moving means 6 of the drainer 1. The moving means 6 holds the cassette 2, lowers the cassette 2, and immerses the cassette 2 in pure water in the immersion tank 3.
The descending speed at this time is a high speed of, for example, about 50 mm / sec or more.

At this time, the temperature of the pure water in the immersion tank 3 of the drainer 1 is set at about 60 to 65 ° C. Further, the circulation pump 8 is driven, and the pure water in the auxiliary tank 5 is filtered by the filters 9 and 1.
0 and circulates in the immersion tank 3.

After immersion for 5 seconds, the driving of the circulation pump 8 and the steam supply means is stopped. The circulation of the pure water by the circulation pump 8 is stopped, and the heating of the pure water by the steam pipe 4 is also stopped. The pure water in the immersion tank 3 does not fluctuate, and the ripples on the surface gradually disappear. Ten seconds after stopping the circulation pump 8, when the ripples disappear from the surface of the pure water in the immersion tank 3, the moving means 6 starts to raise the cassette 2.
The ascending speed is 10 mm / sec. E.g., 5 to 6 mm / sec., Which is much faster than the descending speed.

The glass substrate housed in the cassette 2 is lifted upward at almost the vertical direction at the above-mentioned slow speed against the horizontal surface of pure water of about 63 ° C. which is almost stationary in the immersion tank 3. To go. Pure water adhering in a layer on the surface of the glass substrate can maintain a state continuous with the pure water in the immersion tank 3. The pure water attached to the glass substrate is drawn into the immersion tank 3 by the surface tension of the pure water in the immersion tank 3 and its own gravity. Pure water adhering to the surface of the glass substrate returns to the immersion tank 3 without remaining in the form of water droplets. Further, the auxiliary tanks 13 and 14 may be only one tank.

Since the glass substrate is preheated to at least 40 ° C. by about 63 ° C. pure water in the immersion tank 3,
There is no attachment of steam from the pure water in the immersion tank 3. Further, even if pure water remains as fine water droplets on the glass substrate during lifting, the water droplets evaporate due to heat of the glass substrate and do not remain on the glass substrate.

The glass substrate coming out of the drainer 1 is transported to the next step by a conveyor-type transport means together with the cassette 2. The path for transporting the cassette 2 is a closed space partitioned from the outside, in which purified air is always supplied to keep the inside at a positive pressure with respect to the outside. That is, the cassette 2 is transported in the dust-free space and is transferred to the next process.

According to this embodiment, the glass substrate is immersed in pure water heated to a predetermined temperature, and the glass substrate is slowly lifted up so that the surface of the pure water is not shaken as much as possible. The purified water is prevented from remaining on the glass substrate. When the pure water in the immersion tank 3 fluctuates, the pure water film on the surface of the glass substrate and the pure water in the immersion tank 3 are interrupted, so that the above-described effects cannot be obtained. Therefore, the glass substrate needs to be pulled up at a slow speed as described above. In addition, it is necessary to stop the circulation pump 8 and the steam heating means so that the pure water in the immersion tank 3 does not have a wave before a predetermined time before the lifting. Further, it is preferable that the temperature of the pure water in the immersion tank 3 is such that it does not boil and that the glass substrate can be preheated to an appropriate temperature range.

Immediately after the cassette 2 is unloaded, the drainer 1
The circulation pump 8 and the steam supply means are driven again to set the pure water in the immersion tank 3 to a predetermined temperature. The heating by the steam pipe 4 has a sharp drop in temperature at the time of operation stop and a sharp rise in temperature at the start of operation, and has high thermal efficiency and is convenient for temperature control.

In the case where fibrous filters which swell and deteriorate in accuracy when immersed in high-temperature pure water for a long time are used as the filters 9 and 10, it is preferable to limit the operating temperature. . For example, it is used at a temperature of 75 ° C to 80 ° C, more preferably 70 ° C or lower.

A second embodiment of the present invention will be described with reference to FIG. The application object and the purpose of the cleaning apparatus of this example are the same as those of the apparatus of the first embodiment. The cleaning device of the present example includes a contact cleaning unit, an ultrasonic cleaning unit, a preheating unit 11, a draining unit 1, and a conveying unit that conveys a cassette 2 containing a glass substrate between these units; It has a control unit for controlling the transport means. The mechanical configuration of the contact cleaning unit and the ultrasonic cleaning unit is substantially the same as the conventional technology described with reference to FIG. This device is mainly characterized by the configuration and operation of the preheating unit 11 and the draining unit 1.

Next, a description will be given of the preheating unit 11 and the draining unit 1 which are main features of the configuration and operation of the present embodiment. The preheating unit 11 shown in FIG. 2 is installed between the above-described ultrasonic cleaning unit and the draining unit 1. Since the configuration of the drainer 1 of this example is substantially the same as that of the first embodiment described with reference to FIG. 1, the same components as those of FIG. Description is omitted.

The preheating section 11 of this embodiment is provided with a preheating tank 12 for storing pure water into which the object to be cleaned, which has been cleaned by the ultrasonic cleaning section, is immersed. The preheating tank 12 is a stainless steel container having an open upper surface. Inside the preheating tank 12, a steam pipe 4a as a heating means is installed. Both ends of the steam pipe 4a in the preheating tank 12 are
Is guided to the outside through the wall portion. Steam is supplied into the steam pipe 4a from an external steam supply means (not shown).
The liquid (pure water) stored in the preheating tank 12 can be heated to a desired temperature (64 ° C. in this example) and maintained at the same temperature. The preheating tank 12 is provided with a first auxiliary tank 13 for receiving pure water overflowing from the preheating tank 12 and a second auxiliary tank 14 for receiving pure water overflowing from the first auxiliary tank 13. Pure water overflowing from the auxiliary tank 5 of the draining section 1 is supplied to the preheating section 1
The first auxiliary tank 13 is provided.

The moving means 6 is provided in the preheating section 11 near the preheating tank 12. The moving means 6 has a holding device 6a for holding the cassette 2 containing the glass substrates, and an elevating device 6b for moving the holding device 6a in the vertical direction. According to the present moving means 6, the cassette 2 is placed between the pure water in the preheating tank 12 and the upper part of the pure water in the preheating tank 12.
Can be raised and lowered at a desired speed, and the glass substrate housed in the cassette 2 can be immersed in pure water, or the glass substrate immersed in pure water can be pulled up from pure water. In addition,
The direction in which the cassette 2 is moved up and down by the moving means 6 is a direction (vertical direction) substantially perpendicular to the surface (horizontal plane) of the pure water in the preheating tank 12.

The second auxiliary tank 14 communicates with a preheating tank 16 through a pipe 15. The preheating tank 16 is a storage tank made of stainless steel, and has a lid 16a for preventing vapor from leaking to the outside. The temperature of the liquid (pure water) stored inside is always constant (69 ° C. in this example). Heat and hold. Pure water flowing out of the preheating tank 16 via the pipe line 17 is supplied to the preheating tank 1 via the circulation pump 8a and the filters 9a and 10a.
Circulating to 2. The circulation pump 8a is connected to the second auxiliary tank 14
Is circulated through the preheating tank 16 to the preheating tank 12. The filters 9a and 10a are the same as the filters 9 and 10 of the drainer 1 in the first embodiment.

The cleaning apparatus according to the present embodiment includes a pure water heating tank 1 as a pure water supply means for supplying pure water to the preheating unit 11 and the draining unit 1.
8 is provided. A supply pipe 19 led from an external pure water supply source is connected to the pure water heating tank 18. Supply pipe 1
In the middle of 9, a filter 2 having a filtration accuracy range of 10 μm
0, a filter 21 of 3 μm, and a solenoid valve 22 are connected in series. By appropriately operating the electromagnetic valve 22, a necessary and sufficient amount of pure water can always be stored inside the pure water heating tank 18.

Inside the pure water heating tank 18 is provided a steam pipe 4b as a heating means. Both ends of the steam pipe 4 b in the pure water heating tank 18 are guided to the outside through the wall of the pure water heating tank 18. Steam is supplied into the steam pipe 4b from an external steam supply means (not shown), and the liquid (pure water) stored in the pure water heating tank 18 is heated to a desired temperature (70 ° C. in this example). The temperature can be maintained.

A circulation line 23 is connected to the pure water heating tank 18. The circulation line 23 is connected to a circulation pump 8 b and two filters 21 having filtration accuracy ranges of 3 μm and 1 μm.
b and 9b are connected in series. The pure water in the pure water heating tank 18 is circulated by the circulation pump 8b to keep the temperature uniform. Then, a part of the circulation pipe 23 is connected to the pipe 7 of the draining section 1 via the electromagnetic valve 24. An overflow pipe 25 connected to the upper limit position of the water surface of the preliminary heating tank 16 is connected to the pure water heating tank 18.

The transport means of this apparatus is a cassette 2 containing one or more glass substrates that have been contact-cleaned.
Having a function of transporting the liquid between the contact cleaning unit, the ultrasonic cleaning unit, the preheating unit 11 and the draining unit 1, and has substantially the same configuration as the transport unit in the first embodiment. .

This apparatus is provided with control means having the same functions as those of the cleaning apparatus according to the first embodiment.

The operation of the above configuration will be described. The glass substrate cleaned in the contact cleaning section is stored in the cassette 2. The cassette 2 containing a predetermined number of glass substrates is transported to the ultrasonic cleaning unit by the transport unit. The glass substrate in the cassette 2 cleaned in the ultrasonic cleaning unit is transferred to the preheating unit 11 by the transfer unit.

The cassette 2 transferred from the conveying means to the moving means 6 of the preheating section 11 is lowered by the moving means 6 and immersed in pure water in the preheating tank 12. The descent speed is 50
６０60 mm / sec. The immersion time is the same as the immersion time in each cleaning tank of the ultrasonic cleaning unit, and is about 110 seconds.
0 seconds before, the circulation pump 8 is stopped. Immediately after the lapse of time, the moving means 6 is driven to raise the cassette 2 at a speed of 50 to 60 mm / sec, and lift the cassette 2 from pure water.

If the glass substrate is left wet, the surface may be stained. Therefore, the glass substrate transported from the ultrasonic cleaning unit is immediately immersed in the preheating tank 12. Therefore, the rising speed of the glass substrate by the moving means 6 is 50 to 6
The speed is set as high as 0 mm / sec.

The preheating unit 11 is a pre-process for heating the glass substrate to a predetermined temperature in the draining unit 1. The preheated glass substrate is quickly pulled up before the temperature is lowered, and the pre-heating glass substrate is raised in the next step. Must be handed over. Therefore, the rising speed of the glass substrate by the moving means 6 is set to be as high as the descending speed.

The glass substrate in the cassette 2 preheated by the preheating section 11 is transferred to the moving means 6 of the draining section 1 by the transport means. The procedure of the processing in the water draining section 1 is the same as the operation in the first embodiment described above.

FIG. 3 shows the effect of the embodiment of the present invention. A square glass substrate having a predetermined size was used as the object to be cleaned, and cleaning was performed using the cleaning apparatus according to the first or second embodiment. Thereafter, aluminum was deposited on the entire surface. The relative values of the number of pinholes found in the aluminum film are shown for 11 samples. Assuming that the number of pinholes is 1 in the case of the conventional CFC-cleaned product, the conventional product is located between 0.5 and 1.0, but the present product is at most about 0.25. The number of pinholes was smaller than that of the conventional product.

FIG. 4 shows the effect of the embodiment of the present invention. FIG. 4 shows an investigation of the AD ratio (conduction defect rate) for each type of fluorescent display tube made using the glass substrate, for the conventional glass substrate obtained by cleaning with Freon and the glass substrate obtained by the cleaning method of the present invention. The displayed result is shown. The AD ratio is shown as a relative value of the AD ratio of the present invention when the conventional AD ratio is set to 100. The general product is a so-called direct-view type fluorescent display tube in which a wiring or an anode conductor is formed of Al on a glass substrate, and the light emission of the phosphor tank provided on the anode conductor is observed through the entire surface of the facing substrate. An FV product is a so-called front emission type fluorescent display tube in which a wiring or a translucent anode conductor is formed of Al on a glass substrate, and light emitted from a phosphor tank provided on the anode conductor is observed through the glass substrate. It is. The non-reflective type is a fluorescent display tube of a type having an antireflection film between a glass substrate and a wiring made of Al. The dot product is a fluorescent display tube having a large number of dot-shaped light-emitting portions arranged in a predetermined pattern and displaying arbitrary characters, images, and the like. Wiring is thin and routing is complicated. In any type of fluorescent display tube, the product using the glass substrate cleaned according to the present invention has a higher yield than the product using the glass substrate obtained by the conventional cleaning method, and has a higher AD.
The rate was low.

In the embodiment described above, one preheating tank 12 for the preheating unit 11 and one immersion tank 3 for the draining unit 1 are provided, but a plurality of each may be provided.

In the embodiment described above, the glass substrate is moved up and down by the moving means 6 and is immersed in pure water in the immersion tank 3 or pulled up. However, in order to relatively move the glass substrate immersed in pure water and the pure water so as not to leave water droplets on the surface of the glass substrate, pull up the glass substrate from the pure water at a predetermined speed or less. Not only that, the position of the glass substrate with respect to the immersion tank 3 may be fixed, and pure water may be gradually discharged from the immersion tank 3 at a predetermined speed or less to lower the water level. Alternatively, the position of the glass substrate with respect to the immersion tank 3 may be fixed, and the immersion tank 3 may be gradually lowered at a predetermined speed or less to lower the position of the water surface in the immersion tank 3 with respect to the glass substrate.

In the above-described embodiment, a glass substrate is illustrated as an object to be cleaned, but the present invention can be applied to substrates other than glass. Further, the present invention can also be applied to an article other than a plate-like article such as a substrate.

[0063]

According to the cleaning method and the cleaning apparatus of the present invention, the object to be cleaned is immersed in pure water set at a predetermined temperature range, and the object to be cleaned is relatively pure water at a speed lower than a predetermined speed. By separating from the surface of the object to be cleaned, pure water adhering to the surface of the object to be cleaned can be reliably removed and draining can be performed.
As a result, the effect of cleaning the surface of the object to be cleaned is enhanced, the processing efficiency and the yield of the object to be cleaned thereafter are improved, and the quality and production efficiency of the product are improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a main part of a first embodiment of the present invention.

FIG. 2 is a configuration diagram showing a main part of a second embodiment of the present invention.

FIG. 3 is a graph showing an effect of the embodiment of the present invention.

FIG. 4 is a table showing effects of the embodiment of the present invention.

FIG. 5 is a configuration diagram showing a configuration of a conventional cleaning device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Drain part 2 Cassette 3 Immersion tank 6 Moving means 8, 8a, 8b Circulation pump 9, 9a, 9b, 10, 10a, 20, 21 21b
Filter 11 Preheating section 12 Preheating tank 100 Contact cleaning section 101 Ultrasonic cleaning section

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-298747 (JP, A) JP-A-4-78476 (JP, A) JP-A-7-16438 (JP, A) JP-A-7- 185239 (JP, A) JP-A-6-168927 (JP, A) JP-A-7-86227 (JP, A) JP-A-63-105071 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/304 B08B 3/00-3/14

Claims (11)

(57) [Claims] 1. A contact cleaning step in which a cleaning member is brought into contact with a surface of a body to be cleaned to clean the surface of the body to be cleaned, and the body to be cleaned that has passed through the contact cleaning step is immersed in a cleaning solution vibrated by ultrasonic waves. And an ultrasonic cleaning step of cleaning, and pure water is supplied to the object to be cleaned that has passed through the ultrasonic cleaning step.
After being immersed in pure water at 50 ° C. or higher and heated to 40 ° C. or higher and stored in an immersion tank overflowing with pure water, the pure water is substantially perpendicular to the surface of the pure water. 10 in the direction
a water draining step of relatively pulling up the object to be cleaned at a speed of not more than mm / sec , wherein the object to be cleaned is pulled from the pure water in the water draining step.
Before pumping, supply of pure water to the immersion tank and the immersion
The heating of the pure water in the tank is stopped for a predetermined time and the surface of the pure water in the immersion tank is
Cleaning method to prevent ripples from appearing on the surface . 2. The ultrasonic cleaning step and the draining step.
In the meantime, the object to be cleaned that has passed through the ultrasonic cleaning
Preheating process of heating by immersing in pure water with a higher temperature than the pure body
The method of cleaning according to claim 1 having a. 3. The object to be cleaned is immersed in the draining step.
Pure water is filtered with a filtration accuracy of 1 μm or less.
The method of cleaning according to claim 1, wherein a pure water passed through. 4. The cleaning method according to claim 1 , wherein said pure water contains ozone . 5. The object to be cleaned in contact with the object to be transported.
A contact cleaning unit provided with a cleaning member for cleaning the object to be cleaned which has been cleaned in the contact cleaning unit;
A washing tank for containing a washing solution to be washed, and washing in the washing tank.
An ultrasonic wave generating means for generating ultrasonic waves in the purified liquid
A sonic cleaning unit and a pure body in which the object to be cleaned cleaned in the ultrasonic cleaning unit is immersed.
An immersion tank for storing water, and
Between the pure water and the pure water above the immersion tank.
Draining unit having moving means for relatively moving at a speed
And the contact cleaning unit, the ultrasonic cleaning unit and the draining unit
Cleaning apparatus having a conveying means you transport the cleaning object between. 6. A pure material having a higher temperature than the cleaned object.
Preheating for storing water and immersing the cleaned object
The tank and the object to be cleaned are placed in pure water of the preheating tank and pure water in the preheating tank.
A moving hand that moves at a desired speed between and above the water
And a step for heating the cleaned object to be cleaned to a higher temperature than the object to be cleaned.
After immersing in high purity water and heating,
The preheating unit, which is pulled up at a speed, is combined with the ultrasonic cleaning unit and the water.
The cleaning device according to claim 5, wherein the cleaning device is provided between the cut portions. 7. The object to be cleaned cleaned in the contact cleaning section is
It has a cassette to be stored, and the carrying means
The cleaning device according to claim 5, wherein the stored cassette is transported . 8. Supplying pure water to the immersion tank of the draining section.
Filter with a filtration accuracy of 3 to 0.5 μm
The cleaning device according to claim 5, 9. The immersion tank of the draining section overflows from the immersion tank.
The cleaning device according to claim 5 , further comprising an auxiliary tank for receiving the purified water . 10. The pure water received by the auxiliary tank is immersed in the immersion tank.
The cleaning device according to claim 9 , wherein a circulation pump and a filter are provided in a pipe that circulates the water . 11. A method according to claim 11, wherein a plurality of said filters are provided.
Item 11. The cleaning device according to item 8 or 10 .