KR100302212B1 - Method for the preparation of the adhesive tape for the electronic parts - Google Patents

Method for the preparation of the adhesive tape for the electronic parts Download PDF

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KR100302212B1
KR100302212B1 KR1019990002019A KR19990002019A KR100302212B1 KR 100302212 B1 KR100302212 B1 KR 100302212B1 KR 1019990002019 A KR1019990002019 A KR 1019990002019A KR 19990002019 A KR19990002019 A KR 19990002019A KR 100302212 B1 KR100302212 B1 KR 100302212B1
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weight
parts
epoxy
adhesive tape
acrylonitrile
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KR1019990002019A
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KR20000051521A (en
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진화일
임대우
지성대
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한형수
주식회사 새 한
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J109/00Adhesives based on homopolymers or copolymers of conjugated diene hydrocarbons
    • C09J109/02Copolymers with acrylonitrile
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3412Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
    • C08K5/3415Five-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • C08L83/06Polysiloxanes containing silicon bound to oxygen-containing groups
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • C09J163/04Epoxynovolacs
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • C09J163/10Epoxy resins modified by unsaturated compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors

Abstract

본 발명은 리드, 다이패드, 방열판 반도체 칩과 같이 반도체 장치를 구성하는 리드프레임 주변의 부품들간의 접착에 사용되는 내열성을 지닌 전자부품용 접착테이프에 관한 것으로서, 기존의 접착테이프에 비해 접착력, 내열성, 전기적 특성 등을 향상시키기 위해 안출된 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adhesive tape for electronic components having heat resistance used for bonding between components around a lead frame constituting a semiconductor device such as a lead, a die pad, and a heat sink semiconductor chip. In order to improve the electrical characteristics, etc.

본 발명은 중량평균분자량이 5,000~200,000이고 아크릴로 니트릴 함량이 5~50중량%인 아크릴로 니트릴-부타디엔 공중합체, 비스페놀 A계 에폭시 및 크레졸노볼락에폭시 혹은 페놀노볼락에폭시의 혼합 에폭시수지, 한분자내에 2개 이상의 말레이미드기를 함유한 화합물, 방향족 디아민계 화합물, 액상 실리콘수지, 무기 또는 유기입자로 된 충전제 및 용제로 구성된 접착조성물을 사용해 내열성 필름의 일면 또는 양면에 도포, 건조시킴에 의해 접착층을 형성시키는 것을 특징으로 한 접착테이프의 제조방법에 관한 것으로서, 이와 같이 제조된 접착테이프는 접착력, 내열성 등의 제반물성이 우수하여 특히 반도체 칩 등의 전자부품으로 사용할 때 유용하다.The present invention is an acrylonitrile-butadiene copolymer having a weight average molecular weight of 5,000 to 200,000 and an acrylonitrile content of 5 to 50% by weight, a mixed epoxy resin of bisphenol A-based epoxy and cresol novolac epoxy or phenol novolac epoxy, one minute Adhesive layer by coating and drying on one or both sides of the heat resistant film using an adhesive composition composed of a compound containing two or more maleimide groups, an aromatic diamine compound, a liquid silicone resin, a filler made of inorganic or organic particles, and a solvent. The present invention relates to a method for producing an adhesive tape, wherein the adhesive tape thus prepared is excellent in general properties such as adhesive strength and heat resistance, and is particularly useful when used as an electronic component such as a semiconductor chip.

Description

전자부품용 접착테이프의 제조방법{METHOD FOR THE PREPARATION OF THE ADHESIVE TAPE FOR THE ELECTRONIC PARTS}Manufacturing method of adhesive tape for electronic component {METHOD FOR THE PREPARATION OF THE ADHESIVE TAPE FOR THE ELECTRONIC PARTS}

본 발명은 리드, 다이패드, 방열판 반도체 칩과 같은 반도체 장치를 구성하는 리드프레임 주변의 부품들간 접착에 사용할 수 있는 전자 부품용 접착테이프에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adhesive tape for electronic components that can be used for bonding between components around a lead frame constituting a semiconductor device such as a lead, a die pad, and a heat sink semiconductor chip.

기존의 수지패키지형 반도체 장치에 사용되는 접착테이프에는 리드 프레임 고정용 접착테이프, 방열판 접착용 테이프, TAB 캐리어 테이프 등이 있는데, 리드 프레임 고정용 접착테이프의 경우에 있어서는, 리드 프레임의 리드를 고정하여 리드 프레임 자체 및 반도체 조립 공정 전체의 수율 및 생산성 향상을 목적으로 사용되며, 일반적으로 리드 프레임 메이커에서 리드 프레임 위에 접착되고, 반도체 조립업체에서는 이것을 이용하여 반도체 칩을 탑재한 후에 수지로 패키징하게 되는데, 이때 사용되는 리드 프레임 고정용 접착테이프는 반도체 수준에서 일반적인 신뢰성 및 테이핑시의 작업성, 테이핑 후의 접착력 등이 우수해야 함은 물론 반도체 장치의 조립공정에서의 가열에 견딜 수 있는 충분한 내열성이 갖추어야 한다.Adhesive tapes used in conventional resin packaged semiconductor devices include adhesive tapes for fixing lead frames, adhesive tapes for heat sinks, TAB carrier tapes, and the like. In the case of adhesive tapes for fixing lead frames, the lead frame is fixed by It is used to improve the yield and productivity of the lead frame itself and the entire semiconductor assembly process, and is generally bonded onto the lead frame in the lead frame maker, and the semiconductor assembly company uses the semiconductor chip to mount the semiconductor chip and then package it with resin. At this time, the adhesive tape for fixing the lead frame should be excellent in general reliability at the semiconductor level, workability at the time of taping, adhesive strength after taping, etc., as well as sufficient heat resistance to withstand the heating in the assembly process of the semiconductor device.

이와 같은 용도에 사용되는 기존의 접착테이프로는, 예를 들어, 폴리이미드필름 등의 내열성 지지필름상에, 폴리아크릴로니트릴, 폴리아크릴레이트 혹은 아크릴로니트릴-부타디엔 공중합체 등을 단독으로 도포하거나 또는 열경화성수지를 혼합하여 도포한 것들이 사용되었다. 그러나, 근래들어 반도체 장치 내부에 있어서도 다핀화 하거나, 방열성의 확보에 대한 요구로 인하여 패키지 구조가 복잡화하고 있으며, 접착테이프의 유기재료에 대해서는 전기적, 물리적, 열적특성이나 취급 특성에 대한 요구가 엄격해지고 있는 실정으로서, 상기와 같은 종래의 접착테이프의 경우는 열적특성, 치수안정성, 전기적 특성이 충분치 않으며, 특히 히트싱크와 리드핀을 접착시키거나, 반도체 칩과 리드핀을 절연 테이프로 접합시키는 공정에서는 리드프레임 등의 금속재료를 변형시키거나, 손상시킬 우려가 있는 문제점을 지닌다.Existing adhesive tapes used in such applications are, for example, coated with polyacrylonitrile, polyacrylate, or acrylonitrile-butadiene copolymer alone or the like on a heat resistant support film such as a polyimide film. Or those coated with a mixture of thermosetting resins were used. However, in recent years, the structure of the package has become complicated due to the requirement for multi-pinning or securing heat dissipation even inside the semiconductor device, and the demand for electrical, physical, thermal characteristics, and handling characteristics of organic materials of adhesive tapes has become strict. As a matter of fact, in the case of the conventional adhesive tape as described above, thermal properties, dimensional stability, and electrical properties are not sufficient, and in particular, in the process of bonding the heat sink and the lead fins or bonding the semiconductor chip and the lead fins with insulating tape. It has a problem of deforming or damaging metal materials such as lead frames.

이와 같은 문제점을 해결하기 위해 USP 5,494,757, USP 5,500,294에서는 피페라지닐 에틸아미노카르보닐기를 갖는 부타디엔-아크릴로 니트릴 공중합체, 2개 이상의 말레이미드기를 함유한 화합물, 디아민 함유 폴리실록산 화합물 등으로 구성된 접착제를 사용하는 방법이 제시되어 있는데, 이 경우에는 비교적 저온에서 접착, 경화할 수 있고 내열성, 전기적 특성이 우수한 반면 아웃가스가 다량 발생하는 등의 문제점이 잔존한다.In order to solve this problem, USP 5,494,757, USP 5,500,294 uses an adhesive composed of a butadiene-acrylonitrile copolymer having a piperazinyl ethylaminocarbonyl group, a compound containing two or more maleimide groups, a diamine-containing polysiloxane compound, and the like. In this case, there are problems such as adhesion and curing at a relatively low temperature, excellent heat resistance and electrical properties, but a large amount of outgas.

본 발명은 상기와 같은 문제점을 해결하기 위해 안출된 것으로서, 비교적 저온에서 접착, 경화할 수 있고 내열성, 전기적 특성이 우수하고 아웃가스 발생이 적기 때문에 특히 반도체 부품들간의 접착에 유용한 접착테이프를 제공하는데 그 목적이 있는 것이다.The present invention has been made to solve the above problems, and because it can be bonded and cured at a relatively low temperature, excellent heat resistance, electrical properties and less outgassing to provide an adhesive tape particularly useful for bonding between semiconductor components. The purpose is.

본 발명은 내열성 필름의 한면 혹은 양면에 중량평균분자량이 5,000~200,000 범위에 있고 아크릴로니트릴 함량이 5-50중량%이며 분자쇄중에 카르복실기를 함유한 아크릴로니트릴-부타디엔 공중합체(성분a) 비스페놀A계 에폭시와 크레졸노볼락에폭시 또는 비스페놀A계 에폭시와 페놀노볼락에폭시의 에폭시혼합수지(성분b), 한분자내에서 2개 이상의 말레이미드기를 함유하는 화합물(성분c), 방향족 디아민계 화합물(성분d), 에폭시기를 지닌 액상실리콘수지(성분e), 무기 또는 유기성분의 입자로 된 충전제(성분f) 및 용제로 구성된 접착조성물을 도포 건조하여 제조하는 것을 특징으로 하는 전자부품용 접착테이프의 제조방법에 관한 것이다.According to the present invention, an acrylonitrile-butadiene copolymer (component a) bisphenol having a weight average molecular weight in the range of 5,000 to 200,000 on one side or both sides of the heat resistant film, having an acrylonitrile content of 5-50% by weight, and containing a carboxyl group in the molecular chain Epoxy mixture resin (component b) of A type epoxy and cresol novolac epoxy or bisphenol A type epoxy and phenol novolac epoxy, the compound (component c) which contains two or more maleimide groups in one molecule, and aromatic diamine type compound (component d) Manufacture of adhesive tape for electronic parts, characterized by coating and drying an adhesive composition composed of a liquid silicone resin (component e) having an epoxy group, a filler (component f) composed of particles of an inorganic or organic component, and a solvent. It is about a method.

이하에서 본 발명을 구체적으로 설명한다.Hereinafter, the present invention will be described in detail.

본 발명에서 아크릴로니트릴-부타디엔 공중합체(성분a)는 중량평균 분자량이 5,000~200,000, 아크릴로니트릴 함량이 5~50중량%, 카르복실기의 당량이 500~10,000 범위에 있는 것이 사용된다. 이때 중량평균분자량이 5,000 보다 작으면 열안정성이 불량해지고 접착력, 내열성이 저하하며, 200,000 보다 크게 되면 용매에 대한 용해성이 나빠지고 용액 제조시 점도가 증가하여 작업성이 불량해진다. 또, 아크릴로 니트릴 함량이 5중량% 보다 적으면 내열성, 내화학성이 저하되고, 50중량% 보다 많으면 접착력이 불량해진다. 또한 카르복실기 당량이 10,000 보다 크게 되면 접착력, 내열성이 저하되고, 500 보다 작으면 용액상태에서의 안정성이 떨어져 작업성이 나쁘게 된다.In the present invention, the acrylonitrile-butadiene copolymer (component a) has a weight average molecular weight of 5,000 to 200,000, an acrylonitrile content of 5 to 50% by weight, and an equivalent of a carboxyl group in the range of 500 to 10,000 is used. At this time, when the weight average molecular weight is less than 5,000, the thermal stability is poor, the adhesion and heat resistance is lowered, and when the weight average molecular weight is greater than 200,000, the solubility in the solvent is worsened and the viscosity increases during solution preparation, resulting in poor workability. When the acrylonitrile content is less than 5% by weight, the heat resistance and chemical resistance are lowered, and when the acrylonitrile content is more than 50% by weight, the adhesion is poor. In addition, when the carboxyl group equivalent is greater than 10,000, the adhesion and heat resistance are lowered, and when the carboxyl equivalent is less than 500, the stability in the solution state is lowered, resulting in poor workability.

그리고, 성분b(에폭시혼합수지)의 경우에는 성분a 100중량부에 대하여 비스페놀A계 에폭시 20~500중량부(보다 바람직하게는 80~200중량부), 크레졸노볼락에폭시 또는 페놀노볼락에폭시 10~200중량부(보다 바람직하게는 40~100중량부)로 구성된 에폭시혼합수지를 사용한다. 이 경우에 있어서, 비스페놀A계 에폭시를 20중량부 미만 사용한 경우는 접착력이 저하되며, 과다하게 사용한 경우는 내열성이 저하된다. 또 크레졸노볼락에폭시 또는 페놀노볼락에폭시가 10중량부 미만일때는 내열성이 나빠지며, 과다하게 사용하면 접착력이 떨어진다.In the case of component b (epoxy mixture resin), 20 to 500 parts by weight of bisphenol A epoxy (more preferably 80 to 200 parts by weight), cresol novolac epoxy or phenol novolac epoxy 10 based on 100 parts by weight of component a An epoxy mixed resin composed of ˜200 parts by weight (more preferably 40-100 parts by weight) is used. In this case, when less than 20 weight part of bisphenol A epoxy is used, adhesive force falls, and when used excessively, heat resistance falls. In addition, when the cresol novolac epoxy or phenol novolac epoxy is less than 10 parts by weight, the heat resistance is poor, and when used excessively, the adhesive strength is lowered.

성분c는 하기 화학식 1 또는 화학식 2로 나타내는 화합물과 같이 1분자내에 2개 이상의 말레이미드기르 함유한 화합물로서, 그 사용량은 성분a 100중량부에 대하여 10~200중량부 첨가하는 것이 바람직한데, 10중량부 보다 적은 경우에는 내열성 및 경화후 탄성율 및 기계적 강도가 저하되고, 과다한 경우에는 접착력이 저하된다.Component c is a compound containing two or more maleimide groups in one molecule, such as the compound represented by the following Chemical Formula 1 or Chemical Formula 2, and its amount is preferably 10 to 200 parts by weight based on 100 parts by weight of component a. If less than the weight part, the heat resistance and the post-curing elastic modulus and mechanical strength are lowered, and if excessive, the adhesive force is lowered.

성분d(방향족디아민계 화합물)의 경우에는 에폭시수지와 비스말레이미드수지함량에 대하여 적합한 양이 들어가야 되는데, 대략 성분b와 성분c의 총 사용량 100중량부에 대하여 1~100중량부 범위에서 사용하며, 부족하거나 과다한 경우는 내용제성, 내열성, 전기저항 등이 저하된다. 본 발명에서는 특히 전기적 특성과 내열성, 내약품성이 우수한 방향족 디아민 화합물을 사용하는 것이 좋으며, 경화반응을 촉진하기 위하여 경화촉진제를 사용할 수 있다.In the case of component d (aromatic diamine-based compound), a suitable amount should be included with respect to the epoxy resin and bismaleimide resin content, and it is used in the range of 1 to 100 parts by weight based on 100 parts by weight of the total amount of component b and component c. In case of lack or excessive, solvent resistance, heat resistance, electrical resistance, etc. are lowered. In the present invention, it is particularly preferable to use an aromatic diamine compound having excellent electrical properties, heat resistance, and chemical resistance, and a curing accelerator may be used to promote a curing reaction.

성분e(에폭시기를 지닌 실리콘수지)의 경우에는 실리콘성분 등이 접착제내에서 화학결합을 시켜줌으로써 접착제의 내열성, 내흡수성, 전기절연성이 향상되어 접착테이프의 내구성, 신뢰성을 부여하는데, 그 사용량은 성분b 100중량부에 대하여 0.1~20중량부 범위에서 첨가한다. 이때 0.1중량부 보다 적게 첨가하는 경우 상기와 같은 성능향상이 미미하며, 20중량부 초과 첨가되는 경우 접착력이 저하된다.In the case of component e (a silicone resin having an epoxy group), a silicone component, etc., chemically bonds in the adhesive, thereby improving heat resistance, water absorption, and electrical insulation of the adhesive, thereby providing durability and reliability of the adhesive tape. b It is added in the range of 0.1 to 20 parts by weight based on 100 parts by weight. At this time, when the addition of less than 0.1 parts by weight, such a performance improvement is insignificant, and when more than 20 parts by weight is added, the adhesive strength is lowered.

그리고, 성분f(무기 또는 유기성분의 입자)의 경우에는 성분a 100중량부에 대하여 1~50중량부 첨가하는 것이 좋은데, 0.1중량부보다 적게 첨가되는 경우에는 접착성이 과다하여 작업성이 저하되며 기계적 강도 및 탄성율이 저하되고, 50중량부 초과하여 첨가하는 경우에는 접착력이 떨어진다. 이때 사용할 수 있는 무기충전제로는 산화아연, 실리카, 알루미나 및 지리콘 분말 등이 있으며, 유기 충전제로는 분말상의 아크릴수지, 폴리아마이드수지 또는 실리콘 등이 있다.In the case of component f (particles of inorganic or organic components), it is preferable to add 1 to 50 parts by weight with respect to 100 parts by weight of component a. However, when less than 0.1 part by weight, adhesiveness is excessive and workability is lowered. The mechanical strength and elastic modulus are lowered, and when added in excess of 50 parts by weight, the adhesive strength is lowered. At this time, inorganic fillers that can be used include zinc oxide, silica, alumina and zircon powders, and organic fillers include powdery acrylic resins, polyamide resins, or silicon.

이상과 같은 조성으로 준비된 접착조성물은 점도가 100~2000cps(보다 좋기로는 300~1000cps)가 되도록 용제에 용해하여 사용한다.The adhesive composition prepared in the above composition is dissolved in a solvent so as to have a viscosity of 100 to 2000 cps (preferably 300 to 1000 cps).

본 발명에서는 상기 접착 조성물을 내열성 필름 위에 건조후의 두께가 10~50㎛이 되도록 도포하고 80~120℃에서 1~20분 동안 건조한 후 박리성 필름을 붙이고80~120℃에서 5~30분 동안 반경화시키는 일반적인 접착테이프 제조공정을 거쳐 원하는 내열성 접착테이프를 얻는다.In the present invention, the adhesive composition is applied so that the thickness after drying on the heat-resistant film is 10 ~ 50㎛ and dried for 1 to 20 minutes at 80 ~ 120 ℃ and attach the release film and the radius for 5 to 30 minutes at 80 ~ 120 ℃ The desired heat-resistant adhesive tape is obtained through a general adhesive tape manufacturing process.

이때 사용될 수 있는 내열성 필름으로는, 예를 들면, 폴리이미드, 폴리페닐렌 술피드, 폴리에틸렌테레프탈레이트, 폴리에틸렌나프탈레이트 등의 내열성 수지 필름 등이 사용될 수 있으며, 그 두께는 대략 5~100㎛(보다 바람직하게는 25~150㎛)가 적당하다.At this time, as the heat-resistant film that can be used, for example, a heat-resistant resin film such as polyimide, polyphenylene sulfide, polyethylene terephthalate, polyethylene naphthalate, and the like can be used, the thickness is approximately 5 ~ 100㎛ (more Preferably 25-150 micrometers) is suitable.

한편, 본 발명에서 사용 가능한 박리성 필름으로는 폴리프로필렌 필름, 불소 수지계 필름, 폴리에틸렌 필름, 폴리에틸렌 테레프탈레이트 필름, 종이 및 경우에 따라 이들에 실리콘 수지로 박리성을 부여한 필름 등이 있다.On the other hand, as a peelable film which can be used by this invention, a polypropylene film, a fluororesin-type film, a polyethylene film, a polyethylene terephthalate film, a paper, and the film which provided them with silicone resin in some cases, etc. are mentioned.

이하에서 실시예 및 비교예를 들어 본 발명을 좀 더 구체적으로 설명한다.Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples.

<실시예 1><Example 1>

중량평균분자량이 20,000, 카르복실기 당량이 1,200, 아크릴로 니트릴함유량이 40중량%인 아크릴로니트릴-부타디엔 공중합체 100중량부를 메틸에틸케톤에 녹여 고형분이 15중량%인 용액을 제조한 후, 비스페놀A계 에폭시(에폭시당량 400) 100중량부, 크레졸노볼락에폭시(에폭시당량 200) 50중량부, N', N'-(4-4'-디페닐메탄)비스말레이미드 25중량부, 디아미노디페닐메탄 25중량부, 에폭시기를 가진 액상 실리콘수지 2중량부, 평균입자크기가 2.0㎛인 산화아연 6중량부를 첨가혼합하고, 메틸에틸케톤과 톨루엔 용제를 이용하여 용액의 점도를 800~1000cps로 맞추었다100 parts by weight of an acrylonitrile-butadiene copolymer having a weight average molecular weight of 20,000, a carboxyl equivalent of 1,200 and an acrylonitrile content of 40% by weight was dissolved in methyl ethyl ketone to prepare a solution having a solid content of 15% by weight. 100 parts by weight of epoxy (epoxy equivalent 400), 50 parts by weight of cresol novolac epoxy (epoxy equivalent 200), 25 parts by weight of N ', N'-(4-4'-diphenylmethane) bismaleimide, diaminodiphenyl 25 parts by weight of methane, 2 parts by weight of liquid silicone resin having an epoxy group, and 6 parts by weight of zinc oxide having an average particle size of 2.0 µm were added and mixed, and the viscosity of the solution was adjusted to 800 to 1000 cps using methyl ethyl ketone and toluene solvent.

이 접착 조성물을 이용하여 두께가 50㎛인 폴리이미드 필름(상품명 : KAPTON, DUPON사 제조)위에 건조후의 두께가 20㎛이 되도록 도포하고, 120℃에서 5분간 건조한후, 두께가 38㎛ 폴리에틸렌 테레프탈레이트 필름을 라미네이트하여 접착테이프를 제조하였다.Using this adhesive composition, it was applied on a polyimide film having a thickness of 50 µm (trade name: KAPTON, manufactured by DUPON Co., Ltd.) so as to have a thickness of 20 µm after drying, and dried at 120 ° C. for 5 minutes, and then 38 µm thick polyethylene terephthalate. The film was laminated to prepare an adhesive tape.

<실시예 2><Example 2>

중량평균분자량이 100,000, 카르복실기 당량이 2,700, 아크릴로 니트릴함유량이 27중량%인 아크릴로니트릴-부타디엔 공중합체 100중량부에 비스페놀A계 에폭시(에폭시당량 400) 200중량부, 크레졸노볼락에폭시(에폭시당량 200) 100중량부, N', N'-(4-4'-디페닐메탄)비스말레이미드 50중량부, 디아미노디페닐메탄 50중량부, 에폭시기를 가진 액상 실리콘수지 2중량부, 평균입자크기가 2.0㎛인 산화아연 6중량부를 첨가하여 실시예 1과 같이 메틸에틸케톤과 톨루엔 용제를 이용하여 용액의 점도를 800~1000cps로 맞춘다음, 이 접착 조성물을 이용하여 실시예 1과 같은 방법으로 접착테이프를 제조하였다.200 parts by weight of bisphenol A-based epoxy (epoxy equivalent 400) to 100 parts by weight of an acrylonitrile-butadiene copolymer having a weight average molecular weight of 100,000, a carboxyl equivalent of 2,700 and an acrylonitrile content of 27% by weight, and cresol novolac epoxy (epoxy Equivalent 200) 100 parts by weight, 50 parts by weight of N ', N'-(4-4'-diphenylmethane) bismaleimide, 50 parts by weight of diaminodiphenylmethane, 2 parts by weight of liquid silicone resin with epoxy group, average 6 parts by weight of zinc oxide having a particle size of 2.0 μm was added to adjust the viscosity of the solution to 800 to 1000 cps using methyl ethyl ketone and toluene solvent as in Example 1, and then the same method as in Example 1 using this adhesive composition. An adhesive tape was prepared.

<실시예 3><Example 3>

중량평균분자량이 100,000, 카르복실기 당량이 2,300, 아크릴로 니트릴함유량이 32중량%인 아크릴로니트릴-부타디엔 공중합체 100중량부에 비스페놀A계 에폭시(에폭시당량 400) 200중량부, 페놀노볼락에폭시(에폭시당량 200) 100중량부, N, N'-(4, 4'-디페닐메탄)비스말레이미드 50중량부, 디아미노디페닐메탄 50중량부, 에폭시기를 가진 액상 실리콘수지 2중량부, 평균입자크기가 2.0㎛인 산화아연 6중량부를 첨가하여 실시예 1과 같이 메틸에틸케톤과 톨루엔 용제를 이용하여 용액의 점도를 800~1000cps로 맞춘 다음, 이 접착 조성물을 이용하여 실시예 1과 같은 방법으로 접착테이프를 제조하였다.200 parts by weight of bisphenol A epoxy (epoxy equivalent 400) to 100 parts by weight of an acrylonitrile-butadiene copolymer having a weight average molecular weight of 100,000, a carboxyl equivalent of 2,300 and an acrylonitrile content of 32% by weight, and phenol novolac epoxy (epoxy Equivalent 200) 100 parts by weight, 50 parts by weight of N, N '-(4,4'-diphenylmethane) bismaleimide, 50 parts by weight of diaminodiphenylmethane, 2 parts by weight of liquid silicone resin with epoxy group, average particle 6 parts by weight of zinc oxide having a size of 2.0 μm was added to adjust the viscosity of the solution to 800 to 1000 cps using methyl ethyl ketone and toluene solvent as in Example 1, and then using the adhesive composition in the same manner as in Example 1 Adhesive tape was prepared.

<비교예 1>Comparative Example 1

중량평균분자량이 100,000, 카르복실기 당량이 2,300, 아크릴로 니트릴 함유량이 32중량%인 아크릴로니트릴-부타디엔 공중합체 100중량부에 비스페놀A계 에폭시(에폭시당량 400) 300중량부, 디아미노디페닐메탄 50중량부, 에폭시기를 가진 액상 실리콘수지 2중량부, 평균입자크기가 2.0㎛인 산화아연 6중량부를 첨가하여 실시예 1과 같이 메틸에틸케톤과 톨루엔 용제를 이용하여 용액의 점도를 800~1000cps로 맞춘 다음, 이 접착 조성물을 이용하여 실시예 1과 같은 방법으로 접착테이프를 제조하였다.100 parts by weight of an acrylonitrile-butadiene copolymer having a weight average molecular weight of 100,000, a carboxyl equivalent of 2,300 and an acrylonitrile content of 32% by weight, 300 parts by weight of bisphenol A epoxy (400 equivalents), diaminodiphenylmethane 50 By weight, 2 parts by weight of a liquid silicone resin having an epoxy group, and 6 parts by weight of zinc oxide having an average particle size of 2.0 µm were added, and the viscosity of the solution was adjusted to 800 to 1000 cps using methyl ethyl ketone and toluene solvent as in Example 1. Next, an adhesive tape was prepared in the same manner as in Example 1 using this adhesive composition.

<비교예 2>Comparative Example 2

중량평균분자량이 150,000, 아크릴로 니트릴 함유량이 32중량%인 아크릴로니트릴-부타디엔 공중합체 100중량부에 비스페놀A계 에폭시(에폭시당량 400) 200중량부, 크레졸노볼락에폭시(에폭시당량 200) 100중량부, N, N'-(4-4'-디페닐메탄)비스말레이미드 50중량부, 디아미노디페닐메탄 50중량부, 평균입자크기가 2.0㎛인 산화아연 6중량부를 첨가하여 실시예 1과 같이 메틸에틸케톤과 톨루엔 용제를 이용하여 용액의 점도를 800~1000cps로 맞춘 다음, 이 접착 조성물을 이용하여 실시예 1과 같은 방법으로 접착테이프를 제조하였다.100 parts by weight of an acrylonitrile-butadiene copolymer having a weight average molecular weight of 150,000 and an acrylonitrile content of 32% by weight, 200 parts by weight of bisphenol A epoxy (400 equivalents), 100 parts by weight of cresol novolac epoxy (200 equivalents) 1 part by adding 50 parts by weight of N, N '-(4-4'-diphenylmethane) bismaleimide, 50 parts by weight of diaminodiphenylmethane, and 6 parts by weight of zinc oxide having an average particle size of 2.0 µm. As described above, the viscosity of the solution was adjusted to 800 to 1000 cps using methyl ethyl ketone and toluene solvent, and then the adhesive tape was prepared in the same manner as in Example 1 using this adhesive composition.

상기 실시예 및 비교실시예에서 제조된 접착테이프의 특성은 다음의 방법으로 평가하여 그 결과를 하기 표 1에 나타내었다.Properties of the adhesive tapes prepared in Examples and Comparative Examples were evaluated by the following method and the results are shown in Table 1 below.

접착력Adhesion

150℃로 유지되고 있는 열판 위에 동박을 얹어 놓고, 상기 실시예 및 비교예에서 제조된 테이프를 5㎏/㎠의 압력으로 0.5초간 압착한 후, 175℃ 열풍오븐에서 1시간 동안 경화시킨 후 인장강도시험기를 이용하여 T-PEEL 강도를 측정하였다.The copper foil was placed on a hot plate maintained at 150 ° C., and the tapes prepared in Examples and Comparative Examples were pressed for 5 seconds at a pressure of 5 kg / cm 2, and then cured for 1 hour in a 175 ° C. hot air oven, followed by tensile strength. T-PEEL strength was measured using a tester.

열분해온도Pyrolysis temperature

TGA(듀퐁 V4. IC 2200)을 이용하여 측정하여 질량이 5% 감소한 온도를 열분해 온도로 하였다.The temperature at which the mass was reduced by 5% as measured using TGA (Dupont V4.IC 2200) was used as the pyrolysis temperature.

아웃가스Outgas

건조기에서 170℃ 1시간 동안 보관한 뒤 무게변화를 측정하였다.After storage for 1 hour at 170 ℃ in the dryer the weight change was measured.

흡습율Moisture absorption

23℃ 물에 24시간 동안 담근 후 무게변화를 측정하였다.The weight change was measured after soaking in water at 23 ° C. for 24 hours.

탄성율Modulus

170℃에서 1시간 추가로 250℃에서 1시간 동안 경화한 후 인장강도시험기를 이용하여 탄성율을 측정하였다.After curing at 170 ° C. for an additional 1 hour at 250 ° C., the elastic modulus was measured using a tensile strength tester.

평가항목Evaluation item 접착력Adhesion 열분해온도Pyrolysis temperature 아웃가스Outgas 흡습율Moisture absorption 탄성율Modulus 단위unit (g/㎝)(g / cm) (℃)(℃) (%)(%) (%)(%) (㎏/㎟)(Kg / mm2) 실시예 1Example 1 900900 370370 0.70.7 1.51.5 4,5004,500 실시예 2Example 2 740740 395395 0.60.6 1.31.3 4,5704,570 실시예 3Example 3 720720 395395 0.70.7 1.31.3 4,9904,990 비교예 1Comparative Example 1 930930 370370 1.11.1 1.41.4 3,2003,200 비교예 2Comparative Example 2 310310 390390 0.60.6 1.21.2 4,6604,660

상기 실시예 및 비교예를 분석해보면 본 발명에 따라 제조된 실시예들의 경우에는 접착력, 내열성 등의 전반적인 물성이 골고루 우수한 반면에 비교예들의 경우에는, 예를 들어, 비교예 1의 경우에는 특히 아웃가스의 발생이 많고 탄성율이낮은 단점을 지니고 비교예 2의 경우에는 접착력이 특히 나쁜 단점을 지닌다. 이와 같이 본 발명에 따라 제조된 접착테이프는 접착력, 내열성 및 전기적특성 등의 물성이 우수하기 때문에 반도체 장치 등 전자부품용으로 사용시 매우 유용하다.In the analysis of the examples and comparative examples, the overall physical properties such as adhesion and heat resistance are excellent in the examples prepared according to the present invention, while in the case of the comparative examples, for example, especially in the case of Comparative Example 1 It has a disadvantage of high gas generation and low modulus of elasticity, and in Comparative Example 2, the adhesive strength is particularly bad. Thus, the adhesive tape prepared according to the present invention is very useful when used for electronic parts such as semiconductor devices because of excellent physical properties such as adhesion, heat resistance and electrical properties.

Claims (7)

중량평균분자량이 5,000~10,000이고 아크릴로니트릴 함량이 5~50중량%인 카르복실기 함유 아크릴로니트릴-부타디엔 공중합체, 비스페놀A계 에폭시와 크레졸노볼락에폭시 또는 비스페놀A계 에폭시와 페놀노볼락 에폭시 중에서 선택된 에폭시혼합수지, 한 분자내에 2개 이상의 말레이미드기를 함유한 화합물, 방향족 디아민계 화합물, 에폭시기를 지닌 액상실리콘수지, 충전제 및 용제로 구성된 접착조성물을 내열성 필름의 한면 혹은 양면에 도포, 건조하여 제조하는 것을 특징으로 하는 전자부품용 접착테이프의 제조방법Selected from carboxyl group-containing acrylonitrile-butadiene copolymers having a weight average molecular weight of 5,000 to 10,000 and acrylonitrile content of 5 to 50% by weight, bisphenol A epoxy and cresol novolac epoxy or bisphenol A epoxy and phenol novolac epoxy An epoxy composite resin, a compound containing two or more maleimide groups in one molecule, an aromatic diamine-based compound, a liquid silicone resin having an epoxy group, a filler and a solvent are prepared by coating and drying one or both sides of the heat resistant film. Method for manufacturing an adhesive tape for electronic components, characterized in 제1항에 있어서, 카르복실기 함유 아크릴로니트릴-부타디엔 공중합체는 카르복실기 당량이 500~10,000 범위에 있는 것임을 특징으로 하는 전자부품용 접착테이프의 제조방법The method of claim 1, wherein the carboxyl group-containing acrylonitrile-butadiene copolymer has a carboxyl group equivalent in the range of 500 to 10,000. 제1항에 있어서, 비스페놀A계 에폭시는 아크릴로니트릴-부타디엔 공중합체 100중량부에 대하여 20~50중량부, 크레졸노볼락에폭시 또는 페놀노볼락에폭시는 10~200중량부 사용하는 것을 특징으로 하는 전자부품용 접착테이프의 제조방법The bisphenol A epoxy is used in an amount of 20 to 50 parts by weight based on 100 parts by weight of the acrylonitrile-butadiene copolymer, and 10 to 200 parts by weight of cresol novolac epoxy or phenol novolac epoxy. Manufacturing method of adhesive tape for electronic parts 제1항에 있어서, 한분자내에 2개 이상의 말레이미드기를 함유한 화합물은 아크릴로니트릴-부타디엔 공중합체 100중량부에 대하여 10~200중량부 사용하는 것을특징으로 하는 전자부품용 접착테이프의 제조방법The method for producing an adhesive tape for electronic component according to claim 1, wherein the compound containing two or more maleimide groups in one molecule is used in an amount of 10 to 200 parts by weight based on 100 parts by weight of the acrylonitrile-butadiene copolymer. 제1항 및 제4항에 있어서, 한분자내에 2개 이상의 말레이미드기를 함유한 화합물을 하기 화학식 1과 화학식 2로 나타내는 화합물 중에서 선택된 것임을 특징으로 하는 전자부품용 접착테이프의 제조방법The method for manufacturing an adhesive tape for an electronic component according to claim 1 or 4, wherein the compound containing two or more maleimide groups in one molecule is selected from the compounds represented by the following Chemical Formulas (1) and (2). <화학식 1><Formula 1> <화학식 2><Formula 2> 제1항에 있어서, 방향족 디아민 화합물은 에폭시혼합수지와 2개 이상의 말레이미드기를 함유한 화합물의 총 사용량 100중량부에 대하여 1~100중량부 사용하는 것을 특징으로 하는 전자부품용 접착테이프의 제조방법The method for producing an adhesive tape for electronic parts according to claim 1, wherein the aromatic diamine compound is used in an amount of 1 to 100 parts by weight based on 100 parts by weight of the total amount of the compound containing an epoxy mixed resin and two or more maleimide groups. 제1항에 있어서, 에폭시기를 지닌 액상 실리콘 수지는 아크릴로니트릴-부타디엔 공중합체 100중량부에 대하여 0.1~20중량부 사용하는 것을 특징으로 하는 전자부품용 접착테이프의 제조방법.The method for producing an adhesive tape for an electronic component according to claim 1, wherein the liquid silicone resin having an epoxy group is used in an amount of 0.1 to 20 parts by weight based on 100 parts by weight of the acrylonitrile-butadiene copolymer.
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KR100607372B1 (en) * 2000-04-20 2006-08-02 도레이새한 주식회사 Adhesive tape for the electronic parts
KR100852133B1 (en) * 2002-11-14 2008-08-13 주식회사 코오롱 Adhesive film for cleaning a screen plate
KR100836158B1 (en) * 2006-12-12 2008-06-09 도레이새한 주식회사 Heat-curable adhesive film having good heat-resistance and workability
JP6909171B2 (en) * 2018-02-12 2021-07-28 株式会社巴川製紙所 Adhesive sheet for manufacturing semiconductor devices and manufacturing method of semiconductor devices using it
CN110283561B (en) * 2019-05-30 2021-09-10 天津德高化成科技有限公司 Packaging resin composition for LED display screen patch type discrete device and application thereof

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