KR100293069B1 - Exhausting device of fluorescent display tube - Google Patents

Abstract

In the exhaust device of the fluorescent display tube, the lid member 60 is always kept in a stable position at the time of sealing the exhaust hole 8 of the fluorescent display tube 2 and the exhaust hole 8 is sealed with a constant pressing force.

The weight 59 corresponding to the pressing force of the lid member 60 applied to the exhaust hole 8 and the weight 59 are moved without causing a stumbling block or stick slip phenomenon to be transferred to the lid member as a load. By providing the pushing-up mechanism 14, the pressing force is precisely and stably controlled at the time of sealing the exhaust hole 8.

Description

Exhaust system of fluorescent tube {EXHAUSTING DEVICE OF FLUORESCENT DISPLAY TUBE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust device of a fluorescent display tube having a structure in which an exhaust hole without an exhaust pipe for exhaust is sealed with a cover member. It relates to an exhaust device.

3 is a cross-sectional view showing an example of an exhaust device of a conventional fluorescent display tube. BACKGROUND ART Fluorescent display tubes having a structure in which an exhaust hole without an exhaust pipe for exhaust gas is sealed with a lid member are generally well known. As an exhaust device 1 for evacuating and sealing a fluorescent display tube of this kind, for example, as shown in FIG. 3, an exhaust head 3 having an exhaust pipe 13 and a crack plate 5 on the upper end surface thereof. The fluorescent display tube 2 is mounted on the O-ring 26 and the crack plate 5 to be inserted into the inner diameter of the crack plate 5. The exhaust hole 8 of the fluorescent display tube 2 is placed so as to be the center of the O-ring 26. In addition, the plurality of exhaust heads 3 are fixed to the rotary table 12.

Inside the cylindrical exhaust head 3, a rod-shaped sealing heater 6 in which a lid member 60 is placed on the upper end surface is attached to the inside of the exhaust head 3 so as to be able to move up and down in an airtight manner. And this sealing heater 6 is lowered by the magnetic force which cannot be inhaled at the time of vacuum exhaust by the magnet 16 fixed to the lower end part of the guide shaft 9 arrange | positioned below the sealing heater 6, It is held by the adsorption plate 17 of the bottom plate 19. Moreover, this sealing heater 6 is energized from the circuit wired to the rotary table 12 which fixed the exhaust head 3.

Then, when the exhaust head 3 is rotated at a predetermined index time and positioned at a predetermined position, the sealing heater 6 is pushed by raising the pushing up portion 14 disposed at a predetermined position outside the rotary table 12. Will be raised.

In the vacuum evacuation and sealing of the fluorescent display tube 2, first, a lid member 60 having a low melting point glass coated thereon is placed on an upper end surface of the sealing heater 6, and a crack plate on the exhaust head 3 is formed. 5, the fluorescent display tube 2 is loaded through the O-ring 26, and the exhaust head 3 is evacuated. Next, by rotating the rotary table 12 at the set index time, a constant process index time can be obtained. By proceeding this step, the fluorescent display tube 2 is sufficiently evacuated and heated to a predetermined temperature by the heating furnace 15.

Then, the sealing heater 6 starts heating at a predetermined position after the start of vacuum evacuation, and is controlled at a temperature at which the low melting point glass applied on the lid member 60 melts. In addition, when the fluorescent display tube 2 reaches the position of the pushing-up part 14 in accordance with the rotation of the rotary table 12, heating by the sealing heater 6 is stopped and the shaft of the air cylinder 54 is stopped. (53) is lifted and separated from the magnet (16) by bringing the magnet (47) fixed to the upper end of the shaft (53) and adsorbed on the adsorption plate (17) under the sealing heater (6) against the adsorption plate (17). , The entire sealing heater 6 is pushed up. As a result, the lid member 60 is pressed against the exhaust hole 8 of the fluorescent display tube 2 by a pressing force determined by the inner diameter of the air cylinder 54 and the compressed air pressure to be used, and sealing is performed for a predetermined time. After the pushing-up sealing is completed for a predetermined time, the sealing heater 6 is lowered by being lowered by the pushing-up portion 14 and locked down by the magnetic force of the magnet 16.

In the above-described exhaust apparatus of the fluorescent display tube, the shaft 53 is raised by the air cylinder 54 when the lid member 60 is sealed, and the adsorption plate 17 is contacted via the magnet 47, thereby, The bottom member 19 of the sealing heater 6 is raised, and the lid member 60 is pressed against the exhaust hole 8 of the fluorescent display tube 2 at a predetermined pressure so that the lid member 60 on the upper portion of the sealing heater 6 is pressed. The position of 60 is determined.

However, the pressure of the air supplied to the air cylinder 54 fluctuates by factory consumption, and the fluctuation of the air pressure is encouraged by the throttle valve provided in the middle of the air supply piping. For this reason, when the pressure of the air supplied falls, the force which pushes in the vicinity of the exhaust hole 8 is insufficient, and the cover member 60 will not adhere to the fluorescent display tube 2, or air pressure will rise and excess near the exhaust hole There was a problem of partially deforming the exhaust hole 8 by applying a pressing force. In addition, the followability with respect to the air supply is deteriorated, making it difficult to fine-adjust the pressing force at the time of setting the pressure, and there is also a problem that wastes a lot of time for adjustment.

On the other hand, an exhaust device of a fluorescent display tube capable of stably moving the lid member inside the exhaust head to press the appropriate pressure against the exhaust hole is disclosed in Japanese Patent Laid-Open No. 04-061727. The exhaust device is provided with a guide member for guiding the heater portion on which the lid member is placed on the tip end portion of the exhaust head, and a transmission device for imparting a vertical movement to the heater portion via a compression spring provided in the exhaust head.

Then, the heater portion is raised in the delivery device, guided to the guide member, and the lid member contacts the exhaust hole without falling off from the heater portion. After that, the cover member is pressed against the exhaust hole by a compression spring whose spring pressure is adjusted to seal the exhaust hole. However, this exhaust sealing device has a drawback that it takes exhaust time because it is evacuated through a plurality of grooves of the guide member. In addition, installing compression springs in all exhaust heads requires a large number of adjustment steps. In addition, this kind of compression springs are susceptible to fatigue deterioration and high exchange frequency, which lowers the operation rate of the device.

Accordingly, it is an object of the present invention to keep the cover member in a stable position at the time of sealing the exhaust hole of the fluorescent display tube and to press the cover member to the exhaust hole at a constant pressing force to exhaust the fluorescent display tube and seal the exhaust hole. The present invention provides an exhaust device for a fluorescent display tube.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a sectional view showing an exhaust device of a fluorescent display tube in one embodiment of the present invention.

FIG. 2 is a sectional view showing a modification of the exhaust device of the fluorescent display tube of FIG.

3 is a cross-sectional view showing an example of an exhaust device of a conventional fluorescent display tube.

<Explanation of symbols for main parts of the drawings>

1: exhaust device

2: fluorescent tube

3: exhaust head

5: crack plate

6: sealing heater

8: exhaust hole

9: guide shaft

12: rotating table

13: exhaust pipe

14: push up

15: heating furnace

16, 47: magnet

17: adsorption plate

18: sealing part

19: bottom plate

53: axis

54: air cylinder

55 support pillar

56a, 56b: Sprocket

57: chain

58a, 58b: Linear Bearings

59: weight

60: cover member

61: direct drive motor

62: shaft

63: shock absorber

64: pushing up axis

Features of the present invention include a plurality of exhaust heads having exhaust pipes for performing vacuum exhaust from the exhaust holes of the fluorescent display tubes in the heating furnace, and attached to the periphery of the rotary table, and capable of moving up and down in an airtight manner within the exhaust heads, and at the same time. An exhaust device of a fluorescent display tube comprising a sealing member of a rod type having a lid member used for sealing an exhaust hole of a tube, and having a heater portion for heating and welding the lid member, wherein the exhaust pipe protrudes downward from the exhaust head. Balance with the force applied to the pushing-up part which has the mechanism which catches the edge part of a sealing heater, and gives an up-down motion to the said sealing heater, and sets the pressing force of the said lid member applied to the said exhaust hole. Weight and weights to support the weight and to move the weight up and down It is provided with a weight moving mechanism having an emitter.

And it is preferable that the mechanism which catches the edge part of the said sealing heater is equipped with a magnet. Moreover, this magnet is provided with a shock absorber attached upwards as needed. On the other hand, it is preferable that the motor is a linear motor in which the shaft moves up and down. Moreover, it is preferable to provide the guide mechanism which linearly guides the vertical movement of the said weight. And, it is preferable that this guide mechanism is provided with the linear friction bearing. Moreover, it is preferable to provide the shock absorber which contacts the edge part of the said sealing heater of the said pushing up part.

Next, the present invention will be described with reference to the drawings.

1 is a cross-sectional view showing an exhaust device of a fluorescent display tube in one embodiment of the present invention. As shown in Fig. 1, the exhaust device of the fluorescent display tube has an exhaust pipe 13 for evacuating the vacuum from the exhaust hole 8 of the fluorescent display tube 2 in the heating furnace 15, and at the same time, the rotary table 12 ) A plurality of exhaust heads 3 attached to the periphery, and a lid member 60 which can move up and down in an airtight manner in the exhaust head 3 and seal the exhaust hole 8 of the fluorescent display tube 2. The end portion of the rod-shaped sealing heater 6 provided with a heater portion for mounting and heat-sealing the lid member 60 and the sealing heater 6 protruding downward from the exhaust head 3 is held and sealed by magnetic force. Balance with the force applied to the pushing-up part 14 which gives the heater 6 the movement of an up-down direction, and to the pushing-up part 14 which sets the pressing force of the cover member 60 applied to the exhaust hole 8. Weight 59 of the weight and the weight 59 is moved up and down while supporting the weight 59 Key is provided with a weight moving mechanism having a direct-acting motor 61.

In addition, the pushing up portion 14 is attached to the tip end of the pushing up shaft 64 and the pushing up shaft 64 extending upward from the member connecting with the chain 57 extending from the linear bearing 58a. It consists of a magnet 47. In addition, the weight 59 suspended on the chain 57 via the sprockets 56a and 56b is linearly guided by the linear bearing 58b so as not to shake sideways during vertical movement.

In addition, a rotary table 12 to which a plurality of exhaust heads are attached, a sealing portion 18 at the lower end portion of the exhaust head 3 to move the sealing heater 6 in an airtight manner, and a lower end portion of the sealing heater 6 And a bottom plate 19 which is guided to the guide shaft 9 and to which the suction plate 17 is attached, and a magnet 16 attached to the distal end of the guide shaft 9 to pull and hold the suction plate 17. It is provided as follows.

In addition, the exhaust head 3 supports the O-ring 26 and the fluorescent display tube 2 to support the exhaust head 3 and the fluorescent display tube 2 on the upper end face thereof, and provides uniform heating. It has the crack plate 5, and the fluorescent display tube 2 is arrange | positioned so that the exhaust hole 8 may become the center of the O-ring 26 on it. The inside of the exhaust head 3 is incorporated in a sealing heater 6 having a heater sufficient thereon to allow the low melting point glass applied to the upper surface of the lid member 60 to be fused.

The end of the sealing heater 6 protruding from the seal 18 of the exhaust head 3 is a lower end of the suction plate 17 and the guide shaft 9 made of a magnetized metal attached to the bottom plate 19. It is locked below by the magnetic force which generate | occur | produces between the magnet 16 attached to it, and the magnetic weight of the sealing heater 6. In addition, the suction plate 17 of the bottom plate 19 is in a state capable of moving along the guide shaft 9. The magnetic force of the magnet 16 is such that the inside of the exhaust head 3 holds the sealing heater 6 downward without pulling the sealing heater 6 toward the exhaust hole 8 even under vacuum, and pushes up the sealing portion at the time of sealing ( When raising 14), magnetic force is applied to such an extent that it can be easily removed.

In addition, the sealing heater 6 is energized from the circuit which is not shown in figure which was wired to the rotating table 12. As shown in FIG. Then, a plurality of exhaust heads 3 are fixed on the turntable 12 and are moved at a set index time by intermittently rotating the turntable 12. This movement enables vacuum evacuation of the exhaust head 3 via the passage in the fixed heating furnace 15 and the exhaust pipe 13.

On the other hand, the pushing-up part 14 arrange | positioned in the predetermined position outside the rotating table 12 is attached to the support column 55 via the linear bearing 58, and above the support column 55 as mentioned above. The chain 57 is connected to the weight 59 on the opposite side of the support column 55 via two sprockets 56a and 56b. The weight 59 is attached to the linear bearing 58b provided with the linear bearing 58 and the support column 55 therebetween, and the bottom surface of which is the upper end of the shaft 62 of the linear motor 61. Since it is supported by the surface, the pushing-up part 14 on the opposite side to the support pillar 55 is descending normally.

The pushing-up part 14 is fixed to the pushing-up shaft 64 and the upper end surface of the pushing-up shaft 64, and is comprised by the magnet 47 which pulls down a sealing heater by attracting by the adsorption plate 17. As shown in FIG. The magnet 47 is applied with a magnetic force weaker than the weight of the pushing up portion 14, and the weight of the weight 59 is added to the weight of the pushing up portion 14 by the pressing force applied to the predetermined cover member 60. Setting. Instead of the chain 57 and the sprockets 56a and 56b, a configuration such as a wire and a pulley may be used. In any case, it is preferable to smoothly move the weight 59 up and down.

Next, the operation of the exhaust device will be described. First, the cover member 60 having the low melting glass applied to the upper surface is placed on the upper end face of the sealing heater 6 in the state held downward by the adsorption force of the magnet 16, and the crack plate 5 on the exhaust head 3 is disposed. After placing the fluorescent display tube 2 through the O-ring 26, the rotary table 12 is moved, and inside the exhaust head 3 and the fluorescent display tube by a vacuum pump fixed outside the rotary table 12 ( 2) Vacuum the inside out.

Next, by moving the rotary table 12 to the set index time, the fluorescent display tube 2 obtains an index time of a constant process. By moving the rotary table 12, sequentially switching the vacuum pump fixed outside the rotary table 12, and performing a process, the vacuum degree inside the exhaust head 3 and the fluorescent display tube 2 gradually increases.

In addition, the fluorescent display tube 2 is heated to a predetermined temperature by passing through the inside of the heating furnace 15 for the purpose of betting the hot gas in the fluorescent display tube 2. The sealing heater 6 is energized and heated at a predetermined position after the rotation table 12 moves, and is controlled to a temperature at which the low melting glass applied to the lid member 60 is melted.

Then, when the degree of vacuum in the fluorescent display tube 2 is sufficiently high to reach a predetermined temperature, and the fluorescent display tube 2 arrives at the raised portion 14 position, the linear motor 61 supporting the weight 59 is provided. By lowering the shaft 62 of), the weight 59 is lowered and the pushing up portion 14 connected to the chain 57 via the sprockets 56a and 56b is raised. Then, at the position where the lower portion of the sealing heater 6 is pushed up and the lid member 60 is pressed against the exhaust hole 8 of the fluorescent display tube 2, the pushing up portion 14 stops, but at the same time stops. The weight of the weight 59 can be reliably pushed up to the raising part 14 by lowering and stopping the shaft 62 of the linear motion motor 61 several mm below the lowered position of the weight 59 which was made.

In addition, the movement mechanism of this sealing heater 6 uses the linear motor 61 for the fall of the weight 59, without using the transmission mechanism which is easy to produce a backlash, and also the weight 59 and the pushing up By using the linear bearings 58a and 58b due to the low friction rolling contact as guides of the sub-14 motion, smooth movement is possible without causing movement defects due to backlash or stick slip phenomenon due to friction. .

Subsequently, the lid member 60 in which the low melting point glass is sufficiently melted is pushed from the raised portion 14 through the sealing heater 6 to be subjected to a constant pressing force and held for a predetermined time to seal the exhaust hole 8. As the shaft 62 of the formula motor 61 rises and lifts and supports the weight 59, the pushing-up part 14 descends. When the pushing up portion 14 descends, the magnet 47 absorbs the suction plate 17 and simultaneously lowers it. The suction plate 17 stops the magnet 16 as a stopper, and the sealing heater 6 moves downward. Is bound to.

The magnet 47 is separated from the adsorption plate 17 by the weight of the entire lifting portion 14, so that the lifting portion 14 is latched down at a position where the chain 57 is free between the weights. . As the sealing heater 6 descends, the sealing of the lid member 60 to the fluorescent display tube 2 is completed.

FIG. 2 is a cross-sectional view showing a modification of the fluorescent display tube exhaust device of FIG. As shown in Fig. 2, this exhaust device is provided with a shock absorber 63 having a structure in which the pushing up portion 14 absorbs a small dimension (about 5 to 10 mm) of impact below the magnet 47. will be. Other than that is the same as the above-mentioned exhaust apparatus.

When the pushing-up part 14 pushes up, this shock absorber 63 has a structure which absorbs the shock at the time of contacting the lower part of the sealing heater 6. As shown in FIG. In addition, the stroke of the shock absorber 63 and the amount of shock absorbing are small at the same time, and reach the end of the stroke of the shock absorber 63 before the sealing heater 6 rises and contacts the exhaust hole 8, thereby affecting the pressing force. The setting is not given.

In addition, the weight 59 has a structure which can be easily replaced so that the pressing force of the lid member 60 applied to the exhaust hole 8 can be changed.

As described above, the present invention provides a weight corresponding to the pressing force of the lid member applied to the exhaust hole, and a mechanism for moving the weight without causing an obstacle or stick slip, and transferring the weight to the lid member as a load. At the time of sealing the exhaust hole, the pressing force can be precisely and stably controlled, and the exhaust hole can be sealed with certainty, so that the yield is improved.

In addition, as in the prior art, in setting the pressing force, adjustment of the unstable air pressure supplied to the air cylinder and adjustment of the spring pressure in each exhaust head which wastes a lot of time disappear, and the weight of the weight is set in advance, Since it is finished only by putting it on the mechanism which transmits easily, the pressing force adjustment at the time of sealing can be performed easily in a very short time, and there exists an effect that the operation rate of the apparatus with a short stop time improves.

Claims (6)

A plurality of exhaust heads having exhaust pipes for evacuating vacuum from the exhaust holes of the fluorescent display tubes in the heating furnace, and attached to the periphery of the rotary table; In the exhaust device of a fluorescent display tube provided with the sealing heater of the rod type which mounts the lid | cover member used for sealing of the said lid, and has the heater part which heat-fuses the said lid member, The pushing-up part which has a mechanism which catches the edge part of the said sealing heater which protrudes below from the said exhaust head, and gives an upward movement to the said sealing heater, and the pushing-up which sets the pressing force of the cover member to be applied to the said exhaust hole. And a weight moving mechanism comprising a weight having a weight balanced with a force applied to the part, and a motor for moving the weight up and down while supporting the weight. The exhaust device of a fluorescent display tube according to claim 1, wherein a mechanism for holding an end of the sealing heater includes a magnet. The exhaust apparatus of a fluorescent display tube according to claim 1, wherein the motor is a linear motor whose shaft moves up and down. The exhaust apparatus for a fluorescent display tube according to claim 1, further comprising a guide mechanism for linearly guiding the vertical movement of the weight. The exhaust apparatus of a fluorescent display tube according to claim 4, wherein the guide mechanism includes a linear bearing by rolling contact. The exhaust apparatus of a fluorescent display tube according to claim 2, further comprising a shock absorber which abuts against an end portion of the sealing heater of the pushing up portion.