KR100253105B1 - 공진 미러 및 이의 제조 방법 - Google Patents

공진 미러 및 이의 제조 방법 Download PDF

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Publication number
KR100253105B1
KR100253105B1 KR1019920024775A KR920024775A KR100253105B1 KR 100253105 B1 KR100253105 B1 KR 100253105B1 KR 1019920024775 A KR1019920024775 A KR 1019920024775A KR 920024775 A KR920024775 A KR 920024775A KR 100253105 B1 KR100253105 B1 KR 100253105B1
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South Korea
Prior art keywords
mirror
layer
depositing
correction
electrode
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Expired - Fee Related
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KR1019920024775A
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Korean (ko)
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KR930013785A (ko
Inventor
이. 넬슨 윌리엄
Original Assignee
윌리엄 비. 켐플러
텍사스 인스트루먼츠 인코포레이티드
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Publication of KR930013785A publication Critical patent/KR930013785A/ko
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Publication of KR100253105B1 publication Critical patent/KR100253105B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Lasers (AREA)
KR1019920024775A 1991-12-20 1992-12-19 공진 미러 및 이의 제조 방법 Expired - Fee Related KR100253105B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/811,407 US5233456A (en) 1991-12-20 1991-12-20 Resonant mirror and method of manufacture
US811,407 1991-12-20

Publications (2)

Publication Number Publication Date
KR930013785A KR930013785A (ko) 1993-07-22
KR100253105B1 true KR100253105B1 (ko) 2000-05-01

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ID=25206466

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KR1019920024775A Expired - Fee Related KR100253105B1 (ko) 1991-12-20 1992-12-19 공진 미러 및 이의 제조 방법

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Country Link
US (1) US5233456A (enExample)
JP (1) JP3203277B2 (enExample)
KR (1) KR100253105B1 (enExample)
CA (1) CA2084946C (enExample)
TW (1) TW221526B (enExample)

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US5233456A (en) 1993-08-03
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