KR100220117B1 - 쵸크라스키 공정의 실행을 위한 크리스탈 풀러 터릿대 - Google Patents

쵸크라스키 공정의 실행을 위한 크리스탈 풀러 터릿대 Download PDF

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Publication number
KR100220117B1
KR100220117B1 KR1019940021654A KR19940021654A KR100220117B1 KR 100220117 B1 KR100220117 B1 KR 100220117B1 KR 1019940021654 A KR1019940021654 A KR 1019940021654A KR 19940021654 A KR19940021654 A KR 19940021654A KR 100220117 B1 KR100220117 B1 KR 100220117B1
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KR
South Korea
Prior art keywords
guide
winding
rotation
axis
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940021654A
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English (en)
Korean (ko)
Other versions
KR950005760A (ko
Inventor
슐만 빈프리드
팀 프란츠
키이져 헬무트
Original Assignee
페터 좀머캠프, 이리히 투테
발 쩌스 운트 레이볼트 도이치란드 홀딩 아크티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 페터 좀머캠프, 이리히 투테, 발 쩌스 운트 레이볼트 도이치란드 홀딩 아크티엔게젤샤프트 filed Critical 페터 좀머캠프, 이리히 투테
Publication of KR950005760A publication Critical patent/KR950005760A/ko
Application granted granted Critical
Publication of KR100220117B1 publication Critical patent/KR100220117B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B15/00—Drawing glass upwardly from the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1019940021654A 1993-08-31 1994-08-31 쵸크라스키 공정의 실행을 위한 크리스탈 풀러 터릿대 Expired - Fee Related KR100220117B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4329283A DE4329283C2 (de) 1993-08-31 1993-08-31 Drehkopf für Kristallziehanlagen für die Durchführung des Czochralski-Prozesses
DEP4329283.6 1993-08-31

Publications (2)

Publication Number Publication Date
KR950005760A KR950005760A (ko) 1995-03-20
KR100220117B1 true KR100220117B1 (ko) 1999-09-01

Family

ID=6496436

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940021654A Expired - Fee Related KR100220117B1 (ko) 1993-08-31 1994-08-31 쵸크라스키 공정의 실행을 위한 크리스탈 풀러 터릿대

Country Status (6)

Country Link
US (1) US5702523A (enExample)
JP (1) JPH0769781A (enExample)
KR (1) KR100220117B1 (enExample)
DE (1) DE4329283C2 (enExample)
IT (1) IT1274749B (enExample)
TW (1) TW269758B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766348A (en) * 1993-08-31 1998-06-16 Leybold Aktiengesellschaft Rotating head for crystal pulling systems for carrying out the czochralski process
DE19613282A1 (de) * 1996-04-03 1997-10-09 Leybold Ag Vorrichtung zum Ziehen von Einkristallen
JPH10273390A (ja) * 1997-03-28 1998-10-13 Super Silicon Kenkyusho:Kk 半導体単結晶製造装置
US5935328A (en) * 1997-11-25 1999-08-10 Memc Electronic Materials, Inc. Apparatus for use in crystal pulling
DE10007265B4 (de) * 2000-02-17 2009-10-22 Crystal Growing Systems Gmbh Kristallziehanlage
DE102004011901A1 (de) 2004-03-11 2005-12-01 Crystal Growing Systems Gmbh Seildrehkopf für eine Kristallziehanlage
DE102009024472A1 (de) * 2009-06-10 2010-12-30 Siltronic Ag Verfahren und Vorrichtung zum Ziehen eines Einkristalls aus einer Schmelze
US11255024B2 (en) 2019-06-18 2022-02-22 Linton Crystal Technologies Corp. Seed lifting and rotating system for use in crystal growth
US11891721B2 (en) 2020-12-09 2024-02-06 Linton Kayex Technology Co., Ltd Spool-balanced seed lift

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394352A (en) * 1980-03-17 1983-07-19 Motorola, Inc. Melt recharge apparatus
NL8102566A (nl) * 1980-06-14 1982-01-04 Leybold Heraeus Gmbh & Co Kg Inrichting voor het door middel van een opwikkelbaar trekorgaan uit een kroes trekken van een enkel kristal.
DE3116916C2 (de) * 1980-06-14 1984-08-23 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zum Ziehen eines Einkristalls aus einem Tiegel mittels eines aufwickelbaren Zugorgans
US4663128A (en) * 1985-03-06 1987-05-05 Ferrofluidics Corporation Pulling head for a crystal growing furnace
DE69017642T2 (de) * 1989-12-22 1995-07-06 Shinetsu Handotai Kk Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren.

Also Published As

Publication number Publication date
ITMI941793A1 (it) 1996-03-01
ITMI941793A0 (it) 1994-08-30
US5702523A (en) 1997-12-30
TW269758B (enExample) 1996-02-01
JPH0769781A (ja) 1995-03-14
DE4329283C2 (de) 1997-02-13
IT1274749B (it) 1997-07-24
DE4329283A1 (de) 1995-03-02
KR950005760A (ko) 1995-03-20

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