KR0137666B1 - 트렌치 캐패시터로 이루어지는 다이나믹 반도체 메모리용 3차원 i-트랜지스터 셀 구조 및 그 제조방법 - Google Patents
트렌치 캐패시터로 이루어지는 다이나믹 반도체 메모리용 3차원 i-트랜지스터 셀 구조 및 그 제조방법Info
- Publication number
- KR0137666B1 KR0137666B1 KR1019880015305A KR880015305A KR0137666B1 KR 0137666 B1 KR0137666 B1 KR 0137666B1 KR 1019880015305 A KR1019880015305 A KR 1019880015305A KR 880015305 A KR880015305 A KR 880015305A KR 0137666 B1 KR0137666 B1 KR 0137666B1
- Authority
- KR
- South Korea
- Prior art keywords
- trench
- layer
- doped
- substrate
- depth
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000004065 semiconductor Substances 0.000 title claims abstract description 6
- 230000015654 memory Effects 0.000 title abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 24
- 239000010703 silicon Substances 0.000 claims abstract description 24
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 21
- 238000005468 ion implantation Methods 0.000 claims abstract description 7
- 238000001953 recrystallisation Methods 0.000 claims description 11
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 238000005496 tempering Methods 0.000 claims description 3
- 238000005280 amorphization Methods 0.000 claims description 2
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 230000000873 masking effect Effects 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 238000002955 isolation Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000407 epitaxy Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/373—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate the capacitor extending under or around the transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3740171 | 1987-11-26 | ||
DEP3740171.8 | 1987-11-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890008978A KR890008978A (ko) | 1989-07-13 |
KR0137666B1 true KR0137666B1 (ko) | 1998-04-28 |
Family
ID=6341371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880015305A KR0137666B1 (ko) | 1987-11-26 | 1988-11-21 | 트렌치 캐패시터로 이루어지는 다이나믹 반도체 메모리용 3차원 i-트랜지스터 셀 구조 및 그 제조방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US4942554A (ja) |
EP (1) | EP0317934B1 (ja) |
JP (1) | JP2581654B2 (ja) |
KR (1) | KR0137666B1 (ja) |
AT (1) | ATE81230T1 (ja) |
CA (1) | CA1294713C (ja) |
DE (1) | DE3875080D1 (ja) |
HK (1) | HK129094A (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4988637A (en) * | 1990-06-29 | 1991-01-29 | International Business Machines Corp. | Method for fabricating a mesa transistor-trench capacitor memory cell structure |
JPH06216338A (ja) * | 1992-11-27 | 1994-08-05 | Internatl Business Mach Corp <Ibm> | 半導体メモリセル及びその製造方法 |
US5936271A (en) * | 1994-11-15 | 1999-08-10 | Siemens Aktiengesellschaft | Unit cell layout and transfer gate design for high density DRAMs having a trench capacitor with signal electrode composed of three differently doped polysilicon layers |
US5543348A (en) * | 1995-03-29 | 1996-08-06 | Kabushiki Kaisha Toshiba | Controlled recrystallization of buried strap in a semiconductor memory device |
US5905279A (en) * | 1996-04-09 | 1999-05-18 | Kabushiki Kaisha Toshiba | Low resistant trench fill for a semiconductor device |
US5914510A (en) * | 1996-12-13 | 1999-06-22 | Kabushiki Kaisha Toshiba | Semiconductor memory device and method of manufacturing the same |
US6100132A (en) * | 1997-06-30 | 2000-08-08 | Kabushiki Kaisha Toshiba | Method of deforming a trench by a thermal treatment |
US5990511A (en) * | 1997-10-16 | 1999-11-23 | International Business Machines Corporation | Memory cell with transfer device node in selective polysilicon |
US6236079B1 (en) | 1997-12-02 | 2001-05-22 | Kabushiki Kaisha Toshiba | Dynamic semiconductor memory device having a trench capacitor |
US6074909A (en) * | 1998-07-31 | 2000-06-13 | Siemens Aktiengesellschaft | Apparatus and method for forming controlled deep trench top isolation layers |
US6376873B1 (en) | 1999-04-07 | 2002-04-23 | International Business Machines Corporation | Vertical DRAM cell with robust gate-to-storage node isolation |
US6372567B1 (en) | 2000-04-20 | 2002-04-16 | Infineon Technologies Ag | Control of oxide thickness in vertical transistor structures |
FR2819631B1 (fr) * | 2001-01-12 | 2003-04-04 | St Microelectronics Sa | Procede de fabrication d'un substrat monocristallin, et circuit integre comportant un tel substrat |
DE10128193C1 (de) * | 2001-06-11 | 2003-01-30 | Infineon Technologies Ag | Ein-Transistor-Speicherzellenanordnung und Verfahren zu deren Herstellung |
US7375027B2 (en) | 2004-10-12 | 2008-05-20 | Promos Technologies Inc. | Method of providing contact via to a surface |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982761A (ja) * | 1982-11-04 | 1984-05-12 | Hitachi Ltd | 半導体メモリ |
ATE41267T1 (de) * | 1984-04-25 | 1989-03-15 | Siemens Ag | Ein-transistor-speicherzelle fuer hochintegrierte dynamische halbleiterspeicher und verfahren zu ihrer herstellung. |
EP0167764B1 (en) * | 1984-06-14 | 1989-08-16 | International Business Machines Corporation | Dynamic ram cell |
US4649625A (en) * | 1985-10-21 | 1987-03-17 | International Business Machines Corporation | Dynamic memory device having a single-crystal transistor on a trench capacitor structure and a fabrication method therefor |
JPS62193275A (ja) * | 1986-02-12 | 1987-08-25 | シ−メンス、アクチエンゲゼルシヤフト | 3次元1トランジスタ・セル装置およびその製造方法 |
US4801989A (en) * | 1986-02-20 | 1989-01-31 | Fujitsu Limited | Dynamic random access memory having trench capacitor with polysilicon lined lower electrode |
US4728623A (en) * | 1986-10-03 | 1988-03-01 | International Business Machines Corporation | Fabrication method for forming a self-aligned contact window and connection in an epitaxial layer and device structures employing the method |
US4830978A (en) * | 1987-03-16 | 1989-05-16 | Texas Instruments Incorporated | Dram cell and method |
-
1988
- 1988-10-18 US US07/259,699 patent/US4942554A/en not_active Expired - Lifetime
- 1988-11-21 EP EP88119351A patent/EP0317934B1/de not_active Expired - Lifetime
- 1988-11-21 DE DE8888119351T patent/DE3875080D1/de not_active Expired - Lifetime
- 1988-11-21 KR KR1019880015305A patent/KR0137666B1/ko not_active IP Right Cessation
- 1988-11-21 AT AT88119351T patent/ATE81230T1/de not_active IP Right Cessation
- 1988-11-24 CA CA000583983A patent/CA1294713C/en not_active Expired - Fee Related
- 1988-11-24 JP JP63299374A patent/JP2581654B2/ja not_active Expired - Fee Related
-
1994
- 1994-11-17 HK HK129094A patent/HK129094A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE3875080D1 (de) | 1992-11-05 |
HK129094A (en) | 1994-11-25 |
JPH021968A (ja) | 1990-01-08 |
EP0317934A1 (de) | 1989-05-31 |
US4942554A (en) | 1990-07-17 |
ATE81230T1 (de) | 1992-10-15 |
CA1294713C (en) | 1992-01-21 |
EP0317934B1 (de) | 1992-09-30 |
KR890008978A (ko) | 1989-07-13 |
JP2581654B2 (ja) | 1997-02-12 |
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Legal Events
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E902 | Notification of reason for refusal | ||
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E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20080128 Year of fee payment: 11 |
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LAPS | Lapse due to unpaid annual fee |