KR0119012B1 - Apparatus and method for coating the sensitizer of the metal surface - Google Patents

Apparatus and method for coating the sensitizer of the metal surface

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KR0119012B1
KR0119012B1 KR1019900006139A KR900006139A KR0119012B1 KR 0119012 B1 KR0119012 B1 KR 0119012B1 KR 1019900006139 A KR1019900006139 A KR 1019900006139A KR 900006139 A KR900006139 A KR 900006139A KR 0119012 B1 KR0119012 B1 KR 0119012B1
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temperature
coating
metal material
rods
photosensitive liquid
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KR910018089A (en
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이근우
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조희재
엘지마이크로닉스주식회사
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures

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Abstract

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Description

금속표면의 감광액 도포방법 및 장치Method and apparatus for applying photoresist on metal surface

제1도는 종래의 도포 공정 개요도.1 is a schematic view of a conventional coating process.

제2도는 종래의 도포봉의 단면도.2 is a cross-sectional view of a conventional coating rod.

제3도는 본 발명에 따른 도포 공정 개요도.3 is a schematic view of an application process according to the present invention.

제4도는 본 발명에 따른 도포봉의 단면도.4 is a cross-sectional view of an applicator rod according to the present invention.

제5도는 도포된 소재의 단면도.5 is a cross-sectional view of the applied material.

제6도는 본 발명에 따른 도포막 두께의 변화곡선도.6 is a change curve of the coating film thickness according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 금속소재 2 : 탈지공정부1: Metal material 2: Degreasing process

3 : 산처리 공정부 4 : 중화공정부3: acid treatment process part 4: neutralization process part

5 : 도포조 6 : 감광액 온도조절 탱크5: coating tank 6: photosensitive liquid temperature control tank

7 : 감광액 8a,8b : 종래의 도포봉7: photosensitive liquid 8a, 8b: conventional coating rod

9 : 건조공정부 10a,10b : 도포봉의 온도조절장치9: drying step 10a, 10b: temperature control device of the coating rod

11a,11b : 본 발명의 도포봉 12 : 도포막11a, 11b: coating rod 12 of the present invention: coating film

13 : 도포봉의 온도 감지기 14 : 열원공급로13: Temperature sensor of the application rod 14: Heat source supply path

15 : 점도와 도포막두께 비례 그래프 16 : 점도와 온도 반비례 그래프15: Proportional Graph of Viscosity and Coating Film Thickness 16: Inverse Graph of Viscosity and Temperature

17 : 본 발명의 도포봉의 관통한 중심부17: penetrated center of the coating rod of the present invention

본 발명은 띠 상태의 연속된 금속시트의 포토 에칭 제조공정에 관한 것으로 특히 정밀도포에 적당하도록 한 도포 방법 및 장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photoetch manufacturing process of a continuous metal sheet in a band state, and more particularly, to a coating method and apparatus adapted to be suitable for precision cloth.

종래의 금속표면의 감광액 도포 방법에 있어서는 제1도에서 나타낸 바와같이 금속소재(1)을 순차적으로 공급하며 탈지공정(2)과 산처리공정(3)과 중화공정(4)을 거쳐 금속 소재 표면을 깨끗이 세정한 다음 도포조(7)에 침적되어 감광액(5) 계면에 설치된 도포봉(8a, 8b) 사이을 거치면서 금속 소재 양면에 감광액(5)이 균일하게 도포되어 건조공정(9)을 거쳐 금속소재(1) 양면에 동일한 두께의 균일한 도포막(12)을 얻을 수 있었다.In the conventional method of applying a photoresist on a metal surface, as shown in FIG. 1, the metal material 1 is sequentially supplied and subjected to a degreasing process (2), an acid treatment process (3) and a neutralization process (4). After the cleaning process, the photoresist 5 is uniformly applied on both sides of the metal material while passing through the application rods 8a and 8b installed at the interface of the photoresist 5 by being deposited in the application tank 7 and passing through the drying process 9. The uniform coating film 12 of the same thickness was obtained on both surfaces of the metal material 1.

종래의 도포조(5)는 온도 조절용 탱크(6)에서 감광액(7)이 일정한 온도로 조정되어 도포조(5)에 공급되므로 감광액(7)의 점도는 정해진 온도에 따라 일정한 점도를 유지하게 된다.In the conventional coating tank 5, since the photosensitive liquid 7 is adjusted to a constant temperature in the temperature control tank 6 and supplied to the coating tank 5, the viscosity of the photosensitive liquid 7 maintains a constant viscosity according to a predetermined temperature. .

따라서 도포봉(8a, 8b) 사이를 거치면서 도포되는 금속소재 양면의 도포막 두께(12)는 동일하게 형성되었으며 온도조절용 탱크(6)에서 온도를 낮게하여 점도를 높이면 제6도에 나타낸 바와 같이 도포막(12) 두께를 두껍게 할 수 있고 반대로 감광액 온도 조절용 탱크(6)에서 온도를 높여 점도를 낮게하면 도포막 두께(12)는 얇게 된다.Therefore, the coating film thicknesses 12 on both sides of the metal material applied while being applied between the coating rods 8a and 8b are the same, and the viscosity is increased by lowering the temperature in the temperature control tank 6 as shown in FIG. The thickness of the coating film 12 can be thickened. On the contrary, when the temperature is increased in the photosensitive liquid temperature control tank 6 to lower the viscosity, the coating film thickness 12 becomes thin.

그러나 이와같이 종래의 금속표면의 감광액 도포방법에 있어서는 감광액 온도조절 탱크(6)에서 일률적으로 감광액(7) 온도가 조정되므로 소재금속 양면에 도포막(12) 두께가 같게 되어 소재두께에 따른 적절한 조정이 어렵고 특히 소재 양면의 도포막 두께를 다르게 하고자 할 경우에는 그 조정이 불가능하여 소재 양면에 부식시간이 다른 고정밀 부식가공 제품의 가공은 할 수 없었으며 도포막(12) 두께 조정을 위해서는 온도조정탱크(6) 자체의 온도를 조정해야 하므로 많은 시간이 소요되었고 도포막 두께를 얇게 하기 위하여 감광액 온도조절탱크(6)를 고온으로 관리할 경우 암반응 등의 부작용을 초래하였다.However, in the conventional method for applying the photoresist on the metal surface, since the temperature of the photoresist 7 is uniformly adjusted in the photoresist temperature control tank 6, the thickness of the coating film 12 is the same on both sides of the material metal, so that appropriate adjustment according to the material thickness is achieved. It is difficult to adjust the thickness of the coating film on both sides of the material, and it is impossible to adjust it. Therefore, it is not possible to process the high-precision corrosion-resistant products with different corrosion time on both sides of the material, and to adjust the thickness of the coating film 12, 6) Since it was necessary to adjust its own temperature, it took a lot of time, and in order to reduce the thickness of the coating film, when the photoresist temperature control tank 6 was managed at high temperature, it caused side effects such as cancer reaction.

이에 따라 상기한 문제점을 해결한 본 발명에 따른 도포장치는 제3도에서와 같이 금속소재(1)를 순차적으로 공급하여 탈지공정부(2), 산처리 공정부(3), 중화공정부(4)를 거쳐 도포조(5)에 침적되어 감광액(7)계면에 설치된 열원을 공급할 수 있는 도포봉(11a,11b) 사이를 거치면서 금속소재 양면에 감광액(7)이 도포되어 건조공정부(9)를 거쳐 건조된다.Accordingly, the coating apparatus according to the present invention, which solves the above-mentioned problems, sequentially supplies the metal material 1 as shown in FIG. 3 to remove the degreasing step (2), the acid treatment step (3), and the neutralization step ( 4) The photosensitive liquid 7 is applied to both sides of the metal material while being deposited on the coating tank 5 and passed between the coating rods 11a and 11b for supplying a heat source installed on the photosensitive liquid 7 interface. It is dried through 9).

이때 도포봉(11a,11b)에 연결된 도포봉 온도조절장치(10a,10b)를 설치하여 도포봉(11a,11b)의 온도를 조정하므로써 감광액(7)의 점도를 조절할 수 있으며 제6도에 나타난 그래프와 같이 감광액(7)의 온도와 점도는 반비례(16)하여 온도를 높이면 점도는 저하하고 반대로 온도를 낯추면 점도는 상승한다.At this time, by adjusting the temperature of the coating rod (11a, 11b) by installing the coating rod temperature control device (10a, 10b) connected to the coating rod (11a, 11b) it is possible to adjust the viscosity of the photosensitive liquid (7) As shown in the graph, the temperature and the viscosity of the photosensitive liquid 7 are inversely proportional to 16, and when the temperature is increased, the viscosity decreases. On the contrary, when the temperature decreases, the viscosity increases.

또 도포막(12) 두께는 점도와 비례(15)하여 점도가 높을수록 도포막(12) 두께는 두꺼워진다.In addition, the thickness of the coating film 12 becomes 15 in proportion to the viscosity, so that the higher the viscosity, the thicker the coating film 12 becomes.

따라서 본 고안의 도포봉(11a, 11b)은 도포조(5)의 액면에 일부 침적된 상태로 설치되므로 도포봉(11a,11b) 주변의 감광액(7) 온도가 도포봉(11a, 11b)의 온도와 거의 같게되어 도포봉(11a, 11b)의 온도를 높이면 도포봉(11a, 11b)주변의 감광액(7)의 점도가 저하되어 도포막(12) 두께가 얇게디고 도포봉(11a,11b)의 온도를 낮추면 감광액(7)의 점도가 상승하여 도포막(12) 두께가 두꺼워진다.Therefore, since the application rods 11a and 11b of the present invention are installed in a state of being partially deposited on the liquid level of the application tank 5, the temperature of the photosensitive liquid 7 around the application rods 11a and 11b is increased. When the temperature of the coating rods 11a and 11b is increased to be substantially the same as the temperature, the viscosity of the photosensitive liquid 7 around the coating rods 11a and 11b decreases, so that the thickness of the coating film 12 becomes thinner and the application rods 11a and 11b. When the temperature is lowered, the viscosity of the photosensitive liquid 7 increases, and the thickness of the coating film 12 becomes thick.

여기에서 도포봉 11a와 11b는 도포봉 온도조절 장치 10a와 10b에 의하여 각각의 온도가 조정되어 금속소재(1)의 양면(제5도의 A면 및 B면)에 서로 두께가 다른 도포막(12)을 얻을 수가 있다.Here, the coating rods 11a and 11b are coated with a different thickness on each side of the metal material 1 (A side and B side in Fig. 5) by adjusting the respective temperatures by the application rod temperature adjusting devices 10a and 10b. ) Can be obtained.

또 보다 온도를 정밀하게 제어하기 위해서는 도포봉(11a, 11b)에 온도감지기(13)를 설치하여 온도를 따른 도포막(12)의 두께를 정밀하게 제어할 수 있다.Moreover, in order to control temperature more precisely, the temperature sensor 13 is provided in the coating rods 11a and 11b, and the thickness of the coating film 12 according to temperature can be precisely controlled.

본 발명의 방법으로 행한 도포막(12)의 두께 및 부식가공 특성을 살펴보면 표-1에 나타낸 바와 같다.The thickness and corrosion processing characteristics of the coating film 12 performed by the method of the present invention are as shown in Table-1.

Figure kpo00001
Figure kpo00001

표-1에서 나타난 바와 같이 금속소재의A면과 B면의 부식시간의 차와 소재의 특성에 따라 A면과 B면의 도포막 두께를 다르게 함으로써 부식가공품의 정밀도 향상과 탈막에 의한 불량을 배제할 수 있었고, 점도가 다른 감광액의 상호교반은 금속소재가 연속적으로 통과하므로써 차단할 수 있었다.As shown in Table-1, the coating film thickness of A and B surface is changed according to the difference of corrosion time between A surface and B surface of metal material and the characteristics of the material, thereby improving the accuracy of processed corrosion products and eliminating defects due to film removal. The cross stirring of the photosensitive liquids with different viscosities could be prevented by continuously passing the metal material.

여기에서 양면의 도포막(12)의 두께를 다르게 하더라도 감광액(7)암반응 등의 부작용을 배제하기 위해서는 도포봉(11a, 11b)의 온도는 섭씨 30° 이하로 해야하고 감광액 온도조절 탱크(6)의 온도는 두 개의 도포봉(11a, 11b) 중 온도가 낮은 온도의 도포봉과 일치하게 함으로써 관리의 편리를 도모할 수 있다.Here, even if the thickness of the coating film 12 on both sides is different, the temperature of the coating rods 11a and 11b should be 30 degrees Celsius or less in order to exclude side effects such as photoresist 7 cancer reaction and the like. The temperature of can be conveniently managed by making the temperature of the two coating rods 11a and 11b coincide with the application rod of the low temperature.

이와같이 본 발명에 따른 도포장치는 도포봉(11a, 11b)의 온도를 제어하여 금속소재(1)의 양면의 도포막(12) 두께를 각각 별도로 제어하므로써 공정세도 섀도우마스크 및 리드 프레임등 정밀 부식가공 제품을 제공할 수 있고 두꺼운 소재, 얇은소재, 특수합금 등에도 측면부식, 부식시간 등 부식 특성에 따라 용이하게 도포막(12)의 두께를 제어할 수 있을 뿐만 아니라 종래의 방법에서 도포막의 두께를 얇게 하기 위하여 온도 조절용 탱크(6)에서 높은 온도로 관리하여 발생하는 감광액(7)의 암반응 등의 변질도 억제할 수 있다.As described above, the coating apparatus according to the present invention controls the temperature of the coating rods 11a and 11b to separately control the thickness of the coating film 12 on both sides of the metal material 1 so as to precisely process the process fine shadow mask and lead frame. It is possible to provide a product and easily control the thickness of the coating film 12 according to corrosion characteristics such as side corrosion and corrosion time even for thick materials, thin materials, special alloys, etc. In order to make it thin, the deterioration of the dark reaction etc. of the photosensitive liquid 7 which generate | occur | produced by managing at high temperature in the temperature control tank 6 can also be suppressed.

Claims (2)

금속 소재를 순차적으로 공급하여 탈지공정(2)과 산처리공정(3)과 중화공정(4)을 거쳐 금속소재(1) 표면을 세정한 다음 도포조(7)에 침적되어 감광액(5)계면의 도포봉(11a, 11b) 사이를 거치면서 금속소재 양면에 감광액(15)이 도포되고 건조공정(9)을 거쳐 금속소재(1) 양면에 도포막(12)을 얻을 수 있는 방법에 있어서, 도포봉(11a, 11b)에 열을 가하고 그 열원을 온도조절장치(10a, 10b) 및 온도감지기(13)로 섭씨 30° 이하에서 제어하여 도포막(12)의 두께를 조절하고 온도조절탱크(6)의 온도를 두 개의 도포봉(11a, 11b)중 온도가 낮은 도포봉의 온도와 일치시켜 감광액(5)의 온도를 조절하도록 구성된 것을 특징으로 하는 금속표면의 감광액 도포방법.The metal material is sequentially supplied, washed with degreasing (2), acid treatment (3), and neutralization (4) to clean the surface of the metal material (1), and then deposited in an application bath (7) to interface with the photoresist (5). In the method of obtaining the coating film 12 on both sides of the metal material 1 by applying the photosensitive liquid 15 to both sides of the metal material while passing between the application rods (11a, 11b) of the Apply heat to the coating rods 11a and 11b and control the heat source with the temperature adjusting devices 10a and 10b and the temperature sensor 13 at 30 degrees Celsius or less to adjust the thickness of the coating film 12 and to adjust the temperature adjusting tank ( 6) adjusting the temperature of the photosensitive liquid (5) by matching the temperature of the two coating rods (11a, 11b) with the temperature of the lower application rod. 탈지공정부(2)와, 산처리 공정부(3)와, 중화공정부(4) 등 금속 소재(1)표면을 세정하는 부와 금속소재(1)가 감광액(5)에 침적되는 도포조( 감광액(5)을 일정한 온도로 조정하여 도포조(7)에 공급하는 온도조절탱크(6)와, 도포조(7)의 감광액(5) 계면에 설치되어 금속소재(1) 양면에 감광액(5)을 도포하는 두 개의 도포봉(11a, 11b)과, 금속소재(1)양면에 도포된 감광액(5)을 건조시켜 도포막을 얻을 수 있는 건조공정부(9)로 구성된 것에 있어서, 도포막(12)의 두께를 제어하는 도포봉(11a, 11b)의 관통된 중심부(17)에 열원공급로(14)를 연결하고 도포봉(11a, 11b)의 온도를 섭씨 30°이하에서 제어하고 온도조절탱크(6)의 온도를 두 개의 도포봉(11a, 11b) 중 온도가 낮은 도포봉의 온도와 일치시킬 수 있도록 한 온도조절장치(10a, 10b)와 온도감지기(13)를 포함하여 구성된 것을 특징으로 하는 금속 표면의감광액 도포장치.A part for cleaning the surface of the metal material 1, such as a degreasing step 2, an acid treatment step 3, a neutralization step 4, and a coating tank in which the metal material 1 is deposited on the photosensitive liquid 5 (The temperature control tank 6 which adjusts the photosensitive liquid 5 to a constant temperature, and supplies it to the coating tank 7 and the photosensitive liquid 5 interface of the coating tank 7 are installed on both surfaces of the metal material 1). 5) A coating film comprising two coating rods 11a and 11b for applying a coating and a drying step 9 for drying a photoresist 5 coated on both sides of the metal material 1 to obtain a coating film. The heat source supply path 14 is connected to the penetrated central portion 17 of the application rods 11a and 11b for controlling the thickness of the 12, and the temperature of the application rods 11a and 11b is controlled at 30 degrees Celsius or less. It comprises a temperature control device (10a, 10b) and the temperature sensor 13 to adjust the temperature of the control tank (6) to match the temperature of the lower application temperature of the two coating rods (11a, 11b) Ugh A photosensitive liquid coating device on a metal surface.
KR1019900006139A 1990-04-30 1990-04-30 Apparatus and method for coating the sensitizer of the metal surface Expired - Fee Related KR0119012B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100286738B1 (en) * 1998-06-29 2001-04-16 김무 double-faced spread device of sensitizer

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100396905B1 (en) * 1996-06-28 2003-11-20 엘지마이크론 주식회사 Coating apparatus of photosensitive layer of metal sheet material
JPH10314652A (en) * 1997-05-20 1998-12-02 Dainippon Screen Mfg Co Ltd Method for applying coating liquid to metallic sheet and coating applicator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100286738B1 (en) * 1998-06-29 2001-04-16 김무 double-faced spread device of sensitizer

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