JPH10314652A - Method for applying coating liquid to metallic sheet and coating applicator - Google Patents

Method for applying coating liquid to metallic sheet and coating applicator

Info

Publication number
JPH10314652A
JPH10314652A JP9147238A JP14723897A JPH10314652A JP H10314652 A JPH10314652 A JP H10314652A JP 9147238 A JP9147238 A JP 9147238A JP 14723897 A JP14723897 A JP 14723897A JP H10314652 A JPH10314652 A JP H10314652A
Authority
JP
Japan
Prior art keywords
coating liquid
metal sheet
coating
temperature
metallic sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9147238A
Other languages
Japanese (ja)
Inventor
Toshikimi Takeuchi
稔公 武内
Naotake Tanaka
尚武 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP9147238A priority Critical patent/JPH10314652A/en
Priority to KR1019980004041A priority patent/KR100287929B1/en
Publication of JPH10314652A publication Critical patent/JPH10314652A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/14Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2229/00Details of cathode ray tubes or electron beam tubes
    • H01J2229/07Shadow masks
    • H01J2229/0727Aperture plate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/06Screens for shielding; Masks interposed in the electron stream
    • H01J29/07Shadow masks for colour television tubes

Landscapes

  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To make it possible to obviate the generation of air bubbles in the coating liquid packed into respective recessed parts and to form very fine through-holes of desired shapes by measuring the atmosphere temp. on the circumference of a metallic sheet formed with the plural very fine recessed parts and adjusting the temp. of this metallic sheet according to the result of the measurement. SOLUTION: A temp. sensor 30 is so disposed as to face the front surface of the metallic sheet 1 formed with the plural very recessed parts by a coating application section 14 on the side just before the metallic sheet 1 in its transporting direction and a metallic sheet heating section 32 equipped with an electric heater 34 is disposed to face the rear surface of the metallic sheet 1 within a coating booth 12. The electric heater 34 of this metallic sheet heating section 32 measures the atmosphere temp. on the circumference of the metallic sheet 1 in accordance with the detection signal from the temp. sensor 30 and the temp. of the metallic sheet 1 is so adjusted according to the result of the measurement that the specified temp. of the metallic sheet 1 is always maintained.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、金属薄板の主面
に形成された複数の微細な凹窩部に塗布液を充填する金
属薄板への塗布液の塗布方法および塗布装置に関し、特
に、カラー受像管用のシャドウマスク、トリニトロン
(登録商標)管用等のアパーチャグリル、半導体素子用
のリードフレームなどをフォトエッチング法を利用して
製造する場合に、金属薄板の主面にエッチング抵抗層を
形成(裏止め)する際に好適に用いられる金属薄板への
塗布液の塗布方法および塗布装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for applying a coating liquid to a thin metal sheet, which fills a plurality of fine concave portions formed on the main surface of the thin metal sheet with the coating liquid. When manufacturing a shadow mask for a picture tube, an aperture grill for a Trinitron (registered trademark) tube, a lead frame for a semiconductor device, etc. by using a photo-etching method, an etching resistance layer is formed on the main surface of a thin metal plate (back side). The present invention relates to a method and an apparatus for applying a coating liquid to a metal thin plate which is preferably used when stopping.

【0002】[0002]

【従来の技術】カラー受像管用のシャドウマスク、特に
高解像度カラー受像管用のシャドウマスクは、一般に、
2段階のエッチング工程を経て製造される。すなわち、
まず、両主面に所定のパターンを有するレジスト膜がそ
れぞれ被着形成された金属薄板に対し、スプレイノイズ
からエッチング液を両面または片面に吹き付けて、金属
薄板の両面または片面に貫通しない程度の多数の凹窩部
を形成する(第1エッチング工程)。次に、金属薄板の
両面をエッチングしたときはそのうちの一方の面に、片
面をエッチングしたときは多数の凹窩部が形成されたそ
の面に、耐エッチング性を有するUV樹脂などの塗布液
を塗布して、一方の面側に形成された多数の凹窩部に塗
布液を充填し、その面を塗布液によって被覆する(裏止
め工程)。そして、金属薄板に対し、スプレイノズルか
らエッチング液を塗布液で被覆されていない面に吹き付
け、その面に形成された多数の凹窩部(第1エッチング
工程で両面エッチングしたとき)または金属露出面(第
1エッチング工程で片面エッチングしたとき)を、塗布
液で被覆された面側に形成された多数の凹窩部と連通す
るまでエッチングして、金属薄板に表裏で貫通する多数
の微細な透孔を形成する(第2エッチング工程)。
2. Description of the Related Art A shadow mask for a color picture tube, particularly a shadow mask for a high-resolution color picture tube, is generally formed by:
It is manufactured through a two-stage etching process. That is,
First, an etching solution is sprayed on both sides or one side from spray noise to a metal sheet on which a resist film having a predetermined pattern is formed on both main surfaces, so that it does not penetrate both sides or one side of the metal sheet. Are formed (first etching step). Next, when both surfaces of the metal sheet are etched, one surface thereof is etched, and when one surface is etched, a coating liquid such as an UV-resistant resin having etching resistance is applied to the surface where a number of concave portions are formed. After application, the coating liquid is filled into a large number of concave portions formed on one surface side, and the surface is covered with the coating liquid (backing step). Then, an etching solution is sprayed from a spray nozzle onto the surface not coated with the coating solution on the thin metal plate, and a number of concave portions formed on the surface (when both surfaces are etched in the first etching step) or a metal exposed surface. (When one side is etched in the first etching step) is etched until it communicates with the many concave portions formed on the surface side coated with the coating solution, and a large number of fine transparent members penetrating the metal sheet from the front to the back. A hole is formed (second etching step).

【0003】上記したような2段階エッチング法におけ
る裏止め工程において、UV樹脂などの塗布液を金属薄
板の凹窩部形成面に塗布して、多数の凹窩部に塗布液を
充填しその面を塗布液で被覆するのに、例えば実開平6
−33150号公報に開示されたような塗布液の塗布装
置が使用される。
In the backing step in the above-described two-step etching method, a coating liquid such as a UV resin is applied to the surface of the thin metal plate on which the concave portions are formed, and a number of the concave portions are filled with the coating liquid and the surface is coated. Is coated with a coating solution, for example,
No. 33150 discloses a coating liquid coating apparatus.

【0004】同号公報に開示された塗布装置は、帯状の
金属薄板の搬送方向に距離を隔てて平滑ローラからなる
スキージローラと溝付きローラからなるスキージローラ
とを配設するとともに、3本のバックアップローラを、
バックアップローラ間に各スキージローラがそれぞれ配
置されるように配設し、各バックアップローラの上面
を、2本のスキージローラの両下面を含む平面よりそれ
ぞれ上方に位置させ、また、それぞれのスキージローラ
の、金属薄板の搬送方向の手前に、金属薄板上へ塗布液
を供給する供給パイプをそれぞれ配設して構成されてい
る。この塗布装置では、金属薄板が平滑ローラからなる
スキージローラに接触しながらその配設位置を通過する
ことにより、供給パイプから金属薄板上へ供給された塗
布液が、金属薄板の表面に形成された多数の微細な凹窩
部に充填され、続いて、金属薄板が溝付きローラからな
るスキージローラに接触しながらその配設位置を通過す
ることにより、供給パイプから金属薄板上へ供給された
塗布液が金属薄板の表面に塗り重ねられて、金属薄板の
表面が所定の厚みの塗布膜で被覆される。
In the coating apparatus disclosed in the publication, a squeegee roller composed of a smooth roller and a squeegee roller composed of a grooved roller are arranged at a distance in a conveying direction of a strip-shaped metal sheet, and three squeegee rollers are provided. Backup roller,
Each squeegee roller is disposed between the backup rollers, and the upper surface of each backup roller is positioned above a plane including both lower surfaces of the two squeegee rollers, respectively. A supply pipe for supplying the coating liquid onto the metal thin plate is disposed in front of the metal thin plate in the transport direction. In this coating apparatus, the coating liquid supplied from the supply pipe onto the thin metal plate was formed on the surface of the thin metal plate by passing the thin metal plate through the disposition position while contacting the squeegee roller formed of a smooth roller. The coating liquid supplied to the metal thin plate from the supply pipe by being filled in a number of fine concave portions and subsequently passing through the disposition position while the metal thin plate is in contact with the squeegee roller formed of the grooved roller while being in contact therewith. Is applied over the surface of the metal sheet, and the surface of the metal sheet is covered with a coating film having a predetermined thickness.

【0005】[0005]

【発明が解決しようとする課題】実開平6−33150
号公報に開示されたような塗布液の塗布装置を使用して
金属薄板の表面に塗布液を塗布する場合、冬期などにお
いて装置周囲の温度が低下すると、金属薄板の温度も低
下する。そして、温度が低下した金属薄板の表面に塗布
液を塗布すると、塗布液は金属薄板に熱を奪われ、この
結果、金属薄板の表面に塗布される塗布液の粘度が高く
なる。
Problems to be Solved by the Invention
When a coating liquid is applied to the surface of a metal thin plate using a coating liquid coating apparatus as disclosed in Japanese Patent Application Laid-Open Publication No. H11-107, if the temperature around the apparatus decreases in winter or the like, the temperature of the metal thin plate also decreases. When the coating liquid is applied to the surface of the thin metal sheet whose temperature has decreased, the coating liquid loses heat to the thin metal sheet, and as a result, the viscosity of the coating liquid applied to the surface of the thin metal sheet increases.

【0006】ここで、上記したように、金属薄板が平滑
ローラからなるスキージローラに接触しながら移動する
ことにより、供給パイプから金属薄板上へ供給されたU
V樹脂などの塗布液によって金属薄板の表面の微細な凹
窩部が穴埋めされる際、図2の(a)に示すように、金
属薄板1の表面の微細な凹窩部2の内部の空気溜り3
は、スキージローラ4によって押し込まれる塗布液5に
より凹窩部2内から押し出されて塗布液5と置換する。
そして、凹窩部2内から押し出された空気は、細かな気
泡6となって金属薄板1上の塗布液5中に混入する。こ
のとき、塗布液5の粘度が適当に低いと、図2の(b)
に示すように、金属薄板1上の塗布液5中に混入した気
泡6は、塗布液5中をその表面へ向かって移動し、塗布
液5の表面から空気中へ拡散して、金属薄板1上の塗布
液5中から消滅する。
[0006] Here, as described above, the metal sheet moves while contacting the squeegee roller composed of a smooth roller, so that U supplied from the supply pipe onto the metal sheet is supplied.
When the fine recesses on the surface of the metal sheet are filled with a coating liquid such as V resin, air inside the fine recesses 2 on the surface of the metal sheet 1, as shown in FIG. Pool 3
Is pushed out of the concave portion 2 by the coating liquid 5 pushed by the squeegee roller 4 and is replaced with the coating liquid 5.
The air extruded from the concave portion 2 becomes fine bubbles 6 and mixes into the coating liquid 5 on the thin metal plate 1. At this time, if the viscosity of the coating liquid 5 is appropriately low, FIG.
As shown in (1), the air bubbles 6 mixed in the coating liquid 5 on the metal sheet 1 move in the coating liquid 5 toward the surface thereof, diffuse from the surface of the coating liquid 5 into the air, and It disappears from the upper coating solution 5.

【0007】ところが、上記したように、塗布液5が金
属薄板1に熱を奪われる結果、金属薄板1上の塗布液5
の粘度が高くなると、気泡6は、金属薄板1上の塗布液
5中に閉じ込められたままとなり、多数の気泡6が塗布
液5中に混在することにより、塗布液5の白濁現象が起
こる。そして、図2の(c)に示すように、金属薄板1
の表面の凹窩部2に、気泡6が閉じ込められたままの状
態の塗布液5が充填されることとなる。このように金属
薄板1の表面の凹窩部2に充填された塗布液5中に気泡
が閉じ込められた状態で、金属薄板1に対し第2エッチ
ング工程でエッチング液を供給すると、塗布液5が充填
された凹窩部2内の気泡6の部分へエッチング液が浸入
し、本来エッチングすべきでない部分がエッチングされ
て、所望形状の透孔を形成することができない、といっ
た問題点がある。
However, as described above, as a result of the coating liquid 5 being deprived of heat by the metal sheet 1, the coating liquid 5 on the metal sheet 1 is removed.
When the viscosity increases, the bubbles 6 remain trapped in the coating liquid 5 on the thin metal plate 1, and a large number of bubbles 6 are mixed in the coating liquid 5, causing a clouding phenomenon of the coating liquid 5. Then, as shown in FIG.
Is filled with the coating liquid 5 in a state in which the bubbles 6 are kept trapped. When the etching liquid is supplied to the metal sheet 1 in the second etching step in a state in which the bubbles are trapped in the coating liquid 5 filled in the concave portion 2 on the surface of the metal sheet 1, the coating liquid 5 There is a problem that the etchant penetrates into the portion of the bubble 6 in the filled concave portion 2 and the portion that should not be etched is etched, so that a through hole having a desired shape cannot be formed.

【0008】この発明は、以上のような事情に鑑みてな
されたものであり、複数の微細な凹窩部が形成された金
属薄板の主面に塗布液を塗布したときに、凹窩部に充填
される塗布液中に気泡を生じさせたりすることが無く、
エッチングによって所望形状の微細な透孔を金属薄板に
形成することを可能にするような金属薄板への塗布液の
塗布方法を提供すること、ならびに、その塗布方法を好
適に実施することができる金属薄板への塗布液の塗布装
置を提供することを目的とする。
The present invention has been made in view of the above circumstances, and when a coating liquid is applied to a main surface of a metal sheet having a plurality of fine concave portions formed thereon, the concave portion is formed. No bubbles are generated in the applied coating liquid,
Provided is a method of applying a coating liquid to a thin metal plate, which enables a fine through hole having a desired shape to be formed in the thin metal plate by etching, and a metal capable of suitably performing the coating method. An object of the present invention is to provide an apparatus for applying a coating liquid to a thin plate.

【0009】[0009]

【課題を解決するための手段】請求項1に係る発明は、
複数の微細な凹窩部が形成された金属薄板の主面に塗布
液を塗布して、前記凹窩部に塗布液を充填する金属薄板
への塗布液の塗布方法において、前記金属薄板の温度ま
たは金属薄板の周囲の雰囲気温度を測定し、その測定結
果に応じて金属薄板の温度を調節することを特徴とす
る。
The invention according to claim 1 is
In a method of applying a coating liquid to a metal sheet, in which a coating liquid is applied to a main surface of a metal sheet on which a plurality of fine concave portions are formed, and the concave section is filled with the coating liquid, the temperature of the metal sheet is reduced. Alternatively, an ambient temperature around the metal sheet is measured, and the temperature of the metal sheet is adjusted according to the measurement result.

【0010】請求項2に係る発明は、複数の微細な凹窩
部が形成された金属薄板の主面へ塗布液を供給する塗布
液供給手段と、この塗布液供給手段によって金属薄板の
主面へ供給された塗布液を金属薄板上で塗り拡げて金属
薄板に形成された前記凹窩部に充填する塗布液充填手段
とを備えた金属薄板への塗布液の塗布装置において、前
記金属薄板の温度または金属薄板の周囲の雰囲気温度を
測定する温度測定手段と、この温度測定手段による測定
結果に応じて前記金属薄板の温度を調節する温度調節手
段とを有することを特徴とする。
According to a second aspect of the present invention, there is provided a coating liquid supply means for supplying a coating liquid to a main surface of a metal sheet having a plurality of fine concave portions formed thereon, and the main surface of the metal sheet by the coating liquid supply means. A coating liquid filling means for spreading the coating liquid supplied to the thin metal plate on the thin metal plate and filling the concave portion formed in the thin metal plate with the coating liquid. It is characterized by having temperature measuring means for measuring the temperature or the ambient temperature around the metal sheet, and temperature adjusting means for adjusting the temperature of the metal sheet in accordance with the measurement result by the temperature measuring means.

【0011】請求項3に係る発明は、請求項2記載の塗
布装置において、帯状をなす金属薄板をその長手方向に
搬送し、温度測定手段を、塗布液供給手段および塗布液
充填手段より金属薄板の搬送方向における手前側に設置
したことを特徴とする。
According to a third aspect of the present invention, in the coating apparatus according to the second aspect, the strip-shaped metal sheet is transported in the longitudinal direction, and the temperature measuring means is provided by the coating liquid supply means and the coating liquid filling means. In the transport direction.

【0012】請求項1に係る発明の塗布方法によると、
冬期などにおいて金属薄板の温度が低下しても、金属薄
板の温度または金属薄板の周囲の雰囲気温度が測定さ
れ、その測定結果に応じて金属薄板の温度が調節される
ので、金属薄板は、加熱されて所定の温度に保たれる。
このため、金属薄板上へ供給された塗布液が金属薄板に
熱を奪われて温度が低下し、その塗布液の粘度が高くな
る、といったことはない。したがって、金属薄板上へ供
給された塗布液が金属薄板の表面に形成された凹窩部に
充填される際に、塗布液と置換して凹窩部内から押し出
された空気が細かな気泡となって金属薄板上の塗布液中
に混入しても、塗布液の粘度が低いために、塗布液中に
混入した気泡は、図2の(b)に示したように塗布液中
から空気中へ拡散して消滅する。このため、金属薄板の
表面の凹窩部に充填された塗布液中に気泡を生じること
がない。
According to the coating method of the first aspect,
Even if the temperature of the metal sheet decreases in winter or the like, the temperature of the metal sheet or the ambient temperature around the metal sheet is measured, and the temperature of the metal sheet is adjusted according to the measurement result. And maintained at a predetermined temperature.
Therefore, the coating liquid supplied onto the thin metal plate does not lose heat to the thin metal plate to lower the temperature and increase the viscosity of the coating liquid. Therefore, when the coating liquid supplied onto the metal sheet is filled in the concave portion formed on the surface of the metal sheet, the air that has been displaced with the coating liquid and extruded from the concave portion becomes fine bubbles. However, even if the liquid is mixed into the coating liquid on the thin metal plate, the air bubbles mixed into the coating liquid move from the coating liquid to the air as shown in FIG. 2B because the viscosity of the coating liquid is low. Spread out and disappear. Therefore, no bubbles are generated in the coating liquid filled in the concave portion on the surface of the thin metal plate.

【0013】請求項2に係る発明の塗布装置を使用して
金属薄板の主面への塗布液の塗布を行うときは、冬期な
どにおいて金属薄板の温度が低下しても、温度測定手段
によって金属薄板の温度または金属薄板の周囲の雰囲気
温度が測定され、温度調節手段により、温度測定手段に
よる測定結果に応じて金属薄板の温度が調節されるの
で、金属薄板は、加熱されて所定の温度に保たれる。こ
のため、塗布液供給手段によって金属薄板上へ供給され
た塗布液が金属薄板に熱を奪われて温度が低下し、その
塗布液の粘度が高くなる、といったことはない。したが
って、金属薄板上へ供給された塗布液が塗布液充填手段
により金属薄板の表面の凹窩部に充填される際に、上記
したように、金属薄板表面の凹窩部に充填された塗布液
中に気泡を生じることがない。
When the coating liquid is applied to the main surface of the metal sheet by using the coating apparatus according to the second aspect of the present invention, even if the temperature of the metal sheet decreases in winter or the like, the metal is measured by the temperature measuring means. The temperature of the metal sheet or the ambient temperature around the metal sheet is measured, and the temperature of the metal sheet is adjusted by the temperature adjusting means in accordance with the measurement result by the temperature measuring means, so that the metal sheet is heated to a predetermined temperature. Will be kept. Therefore, the coating liquid supplied to the thin metal plate by the coating liquid supply means does not lose heat to the thin metal plate, so that the temperature does not decrease and the viscosity of the coating liquid does not increase. Therefore, when the coating liquid supplied onto the metal sheet is filled in the concave portion on the surface of the metal sheet by the coating liquid filling means, as described above, the coating liquid filled in the concave portion on the surface of the metal sheet. There are no bubbles inside.

【0014】請求項3に係る発明の塗布装置では、温度
測定手段により、塗布液供給手段および塗布液充填手段
より金属薄板の搬送方向における手前側の位置において
金属薄板の温度または金属薄板の周囲の雰囲気温度が測
定されるので、金属薄板が塗布液や塗布液充填手段(ス
キージローラ)と接触する前の温度が測定されることと
なる。したがって、塗布液の温度変動や塗布液充填手段
の温度変動に影響されないで、塗布液の塗布位置へ送り
込まれる金属薄板が常に所定温度に保たれる。
In the coating apparatus according to the third aspect of the present invention, the temperature of the metal sheet or the temperature around the metal sheet at a position nearer to the metal sheet transport direction than the coating liquid supply means and the coating liquid filling means by the temperature measuring means. Since the ambient temperature is measured, the temperature before the metal sheet comes into contact with the application liquid or the application liquid filling means (squeegee roller) is measured. Accordingly, the metal sheet fed to the application position of the coating liquid is always kept at a predetermined temperature without being affected by the temperature fluctuation of the coating liquid or the temperature fluctuation of the coating liquid filling means.

【0015】[0015]

【発明の実施の形態】以下、この発明の好適な実施形態
について図1を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to FIG.

【0016】図1は、この発明に係る塗布液の塗布方法
を実施するのに使用される塗布液の塗布装置の構成の1
例を示す概略正面断面図である。この塗布装置10は、
図示していないが乾燥装置の下流側に配設されており、
乾燥装置より、例えばシャドウマスク素材である帯状の
金属薄板1が、この塗布装置10の塗布ブース12内へ
搬送されてくる。塗布ブース12内へ搬入されてきた金
属薄板1には、その上面側となる表面に多数の微細な凹
窩部が形成されている。
FIG. 1 shows a configuration of a coating liquid coating apparatus used for carrying out a coating liquid coating method according to the present invention.
It is an outline front sectional view showing an example. This coating device 10
Although not shown, it is arranged downstream of the drying device,
From the drying device, for example, a band-shaped thin metal plate 1 which is a shadow mask material is conveyed into a coating booth 12 of the coating device 10. The metal thin plate 1 carried into the coating booth 12 has a large number of fine concave portions formed on the surface on the upper surface side.

【0017】塗布ブース12の内部には、塗布処理部1
4が設けられており、塗布処理部14には、金属薄板1
の搬送路の下方側に、金属薄板1の搬送方向において互
いに距離を隔てて3本のバックアップローラ16、1
8、20が配設されている。金属薄板1は、これらのバ
ックアップローラ16、18、20に下面側を支持され
て塗布ブース12内を長手方向に搬送される。また、金
属薄板1の搬送路の上方側には、金属薄板1の搬送方向
における手前側の第1のバックアップローラ16と中央
の第2のバックアップローラ18との間に平滑ローラか
らなる第1のスキージローラ22が配設され、また、中
央の第2のバックアップローラ18と第3のバックアッ
プローラ20との間に溝付きローラからなる第2のスキ
ージローラ24が配設されている。そして、各バックア
ップローラ16、18、20は、その上面がスキージロ
ーラ22、24のそれぞれの下面を含む水平面よりそれ
ぞれ上方に位置するように配置されており、金属薄板1
が水平面に対し僅かに下向きおよび上向きになりながら
搬送されるようになっている。さらに、金属薄板1の搬
送路の上方側には、それぞれのスキージローラ22、2
4の、金属薄板1の搬送方向における手前側に、金属薄
板1上へUV樹脂などの塗布液を供給する第1の供給パ
イプ26および第2の供給パイプ28の各吐出口がそれ
ぞれ配設されている。それぞれの供給パイプ26、28
は、塗布液の貯留槽(図示せず)に流路接続されてい
る。
Inside the coating booth 12, a coating processing section 1 is provided.
4 is provided.
The three backup rollers 16, 1 are spaced apart from each other in the transport direction of the metal sheet
8, 20 are provided. The thin metal plate 1 is transported in the coating booth 12 in the longitudinal direction while the lower surface side is supported by these backup rollers 16, 18, and 20. On the upper side of the transport path of the thin metal sheet 1, a first smooth roller is provided between the first backup roller 16 on the near side and the second backup roller 18 at the center in the transport direction of the thin metal sheet 1. A squeegee roller 22 is provided, and a second squeegee roller 24 composed of a grooved roller is provided between the second backup roller 18 and the third backup roller 20 at the center. The backup rollers 16, 18, 20 are arranged such that the upper surface thereof is located above a horizontal plane including the lower surfaces of the squeegee rollers 22, 24, respectively.
Are slightly downward and upward with respect to the horizontal plane. Further, the squeegee rollers 22, 2
4, discharge ports of a first supply pipe 26 and a second supply pipe 28 for supplying a coating liquid such as a UV resin onto the metal sheet 1 are provided on the near side in the transport direction of the metal sheet 1. ing. Each supply pipe 26, 28
Is connected to a flow path of a coating liquid storage tank (not shown).

【0018】また、塗布ブース12の内部には、塗布処
理部14より金属薄板1の搬送方向における手前側に、
金属薄板1の上面と対向するように放射温度計等の温度
センサ30が配設されており、また、金属薄板の下面と
対向するように電気ヒータ34を備えた金属薄板加熱部
32が配設されている。金属薄板加熱部32の電気ヒー
タ34は、温度センサ30からの検知信号に基づいて制
御器(図示せず)により制御される。そして、測定され
た金属薄板1の温度に応じて金属薄板1の温度が調節さ
れ、塗布処理部14へ送り込まれる前の金属薄板1の温
度が常に一定となるように制御されている。なお、図示
例では、温度センサ30によって金属薄板1自体の温度
を測定するようにしているが、金属薄板1の周囲の雰囲
気温度を測定するようにしてもよい。また、図示例で
は、塗布処理部14より金属薄板1の搬送方向における
手前側に温度センサ30を配設しているが、塗布処理部
14より金属薄板1の搬送方向の前方側に温度センサを
配設して、塗布液が塗布された後の金属薄板1の温度を
測定するようにしてもよい。さらに、塗布ブース12に
は隔測温度計36が配設されており、この隔測温度計3
6によって塗布ブース12内の雰囲気温度が測定されて
いて、必要に応じて塗布ブース12内の温度調節も行わ
れる。
Further, inside the coating booth 12, the coating processing section 14 is located on the near side in the transport direction of the metal sheet 1,
A temperature sensor 30 such as a radiation thermometer is provided so as to face the upper surface of the metal sheet 1, and a metal sheet heating unit 32 provided with an electric heater 34 is provided so as to face the lower surface of the metal sheet. Have been. The electric heater 34 of the sheet metal heating unit 32 is controlled by a controller (not shown) based on a detection signal from the temperature sensor 30. Then, the temperature of the metal sheet 1 is adjusted according to the measured temperature of the metal sheet 1, and the temperature of the metal sheet 1 before being sent to the coating processing unit 14 is controlled to be always constant. In the illustrated example, the temperature of the metal sheet 1 itself is measured by the temperature sensor 30, but the ambient temperature around the metal sheet 1 may be measured. Further, in the illustrated example, the temperature sensor 30 is disposed on the near side in the transport direction of the thin metal sheet 1 from the coating processing unit 14, but the temperature sensor is provided on the forward side in the transport direction of the thin metal sheet 1 from the coating processing unit 14. Alternatively, the temperature of the metal sheet 1 after the application liquid is applied may be measured. Further, the coating booth 12 is provided with a remote thermometer 36.
The ambient temperature inside the coating booth 12 is measured by 6 and the temperature inside the coating booth 12 is adjusted as needed.

【0019】上記構成の塗布装置では、温度センサ30
によって金属薄板1の温度を測定し、その測定結果に応
じて金属薄板加熱部32の電気ヒータ34を制御して、
金属薄板1の温度が一定に保たれる。したがって、冬期
などにおいても、供給パイプ26、28から金属薄板1
上へ供給された塗布液が金属薄板1に熱を奪われて温度
が低下し、その塗布液の粘度が高くなる、といったこと
は起こらず、金属薄板1の表面の多数の微細な凹窩部に
充填された塗布液中に気泡を生じる心配が無い。
In the coating apparatus having the above configuration, the temperature sensor 30
To measure the temperature of the metal sheet 1, and control the electric heater 34 of the metal sheet heating unit 32 according to the measurement result.
The temperature of the metal sheet 1 is kept constant. Therefore, even in winter or the like, the metal sheet 1 is supplied from the supply pipes 26 and 28.
The coating liquid supplied to the upper surface of the thin metal sheet 1 does not lose heat and the temperature of the coating liquid decreases, and the viscosity of the coating liquid does not increase. There is no need to worry about bubbles occurring in the coating liquid filled in the coating liquid.

【0020】[0020]

【発明の効果】請求項1に係る発明の塗布液の塗布方法
によると、複数の微細な凹窩部が形成された金属薄板の
主面に塗布液を塗布したときに、冬期などにおいても、
凹窩部に充填される塗布液中に気泡を生じることがなく
なり、このため、エッチングによって常に所望形状の微
細な透孔を形成することが可能となる。
According to the method for applying a coating liquid according to the first aspect of the present invention, when the coating liquid is applied to the main surface of a thin metal plate having a plurality of fine concave portions formed therein, even in winter or the like,
Bubbles are not generated in the coating liquid filled in the concave portions, and therefore, it is possible to always form fine through holes having a desired shape by etching.

【0021】請求項2に係る発明の塗布液の塗布装置を
使用すると、請求項1に係る発明の塗布方法を好適に実
施することができ、複数の微細な凹窩部が形成された金
属薄板の主面に塗布液を塗布したときに、冬期などにお
いても、凹窩部に充填される塗布液中に気泡を生じるこ
とがなくなり、このため、エッチングによって常に所望
形状の微細な透孔を形成することが可能となる。
The use of the coating liquid coating apparatus according to the second aspect of the present invention enables the coating method according to the first aspect of the present invention to be suitably implemented, and a metal sheet having a plurality of fine concave portions formed thereon. When the coating liquid is applied to the main surface of the substrate, bubbles are not generated in the coating liquid filled in the concave portion even in winter or the like, so that fine holes having a desired shape are always formed by etching. It is possible to do.

【0022】請求項3に係る発明の塗布装置では、塗布
液の塗布位置へ送り込まれる金属薄板が常に所定温度に
保たれるので、請求項2に係る発明の上記効果が確実に
奏される。
In the coating apparatus according to the third aspect of the present invention, the metal sheet fed to the application position of the coating liquid is always kept at a predetermined temperature, so that the above-mentioned effect of the second aspect of the invention is reliably achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明に係る塗布液の塗布方法を実施するの
に使用される塗布液の塗布装置の構成の1例を示す概略
正面断面図である。
FIG. 1 is a schematic front sectional view showing an example of a configuration of a coating liquid coating apparatus used for performing a coating liquid coating method according to the present invention.

【図2】従来の塗布方法により金属薄板に塗布液を塗布
して金属薄板の微細な凹窩部に塗布液を充填する場合に
おける問題点を説明するための部分拡大側断面図であ
る。
FIG. 2 is a partially enlarged side sectional view for explaining a problem in a case where a coating liquid is applied to a metal thin plate by a conventional coating method and a fine concave portion of the metal thin plate is filled with the coating liquid.

【符号の説明】[Explanation of symbols]

1 金属薄板 10 塗布液の塗布装置 12 塗布ブース 14 塗布処理部 16、18、20 バックアックローラ 22、24 スキージローラ 26、28 塗布液の供給パイプ 30 温度センサ 32 金属薄板加熱部 34 電気ヒータ REFERENCE SIGNS LIST 1 metal thin plate 10 coating liquid coating device 12 coating booth 14 coating processing unit 16, 18, 20 back-up roller 22, 24 squeegee roller 26, 28 coating liquid supply pipe 30 temperature sensor 32 metal thin plate heating unit 34 electric heater

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の微細な凹窩部が形成された金属薄
板の主面に塗布液を塗布して、前記凹窩部に塗布液を充
填する金属薄板への塗布液の塗布方法において、 前記金属薄板の温度または金属薄板の周囲の雰囲気温度
を測定し、その測定結果に応じて金属薄板の温度を調節
することを特徴とする金属薄板への塗布液の塗布方法。
1. A method of applying a coating liquid to a metal sheet in which a coating liquid is applied to a main surface of a thin metal plate having a plurality of fine concave portions formed therein and the concave portion is filled with the coating liquid. A method for applying a coating liquid to a metal sheet, wherein the temperature of the metal sheet or the ambient temperature around the metal sheet is measured, and the temperature of the metal sheet is adjusted according to the measurement result.
【請求項2】 複数の微細な凹窩部が形成された金属薄
板の主面へ塗布液を供給する塗布液供給手段と、 この塗布液供給手段によって金属薄板の主面へ供給され
た塗布液を金属薄板上で塗り拡げて金属薄板に形成され
た前記凹窩部に充填する塗布液充填手段と、を備えた金
属薄板への塗布液の塗布装置において、 前記金属薄板の温度または金属薄板の周囲の雰囲気温度
を測定する温度測定手段と、 この温度測定手段による測定結果に応じて前記金属薄板
の温度を調節する温度調節手段と、を有することを特徴
とする金属薄板への塗布液の塗布装置。
2. A coating liquid supply means for supplying a coating liquid to a main surface of a metal sheet having a plurality of fine concave portions formed thereon, and a coating liquid supplied to the main surface of the metal sheet by the coating liquid supply means. Means for applying a coating liquid to the metal sheet, comprising: coating the metal sheet with a coating liquid filling means for filling the concave portion formed in the metal sheet by spreading the metal sheet on the metal sheet. Coating a coating liquid on a metal sheet, comprising: a temperature measuring means for measuring a surrounding atmosphere temperature; and a temperature adjusting means for adjusting a temperature of the metal sheet according to a measurement result by the temperature measuring means. apparatus.
【請求項3】 金属薄板が、帯状をなしその長手方向に
搬送され、温度測定手段が、塗布液供給手段および塗布
液充填手段より金属薄板の搬送方向における手前側に設
置された請求項2記載の金属薄板への塗布液の塗布装
置。
3. The metal sheet is formed in a belt shape and is conveyed in the longitudinal direction thereof, and the temperature measuring means is provided on the near side in the conveying direction of the metal sheet with respect to the application liquid supply means and the application liquid filling means. For applying coating liquid to thin metal plates.
JP9147238A 1997-05-20 1997-05-20 Method for applying coating liquid to metallic sheet and coating applicator Pending JPH10314652A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9147238A JPH10314652A (en) 1997-05-20 1997-05-20 Method for applying coating liquid to metallic sheet and coating applicator
KR1019980004041A KR100287929B1 (en) 1997-05-20 1998-02-11 Application method and application device of coating liquid to metal thin plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9147238A JPH10314652A (en) 1997-05-20 1997-05-20 Method for applying coating liquid to metallic sheet and coating applicator

Publications (1)

Publication Number Publication Date
JPH10314652A true JPH10314652A (en) 1998-12-02

Family

ID=15425707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9147238A Pending JPH10314652A (en) 1997-05-20 1997-05-20 Method for applying coating liquid to metallic sheet and coating applicator

Country Status (2)

Country Link
JP (1) JPH10314652A (en)
KR (1) KR100287929B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102205403B1 (en) 2014-10-08 2021-01-21 삼성디스플레이 주식회사 Packing container for deposition mask
KR102541449B1 (en) 2015-12-22 2023-06-09 삼성디스플레이 주식회사 Mask assembly for thin film deposition

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0119012B1 (en) * 1990-04-30 1997-09-30 조희재 Apparatus and method for coating the sensitizer of the metal surface

Also Published As

Publication number Publication date
KR100287929B1 (en) 2001-10-25
KR19980086500A (en) 1998-12-05

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