KR100287929B1 - Application method and application device of coating liquid to metal thin plate - Google Patents

Abstract

When the coating liquid is applied to the main surface of the metal thin plate on which the plurality of fine recesses are formed, air bubbles are not generated in the coating liquid filled into the recesses, and fine pores of a desired shape are formed by etching. The present invention provides a method for making it possible to form a metal sheet.

The temperature of the metal foil 1 or the ambient temperature around the metal foil is measured by the temperature sensor 30, and the heater 34 is controlled according to the measurement result to adjust the temperature of the metal foil.

Description

Coating method and coating apparatus for coating liquid on thin metal plate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating method and a coating apparatus for applying a coating liquid to a metal thin plate in which a plurality of fine recesses formed on a main surface of the metallic thin plate are filled with a coating liquid. When forming an etching grill on the main surface of a metal thin plate when manufacturing an upper grill such as a trinitron (registered trademark) or a lead frame for a semiconductor device using a photoetching method It relates to a coating method and a coating apparatus of a coating liquid to a metal thin plate preferably used.

Color water tube shadow masks, particularly high-resolution color water tube shadow masks, are generally manufactured by a two-step etching process. That is, first, a plurality of recesses are formed so as not to penetrate both sides or one side of the metal sheet by spraying etching liquid onto both sides or one side of the metal thin plate formed by depositing a resist film having a predetermined pattern on both main surfaces, respectively. (1st etching process). Next, when etching both surfaces of the metal thin plate, a coating liquid such as a UV resin having resistance to etching is applied to one surface of the metal thin plate, and the surface where a plurality of recesses are formed when one surface is etched. A plurality of recesses formed on the side surface are filled with the coating liquid and the surface is coated with the coating liquid (backside blocking step). Then, the etching liquid is sprayed on the surface of the metal thin plate not coated with the coating liquid from the spray nozzle, and a plurality of concave portions (when both surfaces are etched in the first etching process) or metal exposed surfaces (in the first etching process) formed on the surface. Etching only one side) is etched until it communicates with a plurality of recesses formed on the side coated with the coating liquid, thereby forming a plurality of fine perforations penetrating the front and back on the metal thin plate (second etching step). .

In the process of applying the back film in the two-step etching method as described above, a coating liquid such as UV resin is applied to the concave forming surface of the metal thin plate, and the coating liquid is filled in a plurality of the concave portions to apply the coating liquid. As coating, for example, a coating apparatus for coating liquid as disclosed in Japanese Patent Application Laid-Open No. 6-33150 is used.

The coating device disclosed in the above publication is provided with a squeegee roller made of a smoothing roller and a grooved roller at a distance in the conveying direction of a strip-shaped metal sheet, and between three backup roller rolls and a backup roller. Each squeegee roller is provided so that each may be arrange | positioned, respectively, and the upper surface of each backup roller may be located above the plane containing both lower surfaces of two squeegee rollers, and also just in front of the conveyance direction of the metal sheet of each squeegee roller. Each of the supply pipes for supplying the coating liquid onto the thin metal plate is configured. In this coating device, the coating liquid supplied from the supply pipe onto the metal foil is filled in a plurality of fine recesses formed on the surface of the metal foil by passing the installation position while the metal foil contacts the squeegee roller made of the smoothing roller. Subsequently, the thin metal sheet passes through the installation position while contacting the squeeze roller made of the grooved roller, so that the coating liquid supplied from the supply pipe onto the metal thin plate is overlaid on the surface of the metal thin plate, thereby providing a predetermined surface of the metal thin plate. It is coat | covered with the coating film of thickness.

When the coating liquid is applied to the surface of the metal thin plate using the coating apparatus of the coating liquid as disclosed in Japanese Patent Application Laid-open No. Hei 6-33150, when the temperature around the apparatus decreases in winter or the like, the temperature of the metal thin plate also decreases. And when a coating liquid is apply | coated to the surface of the metal thin plate which temperature fell, the coating liquid will lose heat to a metal thin plate, As a result, the viscosity of the coating liquid apply | coated to the surface of a metal thin plate will become high.

Here, as described above, by moving the metal thin plate in contact with the squeegee roller made of the smoothing roller, fine recesses on the surface of the metal thin plate can be filled with a coating liquid such as UV resin supplied from the supply pipe onto the metal thin plate. At this time, as shown in Fig. 2A, the air remaining portion 3 inside the fine concave portion 2 on the surface of the metal thin plate 1 is filled with the coating liquid 5 by the squeegee roller 4. Is extruded from the recess 2 to replace the coating liquid 5. And the air extruded from the recessed part 2 turns into the fine bubble 6, and mixes into the coating liquid 5 on the metal thin plate 1. As shown in FIG. At this time, if the viscosity of the coating liquid 5 is moderately low, as shown in FIG. 2 (b), the bubbles 6 mixed in the coating liquid 5 on the metal thin plate 1 are coated with the coating liquid 5. ) Is moved toward the surface thereof, and diffuses from the surface of the coating liquid 5 into the air to dissipate in the coating liquid 5 on the metal thin plate 1.

However, as described above, when the coating liquid 5 is deprived of heat to the metal thin plate 1, when the viscosity of the coating liquid 5 on the metal thin plate 1 becomes high, the bubble 6 becomes the metal thin plate 1 A large number of bubbles 6 are mixed in the coating liquid 5 while being confined in the coating liquid 5 of the phase, so that turbidity of the coating liquid 5 occurs. As shown in FIG. 2C, the coating liquid 5 is filled in the tm state in which the bubbles 6 are closed in the recesses 2 on the surface of the metal thin plate 1. Thus, when the etching liquid is supplied to the metal thin plate 1 in the 2nd etching process in the state in which the bubble was closed in the coating liquid 5 filled in the recessed part 2 of the surface of the metal thin plate 1, a coating liquid ( 5) is filled, the etching liquid penetrates into the part of the bubble 6 in the recessed part 2, and the part which should not be etched originally is etched, and the hole of a desired shape could not be formed.

This invention is made | formed in view of the above circumstances, and when an application liquid is apply | coated to the main surface of the metal thin plate in which several fine recesses were formed, it does not generate | occur | produce a bubble in the coating liquid filled in a recess, and etching By providing a method for applying the coating liquid to the metal thin plate which enables to form fine perforations of a desired shape in the metal thin plate, and further, a coating liquid to the metal thin plate which can preferably be applied. An object of the present invention is to provide a coating device.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic front sectional view showing an example of the configuration of a coating apparatus for coating liquid used to carry out a coating liquid coating method according to the present invention;

2 is a partially enlarged cross-sectional view for explaining a problem in the case where the coating liquid is applied to the metal thin plate by a conventional coating method to fill the fine liquid in the thin recess of the metal thin plate.

<Explanation of simple symbols in the drawing>

One … Metal sheet, 10... Coating device for coating liquid,

12... Booth, 14... Coating treatment unit,

16, 18, 20... Backup roller, 22, 24... Squeegee roller,

26, 28... Supply pipe for coating liquid; temperature Senser,

32. Metal sheet heating portion, 34. Electric heater.

In the invention of the first aspect, a plurality of recesses are formed on both sides or one side of a metal thin plate, and a coating liquid having resistance to etching is applied to one surface on which the recess is formed, and the coating liquid is filled in the recess to apply the one surface. A method of forming a plurality of perforations penetrating back and forth through a metal sheet by etching the uncoated surface, followed by etching with a liquid, wherein the coating liquid having the above-mentioned resistance is applied to fill the recess with the coating liquid. At the time, the temperature of the metal foil or the ambient temperature around the metal foil is measured, and the temperature of the metal foil is adjusted according to the measurement result.

According to a second aspect of the present invention, a coating liquid supplying means for supplying a coating liquid to a main surface of a metal thin plate having a plurality of fine recesses and a coating liquid supplied to the main surface of the metal thin plate by the coating liquid supplying means are spread and applied on the metal thin plate. A coating apparatus for applying a coating liquid to a metal thin plate having a coating liquid filling means for filling the recess formed in the metal thin plate, comprising: temperature measuring means for measuring the temperature of the metal thin plate or the ambient temperature around the metal thin plate; And a temperature adjusting means for controlling the temperature of the metal sheet according to the measurement result by the temperature measuring means.

According to a third aspect of the present invention, in the coating apparatus according to the second aspect, a strip-shaped metal sheet is conveyed in the longitudinal direction, and the temperature measuring means is conveyed in the conveying direction of the metal plate rather than the coating liquid supplying means and the coating liquid filling means. Characterized in that installed just in front of the.

According to the invention according to the first aspect, even if the temperature of the metal sheet decreases in winter or the like, the ambient temperature is measured around the temperature of the metal sheet or around the metal sheet, and the temperature of the metal sheet is adjusted according to the measurement result. The thin plate is heated to maintain a predetermined temperature. For this reason, the coating liquid supplied over the metal thin plate takes heat away from the metal thin plate, and temperature does not fall, and the viscosity of the coating liquid does not become high. Therefore, when the coating liquid supplied onto the thin metal sheet is filled into the recess formed on the surface of the metallic sheet, the coating liquid is replaced with the coating liquid even if the air extruded from the recess becomes a fine bubble and mixes into the coating liquid on the metallic sheet. Since the viscosity of is low, bubbles mixed in the coating liquid are diffused into the air from the coating liquid and removed as shown in FIG. For this reason, it fills in the recessed part of the surface of a metal thin plate, and does not produce a bubble in a coating liquid.

When applying the coating liquid to the main surface of the metal thin plate using the coating apparatus of the second aspect, even if the temperature of the metal foil decreases in winter or the like, the temperature of the metal thin plate or the ambient temperature around the metal thin plate by the temperature measuring means. Since the temperature of the metal thin plate is adjusted by the temperature adjusting means in accordance with the measurement result by the temperature measuring means, the metal thin plate is heated and maintained at a predetermined temperature. For this reason, the coating liquid supplied to the metallic thin plate by the coating liquid supplying means loses heat to the metallic thin plate, and the temperature does not fall, and the viscosity of the coating liquid does not become high. Therefore, when the coating liquid supplied over the metal thin plate is filled by the coating liquid filling means to the recessed portion of the surface of the metal thin plate, as described above, bubbles are generated in the coating liquid filled into the recessed portion of the metal thin plate surface. There is no

In the coating apparatus of the invention of the third aspect, the temperature of the metal thin plate or the temperature of the metal thin plate or the temperature of the metal thin plate is measured by the temperature measuring means at a position just in front of the coating liquid supplying means and the coating liquid filling means in the conveying direction. Since the ambient ambient temperature is measured, the temperature before the metal thin plate contacts the coating liquid or the coating liquid filling means (squeegee roller) tube is measured. Therefore, the metal thin plate sent to the coating position of the coating liquid is always maintained at a predetermined temperature without affecting the temperature variation of the coating liquid or the temperature variation of the coating liquid filling means.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of this invention is described, referring FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic front sectional drawing which shows an example of a structure of the coating apparatus of the coating liquid used for implementing the coating method of the coating liquid which concerns on this invention. Although not shown, this coating device 10 is provided on the downstream side of the drying device, and in the drying device, a strip-shaped metal thin plate 1 made of, for example, a shadow mask material, is introduced into the coating booth 12 of the coating device 10. It is returned. In the metal thin plate 1 carried into the coating booth 12, many fine recesses are formed in the surface used as the upper surface side.

The coating treatment part 14 is provided inside the coating booth 12, and the coating processing part 14 is spaced apart from each other in the conveying direction of the metal thin plate 1 below the conveyance path of the metal thin plate 1, Two backup rollers 16, 18 and 20 are provided. The metal foil 1 is supported by the back-up rollers 16, 18, and 20 on the lower surface side, and the inside of the coating booth 12 is conveyed in the longitudinal direction. In addition, the upper part of the conveyance path of the thin metal plate 1 consists of a smoothing roller between the 1st backup roller 16 immediately ahead in the conveyance direction of the metal foil 1, and the 2nd backup roller 18 of the center. The 1st squeegee roller 22 is provided, and the 2nd squeegee roller 24 which consists of a grooved roller is provided between the center 2nd backup roller 18 and the 3rd backup roller 20. As shown in FIG. Each of the backup rollers 16, 18, and 20 is provided so that its upper surface is located above the horizontal surface including the lower surface of each of the squeegee rollers 24, and above the conveying path of the metal thin plate 1, respectively. First supply pipe 26 and second supply for supplying a coating liquid, such as UV resin, onto the metal foil 1 immediately before the conveyance direction of the gold grain foils 1 of the respective squeegee rollers 22, 24. Each discharge port of the pipe 26 is provided, respectively. Each of the supply pipes 26 and 28 is connected to a flow path (not shown) of the coating liquid.

In addition, a temperature sensor 30 such as a radiation thermometer is installed inside the coating booth 12 so as to face the upper surface of the metal foil 1 in front of the coating processing part 14 in the conveying direction of the metal foil 1. In addition, a metal sheet heating portion 32 having an electric heater 34 is provided so as to face the lower surface of the metal sheet. The electric heater 34 of the metal sheet heating part 32 is controlled by a controller (not shown) based on the detection signal from the temperature sensor 30. Then, the temperature of the metal thin plate 1 is controlled in accordance with the measured temperature of the metal thin plate 1, and the temperature of the metal thin plate 1 before being sent to the table processing unit 14 is controlled to be constant at all times. In addition, although the temperature of the metal foil 1 itself is measured by the temperature sensor 30 in the example of illustration, you may make it measure the ambient temperature of the metal foil 1 surrounding. In addition, although the temperature sensor 30 is provided in the illustration in the conveyance direction of the metal thin plate 1 rather than the coating process part 14, the back side of the conveyance direction of the metal thin plate 1 than the coating process part 14 is provided. A temperature sensor may be provided at the temperature of the metal thin plate 1 after the coating liquid is applied. In addition, the application booth 12 is provided with a telemetry thermometer 36, and the temperature of the atmosphere in the application booth 12 is measured by the telemetry thermometer 36, if necessary. Adjustment is also made.

In the coating apparatus having the above-described configuration, the temperature of the metal thin plate 1 is measured by the temperature sensor 30, and the electric heater 34 of the metal thin plate heating unit 32 is controlled according to the measurement result. The temperature of is kept constant. Therefore, even in winter, the coating liquid supplied from the supply pipes 26 and 28 to the metal thin plate 1 loses heat to the metal thin plate 1 so that the temperature decreases and the viscosity of the coating liquid becomes high. It does not occur, and there is no possibility of generating bubbles in the coating liquid filled in many fine recesses on the surface of the metal thin plate 1.

According to the first aspect of the present invention, when the coating liquid is applied to the main surface of the metal thin plate on which the plurality of fine recesses are formed, no bubbles are generated in the coating liquid filled in the recesses even in the winter season. By etching, it is possible to always form fine perforations of a desired phenomenon.

According to the second aspect, the invention of the first aspect can be preferably carried out, and when the coating liquid is applied to the main name of the metal thin plate on which the plurality of fine recesses are formed, bubbles are also contained in the coating liquid filled in the recess even in winter. Therefore, it is possible to form fine perforations of a desired shape at all times by etching.

According to the 3rd aspect, since the metal thin plate sent to the application position of a coating liquid is always maintained at predetermined temperature, the said effect of invention of a 2nd aspect is reliably achieved.

Claims (1)

A plurality of concave portions are formed on both sides or one side of the metal foil, and a coating liquid having resistance to etching is applied to one surface on which the concave portion is formed, the coating liquid is filled in the concave portion, and the one surface is coated with the coating liquid. A method of forming a plurality of holes penetrating back and forth through a metal sheet by etching the uncoated surface, In the process of applying the dopant having the above-mentioned etching resistance and filling the coating liquid with the recessed portion, the temperature of the metal thin plate or the ambient temperature around the metal thin plate is measured, and the temperature of the metal thin plate is determined according to the measurement result. Perforation forming method of a metal foil, characterized in that for adjusting the.