KR910018089A - Method and apparatus for applying photoresist on metal surface - Google Patents

Method and apparatus for applying photoresist on metal surface Download PDF

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Publication number
KR910018089A
KR910018089A KR1019900006139A KR900006139A KR910018089A KR 910018089 A KR910018089 A KR 910018089A KR 1019900006139 A KR1019900006139 A KR 1019900006139A KR 900006139 A KR900006139 A KR 900006139A KR 910018089 A KR910018089 A KR 910018089A
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KR
South Korea
Prior art keywords
temperature
coating
metal material
photosensitive liquid
rods
Prior art date
Application number
KR1019900006139A
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Korean (ko)
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KR0119012B1 (en
Inventor
이근우
Original Assignee
조희재
금성마이크로닉스 주식회사
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Priority to KR1019900006139A priority Critical patent/KR0119012B1/en
Publication of KR910018089A publication Critical patent/KR910018089A/en
Application granted granted Critical
Publication of KR0119012B1 publication Critical patent/KR0119012B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

내용 없음No content

Description

금속표면의 감광액 도포방법 및 장치Method and apparatus for applying photoresist on metal surface

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 종래의 도포 공정 개요도, 제2도는 종래의 도포봉의 단면도, 제3도는 본 발명에 따른 도포 공정 개요도.1 is a schematic view of a conventional coating process, FIG. 2 is a cross-sectional view of a conventional coating rod, and FIG. 3 is a schematic view of a coating process according to the present invention.

Claims (2)

금속 소재를 순차적으로 공급하여 탈지공정(2)과 산처리공정(3)과 중화공정(4)을 거쳐 금속소재(1)표면을 세정한 다음 도포조(7)에 침착되어 감광액(5)계면의 도포봉(11a,11b)사이를 거치면서 금속소재 양면에 감광액(15)이 도포되고 건조공정(9)을 거쳐 금속소재(1)양면에 도포막(12)을 얻을 수 있는 방법에 있어서, 도포봉(11a,11b)에 열을 가하고 그 열원을 온도조절장치(10a,10b) 및 온도감지기(13)로섭씨30° 이하에서 제어하여 도포막(12)두께를 조절하고 온도조절탱크(6)의 온도를 두개의 도포봉(11a,11b)중 온도가 낮은 도포봉의 온도와 일치시켜 감광액(5)의 온도를 조절하도록 구성된 것을 특징으로 하는 금속표면의 감광액 도포방법.The metal material is sequentially supplied, washed with degreasing (2), acid treatment (3), and neutralization (4) to clean the surface of the metal material (1), and then deposited in an application bath (7) to interface with the photoresist (5). In the method of obtaining the coating film 12 on both sides of the metal material 1 by applying the photosensitive liquid 15 to both sides of the metal material while passing between the application rods (11a, 11b) of the metal material, Heat the coating rods 11a and 11b and control the heat source at 30 degrees Celsius or less with the temperature adjusting devices 10a and 10b and the temperature sensor 13 to adjust the thickness of the coating film 12 and to adjust the temperature adjusting tank 6 And adjusting the temperature of the photosensitive liquid (5) by matching the temperature of the photocoating with the temperature of the lower coating rod in the two coating rods (11a, 11b). 탐지공정부(2)와, 산처리 공정부(3)와, 중화공정부(4)등 금속소재(1)표면을 세정하는 부와 금속소재(1)가 감광액(5)에 침적되는 도포조(7)와, 감광액(5)을 일정한 온도로 조정하여 도포조(7)에 공급하는 온도 조절탱크(6)와, 도포조(7)의 감광액(5) 계면에 설치되어 금속소재(1)양면에 감광액(5)을 도포하는 두 개의 도포봉(11a,11b)고, 금속소재(1) 양면에 도포된 감광액(5)을 건조시켜 도포막을 얻을 수 있는 건조 공정부(9)로 구성된 것에 있어서, 도포막(12)의 두께를 제어하는 도포봉(11a,11b)의 관통된 중심부(17)에 열원공급로(14)를 연결하고 도포봉(11a,11b)의 온도를 섭씨 30° 이하에서 제어하고 온도 조절탱크(6)의 온도를 두개의 도포봉(11a,11b)중 온도가 낮은 도포봉의 온도와 일치시킬수 있도록 한 온도조절장치(10a,10b)와 온도감지기(13)를 포함하여 구성된 것을 특징으로 하는 금속 표면의 감광액 도포장치.A part for cleaning the surface of the metal material 1, such as the detection process part 2, the acid treatment process part 3, the neutralization process part 4, and the coating material in which the metal material 1 is deposited on the photosensitive liquid 5 (7), the temperature control tank (6) for adjusting the photosensitive liquid (5) to a constant temperature and supplying it to the coating tank (7), and the photosensitive liquid (5) interface of the coating tank (7), the metal material (1) It consists of two coating rods 11a and 11b which apply the photosensitive liquid 5 to both surfaces, and the drying process part 9 which can obtain the coating film by drying the photosensitive liquid 5 apply | coated on both sides of the metal material 1 The heat source supply path 14 is connected to the penetrated central portion 17 of the coating rods 11a and 11b for controlling the thickness of the coating film 12, and the temperature of the coating rods 11a and 11b is 30 degrees Celsius or less. Including the temperature control device (10a, 10b) and the temperature sensor 13 to control the temperature of the temperature control tank (6) and to match the temperature of the lower temperature of the two application rods (11a, 11b) Characterized by Photosensitive liquid coating device of a metal surface which. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900006139A 1990-04-30 1990-04-30 Apparatus and method for coating the sensitizer of the metal surface KR0119012B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900006139A KR0119012B1 (en) 1990-04-30 1990-04-30 Apparatus and method for coating the sensitizer of the metal surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900006139A KR0119012B1 (en) 1990-04-30 1990-04-30 Apparatus and method for coating the sensitizer of the metal surface

Publications (2)

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KR910018089A true KR910018089A (en) 1991-11-30
KR0119012B1 KR0119012B1 (en) 1997-09-30

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KR1019900006139A KR0119012B1 (en) 1990-04-30 1990-04-30 Apparatus and method for coating the sensitizer of the metal surface

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KR (1) KR0119012B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100287929B1 (en) * 1997-05-20 2001-10-25 이시다 아키라 Application method and application device of coating liquid to metal thin plate
KR100396905B1 (en) * 1996-06-28 2003-11-20 엘지마이크론 주식회사 Coating apparatus of photosensitive layer of metal sheet material

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100286738B1 (en) * 1998-06-29 2001-04-16 김무 double-faced spread device of sensitizer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100396905B1 (en) * 1996-06-28 2003-11-20 엘지마이크론 주식회사 Coating apparatus of photosensitive layer of metal sheet material
KR100287929B1 (en) * 1997-05-20 2001-10-25 이시다 아키라 Application method and application device of coating liquid to metal thin plate

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Publication number Publication date
KR0119012B1 (en) 1997-09-30

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