JPWO2025177564A5 - - Google Patents

Info

Publication number
JPWO2025177564A5
JPWO2025177564A5 JP2024541275A JP2024541275A JPWO2025177564A5 JP WO2025177564 A5 JPWO2025177564 A5 JP WO2025177564A5 JP 2024541275 A JP2024541275 A JP 2024541275A JP 2024541275 A JP2024541275 A JP 2024541275A JP WO2025177564 A5 JPWO2025177564 A5 JP WO2025177564A5
Authority
JP
Japan
Prior art keywords
shape
opening
area
rectangular
plug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024541275A
Other languages
English (en)
Japanese (ja)
Other versions
JP7753556B1 (ja
JPWO2025177564A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/006631 external-priority patent/WO2025177564A1/ja
Publication of JPWO2025177564A1 publication Critical patent/JPWO2025177564A1/ja
Priority to JP2025165768A priority Critical patent/JP2025178461A/ja
Application granted granted Critical
Publication of JP7753556B1 publication Critical patent/JP7753556B1/ja
Publication of JPWO2025177564A5 publication Critical patent/JPWO2025177564A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024541275A 2024-02-22 2024-02-22 半導体製造装置用部材 Active JP7753556B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025165768A JP2025178461A (ja) 2024-02-22 2025-10-01 半導体製造装置用部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2024/006631 WO2025177564A1 (ja) 2024-02-22 2024-02-22 半導体製造装置用部材

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025165768A Division JP2025178461A (ja) 2024-02-22 2025-10-01 半導体製造装置用部材

Publications (3)

Publication Number Publication Date
JPWO2025177564A1 JPWO2025177564A1 (https=) 2025-08-28
JP7753556B1 JP7753556B1 (ja) 2025-10-14
JPWO2025177564A5 true JPWO2025177564A5 (https=) 2026-01-28

Family

ID=96810904

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2024541275A Active JP7753556B1 (ja) 2024-02-22 2024-02-22 半導体製造装置用部材
JP2025165768A Pending JP2025178461A (ja) 2024-02-22 2025-10-01 半導体製造装置用部材

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025165768A Pending JP2025178461A (ja) 2024-02-22 2025-10-01 半導体製造装置用部材

Country Status (4)

Country Link
US (1) US20250273507A1 (https=)
JP (2) JP7753556B1 (https=)
TW (1) TW202601888A (https=)
WO (1) WO2025177564A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6490145B1 (en) * 2001-07-18 2002-12-03 Applied Materials, Inc. Substrate support pedestal
US11715652B2 (en) * 2018-09-28 2023-08-01 Ngk Insulators, Ltd. Member for semiconductor manufacturing apparatus
JP7441402B2 (ja) * 2019-03-05 2024-03-01 Toto株式会社 静電チャック、および処理装置
JP7382978B2 (ja) * 2021-02-04 2023-11-17 日本碍子株式会社 半導体製造装置用部材及びプラグ
KR102779855B1 (ko) * 2021-02-17 2025-03-10 어플라이드 머티어리얼스, 인코포레이티드 다공성 플러그 본딩
JP7569772B2 (ja) * 2021-10-07 2024-10-18 日本碍子株式会社 半導体製造装置用部材
JP7569342B2 (ja) * 2022-01-21 2024-10-17 日本碍子株式会社 半導体製造装置用部材
JP7483121B2 (ja) * 2022-02-09 2024-05-14 日本碍子株式会社 半導体製造装置用部材

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