JPWO2025046720A5 - - Google Patents

Info

Publication number
JPWO2025046720A5
JPWO2025046720A5 JP2024513175A JP2024513175A JPWO2025046720A5 JP WO2025046720 A5 JPWO2025046720 A5 JP WO2025046720A5 JP 2024513175 A JP2024513175 A JP 2024513175A JP 2024513175 A JP2024513175 A JP 2024513175A JP WO2025046720 A5 JPWO2025046720 A5 JP WO2025046720A5
Authority
JP
Japan
Prior art keywords
ceramic member
central
outer peripheral
peripheral
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024513175A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025046720A1 (https=
JP7751079B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/031085 external-priority patent/WO2025046720A1/ja
Publication of JPWO2025046720A1 publication Critical patent/JPWO2025046720A1/ja
Publication of JPWO2025046720A5 publication Critical patent/JPWO2025046720A5/ja
Application granted granted Critical
Publication of JP7751079B2 publication Critical patent/JP7751079B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024513175A 2023-08-29 2023-08-29 半導体製造装置用部材 Active JP7751079B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/031085 WO2025046720A1 (ja) 2023-08-29 2023-08-29 半導体製造装置用部材

Publications (3)

Publication Number Publication Date
JPWO2025046720A1 JPWO2025046720A1 (https=) 2025-03-06
JPWO2025046720A5 true JPWO2025046720A5 (https=) 2025-08-06
JP7751079B2 JP7751079B2 (ja) 2025-10-07

Family

ID=94773396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024513175A Active JP7751079B2 (ja) 2023-08-29 2023-08-29 半導体製造装置用部材

Country Status (5)

Country Link
US (1) US20250079134A1 (https=)
JP (1) JP7751079B2 (https=)
CN (1) CN121753542A (https=)
TW (1) TW202512376A (https=)
WO (1) WO2025046720A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2026053937A (ja) * 2024-09-13 2026-03-26 日本特殊陶業株式会社 保持装置、および、保持装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6442296B2 (ja) * 2014-06-24 2018-12-19 東京エレクトロン株式会社 載置台及びプラズマ処理装置
JP6540022B2 (ja) * 2014-12-26 2019-07-10 東京エレクトロン株式会社 載置台及びプラズマ処理装置
JP7134104B2 (ja) * 2019-01-09 2022-09-09 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理装置の載置台
JP7579758B2 (ja) * 2021-06-28 2024-11-08 東京エレクトロン株式会社 基板支持体、基板支持体アセンブリ及びプラズマ処理装置
JP7621226B2 (ja) * 2021-09-08 2025-01-24 東京エレクトロン株式会社 基板支持体アセンブリ及びプラズマ処理装置

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