JPWO2025027894A1 - - Google Patents

Info

Publication number
JPWO2025027894A1
JPWO2025027894A1 JP2025538187A JP2025538187A JPWO2025027894A1 JP WO2025027894 A1 JPWO2025027894 A1 JP WO2025027894A1 JP 2025538187 A JP2025538187 A JP 2025538187A JP 2025538187 A JP2025538187 A JP 2025538187A JP WO2025027894 A1 JPWO2025027894 A1 JP WO2025027894A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025538187A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2025027894A1 publication Critical patent/JPWO2025027894A1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/18Epitaxial-layer growth characterised by the substrate
    • C30B25/20Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/38Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2025538187A 2023-07-28 2024-02-19 Pending JPWO2025027894A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023123380 2023-07-28
PCT/JP2024/005738 WO2025027894A1 (ja) 2023-07-28 2024-02-19 Iii族窒化物半導体エピタキシャルウエハ及びデバイス

Publications (1)

Publication Number Publication Date
JPWO2025027894A1 true JPWO2025027894A1 (https=) 2025-02-06

Family

ID=94394994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025538187A Pending JPWO2025027894A1 (https=) 2023-07-28 2024-02-19

Country Status (3)

Country Link
JP (1) JPWO2025027894A1 (https=)
CN (1) CN121488073A (https=)
WO (1) WO2025027894A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6168091B2 (ja) * 2010-08-31 2017-07-26 株式会社リコー Iii族窒化物結晶およびiii族窒化物の結晶基板
JP6785455B2 (ja) * 2018-05-11 2020-11-18 パナソニックIpマネジメント株式会社 発光ダイオード素子、及び発光ダイオード素子の製造方法
JP7117732B2 (ja) * 2018-07-11 2022-08-15 国立大学法人大阪大学 Iii族窒化物基板およびiii族窒化物結晶の製造方法
JP7166998B2 (ja) * 2019-09-20 2022-11-08 株式会社サイオクス 窒化物半導体基板

Also Published As

Publication number Publication date
CN121488073A (zh) 2026-02-06
WO2025027894A1 (ja) 2025-02-06

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