JPWO2025004191A1 - - Google Patents
Info
- Publication number
- JPWO2025004191A1 JPWO2025004191A1 JP2025529055A JP2025529055A JPWO2025004191A1 JP WO2025004191 A1 JPWO2025004191 A1 JP WO2025004191A1 JP 2025529055 A JP2025529055 A JP 2025529055A JP 2025529055 A JP2025529055 A JP 2025529055A JP WO2025004191 A1 JPWO2025004191 A1 JP WO2025004191A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/023832 WO2025004191A1 (ja) | 2023-06-27 | 2023-06-27 | 荷電粒子線装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2025004191A1 true JPWO2025004191A1 (https=) | 2025-01-02 |
Family
ID=93937826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025529055A Pending JPWO2025004191A1 (https=) | 2023-06-27 | 2023-06-27 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPWO2025004191A1 (https=) |
| KR (1) | KR20250150034A (https=) |
| TW (1) | TWI908100B (https=) |
| WO (1) | WO2025004191A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022185390A1 (ja) * | 2021-03-01 | 2022-09-09 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6576923B2 (en) * | 2000-04-18 | 2003-06-10 | Kla-Tencor Corporation | Inspectable buried test structures and methods for inspecting the same |
| JP4248382B2 (ja) * | 2003-12-04 | 2009-04-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビームによる検査方法および検査装置 |
| JP2005268522A (ja) * | 2004-03-18 | 2005-09-29 | Sony Corp | 露光装置、露光方法および半導体装置の製造方法 |
| JP2009531855A (ja) * | 2006-03-27 | 2009-09-03 | マルチビーム システムズ インコーポレイテッド | 高電流密度パターン化荷電粒子ビーム生成のための光学系 |
| JP5188529B2 (ja) | 2010-03-30 | 2013-04-24 | 株式会社日立ハイテクノロジーズ | 電子ビーム照射方法、及び走査電子顕微鏡 |
| JP5823136B2 (ja) * | 2011-02-10 | 2015-11-25 | 株式会社日立ハイテクノロジーズ | 走査型荷電粒子顕微鏡及び試料観察方法 |
| DE112014003984B4 (de) | 2013-09-26 | 2020-08-06 | Hitachi High-Technologies Corporation | Mit einem Strahl geladener Teilchen arbeitende Vorrichtung |
| JP7305422B2 (ja) * | 2019-05-13 | 2023-07-10 | 株式会社日立ハイテク | パターン評価システム及びパターン評価方法 |
| WO2022185390A1 (ja) * | 2021-03-01 | 2022-09-09 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
2023
- 2023-06-27 KR KR1020257030052A patent/KR20250150034A/ko active Pending
- 2023-06-27 WO PCT/JP2023/023832 patent/WO2025004191A1/ja not_active Ceased
- 2023-06-27 JP JP2025529055A patent/JPWO2025004191A1/ja active Pending
-
2024
- 2024-05-30 TW TW113119931A patent/TWI908100B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025004191A1 (ja) | 2025-01-02 |
| TW202501532A (zh) | 2025-01-01 |
| KR20250150034A (ko) | 2025-10-17 |
| TWI908100B (zh) | 2025-12-11 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250731 |