JPWO2024203120A1 - - Google Patents

Info

Publication number
JPWO2024203120A1
JPWO2024203120A1 JP2025510173A JP2025510173A JPWO2024203120A1 JP WO2024203120 A1 JPWO2024203120 A1 JP WO2024203120A1 JP 2025510173 A JP2025510173 A JP 2025510173A JP 2025510173 A JP2025510173 A JP 2025510173A JP WO2024203120 A1 JPWO2024203120 A1 JP WO2024203120A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025510173A
Other languages
Japanese (ja)
Other versions
JPWO2024203120A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024203120A1 publication Critical patent/JPWO2024203120A1/ja
Publication of JPWO2024203120A5 publication Critical patent/JPWO2024203120A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H10D62/107Buried supplementary regions, e.g. buried guard rings 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/415Insulated-gate bipolar transistors [IGBT] having edge termination structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • H10D12/461Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
JP2025510173A 2023-03-30 2024-03-07 Pending JPWO2024203120A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023056392 2023-03-30
PCT/JP2024/008808 WO2024203120A1 (ja) 2023-03-30 2024-03-07 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2024203120A1 true JPWO2024203120A1 (https=) 2024-10-03
JPWO2024203120A5 JPWO2024203120A5 (https=) 2025-12-26

Family

ID=92905631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025510173A Pending JPWO2024203120A1 (https=) 2023-03-30 2024-03-07

Country Status (4)

Country Link
US (1) US20260020294A1 (https=)
JP (1) JPWO2024203120A1 (https=)
CN (1) CN120937526A (https=)
WO (1) WO2024203120A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5188037B2 (ja) * 2006-06-20 2013-04-24 株式会社東芝 半導体装置
JP5205856B2 (ja) * 2007-01-11 2013-06-05 富士電機株式会社 電力用半導体素子
JP2009289904A (ja) * 2008-05-28 2009-12-10 Toshiba Corp 半導体装置
JP6091395B2 (ja) * 2013-10-07 2017-03-08 三菱電機株式会社 半導体装置およびその製造方法
EP3084833B1 (en) * 2013-12-16 2017-09-13 ABB Schweiz AG Edge termination for semiconductor devices and corresponding fabrication method
CN106409884B (zh) * 2016-11-07 2019-06-28 株洲中车时代电气股份有限公司 一种功率半导体器件终端结构

Also Published As

Publication number Publication date
CN120937526A (zh) 2025-11-11
US20260020294A1 (en) 2026-01-15
WO2024203120A1 (ja) 2024-10-03

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251110